CN215139814U - 3, 3-dimethyl-1-butyne hexacarbonyl cobaltic acid preparation facilities - Google Patents
3, 3-dimethyl-1-butyne hexacarbonyl cobaltic acid preparation facilities Download PDFInfo
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- CN215139814U CN215139814U CN202120630470.1U CN202120630470U CN215139814U CN 215139814 U CN215139814 U CN 215139814U CN 202120630470 U CN202120630470 U CN 202120630470U CN 215139814 U CN215139814 U CN 215139814U
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Abstract
The utility model provides a 3, 3-dimethyl-1-butyne hexacarbonyl cobaltic preparation facilities, include: the primary heating mechanism is arranged on the top surface of the supporting table at the bottom of the reaction kettle; the filtering mechanism is arranged on the right side below the reaction kettle, the upper end of the left side of the filtering mechanism is communicated with a discharge pipe at the bottom of the reaction kettle, and the right side of the filtering mechanism is provided with a delivery pump; the purification mechanism is arranged on the right side of the delivery pump, and the upper end of the left side of the purification mechanism is communicated with the delivery pipe of the delivery pump; and the secondary heating mechanism is arranged on the outer side of the purification mechanism. The utility model discloses utilize the electromagnetic heating coil in the one-level heating mechanism to carry out the high-efficient heating to reation kettle, improve heating efficiency to improve the productivity, through the processing of filter equipment and purification mechanism, improved product purity simultaneously.
Description
Technical Field
The utility model relates to the technical field of chemical industry, concretely relates to 3, 3-dimethyl-1-butyne hexacarbonyl cobaltic acid preparation facilities.
Background
Cobalt-containing CVD/ALD precursors are important functional layers in manufacturing equipment and these materials can be used as gate insulators, diffusion masks, sidewall spacers, hard masks, anti-reflective coatings, passivation, and encapsulation, among others, in the fabrication of semiconductor devices. The cobaltosic carbonyl is generally prepared under the protection of inert gas, and in the existing preparation process of the cobaltosic carbonyl, the cobaltosic carbonyl has low heating efficiency, influences the yield and has low product purity.
SUMMERY OF THE UTILITY MODEL
In order to overcome the defects in the prior art, a 3, 3-dimethyl-1-butyne hexacarbonylcobaltous oxide preparation device is provided so as to solve the problems that the hexacarbonylcobaltous oxide is low in heating efficiency, influences the yield and is low in product purity in the preparation process.
In order to achieve the above object, there is provided a 3, 3-dimethyl-1-butyne hexacarbonylcobaltic acid preparation apparatus comprising:
the stirring mechanism is arranged inside and at the top of the reaction kettle, a feed inlet is arranged on the left side of the top surface of the reaction kettle, a seal cover is arranged on the feed inlet, a nitrogen generator is arranged on the rear side of the reaction kettle, and a nitrogen conveying pipe of the nitrogen generator is communicated with an air inlet on the rear side of the top surface of the reaction kettle;
the primary heating mechanism is arranged on the top surface of the supporting table at the bottom of the reaction kettle;
the filtering mechanism is arranged on the right side below the reaction kettle, the upper end of the left side of the filtering mechanism is communicated with a discharge pipe at the bottom of the reaction kettle, and the right side of the filtering mechanism is provided with a delivery pump;
the purification mechanism is arranged on the right side of the delivery pump, and the upper end of the left side of the purification mechanism is communicated with the delivery pipe of the delivery pump;
and the secondary heating mechanism is arranged on the outer side of the purification mechanism.
Further, rabbling mechanism includes agitator motor and stirring rake, and agitator motor sets up in reation kettle top surface central point and puts, and the stirring rake sets up inside reation kettle, and the pivot of stirring rake passes through shaft coupling fixed connection with agitator motor's output shaft.
Furthermore, the one-stage heating mechanism comprises a temperature sensor, an electromagnetic heating coil, a temperature controller and an electromagnetic controller, the temperature sensor is arranged at the top end of the right side wall in the reaction kettle, the type of the temperature sensor is pt100, the temperature sensor is electrically connected with the temperature controller, the electromagnetic heating coil is wound on the outer surface of the reaction kettle, the electromagnetic heating coil is electrically connected with the electromagnetic controller, the temperature controller is electrically connected with the electromagnetic controller, and the type of the temperature controller is ST-22.
Further, filtering mechanism includes rose box and filter screen, and the rose box is the rectangle cavity structure, the left side upper end of rose box and the discharging pipe intercommunication of reation kettle bottom, and the filter screen setting is in the inside central point of rose box, the right side bottom of rose box and the pump discharge pipe intercommunication of delivery pump.
Further, purification mechanism includes retort, honeycomb duct, condenser and connects the workbin, and retort left side upper end and the conveyer pipe top intercommunication of delivery pump top surface, honeycomb duct left end and retort top intercommunication, the condenser setting is on the honeycomb duct, the honeycomb duct top with connect workbin top surface inlet pipe intercommunication.
Further, second grade heating mechanism includes steam generator, delivery duct, steam return pipe and steam coil, and steam generator sets up on the support on retort right side, and delivery duct's right-hand member and steam generator's left side upper end intercommunication, delivery duct and retort surface's steam coil upper end intercommunication, steam return pipe left end and steam coil right side lower extreme intercommunication, steam return pipe right-hand member and steam generator left side bottom intercommunication.
The beneficial effects of the utility model reside in that, the utility model discloses a cobaltic carbonyl preparation facilities utilizes the electromagnetic heating coil in the one-level heating mechanism to carry out high-efficient heating to reation kettle, improves heating efficiency to improve the productivity, through the processing of filter mechanism and purification mechanism simultaneously, improved product purity, solved at cobaltic carbonyl in the preparation process, heating efficiency is lower, influences the productivity, the lower problem of product purity simultaneously.
Drawings
Fig. 1 is a schematic front sectional view of an embodiment of the present invention;
FIG. 2 is a schematic diagram of a left-side sectional structure of a reaction kettle according to an embodiment of the present invention;
fig. 3 is a schematic front view of the embodiment of the present invention.
1. A support table; 2. a reaction kettle; 3. a feed inlet; 4. a stirring mechanism; 41. a stirring motor; 42. a stirring paddle; 5. a primary heating mechanism; 51. a temperature sensor; 52. an electromagnetic heating coil; 53. a temperature controller; 54. an electromagnetic controller; 6. a discharge pipe; 7. a filtering mechanism; 71. a filter box; 72. a filter screen; 8. A delivery pump; 9. a purification mechanism; 91. a distillation tank; 92. a flow guide pipe; 93. a condenser; 94. a material receiving box; 10. a secondary heating mechanism; 101. a steam generator; 102. a steam delivery pipe; 103. a steam return pipe; 104. a steam coil; 11. a nitrogen generator.
Detailed Description
The following description of the embodiments of the present invention is provided for illustrative purposes, and other advantages and effects of the present invention will be readily apparent to those skilled in the art from the disclosure herein. The present invention can also be implemented or applied through other different specific embodiments, and various details in the present specification can be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention.
Referring to fig. 1 to 3, the present invention provides a 3, 3-dimethyl-1-butyne hexacarbonyl cobaltic oxide preparing apparatus, comprising: the device comprises a stirring mechanism 4, a primary heating mechanism 5, a filtering mechanism 7, a purifying mechanism 9 and a secondary heating mechanism 10.
Specifically, the stirring mechanism is arranged inside and at the top of the reaction kettle, a feed inlet is formed in the left side of the top surface of the reaction kettle, a sealing cover is arranged on the feed inlet, a nitrogen generator is arranged on the rear side of the reaction kettle, and a nitrogen conveying pipe of the nitrogen generator is communicated with an air inlet in the rear side of the top surface of the reaction kettle.
The first-stage heating mechanism is arranged on the top surface of the supporting table at the bottom of the reaction kettle.
The filtering mechanism is arranged on the right side below the reaction kettle, the upper end of the left side of the filtering mechanism is communicated with the discharge pipe at the bottom of the reaction kettle, and the right side of the filtering mechanism is provided with a delivery pump.
The purification mechanism is arranged on the right side of the delivery pump, and the upper end of the left side of the purification mechanism is communicated with the delivery pipe of the delivery pump.
And the secondary heating mechanism is arranged on the outer side of the purification mechanism.
In the prior art, the heating efficiency of cobaltosic carbonyl is low in the preparation process, the yield is influenced, and the product purity is low. Therefore, the utility model discloses a hexacarbonyl cobaltic oxide preparation facilities utilizes the electromagnetic heating coil in the one-level heating mechanism to carry out the high efficiency heating to reation kettle, improves heating efficiency to improve the productivity, through the processing of filter mechanism and purification mechanism simultaneously, improved product purity, solved at hexacarbonyl cobaltic oxide in preparation process, heating efficiency is lower, influences the productivity, the lower problem of product purity simultaneously.
In this embodiment, the stirring mechanism 4 includes a stirring motor 41 and a stirring paddle 42, and the primary heating mechanism 5 includes a temperature sensor 51, an electromagnetic heating coil 52, a temperature controller 53, and an electromagnetic controller 54.
As a preferred embodiment, the stirring motor 41 is disposed at the central position of the top surface of the reaction vessel 2, the stirring paddle 42 is disposed inside the reaction vessel 2, the rotating shaft of the stirring paddle 42 is fixedly connected to the output shaft of the stirring motor 41 through a coupling, the temperature sensor 51 is disposed at the top end of the right side wall inside the reaction vessel 2, the temperature sensor 51 is pt100, the temperature sensor 51 is electrically connected to the temperature controller 53, the electromagnetic heating coil 52 is wound on the outer surface of the reaction vessel 2, the electromagnetic heating coil 52 is electrically connected to the electromagnetic controller 54, the temperature controller 53 is ST-22, the electromagnetic heating coil 52 efficiently heats the reaction vessel 2, and the stirring motor 41 drives the stirring paddle 42 to rotate to fully stir the reaction materials, so that the reaction is more sufficient and the yield is improved.
In the present embodiment, the filter mechanism 7 includes a filter tank 71 and a filter mesh 72.
As a preferred embodiment, the filter box 71 is of a rectangular cavity structure, the upper end of the left side of the filter box 71 is communicated with the discharge pipe 6 at the bottom of the reaction kettle 2, the filter screen 72 is arranged at the central position inside the filter box 71, the bottom end of the right side of the filter box 71 is communicated with the pumping pipe of the delivery pump 8, after the reaction in the reaction kettle 2 is finished, the valve above the discharge pipe 6 is opened to lower the crude product into the filter box 71 through the filtering effect of the filter screen 72, and the content of impurities in the crude product is reduced.
In this embodiment, purifier mechanism 9 includes distillation tank 91, draft tube 92, condenser 93 and receiver tank 94, and secondary heating mechanism 10 includes steam generator 101, delivery tube 102, steam return tube 103 and steam coil 104.
As a better implementation mode, the upper end of the left side of the distillation retort 91 is communicated with the top end of a conveying pipe on the top surface of the conveying pump 8, the left end of a guide pipe 92 is communicated with the top end of the distillation retort 91, a condenser 93 is arranged on the guide pipe 92, the top end of the guide pipe 92 is communicated with a feeding pipe on the top surface of a material receiving box 94, a steam generator 101 is arranged on a support on the right side of the distillation retort 91, the right end of a steam conveying pipe 102 is communicated with the upper end of the left side of the steam generator 101, the steam conveying pipe 102 is communicated with the upper end of a steam coil 104 on the outer surface of the distillation retort 91, the left end of a steam return pipe 103 is communicated with the lower end of the right side of the steam coil 104, the right end of the steam return pipe 103 is communicated with the bottom end of the left side of the steam generator 101, the crude product in the distillation retort 91 is circularly heated by high-temperature steam in the steam coil 104, the distillation efficiency is high, and the purity of the product is improved.
The utility model discloses a cobaltosic carbonyl preparation facilities can effectively solve in cobaltosic carbonyl preparation process, and heating efficiency is lower, influences the productivity, and the lower problem of product purity simultaneously heats and purifies efficiently, is applicable to the preparation of cobaltosic carbonyl.
Claims (6)
1. A3, 3-dimethyl-1-butyne hexacarbonyl cobaltous preparation facilities, characterized by including:
the stirring mechanism (4) is arranged inside and at the top of the reaction kettle (2), a feed inlet (3) is formed in the left side of the top surface of the reaction kettle (2), a sealing cover is arranged on the feed inlet (3), a nitrogen generator (11) is arranged on the rear side of the reaction kettle (2), and a nitrogen conveying pipe of the nitrogen generator (11) is communicated with an air inlet in the rear side of the top surface of the reaction kettle (2);
the primary heating mechanism (5) is arranged on the top surface of the support table (1) at the bottom of the reaction kettle (2);
the filtering mechanism (7) is arranged on the right side below the reaction kettle (2), the upper end of the left side of the filtering mechanism (7) is communicated with a discharge pipe (6) at the bottom of the reaction kettle (2), and the right side of the filtering mechanism (7) is provided with a delivery pump (8);
the purification mechanism (9) is arranged on the right side of the delivery pump (8), and the upper end of the left side of the purification mechanism (9) is communicated with the delivery pipe of the delivery pump (8);
and the secondary heating mechanism (10) is arranged outside the purifying mechanism (9).
2. The device for preparing hexacarbonyl cobaltic oxide according to claim 1, wherein the stirring mechanism (4) comprises a stirring motor (41) and a stirring paddle (42), the stirring motor (41) is arranged at the central position of the top surface of the reaction kettle (2), the stirring paddle (42) is arranged inside the reaction kettle (2), and the rotating shaft of the stirring paddle (42) is fixedly connected with the output shaft of the stirring motor (41) through a coupler.
3. The device for preparing hexacarbonyl cobaltic oxide according to claim 1, wherein the primary heating mechanism (5) comprises a temperature sensor (51), an electromagnetic heating coil (52), a temperature controller (53) and an electromagnetic controller (54), the temperature sensor (51) is arranged at the top end of the right side wall in the reaction kettle (2), the temperature sensor (51) is pt100, the temperature sensor (51) is electrically connected with the temperature controller (53), the electromagnetic heating coil (52) is wound on the outer surface of the reaction kettle (2), the electromagnetic heating coil (52) is electrically connected with the electromagnetic controller (54), the temperature controller (53) is electrically connected with the electromagnetic controller (54), and the temperature controller (53) is ST-22.
4. The device for preparing the hexacarbonyl cobaltic oxide according to claim 1, wherein the filtering mechanism (7) comprises a filtering tank (71) and a filtering screen (72), the filtering tank (71) is of a rectangular cavity structure, the upper end of the left side of the filtering tank (71) is communicated with the discharge pipe (6) at the bottom of the reaction kettle (2), the filtering screen (72) is arranged at the central position inside the filtering tank (71), and the bottom end of the right side of the filtering tank (71) is communicated with the pumping pipe of the conveying pump (8).
5. The cobaltous dicarbonyl preparation device of claim 4, wherein said purification mechanism (9) comprises a distillation tank (91), a flow guide tube (92), a condenser (93) and a material receiving box (94), the upper end of the left side of the distillation tank (91) is communicated with the top end of the conveying tube on the top surface of the conveying pump (8), the left end of the flow guide tube (92) is communicated with the top end of the distillation tank (91), the condenser (93) is arranged on the flow guide tube (92), and the top end of the flow guide tube (92) is communicated with the feeding tube on the top surface of the material receiving box (94).
6. The cobaltous hexacarbonyl preparation device according to claim 5, wherein the secondary heating mechanism (10) comprises a steam generator (101), a steam delivery pipe (102), a steam return pipe (103) and a steam coil (104), the steam generator (101) is arranged on a bracket on the right side of the distillation tank (91), the right end of the steam delivery pipe (102) is communicated with the upper end of the left side of the steam generator (101), the steam delivery pipe (102) is communicated with the upper end of the steam coil (104) on the outer surface of the distillation tank (91), the left end of the steam return pipe (103) is communicated with the lower end of the right side of the steam coil (104), and the right end of the steam return pipe (103) is communicated with the bottom end of the left side of the steam generator (101).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120630470.1U CN215139814U (en) | 2021-03-29 | 2021-03-29 | 3, 3-dimethyl-1-butyne hexacarbonyl cobaltic acid preparation facilities |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120630470.1U CN215139814U (en) | 2021-03-29 | 2021-03-29 | 3, 3-dimethyl-1-butyne hexacarbonyl cobaltic acid preparation facilities |
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| CN215139814U true CN215139814U (en) | 2021-12-14 |
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| CN202120630470.1U Active CN215139814U (en) | 2021-03-29 | 2021-03-29 | 3, 3-dimethyl-1-butyne hexacarbonyl cobaltic acid preparation facilities |
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2021
- 2021-03-29 CN CN202120630470.1U patent/CN215139814U/en active Active
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