CN215103678U - Single crystal furnace cleaning device - Google Patents
Single crystal furnace cleaning device Download PDFInfo
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- CN215103678U CN215103678U CN202023275095.8U CN202023275095U CN215103678U CN 215103678 U CN215103678 U CN 215103678U CN 202023275095 U CN202023275095 U CN 202023275095U CN 215103678 U CN215103678 U CN 215103678U
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Abstract
The embodiment of the utility model provides a single crystal growing furnace cleaning device. The cleaning device of the single crystal furnace comprises a cleaning assembly, wherein the cleaning assembly comprises a positioning component, a driving component and a cleaning component; the driving part is arranged on the positioning part, and the positioning part is used for providing a supporting point for the driving part; the cleaning component is sleeved outside the positioning component, and the driving component drives the cleaning component to move so as to clean the single crystal furnace. Therefore, the cleaning component can be driven by the driving component to clean without manpower, the cleaning degree of the furnace wall of the single crystal furnace can be ensured while the manpower is saved, and the wire breakage risk during the pulling production of the monocrystalline silicon is reduced.
Description
Technical Field
The utility model relates to a solar photovoltaic technology field especially relates to a single crystal growing furnace cleaning device.
Background
The process for drawing the silicon single crystal rod by the Czochralski method belongs to a high-temperature process, during the preparation process, certain volatile matters and impurities are generated and attached to the inner wall of a single crystal furnace, and if the volatile matters and the impurities are not cleaned in time, secondary volatilization can be carried out at a high temperature, so that the drawing quality of the silicon single crystal rod of the next batch is influenced.
At present, a commonly used cleaning device for the inner wall of a single crystal furnace comprises a supporting rod and a wiping ring, wherein the wiping ring is fixed at the end part of the first end of the supporting rod, and a towel is arranged on the surface of the wiping ring. When cleaning the furnace wall of the single crystal furnace, an operator holds the end part of the second end of the supporting rod, and rotates the supporting rod to drive the cleaning ring to rotate through rotating the supporting rod, so that the furnace wall of the single crystal furnace is cleaned through a towel arranged on the surface of the cleaning ring.
However, due to the limited effect of wiping by manpower, the furnace wall of the single crystal furnace cannot be cleaned, and the unclean furnace wall of the single crystal furnace affects the quality of the pulled single crystal and increases the risk of wire breakage during the pulling production of the single crystal silicon.
SUMMERY OF THE UTILITY MODEL
In order to solve or partially solve the problems, the utility model discloses a single crystal furnace cleaning device to solve the problem that the existing single crystal furnace cleaning device can not realize the automatic cleaning single crystal furnace.
The utility model discloses a single crystal furnace cleaning device, which comprises a cleaning component, wherein the cleaning component comprises a positioning part, a driving part and a cleaning part;
the driving component is arranged on the positioning component, and the positioning component is used for providing a supporting point for the driving component;
the cleaning component is sleeved on the outer side of the positioning component, and the driving component drives the cleaning component to move so as to clean the single crystal furnace.
Optionally, the driving part comprises a driving motor, a first driving gear, a second driving gear and a connecting piece;
the first driving gear is arranged on the driving motor, and the second driving gear is arranged on the positioning cylinder; the first driving gear and the second driving gear are meshed with each other; the connecting member connects the cleaning member and the second driving gear。
Optionally, the connecting member includes a first connecting strip and a second connecting strip, and the first connecting strip and the second connecting strip are arranged oppositely.
Optionally, the cleaning member comprises a cleaning panel and a cleaning member, and the cleaning member is detachably connected with the outer wall of the cleaning panel.
Optionally, the positioning component includes a positioning base and a positioning cylinder, and the positioning cylinder is disposed on the positioning base.
Optionally, a clamping groove is formed in the outer wall of the positioning cylinder, the positioning cylinder is coaxial with the second driving gear, and the second driving gear is embedded in the clamping groove and connected with the positioning cylinder.
Optionally, a gap is formed between the outer wall of the positioning cylinder and the inner wall of the second driving gear, and a plurality of balls are arranged in the gap between the outer wall of the positioning cylinder and the inner wall of the second driving gear.
Optionally, the cleaning device further comprises a support assembly, the support assembly comprises a support sleeve and a support base, a first end of the support sleeve is connected with the cleaning assembly, and a second end of the support sleeve is connected with the support base.
Optionally, a brake, a clutch and a screw rod module are mounted in the support base;
the lead screw module is connected with the second end of the supporting sleeve, the brake and the clutch are connected with the lead screw module, and the brake and the clutch are used for controlling the rotation or stop of the lead screw module.
Optionally, the bottom of the support base is provided with a moving assembly.
Compared with the prior art, the embodiment of the utility model provides an including following advantage:
according to the embodiment, the cleaning component is sleeved outside the positioning component, and the driving component drives the cleaning component to move, so that the cleaning component can be driven by the driving component to clean the wall of the single crystal furnace, manual wiping is not needed for cleaning, the cleaning degree of the wall of the single crystal furnace can be ensured while manpower is saved, the quality of the pulled single crystal is ensured, and the wire breakage risk during pulling production of the single crystal silicon is reduced.
Drawings
FIG. 1 is a schematic structural diagram of a cleaning device of a single crystal furnace according to an embodiment of the present invention;
FIG. 2 is a schematic cross-sectional view of a support sleeve included in a cleaning apparatus for a single crystal furnace according to an embodiment of the present invention in an extended state;
FIG. 3 is a schematic cross-sectional view of a support sleeve included in a cleaning apparatus for a single crystal furnace according to an embodiment of the present invention in a retracted state;
fig. 4 is a partially enlarged schematic view of a cleaning device of a single crystal furnace according to an embodiment of the present invention at a point a in fig. 3.
Description of reference numerals:
1-a cleaning component; 2-a support assembly; 11-a positioning member; 12-a drive member; 13-a cleaning member; 21-a support sleeve; 22-a support base; 111-a positioning base; 112-positioning the cylinder; 121 driving a motor; 122 — a first drive gear; 123-a second drive gear; 124, connecting pieces; 131-cleaning the panel; 132-a cleaning member; 221-a brake; 222-clutch 223-lead screw module; 224-a stepper motor; 225-third drive gear; 226-fourth drive gear; 227-fifth drive gear.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
It should be appreciated that reference throughout this specification to "one embodiment" or "an embodiment" means that a particular feature, structure or characteristic described in connection with the embodiment is included in at least one embodiment of the present invention. Thus, the appearances of the phrases "in one embodiment" or "in an embodiment" in various places throughout this specification are not necessarily all referring to the same embodiment. Furthermore, the particular features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.
Fig. 1 is an assembly schematic view of a cleaning device of a single crystal furnace in an embodiment of the present invention, and as shown in fig. 1, a cleaning assembly 1 includes a positioning part 11, a driving part 12 and a cleaning part 13; the driving component 12 is arranged on the positioning component 11, and the positioning component 11 is used for providing a supporting point for the driving component 12; the cleaning component 13 is sleeved outside the positioning component 11, and the driving component 12 drives the cleaning component 13 to move so as to clean the single crystal furnace.
As seen from the above embodiment, since the cleaning member 13 is sleeved outside the positioning member 11, and the driving member 12 drives the cleaning member 13 to move, the cleaning member 13 can be driven by the driving assembly to clean without manpower, so that the cleaning degree of the furnace wall of the single crystal furnace can be ensured while manpower is saved, and the risk of wire breakage during the pulling production of the single crystal silicon is reduced.
Specifically, the cleaning assembly 1 is a main component for cleaning the wall of the single crystal furnace, and as shown in fig. 1, the cleaning assembly 1 may include a positioning member 11, a driving member 12, and a cleaning member 13. Wherein, the positioning component 11 is used for providing a supporting point for the driving component 12 and providing a driving and connecting space for the driving component 12 and the cleaning assembly 1, and the specific composition and mechanism of the positioning component 11 are determined according to the type of the driving component 12, which is not limited by the embodiment of the present invention.
In a possible implementation manner, if the driving part 12 is a driving part such as a motor and a gear, the positioning part 11 is a fixing part such as a gear fixing seat; in another possible implementation manner, if the driving member 12 is a driving member such as a cylinder or a crank rod, the positioning member 11 may be a fixing member such as a crank rod fixing frame.
In addition, the cleaning member 13 can be driven by the driving member 12 to move circularly to clean the single crystal furnace, such as a mode that a motor drives a gear and the gear drives the cleaning member 13 to rotate. Meanwhile, under the driving of the driving part 12, the cleaning part 13 can also make reciprocating linear motion to clean the single crystal furnace, for example, a mode that a cylinder drives a sliding block of a sliding rail to make reciprocating linear motion.
Taking the cleaning component 13 capable of making a circular motion to clean the single crystal furnace as an example, the positioning component 11 may optionally include a positioning base 111 and a positioning cylinder 112, and the positioning cylinder 112 is disposed on the positioning base 111.
The driving part 12 may include a driving motor 121, a first driving gear 122, a second driving gear 123, and a connecting member 124; a first drive gear 122 is provided on the drive motor 121, and a second drive gear 123 is provided on the positioning cylinder 112; the first drive gear 122 and the second drive gear 123 are engaged with each other; the connecting member 124 connects the cleaning member 13 and the second driving gear 123。
It should be noted that the diameter of the positioning cylinder 112 is smaller than the diameter of the second driving gear 123, so that the positioning cylinder 112 can be located inside the second driving gear 123, and thus, when the second driving gear 123 rotates, the second driving gear 123 can rotate under the common limit of the slot and the positioning cylinder 112, so that the second driving gear 123 can rotate around the circumferential direction of the positioning cylinder 112, thereby preventing the second driving gear 123 from shifting when rotating, ensuring the stability of the ring cleaning component 13 when rotating, and further ensuring the cleaning effect of the cleaning component 13. In addition, a gap can be formed between the outer wall of the positioning cylinder 112 and the inner wall of the second driving gear 123, and the connecting piece 124 can be limited in the gap between the outer wall of the positioning cylinder 112 and the inner wall of the second driving gear 123, so that the influence of the arrangement of the positioning cylinder 112 on the rotation of the second driving gear 123 can be avoided.
It should be noted that, since the first driving gear 122 is connected to the driving shaft of the driving motor 121, the first driving gear 122 may rotate along with the rotation of the driving motor 121, and since the first driving gear 122 is engaged with the second driving gear 123, the second driving gear 123 may rotate along with the rotation of the first driving gear 122. Thus allowing the cleaning member 13 to rotate together with the second driving gear 123, automatic rotation cleaning is achieved. It should be noted that the connecting member 124 may be a welding bar, one end of the welding bar is connected to the inner wall of the second driving gear 123, and the other end of the welding bar is welded to the inner wall of the cleaning member 13, so that the second driving gear 123 and the cleaning member 13 are integrated. Therefore, the first driving gear 122 can be driven to rotate by the driving motor 121, and then the second driving gear 123 is driven to rotate to drive the cleaning component 13 to rotate so as to clean the single crystal furnace, and the cleaning component can be uniformly wiped under the condition that the rotating speed of the driving motor 121 is not changed, so that the cleaning degree of the inner wall of the single crystal furnace is ensured, and the wire breakage risk during the pulling production of the monocrystalline silicon is reduced.
Optionally, the connecting member 124 includes a first connecting strip and a second connecting strip, and the first connecting strip and the second connecting strip are oppositely disposed.
Specifically, the first connecting bar and the second connecting bar may be disposed at two diametrically opposite positions of the positioning cylinder 112, so that the connecting point between the cleaning member 13 and the second driving gear 123 is also at the opposite position, thereby making the fixation between the cleaning member 13 and the second driving gear 123 more secure. Of course, the number of the connecting strips included in the connecting member 124 is not limited to the two connecting strips, and the specific number is determined according to the fixing effect between the cleaning member 13 and the second driving gear 123, which is not limited by the embodiment of the present invention.
Optionally, a clamping groove is formed in an outer wall of the positioning cylinder 112, the positioning cylinder 112 is coaxial with the second driving gear 123, and the second driving gear 123 is connected to the positioning cylinder 112 by being embedded in the clamping groove.
Specifically, this draw-in groove can be the ring channel, and the diameter of ring channel and second drive gear 123's diameter equals, and then makes second drive gear 123 joint in the ring channel, and has the clearance between the cell wall of second drive gear 123 and draw-in groove, and then makes second drive gear 123 rotate under the limiting displacement of draw-in groove.
Alternatively, a gap is formed between the outer wall of the positioning cylinder 112 and the inner wall of the second driving gear 123, and a plurality of balls are disposed in the gap between the outer wall of the positioning cylinder 112 and the inner wall of the second driving gear 123, and pass through the balls.
It should be noted that, by arranging the balls in the gap between the outer wall of the positioning cylinder 112 and the inner wall of the second driving gear 123, the friction between the inner wall of the second driving gear 123 and the outer wall of the positioning cylinder 112 is reduced, and then the resistance when the second driving gear 123 rotates is reduced, which is more beneficial for the second driving gear 1233 to drive the cleaning component 13 to rotate.
Optionally, the cleaning member 13 includes a cleaning panel 131 and a cleaning member 132, and the cleaning member 132 is detachably connected to an outer wall of the cleaning panel 131.
The cleaning panel 131 may be a cylindrical, semicircular, arc-shaped panel, or the like, and the specific shape of the cleaning panel 131 is determined according to the shape of the furnace wall of the single crystal furnace. For better furnace wall tangent joint of the single crystal furnace, the cleaning panel 131 is preferably an annular cleaning panel 131, and the annular cleaning panel 131 can be a cylinder with a thickness of 20mm, an inner diameter of 358mm and an outer diameter of 362mm, so that the annular cleaning panel 131 can be adapted to the specification of the single crystal furnace. In addition, since the cleaning panel 131 is cylindrical, when the cleaning panel 131 rotates at a constant speed, the outer wall of the cleaning panel 131 can uniformly contact with the furnace wall of the single crystal furnace, thereby achieving a uniform cleaning effect. The cleaning member 132 may be wrapped on the outer wall of the cleaning panel 131, and the cleaning member 132 may have an adhesive button, so that the cleaning member 132 may be adhered to the outer wall of the cleaning panel 131 through the adhesive button during installation, and after subsequent wiping is completed, the cleaning member 132 may be conveniently replaced. In addition, the cleaning member 132 can be made of dust-free cloth with certain water absorption and dust absorption performance, so that the cleaning effect of the furnace wall of the single crystal furnace is better.
Optionally, the cleaning device of the single crystal furnace further comprises a support assembly 2, the support assembly 2 comprises a support sleeve 21 and a support base 22, a first end of the support sleeve 21 is connected with the cleaning assembly 1, and a second end of the support sleeve 21 is connected with the support base 22.
Wherein the support base 22 is used for fixing the support sleeve 21 and providing a support point for the cleaning device of the single crystal furnace. The supporting base 22 can be a casing in the shape of a circular truncated cone, a rectangular parallelepiped or the like, and provides a larger landing area for the cleaning device of the single crystal furnace through the bottom surface of the supporting base 22, so that the cleaning device is favorable for keeping stable during cleaning. The size of the support base 22 is determined according to the size of the whole single crystal furnace cleaning device, and taking the support base 22 as a rectangular parallelepiped as an example, the length of the support base 22 may be 400mm, the width of the support base 22 may be 300mm, and the height may be 400 mm. In addition, the supporting base 22 has an inner cavity, so that a sufficient space can be provided for the installation of the brake 221, the clutch 222, the adapter, the screw module 223 and other devices through the inner cavity, and the shell of the supporting base 22 can provide certain protection for the brake 221, the clutch 222, the adapter, the screw module 223 and other devices, thereby prolonging the service life of the cleaning device of the single crystal furnace.
Because the weight and the size of the single crystal furnace are fixed, if the whole cleaning work of the single crystal furnace is realized, the size and the weight of the whole cleaning device are large. Therefore, in order to facilitate the transportation of the cleaning device, optionally, a moving assembly may be disposed at the bottom of the supporting base 22, for example, a plurality of rollers may be disposed at the bottom of the supporting base 22, and the plurality of rollers may be disposed in two rows, so that the movement of the cleaning device is smoother and more stable. In this way, the rollers at the bottom of the supporting base 22 can be used to facilitate the movement and installation of the cleaning device, thereby saving labor.
Alternatively, as shown in fig. 2 to 4, a brake 221, a clutch 222, and a lead screw module 223 are installed in the support base 22; the lead screw module 223 is connected with the second end of the support sleeve 21, and the brake 221 and the clutch 222 are both connected with the lead screw module 223, wherein the brake 221 and the clutch 222 are used for controlling the rotation or stop of the lead screw module 223.
It should be noted that both the clutch 222 and the brake 221 can be installed on a screw included in the screw module 223, and both the clutch 222 and the brake 221 can be electrically connected to a remote controller through an adapter, and current exchange is performed through the remote controller to control the adapter, so as to change the energization state of the clutch 222 and the brake 221, so that the working state of the clutch 222 and the brake 221 changes, further to control the rotation or stop of the screw module 223, and simultaneously, the state of extension or retraction of the support sleeve 21 changes, and further, the whole cleaning device is safe and controllable.
In addition, the support sleeve 21 is retractable in the length direction to accommodate single crystal furnaces of different heights. Specifically, the length of the extended support sleeve 21 can be consistent with the height of the single crystal furnace, so that the requirement of omnibearing cleaning of the single crystal furnace is met. Because the supporting sleeve 21 can stretch in the length direction, the length of the supporting sleeve 21 can be adjusted according to the cleaning position of the single crystal furnace by the supporting sleeve 21, and after cleaning is completed, the supporting sleeve 21 can retract, so that the occupied space of the supporting sleeve 21 is reduced, and the cleaning device is convenient to store integrally.
It should be noted that the support sleeve 21 can be driven by an air cylinder, or can be driven by a motor screw. Illustratively, a stepping motor 224, a third driving gear 225, a fourth driving gear 226 and a lead screw module 223 may be installed in the support base 22, a driving shaft of the stepping motor 224 is fixedly connected with the third driving gear 225, the third driving gear 225 is meshed with the fourth driving gear 226, and the lead screw module 223 and the fourth driving gear 226 are coaxial. When the screw module 223 and the fourth drive gear 226 are coaxial, the screw module 223 can rotate along with the rotation of the fourth drive gear 226. Specifically, for example, when the stepping motor 224 rotates clockwise, the lead screw moves in a direction away from the support base 22, and when the stepping motor 224 rotates clockwise, the lead screw is driven by the fourth driving gear 226 to rotate, so that the nut seat screwed on the lead screw moves along the length direction of the lead screw, and since the nut seat is fixedly connected with the nut seat and the support sleeve 21, the nut seat and the support sleeve 21 move together in a direction away from the support base 22, so that the support sleeve 21 extends. On the contrary, when the stepping motor 224 rotates counterclockwise, the screw rod is driven by the fourth driving gear 226 to rotate, so that the nut seat screwed on the screw rod moves along the length direction of the screw rod, and since the nut seat and the nut seat are fixedly connected with the support sleeve 21, the nut seat and the support sleeve 21 move together in a direction approaching the support base 22, so that the support sleeve 21 retracts. Therefore, the automatic extension and retraction of the supporting sleeve 21 can be realized by controlling the rotating direction of the stepping motor 224, the length of the extension of the supporting sleeve 21 can be adjusted according to the position of the single crystal furnace to be cleaned, the wiping position is not required to be manually adjusted, the cleaning process is more convenient and faster, and the damage of the supporting sleeve 21 to other parts in the single crystal furnace in the position adjusting process can be avoided.
Furthermore, a fifth driving gear 227 may be provided, the fifth driving gear 227 and the third driving gear 225 are coaxially disposed, and the third driving gear 225 is meshed with the fourth driving gear 226 through the fifth driving gear 227. In this way, the transmission ratio can be changed by changing the parameters of the fifth driving gear 227, that is, the transmission ratio between the third driving gear 225 and the fourth driving gear 226 is changed, and the rotation speed of the fourth driving gear 226 is further changed, so as to meet the speed requirements of extension and retraction of the screw rod module 223.
Further, the support sleeve 21 includes at least two sleeves, and each two adjacent sleeves are sleeved with each other, as shown in fig. 2, when the support sleeve 21 retracts, the screw rod module 223 moves toward the direction close to the support base 22, and the first target sleeve retracts into the cavity of the second target sleeve under the driving of the screw rod module 223; as shown in fig. 3, when the support sleeve 21 is extended, the lead screw module 223 moves away from the support base 22, and the first target sleeve protrudes from the cavity of the second target sleeve under the driving of the lead screw module 223, wherein the first target sleeve is a sleeve of the at least two sleeves close to the support base 22, and the second target sleeve is a sleeve of the at least two sleeves except the first target sleeve.
Specifically, for example, the support sleeve 21 includes a first sleeve, a second sleeve, a third sleeve and a fourth sleeve, wherein a first end of the first sleeve may be fixed on the support base 22, a second end of the first sleeve is sleeved with the first end of the second sleeve, a second end of the second sleeve is sleeved with the first end of the third sleeve, a second end of the third sleeve is sleeved with the first end of the fourth sleeve, and a second end of the fourth sleeve is fixed at the bottom of the fixing component. Illustratively, the first sleeve may be a 1500mm long, 225mm diameter round tube, the second sleeve may be 1800mm long, 160mm diameter round tube, the third sleeve may be 2000mm long, 100mm diameter round tube, and the third sleeve may be 900mm long, 50mm diameter round tube. The second end of the first sleeve is provided with a limiting hole, the outer wall of the first end of the second sleeve is provided with a limiting joint, the size of the limiting joint of the first end of the second sleeve is smaller than the diameter of the limiting hole formed in the second end of the first sleeve, so that the second sleeve can be prevented from being pulled out of the first sleeve after the support sleeve 21 is extended. In addition, the nut seat included in the lead screw module 223 can be connected to the inner wall of the fourth sleeve, so that when the stepping motor 224 rotates clockwise and moves the nut seat in a direction away from the support base 22, the fourth sleeve can extend from the lumen of the third sleeve, and then the second sleeve is driven to extend from the lumen of the first sleeve, and the third sleeve is driven to extend from the lumen of the second sleeve, so as to achieve the overall extension of the support sleeve 21. Conversely, when the stepping motor 224 rotates counterclockwise and moves the nut seat toward the direction close to the support base 22, the fourth sleeve can be retracted into the lumen of the third sleeve, so as to drive the second sleeve to be retracted into the lumen of the first sleeve, and drive the third sleeve to be retracted into the lumen of the second sleeve, thereby realizing the retraction of the whole support sleeve 21. Like this, can realize the automation of support sleeve 21 through the rotation direction of control step motor 224 and stretch out and draw back, and then can adjust the length that support sleeve 21 extends according to the position that the single crystal growing furnace needs to clean, need not the manpower and adjust and clean the position for clean process is convenient and fast more. It should be further noted that the number of sleeves and the size of the sleeves included in the support sleeve 21 are only an exemplary implementation manner of the embodiment of the present invention, and the number of sleeves and the size of the sleeves included in the support sleeve 21 are not limited in the embodiment of the present invention.
In addition, the support sleeve 21 may be connected to the positioning member 11 by screwing or clipping. For example, an adapter may be provided at the first end of the support sleeve 21, and the adapter may be a screw joint or a snap joint. When the adapter is a threaded adapter, the positioning component 11 includes a threaded hole formed in the positioning base 111, so that the first end of the support sleeve 21 is screwed with the positioning base 111; when this adapter is the joint, can set up the joint hole on location base 111, and then make the first end and the fixing base joint of support sleeve 21, like this, can conveniently dismantle clean subassembly 1 after cleaning the completion, maintain and safeguard clean subassembly 1.
As seen from the above embodiment, since the cleaning member 13 is sleeved outside the positioning member 11, and the driving member 12 drives the cleaning member 13 to move, the cleaning member 13 can be driven by the driving member 12 to clean without manpower, so that the cleaning degree of the furnace wall of the single crystal furnace can be ensured while manpower is saved, and the risk of wire breakage during the pulling production of the single crystal silicon is reduced.
In addition, the single crystal furnace cleaning device further comprises a supporting component 2, the supporting component 2 comprises a supporting sleeve 21 and a supporting base 22, the first end of the supporting sleeve 21 is connected with the cleaning component 1, the second end of the supporting sleeve 21 is connected with the supporting base 22, under the condition that the supporting sleeve 21 is telescopic in the length direction, the supporting sleeve 21 can adjust the length of the extending part of the supporting sleeve 21 according to the cleaning part of the single crystal furnace, and after cleaning is completed, the supporting sleeve 21 can retract, so that the space occupied by the supporting sleeve 21 is reduced, and the cleaning device is convenient to store integrally.
The embodiments in the specification are all described in a progressive mode, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.
While preferred embodiments of the present invention have been described, additional variations and modifications of these embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. It is therefore intended that the following claims be interpreted as including the preferred embodiments and all changes and modifications that fall within the scope of the embodiments of the invention.
Finally, it should also be noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or terminal that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or terminal. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other like elements in a process, method, article, or terminal that comprises the element.
The above detailed description is given to the cleaning device for the single crystal furnace provided by the present invention, and the specific examples are applied herein to explain the principle and the implementation of the present invention, and the description of the above examples is only used to help understand the method and the core idea of the present invention; meanwhile, for the general technical personnel in the field, according to the idea of the present invention, there are changes in the specific implementation and application scope, to sum up, the content of the present specification should not be understood as the limitation of the present invention.
Claims (10)
1. The cleaning device for the single crystal furnace is characterized by comprising a cleaning assembly, wherein the cleaning assembly comprises a positioning part, a driving part and a cleaning part;
the driving component is arranged on the positioning component, and the positioning component is used for providing a supporting point for the driving component;
the cleaning component is sleeved on the outer side of the positioning component, and the driving component drives the cleaning component to move so as to clean the single crystal furnace.
2. The single crystal furnace cleaning device according to claim 1, wherein the driving part comprises a driving motor, a first driving gear, a second driving gear and a connecting piece;
the first driving gear is arranged on the driving motor, and the second driving gear is arranged on the positioning component; the first driving gear and the second driving gear are meshed with each other; the connecting member connects the cleaning member and the second drive gear.
3. The single crystal furnace cleaning device according to claim 2, wherein the connecting member comprises a first connecting bar and a second connecting bar, and the first connecting bar and the second connecting bar are oppositely arranged.
4. The single crystal furnace cleaning device according to claim 1, wherein the cleaning member comprises a cleaning panel and a cleaning member, and the cleaning member is detachably attached to an outer wall of the cleaning panel.
5. The single crystal furnace cleaning device according to claim 2, wherein the positioning member comprises a positioning base and a positioning cylinder, and the positioning cylinder is disposed on the positioning base.
6. The cleaning device for the single crystal furnace according to claim 5, wherein a clamping groove is formed in the outer wall of the positioning cylinder, the positioning cylinder is coaxial with the second driving gear, and the second driving gear is connected with the positioning cylinder through being embedded in the clamping groove.
7. The single crystal furnace cleaning device according to claim 5, wherein a gap is provided between the outer wall of the positioning cylinder and the inner wall of the second driving gear, and a plurality of balls are provided in the gap between the outer wall of the positioning cylinder and the inner wall of the second driving gear.
8. The single crystal furnace cleaning apparatus of claim 1, further comprising a support assembly including a support sleeve and a support base, a first end of the support sleeve being coupled to the cleaning assembly and a second end of the support sleeve being coupled to the support base.
9. The cleaning device for the single crystal furnace according to claim 8, wherein a brake, a clutch and a lead screw module are installed in the supporting base;
the lead screw module is connected with the second end of the supporting sleeve, the brake and the clutch are connected with the lead screw module, and the brake and the clutch are used for controlling the rotation or stop of the lead screw module.
10. The single crystal furnace cleaning apparatus according to claim 8, wherein a moving assembly is provided at a bottom of the support base.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023275095.8U CN215103678U (en) | 2020-12-28 | 2020-12-28 | Single crystal furnace cleaning device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023275095.8U CN215103678U (en) | 2020-12-28 | 2020-12-28 | Single crystal furnace cleaning device |
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| CN215103678U true CN215103678U (en) | 2021-12-10 |
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| CN202023275095.8U Active CN215103678U (en) | 2020-12-28 | 2020-12-28 | Single crystal furnace cleaning device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116000033A (en) * | 2022-12-15 | 2023-04-25 | 西安奕斯伟材料科技有限公司 | Single crystal furnace auxiliary chamber cleaning device and method |
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2020
- 2020-12-28 CN CN202023275095.8U patent/CN215103678U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116000033A (en) * | 2022-12-15 | 2023-04-25 | 西安奕斯伟材料科技有限公司 | Single crystal furnace auxiliary chamber cleaning device and method |
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