CN215147876U

CN215147876U - Polishing solution circulation structure with blowdown function

Info

Publication number: CN215147876U
Application number: CN202120658527.9U
Authority: CN
Inventors: 寇明虎; 刘泳沣
Original assignee: Beijing Tesidi Semiconductor Equipment Co ltd
Current assignee: Beijing Tesidi Semiconductor Equipment Co ltd
Priority date: 2021-03-31
Filing date: 2021-03-31
Publication date: 2021-12-14
Anticipated expiration: 2031-03-31

Abstract

The utility model discloses a polishing solution loop construction with blowdown function, including weeping groove, connecting pipe, fluid-discharge tube, drainage box, swing groove, fixed plate and pneumatic slip table slide rail, weeping groove fixed mounting is in the front side of processing equipment box, the bottom of weeping groove pass through the elbow with the one end of connecting pipe is connected, the other end of connecting pipe with the one end of fluid-discharge tube is connected, fluid-discharge tube fixed mounting is in the upper portion position of drainage box, just the other end of fluid-discharge tube stretches into in the drainage box, the swing groove sets up exit position department in the drainage box is stretched into to the fluid-discharge tube, and this loop construction is used for the circulation recycle of polishing solution, and another flowing back export is connected with discharge apparatus for carry out the discharge treatment with the polishing solution that can't use. The circulation and the discharge of the polishing solution can be realized.

Description

Polishing solution circulation structure with blowdown function

Technical Field

The utility model belongs to the technical field of machining and specifically relates to a polish circulating structure who has blowdown function in polishing and polishing processing is related to.

Background

A large amount of polishing solution is used in the polishing process, the polishing solution is corrosive and is not suitable for staying on the surface of mechanical equipment for a long time, and the processed polishing solution is sometimes required to be recycled or directly discharged according to the use condition. The prior art does not have good treatment and recycling of used polishing solution. Resulting in economic losses.

SUMMERY OF THE UTILITY MODEL

Problem to prior art existence, the utility model provides a polishing solution circulation structure with blowdown function realizes retrieving or directly discharging along with the processing process instant choice polishing solution circulation.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

a polishing solution circulating structure with a pollution discharge function is characterized in that: the polishing solution circulating structure with the pollution discharge function comprises a liquid leakage groove, a connecting pipe, a liquid discharge box, a swinging groove, a fixed plate and a pneumatic sliding table slide rail, wherein the liquid leakage groove is fixedly arranged at the front side of a processing equipment box body, the bottom of the liquid leakage groove is connected with one end of the connecting pipe through an elbow, the other end of the connecting pipe is connected with one end of the liquid discharge pipe, the liquid discharge pipe is fixedly arranged at the upper part of the liquid discharge box, the other end of the liquid discharge pipe extends into the liquid discharge box, the swinging groove is arranged at the outlet position of the liquid discharge pipe extending into the liquid discharge box, two grooves are arranged below the outlet position of the liquid discharge pipe in the liquid discharge box, a filter screen support is respectively arranged on each groove, a replaceable filter screen for filtering polishing solution is arranged on the filter screen support, and the bottom of each groove is respectively provided with a liquid discharge outlet, one of them flowing back export is connected with polishing solution recovery agitator for polishing solution's cyclic recovery utilizes, and another flowing back export is connected with discharge apparatus for carry out the discharge treatment with polishing solution that can't use.

Further: the liquid leakage groove comprises a main body part and a square groove, the main body part is a circular groove, the groove is arranged in a left-high-right-low mode, an opening is formed in the lower portion of the groove, the opening is connected with the square groove, and the elbow is connected with the bottom of the square groove.

Further: the liquid discharging box is fixedly arranged on the right side of the box body.

Further: the swing groove is hourglass hopper-shaped, and fixed mounting is on the mounting panel, the mounting panel is installed pneumatic slip table slide rail is last and can be followed pneumatic slip table slide rail slides, pneumatic slip table slide rail is installed on the box.

Further: a protective cover is arranged outside the pneumatic sliding table sliding rail.

Further: the liquid leakage groove, the liquid discharging box and the swinging groove are made of PVC materials.

Compared with the prior art, the beneficial effects of the utility model are as follows:

1. the utility model discloses a set up the weeping groove, the elbow, the connecting pipe, the drainage box, the guard shield, the box, the swing groove, the fluid-discharge tube, the filter screen supports, and mounting panel and pneumatic slip table slide rail cooperation are used, realize that the polishing solution circulates and discharges.

2. The utility model discloses a design of weeping groove realizes corrosion-resistant, and the polishing solution discharges the low department rapidly in the processing, does not have and stores up.

3. The utility model discloses an establish two grooves in the flowing back box, realize that the polishing solution circulation is light to be selected and corrosion-resistant with the blowdown.

4. The utility model discloses a structural design in swing groove helps the exhaust polishing solution quickly separating to corresponding inslot.

Drawings

Fig. 1 is a schematic view of an overall installation structure provided by an embodiment of the present invention.

FIG. 2 is a view showing a structure of a circulation of a polishing liquid according to an embodiment of the present invention.

Fig. 3 is a front view of the overall installation structure of the embodiment of the present invention.

Fig. 4 is a top view of the overall installation structure of the embodiment of the present invention.

Reference numerals: 1. a liquid leakage groove; 2. bending the pipe; 3. a connecting pipe; 4. a draining box; 5. a shield; 6. a box body; 7. a swing groove; 8. a liquid discharge pipe; 9. a filter screen support; 10. mounting a plate; 11. pneumatic slip table slide rail.

Detailed Description

In order to further understand the contents, features and effects of the present invention, the following embodiments are illustrated and described in detail with reference to the accompanying drawings.

The structure of the present invention will be described in detail with reference to the accompanying drawings.

As shown in fig. 1 to 4, a polishing solution circulation and drainage structure provided by an embodiment of the present invention comprises a leakage tank 1, an elbow 2, a connecting pipe 3, a drainage box 4, a shield 5, a box body 6, a swing groove 7, a drainage pipe 8, a filter screen support 9, a mounting plate 10 and a pneumatic sliding table slide rail 11, wherein the leakage tank 1 is fixedly installed at the front side of the box body 6, the leakage tank is configured to be a circular groove with a high left and a low right, and an open square leakage tank is arranged at the low part, the elbow 2 is arranged at the lower side of the leakage tank 1 and connected with the connecting pipe 3, the connecting pipe 3 is connected with the drainage pipe 8 and fixed at the upper side of the drainage box 4, the drainage box 4 is fixedly installed at the right side of the box body 6, two grooves are arranged in the drainage box, each groove is respectively provided with a filter screen support and a filter screen for filtering polishing solution, and a drainage outlet is arranged at the bottom of each groove, the swing groove 7 is fixedly installed on the installation plate 10, the installation plate 10 is installed on a pneumatic sliding table sliding rail 11, the pneumatic sliding table sliding rail is installed on the box body 6, a protection cover 5 is arranged outside the pneumatic sliding table sliding rail, and the swing groove 7 is located at an outlet of the liquid discharge pipe 8.

Referring to fig. 1 to 4, the liquid leakage groove 1 is made of PVC, the inner groove is set to be high at the left and low at the right, and an opening is formed at the lower part to connect with a square groove.

Adopt above-mentioned scheme: the corrosion resistance is realized, and the polishing solution is quickly discharged to a low position in the processing without accumulation.

Referring to fig. 1 to 4, the drainage box 4 is made of PVC, and has two grooves therein, each of which is provided with a filter net support and a filter net installed therein and is provided with a discharge port.

Adopt above-mentioned scheme: the filter screen can be easily replaced to realize the easy selection of polishing solution circulation and pollution discharge and corrosion resistance.

Referring to fig. 1 to 4, the swing groove 7 is made of PVC, is funnel-shaped, is arranged in the drainage box 4, and is mounted on a slide rail of a pneumatic sliding table.

Adopt above-mentioned scheme: the discharged polishing liquid is assisted to be quickly separated into the corresponding groove.

The utility model discloses a theory of operation:

when the device is used, the polishing liquid is thrown to the four walls of the liquid leakage groove 1 along with the processing of the large disc in a rotating mode, the arc position of the liquid leakage groove is set to be high at the left and low at the right, all the flowing polishing liquid flows into the liquid leakage groove at the low position from high to low, then the polishing liquid enters the elbow and flows into the liquid discharge pipe 8 along the connecting pipe 3, the device is set in advance to be a sewage discharge mode or a circulation mode, the pneumatic sliding table sliding rail drives the swing groove to move to the corresponding groove position of the selected liquid discharge box, two filter screens are arranged on the two filter screen supports in the liquid discharge box, the filter screens are convenient to take down, and the outlet corresponding to the bottom of the liquid discharge box is connected to a recovery stirring barrel or a removal device after the filtration.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a polishing solution circulation structure with blowdown function which characterized in that: the polishing solution circulating structure with the pollution discharge function comprises a liquid leakage groove, a connecting pipe, a liquid discharge box, a swinging groove, a fixed plate and a pneumatic sliding table slide rail, wherein the liquid leakage groove is fixedly arranged at the front side of a processing equipment box body, the bottom of the liquid leakage groove is connected with one end of the connecting pipe through an elbow, the other end of the connecting pipe is connected with one end of the liquid discharge pipe, the liquid discharge pipe is fixedly arranged at the upper part of the liquid discharge box, the other end of the liquid discharge pipe extends into the liquid discharge box, the swinging groove is arranged at the outlet position of the liquid discharge pipe extending into the liquid discharge box, two grooves are arranged below the outlet position of the liquid discharge pipe in the liquid discharge box, a filter screen support is respectively arranged on each groove, a replaceable filter screen for filtering polishing solution is arranged on the filter screen support, and the bottom of each groove is respectively provided with a liquid discharge outlet, one of them flowing back export is connected with polishing solution recovery agitator for polishing solution's cyclic recovery utilizes, and another flowing back export is connected with discharge apparatus for carry out the discharge treatment with polishing solution that can't use.

2. The polishing solution circulation structure with a blowdown function as defined in claim 1, wherein: the liquid leakage groove comprises a main body part and a square groove, the main body part is a circular groove, the groove is arranged in a left-high-right-low mode, an opening is formed in the lower portion of the groove, the opening is connected with the square groove, and the elbow is connected with the bottom of the square groove.

3. The polishing liquid circulation structure with a sewage draining function according to claim 1 or 2, wherein: the liquid discharging box is fixedly arranged on the right side of the box body.

4. The polishing solution circulation structure with a blowdown function as defined in claim 3, wherein: the swing groove is hourglass hopper-shaped, and fixed mounting is on the mounting panel, the mounting panel is installed pneumatic slip table slide rail is last and can be followed pneumatic slip table slide rail slides, pneumatic slip table slide rail is installed on the box.

5. The polishing solution circulation structure with a sewage draining function as claimed in claim 4, wherein: a protective cover is arranged outside the pneumatic sliding table sliding rail.

6. The polishing liquid circulation structure with a sewage draining function according to claim 1 or 4, wherein: the liquid leakage groove, the liquid discharging box and the swinging groove are made of PVC materials.