CN215180548U

CN215180548U - Testing arrangement of SEMI E84 interface

Info

Publication number: CN215180548U
Application number: CN202120476985.0U
Authority: CN
Inventors: 董怀宝
Original assignee: Shanghai Guangchuan Technology Co ltd
Current assignee: Shanghai Guangchuan Technology Co ltd
Priority date: 2021-03-05
Filing date: 2021-03-05
Publication date: 2021-12-14
Anticipated expiration: 2031-03-05

Abstract

The utility model discloses a testing arrangement of SEMI E84 interface, including automatically controlled box, sensor unit and the equipment that contains the interface that awaits measuring, the sensor unit includes the sensor interface, automatically controlled box includes the control interface; the sensor interface, the interface to be tested and the control interface are of the same type, the electronic control box comprises a controller, the sensor interface is connected with equipment through the interface to be tested, and meanwhile the sensor interface is connected with the controller through the control interface; the controller sends an enabling signal to the equipment through the sensor unit, reads a feedback signal of the equipment, and if the feedback signal is normal, the test of the interface to be tested is completed; if the feedback signal is abnormal, error information is output. The utility model provides a pair of testing arrangement of SEMI E84 interface has low cost, portable and easy operation and remote control's advantage, needn't rely on computer and special software.

Description

Testing arrangement of SEMI E84 interface

Technical Field

The utility model belongs to interface test field specifically belongs to a testing arrangement of SEMI E84 interface.

Background

The E84 interface is widely used in semiconductor equipment and is a general communication interface for the automatic transfer process of the wafer cassette. The standard interface is usually a 25Pin D-Sub interface, and needs to be paired for use, one side is connected with a sending end sensor, the other side is connected with a receiving end sensor, and after induction heads of the two sensors are butted, non-contact IO signal interaction can be carried out. The interactive data of the two sensors comprises 8 paths of digital quantity input signals, 8 paths of digital quantity output signals and a normal signal of sensor pairing of a sending end and a receiving end. All equipment comprising a SEMI E84 interface needs to test the transceiving function of the interface before shipping.

The conventional testing method generally requires the use of testing software provided by the manufacturer of the E84 sensor, and the use of a special testing tool and special software for testing. The equipment has higher cost, needs to be matched with a computer for use, and cannot be used in some dustless rooms which cannot carry the computer.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a testing arrangement of SEMI E84 interface has low cost, portable and easy operation and remote control's advantage, needn't rely on computer and special software.

In order to achieve the above purpose, the utility model adopts the following technical scheme: a kind of SEMI E84 testing device of the interface, including automatically controlled box, sensor unit and containing the apparatus to be measured interface, the said sensor unit includes sensor interface and E84 sensor, the said automatically controlled box includes the control interface; the interface to be measured, the control interface and the sensor interface are E84 interfaces, the electric control box comprises a controller, the sensor interface is connected with the equipment through the interface to be measured, and meanwhile, the sensor interface is connected with the controller through the control interface.

Further, the sensor unit comprises a first sensor and a second sensor which are connected with each other, the first sensor is connected with the control interface, the second sensor is connected with the interface to be tested, and the first sensor and the second sensor are both E84 sensors.

Further, a sensor interface of the first sensor is connected to a control interface, and a sensor interface of the second sensor is connected to an interface to be detected; the first sensor and the second sensor are capable of being matched.

Further, the electronic control box further comprises a remote control terminal, the wireless module is connected to the remote control terminal and the controller, and the remote control terminal is connected with the controller through the wireless module to perform data interaction.

Further, the wireless module is a bluetooth or WIFI module.

Furthermore, the electric control box also comprises a power supply which is simultaneously connected with the controller and the wireless module and used for supplying power to the controller and the wireless module.

Further, the outer side of the electric control box comprises a button and an indicator light.

The utility model discloses following beneficial effect has: the utility model has simple structure, small volume of the electric control box body and convenient carrying, and can realize remote interface test through the wireless module and the remote control terminal; the utility model discloses can realize the interface test that awaits measuring on the different equipment through automatically controlled box outside button and remote control terminal customization test flow, greatly expand testing arrangement's application range to the test flow and the method of the interface that awaits measuring have been simplified.

Drawings

FIG. 1 is a schematic structural diagram of the testing device of the present invention;

in the figure: the device comprises 1 device, 2 interfaces to be tested, 3 second sensors, 4 first sensors, 5 control interfaces, 6 electric control boxes, 7 controllers, 8 power supplies, 9 wireless modules and 10 remote control terminals.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention clearer, the following detailed description of the embodiments of the present invention is made with reference to the accompanying drawings.

Referring to fig. 1, a testing apparatus for SEMI E84 interface includes an electronic control box 6, a sensor unit and a device 1 including an interface to be tested, the sensor unit includes a sensor interface, the electronic control box 6 includes a control interface 5; the sensor interface, the interface to be tested 2 and the control interface 5 are of the same type and are matched with each other. The interface to be tested is an E84 interface, the sensor in the sensor unit is an E84 sensor, and meanwhile, the sensor interface, the interface to be tested and the control interface are all E84 interfaces.

E84 is a standard number of SEMI standard in which the physical type of interface, pin definition, and signal timing are specified. In semiconductor devices, a wafer cassette is required, and devices for automatically conveying the wafer cassette are all adapted to transmit signals using the standard. The E84 interface is a standard interface for connecting E84 sensors. When the interface to be tested is an E84 interface, an E84 sensor needs to be used in a matching manner, and the final use effect can be ensured firstly based on the following two considerations. In addition, some devices are provided with E84 sensors at receiving ends, and the functional test of the E84 sensor can be simultaneously realized by using the mode for testing. The characteristics of the E84 sensor, which are required to meet the SEMI standards, are SEMI certified. The sensors need to be paired for use, and IO signal handshaking is carried out in a non-contact mode.

With reference to fig. 1, the sensor unit of the present invention includes a first sensor 4 and a second sensor 3 connected to each other, the first sensor 4 is connected to the control interface 5, and the second sensor 3 is connected to the interface 2 to be measured; the first sensor and the second sensor are close to each other, and matching can be performed. For example, the first sensor and the second sensor are E84 sensors, and the interface to be tested, the control interface and the sensor interface are all E84 interfaces. Two E84 sensors in close proximity are capable of signal matching.

The utility model discloses well automatically controlled box 6 still includes controller 7, power and 8 wireless module 9. The power supply 8 is connected with the controller 7 and the wireless module 9 at the same time and used for supplying power to the controller 7 and the wireless module 9. The wireless module 9 is connected to a remote control terminal and the controller, and the remote control terminal 10 is connected to perform data interaction with the controller 7 through the wireless module 9. The wireless mode of the wireless module may be a radio frequency technology, and the specific wireless module may be, but is not limited to, a bluetooth module or a WIFI module.

The outer side of the electric control box also comprises a button and an indicator light, wherein the button can be a test starting button and the like and is used for outputting a test starting signal to the controller. The indicator light can be a status indicator light and is used for reflecting the test result of the interface to be tested in different equipment. In particular, the indicator lights may include different status indicator lights, such as different test results represented by different colors, different test results represented by different numbers of lights, and so on.

In the utility model, the sensor interface in the second sensor is connected with the equipment through the interface to be measured, and the sensor interface in the first sensor is connected with the controller through the control interface; the remote control terminal sends a test instruction through the wireless module phase controller, or the external button box controller of the electric control box sends a test instruction; after receiving the instruction, the controller sends an enabling signal to the equipment through the sensor unit, reads a feedback signal of the equipment, and if the feedback signal is normal, the test of the interface to be tested is completed; if the feedback signal is abnormal, error information is output.

It is worth to say that the sensor model adopted in the sensor unit of the utility model is mutually matched with the interface to be measured and the control interface; and two sensors in the sensor unit are the same in type and can be matched in a close range, so that the enabling signal of the controller can smoothly reach the interface to be detected through the control interface, the first sensor and the second sensor, and whether the interface to be detected is normal is judged according to different enabling signals. In the application, the first sensor and the second sensor both adopt standard E84 sensors, and the control interface is normal, in this case, if the interface to be measured is normal, the feedback signal of the enable signal is necessarily normal; if the feedback signal is abnormal, the problems of the first sensor, the second sensor and the control interface can be eliminated first, and then the fact that the interface to be detected has the problem can be judged.

The utility model discloses the controller includes control center, input and output, and control center, input and output all are connected to first sensor through control interface, and then control the output signal of first sensor and read its input signal. The control center in this application may be a CPU. The controller can be programmed through the remote control terminal, and then the process control and the independent input and output signal control of the enabling signal are achieved. The application range of the device is further expanded, and the device is used for detecting each performance of the interfaces to be detected of different equipment.

The utility model provides a pair of testing arrangement of SEMI E84 interface tests method, including following step:

s01: matching the first sensor and the second sensor; and when the matching indicator lamps on the two sides of the first sensor and the second sensor are lightened, namely the matching is successful, the sensor unit can normally carry out signal connection between the interface to be detected and the control interface.

S02: the remote control terminal or the button controls the controller to enter a test mode; namely, determining a Jessie test mode through a remote control terminal or an outer side button of an electric control box;

s03: the controller sends an enabling signal to the sensor unit through the control interface, the first sensor receives the enabling signal transmitted by the output end of the controller and transmits the enabling signal to the matched second sensor, the second sensor transmits the enabling signal to the interface to be detected again, the interface to be detected can feed back a signal according to the state of the interface after receiving the enabling signal, the feedback signal sequentially passes through the second sensor, the control interface and the input end of the controller to reach the controller, and the controller judges whether the feedback signal is normal or not.

If the feedback signal is normal, the indicating lamp at the outer side of the electric control box indicates the normal state, and meanwhile, the test result is transmitted to the remote control terminal through the wireless module; if the feedback signal is abnormal, the indicating lamp on the outer side of the electric control box indicates the abnormal state, and meanwhile, the test result is transmitted to the remote control terminal through the wireless module.

The utility model has simple structure, small volume of the electric control box body and convenient carrying, and can realize remote interface test through the wireless module and the remote control terminal; the utility model discloses can realize the interface test that awaits measuring on the different equipment through automatically controlled box outside button and remote control terminal customization test flow, greatly expand testing arrangement's application range to the test flow and the method of the interface that awaits measuring have been simplified.

The above description is only a preferred embodiment of the present invention, and the embodiment is not intended to limit the scope of the present invention, so that all the structural changes equivalent to the contents of the description and the drawings of the present invention are included in the scope of the appended claims of the present invention.

Claims

1. The testing device of the SEMI E84 interface is characterized by comprising an electric control box, a sensor unit and equipment containing an interface to be tested, wherein the sensor unit comprises a sensor interface and an E84 sensor, and the electric control box comprises a control interface; the interface to be measured, the control interface and the sensor interface are E84 interfaces, the electric control box comprises a controller, the sensor interface is connected with the equipment through the interface to be measured, and meanwhile, the sensor interface is connected with the controller through the control interface.

2. The SEMI E84 interface testing device of claim 1, wherein the sensor unit comprises a first sensor and a second sensor connected to each other, the first sensor is connected to the control interface, the second sensor is connected to the interface to be tested, and the first sensor and the second sensor are both E84 sensors.

3. The SEMI E84 interface testing apparatus of claim 2, wherein the sensor interface of the first sensor is connected to the control interface, and the sensor interface of the second sensor is connected to the interface to be tested; the first sensor and the second sensor are capable of being matched.

4. The SEMI E84 interface testing device of claim 1, further comprising a remote control terminal, wherein the electronic control box further comprises a wireless module, the wireless module is connected to the remote control terminal and the controller, and the remote control terminal is connected to interact with the controller via the wireless module.

5. The SEMI E84 interface testing apparatus of claim 4, wherein said wireless module is a bluetooth or WIFI module.

6. The SEMI E84 interface testing apparatus of claim 4, wherein the electronic control box further comprises a power supply, the power supply is connected to both the controller and the wireless module for providing power to the controller and the wireless module.

7. The SEMI E84 interface testing device of claim 6, wherein the outside of the electrical control box comprises buttons and indicator lights.