CN215146106U

CN215146106U - Positioning jig

Info

Publication number: CN215146106U
Application number: CN202023286741.0U
Authority: CN
Inventors: 代雪峰; 徐虎
Original assignee: Xuzhou Xinsijie Semiconductor Technology Co ltd
Current assignee: Xuzhou Xinsijie Semiconductor Technology Co ltd
Priority date: 2020-12-29
Filing date: 2020-12-29
Publication date: 2021-12-14
Anticipated expiration: 2030-12-29

Abstract

The utility model discloses a positioning jig belongs to semiconductor processing technology field. The utility model discloses a positioning jig includes base and flywheel dish, the center of base is provided with the round hole, flywheel dish set up in on the base, just flywheel dish with the central axis of round hole is the central line, be provided with a plurality of clamping jaws on the flywheel dish, it is a plurality of the clamping jaw is followed the circumference direction of flywheel dish is evenly arranged, the clamping jaw includes axle center end and location end, the location end can wind the axle center end rotates, the location end is relative axle center end pivoted orbit process the central axis. The utility model discloses a positioning jig, a plurality of clamping jaws on the flywheel dish are through rotating a plurality of different positions departments of difference in the tube socket side respectively to the tube socket exert the effort towards round hole the central axis to the position of adjustment tube socket makes tube socket and round hole keep good concentricity, improves the precision of sealing cap processing, improves the uniformity and the yields of product.

Description

Positioning jig

Technical Field

The utility model belongs to the technical field of the semiconductor processing technique and specifically relates to a positioning jig is related to.

Background

The sealing cap is a necessary process flow of a semiconductor device processing process, in the semiconductor device processing process, a tube seat and a tube cap of the semiconductor device are firstly processed and manufactured respectively, and then the tube seat and the tube cap are welded together through a sealing cap process.

At present, the welding of a pipe seat and a pipe cap is mainly carried out on a cap sealing machine, the position of the pipe cap is fixed during processing, and the accuracy of the relative position of the pipe seat and the pipe cap is ensured mainly by adjusting the position of the pipe seat. However, the existing capping equipment has insufficient accuracy for the position adjustment of the tube seat, which mainly shows that the concentricity of the tube seat during installation is not accurate enough, so that the consistency of processed products is poor, and the defective rate is high.

SUMMERY OF THE UTILITY MODEL

In order to solve the defects of the prior art, the embodiment of the utility model provides a positioning jig for when the semiconductor device sealing cap adds man-hour, fix a position the tube socket, with the concentricity after improving the tube socket location.

In order to realize the above object, the embodiment of the utility model provides a positioning jig, including base and flywheel dish, the center of base is provided with the round hole, the flywheel dish set up in on the base, just the flywheel dish with the central axis of round hole is the central line, be provided with a plurality of clamping jaws on the flywheel dish, it is a plurality of the clamping jaw is followed the circumference direction of flywheel dish is evenly arranged, the clamping jaw includes axle center end and location end, the location end can wind the axle center end rotates, the location end is relative axle center end pivoted orbit process the central axis.

Optionally, three clamping jaws are included, and the central angle between two adjacent clamping jaws is 120 degrees in the circumferential direction of the flywheel disc.

Optionally, the flywheel panel is rotatably disposed on the base, and the flywheel panel uses the central axis as a rotation center line.

Optionally, a convex shoulder is arranged on the surface of the base, the flywheel disc is sleeved on the convex shoulder, and the bottom surface of the flywheel disc is arranged on the surface of the base.

Optionally, the axle center end is provided with first fixed screw, first fixed screw passes flywheel dish and is fixed in on the base, the axle center end with still be provided with the second fixed screw between the location end, be provided with first circular arc groove on the clamping jaw, the second fixed screw passes first circular arc groove is fixed in on the flywheel dish.

Optionally, a second arc groove is formed in the flywheel disc, and the first fixing screw is arranged in the second arc groove.

Optionally, the first fixing screw and the second fixing screw are movably connected to the surface of the flywheel panel, so that the flywheel panel can rotate relative to the first fixing screw and the second fixing screw.

Optionally, a supporting wall is arranged on the circumferential wall of the flywheel disc, and the supporting wall extends outwards along the radial direction of the flywheel disc.

Optionally, the flywheel device further comprises an air cylinder, and an output end of the air cylinder is connected with the supporting wall to push the flywheel disc to rotate.

Optionally, the device further comprises a first moving motor and a second moving motor, wherein the first moving motor drives the base to move in the first direction, and the second moving motor drives the base to move in the second direction.

The utility model has the advantages that:

the utility model discloses a positioning jig, including base and flywheel dish, the center of base is provided with the round hole, the flywheel dish set up in on the base, just the flywheel dish with the central axis of round hole is the central line, be provided with a plurality of clamping jaws on the flywheel dish, it is a plurality of the clamping jaw is followed the circumference direction of flywheel dish is evenly arranged, the clamping jaw includes axle center end and location end, the location end can wind the axle center end rotates, the location end is relative axle center end pivoted orbit process the central axis. The utility model discloses a positioning jig is used for fixing a position the tube socket when semiconductor device sealing cap adds man-hour, and the tube socket is installing in the round hole of base with man-hour, and a plurality of clamping jaws on the flywheel dish are through rotating a plurality of different positions departments of tube socket side respectively and applys the effort towards round hole the central axis to the tube socket to the position of adjustment tube socket makes tube socket and round hole keep good concentricity, improves the precision of sealing cap processing, improves the uniformity and the yields of product.

Drawings

The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the invention and together with the description, serve to explain the principles of the invention.

In order to illustrate the embodiments of the present invention or the technical solutions in the prior art more clearly, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, and it is obvious to those skilled in the art that other drawings can be obtained without inventive exercise, wherein:

fig. 1 is a schematic structural view of a positioning fixture according to an embodiment of the present invention.

Wherein, the corresponding relation between the reference numbers and the part names in fig. 1 is as follows:

1. a base; 2. a flywheel disc; 3. a clamping jaw; 4. a first fixing screw; 5. a second fixing screw; 10. A circular hole; 11. a shoulder is formed; 20. a second arc groove; 21. a support wall; 30. an axial end; 31. a positioning end; 32. the first arc groove.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

The invention will be described in further detail with reference to the following drawings and embodiments:

referring to fig. 1, the embodiment of the utility model provides a positioning jig, including base 1 and flywheel dish 2, the center of base 1 is provided with round hole 10, flywheel dish 2 sets up on base 1, and flywheel dish 2 uses the central axis of round hole 10 to set up as the central line, be provided with a plurality of clamping jaws 3 on the flywheel dish 2, a plurality of clamping jaws 3 evenly arrange along the circumference direction of flywheel dish 2, clamping jaw 3 includes axle center end 30 and location end 31, location end 31 can be around axle center end 30 rotation, and the central axis of the relative axle center end 30 pivoted orbit of location end 31 process round hole 10.

The utility model discloses positioning jig for carry out welding process's in-process at the closing cap machine to tube socket and pipe cap, realize the location to the tube socket, with the concentricity with the pipe cap that improves the tube socket. The tube socket is installed in the round hole 10 of base 1, the location end 31 of a plurality of clamping jaws 3 all rotates towards the direction of the central axis that is close to round hole 10 when locating the tube socket, thereby press from both sides tight tube socket in the different positions department of the side of tube socket respectively, when the concentricity error of tube socket is great, the tube socket receives the size of the effort of the location end 31 of a plurality of clamping jaws 3 and differs, thereby make the position of tube socket obtain the adjustment, when the tube socket reaches sufficient concentricity, the resultant force of the effort of a plurality of clamping jaws 3 to the tube socket is close to zero for the location end 31 of a plurality of clamping jaws 3.

According to the utility model discloses an embodiment, the quantity of clamping jaw 3 is three, and three clamping jaw 3 is in the circumferential direction of flywheel dish 2, and the central angle between two adjacent clamping jaws 3 is 120 degrees.

According to the utility model discloses an embodiment, flywheel dish 2 rotationally sets up on base 1, and flywheel dish 2 uses the central axis of round hole 10 as the rotation center line. The utility model discloses realizing the location to the tube socket, mainly being the position that the tube socket was adjusted to the effort of tube socket through the location end 31 of a plurality of clamping jaws 3, realizing the regulation to the tube socket concentricity, based on this, this embodiment drives clamping jaw 3 through the rotation of flywheel dish 2 and rotates, when flywheel dish 2 rotates promptly, clamping jaw 3 on the flywheel dish 2 is driven and takes place to rotate, and realizes the regulation to the concentricity of tube socket. Because the quantity of clamping jaw 3 is many, directly drives clamping jaw 3, and synchronism and accuracy are difficult to guarantee, and drive a plurality of clamping jaws 3 through flywheel dish 2 and rotate, because a plurality of clamping jaws 3 all set up on flywheel dish 2, consequently can guarantee the synchronism and the accuracy of a plurality of clamping jaws 3 when the motion more conveniently.

In a specific example, the surface of the base 1 is provided with a shoulder 11, the flywheel disk 2 is sleeved on the shoulder 11, and the bottom surface of the flywheel disk 2 is arranged on the surface of the base 1. It will be appreciated that the shoulder 11 is of circular configuration, which acts as the axis of rotation of the flywheel disc 2.

According to the utility model discloses an embodiment, on clamping jaw 3, axle center end 30 is provided with first fixed screw 4, and on first fixed screw 4 passed flywheel dish 2 and was fixed in base 1, still be provided with second fixed screw 5 between axle center end 30 and the location end 31, be provided with first circular arc groove 32 on the clamping jaw 3, second fixed screw 5 passed first circular arc groove 32 and fixes on flywheel dish 2. As shown in fig. 1, the first arc groove 32 is provided along the length direction of the holding jaw 3. When the flywheel disc 2 rotates, at the axle center end 30, because the first fixing screw 4 is fixed on the base 1, the axle center end 30 is kept still under the action of the first fixing screw 4, and within the range of the first arc groove 32, because the second fixing screw 5 is fixed on the flywheel disc 2, the second fixing screw 5 rotates along with the rotation of the flywheel disc 2, and, when the second fixing screw 5 rotates, because the axle center end 30 does not rotate, under the action of the second fixing screw 5, the clamping jaw 3 is driven to rotate, and the second fixing screw 5 moves in the first arc groove 32. In addition, when flywheel dish 2 rotates, a plurality of clamping jaws 3 rotate under the effect of first fixed screw 4, second fixed screw 5 and first circular arc groove 32, and the emergence is rotated simultaneously, and the pivoted direction is unanimous, and then realizes the location to the tube socket.

Further, a second arc groove 20 is further formed in the flywheel disc 2, and the first fixing screw 4 is arranged in the second arc groove 20. As shown in fig. 1, the center of curvature of the second circular arc groove 20 is located on the central axis of the circular hole 10. The second arc groove 20 is used for buffering a period of time before the clamping jaw 3 moves, when the first fixing screw 4 abuts against the end of the second arc groove 20, if the rotation direction of the flywheel disc 2 enables the abutting force of the end of the first fixing screw 4 and the end of the second arc groove 20 to be increased, the clamping jaw 3 is rotated by further rotating the flywheel disc 2, and if the rotation of the flywheel disc 2 enables the abutting force of the end of the first fixing screw 4 and the end of the first arc groove 20 to be reduced, or the first fixing screw 4 is located in the middle section of the second arc groove 20, the clamping jaw 3 does not rotate together with the rotation of the flywheel disc 2 before the flywheel disc 2 rotates to a certain angle.

In the embodiment of the present invention, in order to ensure the smooth movement of the clamping jaw 3, the first fixing screw 4 and the second fixing screw 5 are respectively movably connected to the surface of the flywheel panel 2. In this embodiment, the first fixing screw 4 and the second fixing screw 5 are used as fixing parts for the rotation of the clamping jaw 3, on one hand, it is required to ensure that the clamping jaw 3 does not move in the vertical direction after being installed on the flywheel disc 2, on the other hand, the first fixing screw 4 and the second fixing screw 5 cannot apply an excessive pre-tightening force to the clamping jaw 3, otherwise, the clamping jaw 3 cannot rotate relative to the flywheel disc 2, optionally, by disposing a gasket between the first fixing screw 4 and the second fixing screw 5 and the surface of the flywheel disc 2, the precision of the surface of the gasket is improved by processing, and at the same time, the surface of the flywheel disc 2 is processed, such as polished, to ensure that the surface of the flywheel disc 2 has sufficient smoothness, thereby ensuring that under the condition that the first fixing screw 4 and the second fixing screw 5 apply a pre-tightening force to the flywheel disc 2 enough to prevent the movement of the flywheel disc 2, the flywheel disc 2 can rotate relative to the first fixing screw 4 and the second fixing screw 5. Of course, the specific processing techniques are conventional to those skilled in the art and will not be described in detail herein.

According to an embodiment of the present invention, the circumferential wall of the flywheel panel 2 is provided with a support wall 21, and the support wall 21 extends outward along the radial direction of the flywheel panel 2. Preferably, the support wall 21 extends beyond the range of the base 1 in the radial direction, so as to operate the support wall 21, when the flywheel disc 2 is driven to rotate, the support wall 21 can be selectively pushed to rotate so as to realize the rotation of the flywheel disc 2, and the driving part can be more conveniently connected by arranging the support wall 21.

According to the utility model discloses an embodiment, positioning jig still includes the cylinder (not shown), and the output of cylinder links to each other with holding in the palm wall 21 to fly wheel dish 2 rotates. Specifically, the output of cylinder sets up along the radial direction of flywheel dish 2, when the output of cylinder was released, promotes flywheel dish 2 and rotates to a direction, when the output of cylinder was withdrawed, flywheel dish 2 counter-rotation under the effect of cylinder, and when the output of cylinder kept under the state of releasing, can make flywheel dish 2 keep a pivoted angle to realize that a plurality of clamping jaws 3 kept the tight tube socket of clamp, ensure that the tube socket welds with the pipe cap on good concentricity. Of course, the output end of the cylinder moves linearly when working, so that a slot arranged in the radial direction can be optionally arranged on the support wall 21, and the output end of the cylinder is connected with the support wall 21 through the slot, that is, when the flywheel disc 2 rotates under the action of the cylinder, the connection position of the output end of the cylinder and the support wall 21 can move in the slot.

According to an embodiment of the present invention, the positioning fixture further comprises a first moving motor and a second moving motor (not shown), wherein the first moving motor drives the base 1 to move in the first direction, and the second moving motor drives the base 1 to move in the second direction. In this embodiment, the first direction and the second direction can be selected as the X-axis direction and the Y-axis direction on the horizontal plane, and it can be understood that when the base 1 moves in the first direction or the second direction, the flywheel disk 2, the clamping jaws 3, etc. on the base move together with the base, so that after the socket is installed in the circular hole 10 of the base 1, the position of the base 1 is firstly adjusted by the first moving motor and the second moving motor, so that the position of the socket is firstly accurately adjusted in the first direction and the second direction, and then the concentricity of the socket is adjusted by the clamping jaws 3.

According to the utility model discloses an embodiment, can also select to be provided with the response subassembly, come to monitor positioning jig's motion, wherein, can select to be provided with the response wall on the perisporium of flywheel dish 2, the response wall is preferably along the outside extension setting of the radial direction of flywheel dish 2, be provided with the sensor on base 1, the sensor can select to be photoelectric sensor, when flywheel dish 2 rotates, the response wall passes through the position of sensor, and then by sensor detection, if the sensor detects flywheel dish 2 motion the unusual, then send the warning, maintain with the notice operating personnel.

In the description of the present invention, it should be noted that the terms "upper", "lower", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, which are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; the communication may be direct, indirect via an intermediate medium, or internal to both elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art. In addition, in the description of the present invention, "a plurality" means two or more unless otherwise specified.

The above description is only for the preferred embodiment of the present invention, and is not intended to limit the present invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included within the protection scope of the present invention.

Claims

1. The utility model provides a positioning jig, its characterized in that, includes base and flywheel dish, the center of base is provided with the round hole, flywheel dish set up in on the base, just flywheel dish with the central axis of round hole is the central line, be provided with a plurality of clamping jaws on the flywheel dish, it is a plurality of the clamping jaw is followed the circumference direction of flywheel dish is evenly arranged, the clamping jaw includes axle center end and location end, the location end can wind the axle center end rotates, the location end is relative axle center end pivoted orbit process the central axis.

2. The positioning jig according to claim 1, comprising three clamping jaws, wherein a central angle between two adjacent clamping jaws in a circumferential direction of the flywheel disc is 120 degrees.

3. The positioning fixture according to claim 1, wherein the flywheel panel is rotatably disposed on the base, and the flywheel panel uses the central axis as a rotation center line.

4. The positioning jig according to claim 3, wherein a shoulder is provided on the surface of the base, the flywheel disk is sleeved on the shoulder, and the bottom surface of the flywheel disk is provided on the surface of the base.

5. The positioning fixture according to claim 3, wherein a first fixing screw is disposed at the shaft center end, the first fixing screw penetrates through the flywheel disc and is fixed on the base, a second fixing screw is disposed between the shaft center end and the positioning end, a first arc groove is disposed on the clamping jaw, and the second fixing screw penetrates through the first arc groove and is fixed on the flywheel disc.

6. The positioning fixture according to claim 5, wherein a second arc groove is formed in the flywheel disc, and the first fixing screw is arranged in the second arc groove.

7. The positioning fixture according to claim 5, wherein the first and second fixing screws are movably connected to the surface of the flywheel panel, so that the flywheel panel can rotate relative to the first and second fixing screws.

8. The positioning jig according to any one of claims 1 to 7, wherein a support wall is provided on a peripheral wall of the flywheel disc, the support wall extending outward in a radial direction of the flywheel disc.

9. The positioning fixture according to claim 8, further comprising an air cylinder, wherein an output end of the air cylinder is connected to the support wall to push the flywheel disc to rotate.

10. The positioning fixture according to any one of claims 1 to 7, further comprising a first moving motor and a second moving motor, wherein the first moving motor drives the base to move in a first direction, and the second moving motor drives the base to move in a second direction.