CN215103514U - Substrate clamping piece and coating device comprising same - Google Patents

Abstract

The utility model provides a base plate holder, include: the backup pad, the left and right sides both ends symmetry of backup pad is provided with a plurality of flutings that set up along first direction interval, and every fluting extends along the second direction and forms to be provided with two rubber blocks that set up relatively on every grooved opening end, the interval between two rubber blocks is less than by the thickness of the base plate of centre gripping, and first direction is perpendicular with the second direction. The utility model also provides a coating device containing it. The utility model discloses can guarantee that miniature base plate can not drop and can not damaged at the coating film in-process to once coating film volume is big.

Description

Substrate clamping piece and coating device comprising same

Technical Field

The utility model relates to a coating film technology field especially relates to a base plate holder and contain its coating film device.

Background

When a substrate is coated, the substrate generally needs to be fixed to perform a corresponding coating operation. The substrate coating generally includes single-side coating and whole-periphery coating, and corresponding coating operation is usually realized by selecting a corresponding fixing structure according to the size of the substrate. With the miniaturization of electronic devices, the size of some substrates becomes smaller and smaller, for example, only 5mmx5mmx1mm or 3mmx5mmx1mm, and the entire side peripheral surface, i.e., the surrounding narrow surface, needs to be coated. For such substrates, it is necessary to ensure that the substrate cannot fall off and be damaged during the coating process, and the coating amount at one time needs to be as large as possible, and the current fixing structure cannot meet the requirement.

Therefore, it is highly desirable to provide a fixing structure and a plating scheme for such a substrate.

SUMMERY OF THE UTILITY MODEL

In view of the above, the present invention provides a substrate holder and a coating apparatus including the same, which at least partially solve the problems in the prior art.

An embodiment of the utility model provides a substrate holder, include: the backup pad, the both ends symmetry of backup pad is provided with a plurality of flutings that set up along first direction interval, and every fluting extends along the second direction and forms to be provided with two rubber blocks that set up relatively on every grooved opening end, the interval between two rubber blocks is less than by the thickness of the base plate of centre gripping, and first direction is perpendicular with the second direction.

Another embodiment of the present invention provides a coating apparatus, including: the substrate clamping device comprises a vacuum chamber and a rotary driving device, wherein an evaporation source and at least one rotary frame are arranged in the vacuum chamber, the rotary driving device is arranged at the bottom of the vacuum chamber and connected with the rotary frame, and the rotary frame is provided with a plurality of the substrate clamping pieces along the circumferential direction.

The embodiment of the utility model provides a base plate holder and contain its coating device has following advantage at least:

(1) the clamping piece clamps the substrate through the rubber block, and the upper surface and the lower surface of the substrate cannot be damaged.

(2) The rubber block can clamp the substrate through elasticity and friction force, so that the substrate is firmly installed and is not easy to fall off, moderate clamping force can be ensured, and the interior of the substrate cannot be crushed.

(3) The clamping part is simple in structure and low in cost, only three parts are formed, the supporting plate is formed by machining a steel plate, the structure of the rotating shaft is simple, and the rubber block is a standard product which can be bought on the market and does not need to be customized.

(4) A plurality of substrates can be installed on each clamping piece, then a plurality of groups of clamping pieces are installed through the planetary disk system, each clamping piece completes revolution and rotation at the same time, and 4 narrow surfaces of the substrates are guaranteed to have coating opportunities.

(5) The clamping piece has the advantages of compact structure, large quantity of mounting substrates, simple structure and low processing cost.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without creative efforts.

Fig. 1 and fig. 2 are schematic structural views of a substrate holder according to an embodiment of the present invention;

FIG. 3 is an enlarged view of area A of FIG. 1;

FIG. 4 is a cross-sectional view of FIG. 3;

FIG. 5 is an enlarged view of area B in FIG. 2;

fig. 6 is a front view of a coating device according to an embodiment of the present invention;

fig. 7 and 8 are perspective views of a coating device according to an embodiment of the present invention;

fig. 9 and fig. 10 are schematic views of a coating device according to another embodiment of the present invention.

Detailed Description

The embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

It should be noted that, in the case of no conflict, the features in the following embodiments and examples may be combined with each other; moreover, all other embodiments that can be derived by one of ordinary skill in the art from the embodiments disclosed herein without making any creative effort fall within the scope of the present disclosure.

It is noted that various aspects of the embodiments are described below within the scope of the appended claims. It should be apparent that the aspects described herein may be embodied in a wide variety of forms and that any specific structure and/or function described herein is merely illustrative. Based on the disclosure, one skilled in the art should appreciate that one aspect described herein may be implemented independently of any other aspects and that two or more of these aspects may be combined in various ways. For example, an apparatus may be implemented and/or a method practiced using any number of the aspects set forth herein. Additionally, such an apparatus may be implemented and/or such a method may be practiced using other structure and/or functionality in addition to one or more of the aspects set forth herein.

Fig. 1 and fig. 2 are schematic structural views of a substrate holder according to an embodiment of the present invention; FIG. 3 is an enlarged view of area A of FIG. 1; FIG. 4 is a cross-sectional view of FIG. 3; fig. 5 is an enlarged view of a region B in fig. 2.

The embodiment of the utility model provides a base plate holder 1 is used for the miniature base plate of centre gripping, realizes the coating film of 4 sides (narrow face) of this miniature base plate. In the embodiment of the present invention, the substrate may have different shapes and sizes. In one example, the dimensions of the substrate 2 being clamped may be: 5mmx5mmx1mm or 3mmx5mmx1 mm.

As shown in fig. 1 to 5, a substrate holder 1 according to an embodiment of the present invention may include: the supporting plate 101, the left and right both ends symmetry of supporting plate 101 is provided with a plurality of flutings 102 that set up along first direction interval, and every fluting 102 extends along the second direction and forms to be provided with two relative rubber blocks 103 that set up on the open end of every fluting 102. The interval between the two rubber blocks 103 is smaller than the thickness of the substrate 2 to be clamped, so that the substrate 2 is clamped by elasticity and the substrate 2 is prevented from falling off in the coating process. The specific interval between the two rubber blocks can be slightly smaller than the basic thickness, so that the substrate can be inserted without being damaged and can be prevented from falling off. The utility model discloses owing to come the centre gripping base plate through the block rubber, can not lead to the fact the harm to the base plate is inside.

The utility model discloses in, first direction is perpendicular with the second direction, specifically, and the first direction can be the length direction of backup pad about the direction promptly, and the second direction is the width direction of backup pad about the direction promptly. Because the two ends of the supporting plate are provided with the plurality of slots in the up-down direction, the plurality of substrates can be clamped simultaneously, the coating amount can be as large as possible at each time, and the coating yield is improved.

Further, a rubber block 103 is detachably provided on the open end. Specifically, as shown in fig. 4, two opposing projections may be formed at each open end, and the rubber block 103 is mounted on the corresponding projections. The rubber block 103 can be a standard product sold in the market, and customization cost can be saved.

The embodiment of the utility model provides an in, when the base plate 2 by the centre gripping is in the state by two rubber blocks centre grippings, the line direction of two diagonal angles of base plate is parallel with the second direction, and a diagonal is parallel with the left and right sides direction of backup pad promptly, is parallel with fluting extending direction promptly to make the backup pad to the quantity of sheltering from of the leptoprosopy of base plate 2 as far as possible little, and then realize even coating film.

In the embodiment of the present invention, the supporting plate 101 may be made of a steel plate, or made of other materials meeting the strength requirement, and the present invention is not limited thereto. In addition, the upper and lower ends of the support plate 101 are provided with an upper rotating shaft 104 and a lower rotating shaft 105 to be connected to the support plate mounting structure at the time of coating.

Another embodiment of the present invention provides a coating device 3, as shown in fig. 6 to 10, the coating device 3 may include: a vacuum chamber 301 and a rotation driving device 302, wherein the evaporation source 303 and at least one rotating frame 304 are arranged in the vacuum chamber 301, the rotation driving device 302 is arranged at the bottom of the vacuum chamber 301 and connected with the rotating frame 304, and the rotating frame 304 is provided with a plurality of substrate clamping pieces provided by the previous embodiment along the circumferential direction.

The evaporation source 303 is provided on a side surface of the vacuum chamber 301, and may be a single evaporation source or a plurality of evaporation sources for evaporating the film material onto the surface of the substrate.

In the present invention, the rotating frame 304 may include an upper supporting plate 306 and a lower supporting plate 307 which are spaced apart from each other. The upper support plate 306 and the lower support plate 307 can be connected by a connecting rod 308. The rotation driving device 302 is connected to the lower support plate 307 via a transmission shaft 305 and is connected to the substrate holder via a transmission mechanism. The driving mechanism may include a fixed wheel 309 disposed on the driving shaft 305 and fixedly connected to the bottom of the vacuum chamber 301, and a driven wheel 310 connected to the substrate holder. The rotary drive device 302 may be a drive motor. The fixed wheel 309 may be fixed on the vacuum chamber 309 through a fixed block, and the driven wheel is connected to the lower end of the substrate holder and rotatably connected to the fixed wheel. Thus, the plurality of driven wheels and the fixed wheels constitute a planetary disk structure, that is, the fixed wheels 309 are fixed, and the driven wheels rotate along the fixed wheels while rotating along with the rotating frame 304, so that the substrate holder completes revolution and rotation while revolving along with the rotating frame, thereby ensuring that each narrow side of the substrate can be coated with a film. In one example, the fixed wheel and the driven wheel may be gears, but are not limited thereto, and may be a belt or a chain, etc.

The utility model discloses in, the upper end and the last backup pad 306 of base plate holder rotate to be connected, and the lower extreme passes bottom suspension fagging 307 and is connected from driving wheel 310. Specifically, both ends of the substrate holder are connected to the spin stand through the rotation shafts, respectively. More specifically, the upper support plate 306 and the lower support plate 307 are formed with a plurality of openings at the installation position of the substrate holder, the upper rotating shaft 104 of the basic holder is inserted into the opening of the upper support plate 306, and the lower rotating shaft 105 passes through the opening of the lower support plate 307 and is connected with the driven wheel.

In an embodiment of the present invention, a rotating frame may be included. In another embodiment, as shown in fig. 9 and 10, multiple rotating frames may be included. Under the condition that the rotary frame comprises a plurality of rotary frames, the rotary shafts of the adjacent substrate clamping pieces on the two adjacent rotary frames are connected with each other, namely the rotary shafts of each substrate clamping piece are connected in series end to end, and meanwhile, a plurality of groups of evaporation sources are installed on the side wall of the vacuum chamber, so that a larger product is realized.

The above description is only for the specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention should be covered by the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims (8)

1. A substrate holder, comprising: the backup pad, the left and right sides both ends symmetry of backup pad is provided with a plurality of flutings that set up along first direction interval, and every fluting extends along the second direction and forms to be provided with two rubber blocks that set up relatively on every grooved opening end, the interval between two rubber blocks is less than by the thickness of the base plate of centre gripping, and first direction is perpendicular with the second direction.

2. The substrate holder according to claim 1, wherein the rubber block is detachably provided on the open end.

3. The substrate holder according to claim 1, wherein a line connecting two diagonal corners of the substrate is parallel to the second direction of the slot when the held substrate is held by the two rubber blocks.

4. The substrate holder of claim 1, wherein the support plate is made of a steel plate.

5. The substrate holder according to claim 1, wherein rotation shafts are provided at upper and lower ends of the support plate.

6. A plating device, characterized by comprising: a vacuum chamber in which an evaporation source and at least one spin stand are disposed, and a rotation driving device disposed at the bottom of the vacuum chamber and connected to the spin stand, the spin stand being provided with a plurality of substrate holders according to any one of claims 1 to 4 in a circumferential direction.

7. The plating device according to claim 6, wherein the rotating frame comprises an upper support plate and a lower support plate which are arranged at intervals;

the rotary driving device is connected with the lower supporting plate through a transmission shaft;

the transmission shaft is provided with a fixed wheel fixedly connected with the bottom of the vacuum chamber;

the upper end of the substrate clamping piece is rotatably connected with the upper supporting plate, and the lower end of the substrate clamping piece penetrates through the lower supporting plate to be connected with the driven wheel;

the driven wheel is rotationally connected with the fixed wheel.

8. The plating device according to claim 7, comprising a plurality of the spin stands, wherein the spin axes of adjacent substrate holders on adjacent two spin stands are connected to each other.

Images