CN215103385U

CN215103385U - Closed cavity with partition board

Info

Publication number: CN215103385U
Application number: CN202121480173.XU
Authority: CN
Inventors: 王飞; 罗兵
Original assignee: Shanghai Micro Electronics Equipment Co Ltd
Current assignee: Shanghai Micro Electronics Equipment Co Ltd
Priority date: 2021-06-30
Filing date: 2021-06-30
Publication date: 2021-12-10
Anticipated expiration: 2031-06-30

Abstract

The application discloses take airtight cavity of baffle. The closed cavity comprises: the device comprises a device main body, wherein a cavity is arranged in the device main body and is used for filling nitrogen so as to carry out laser annealing; the device main body comprises two side plates which are oppositely arranged, wherein one side plate is provided with an air inlet, and the other side plate is provided with an air outlet; the baffle is arranged in the cavity, the baffle divides the cavity into an upper cavity and a lower cavity, the air inlet is used for injecting nitrogen into the upper cavity, and the air outlet is used for discharging the nitrogen in the upper cavity. This application can be quick to filling with nitrogen gas in the cavity that carries out laser annealing, and can reduce the use amount of nitrogen gas, ensure that nitrogen gas is even steady to carrying in the cavity.

Description

Closed cavity with partition board

Technical Field

The utility model relates to a laser annealing equipment technical field especially relates to an airtight cavity of taking baffle.

Background

Laser annealing is a processing method for annealing a material using laser light. The laser annealing is generally performed in a laser annealing device, a closed cavity is arranged in a device body of the laser annealing device, and the laser annealing is performed in the closed cavity. In order to protect the workpiece from being oxidized, nitrogen gas needs to be filled into the cavity, and the workpiece is protected by the nitrogen gas. In the prior art, the cavity for laser annealing is large, the using amount of nitrogen is large, and the time required for meeting the requirement that the oxygen concentration in the cavity reaches the index of less than 1PPM is long, namely the time for filling nitrogen is long.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a take airtight cavity of baffle to nitrogen gas use amount is great when carrying out laser annealing among the solution prior art, and fills the longer problem of time of nitrogen gas.

To achieve the purpose, the utility model adopts the following technical proposal:

a sealed chamber with a partition, comprising:

the device comprises a device main body, wherein a cavity is arranged in the device main body and is used for filling nitrogen so as to carry out laser annealing; the device main body comprises two side plates which are oppositely arranged, wherein one side plate is provided with an air inlet, and the other side plate is provided with an air outlet;

the partition board is arranged in the cavity and divides the cavity into an upper cavity and a lower cavity, the air inlet is used for injecting nitrogen into the upper cavity, and the air outlet is used for discharging the nitrogen in the upper cavity.

As an alternative to the above-mentioned sealed chamber with a partition, the sealed chamber further includes:

the flow-equalizing cavity is arranged between the air inlet and the upper cavity and between the upper cavity and the air outlet; the flow homogenizing cavities are arranged in sequence along the flowing direction of the nitrogen flow.

As an alternative of the closed cavity with the partition plate, the adjacent flow equalizing cavities are separated by the partition plate, the partition plate is provided with air holes, the number of the air holes (1123) on each partition plate is inconsistent, and the number of the air holes (1123) on the partition plate is gradually increased from outside to inside.

As an alternative of the above-mentioned sealed cavity with the partition, the number of the flow-equalizing cavities is three, and the flow-equalizing cavities are respectively a first flow-equalizing cavity, a second flow-equalizing cavity and a third flow-equalizing cavity which are sequentially arranged from outside to inside.

As an alternative of the above sealed cavity with the partition, a first partition plate is arranged between the first uniform flow cavity and the second uniform flow cavity, a second partition plate is arranged between the second uniform flow cavity and the third uniform flow cavity, and a third partition plate is arranged between the third uniform flow cavity and the upper cavity;

the number of the air holes on the first isolation plate is 15-25, the number of the air holes on the second isolation plate is 35-45, and the number of the air holes on the third isolation plate is 300-380.

As an alternative to the above-mentioned sealed chamber with partition, the number of the air holes in the first isolation plate is 20, the number of the air holes in the second isolation plate is 40, and the number of the air holes in the third isolation plate is 340.

As an alternative to the above-described sealed chamber with the partition, the partition is integrally formed with the side plate so that the first uniform flow chamber, the second uniform flow chamber, and the third uniform flow chamber are formed in the side plate.

As an alternative to the above-mentioned sealed cavity with the partition, the first uniform flow cavity is located below the second uniform flow cavity and the third uniform flow cavity.

As an alternative to the above-mentioned sealed cavity with the partition, the second uniform flow cavity and the third uniform flow cavity are stacked in the thickness direction of the side plate.

As an alternative to the above-mentioned sealed cavity with a partition, the number of the air inlets and the number of the air outlets are two, and the two air inlets and the two air outlets are distributed at intervals along the length direction of the side plate.

The utility model discloses an useful part lies in: the partition plate is arranged in the cavity of the device main body, the cavity is divided into an upper cavity and a lower cavity, laser annealing operation is carried out in the upper cavity, the lower cavity is used for carrying out other operations, the space for carrying out laser annealing operation is reduced due to the partition plate, the using amount of nitrogen is reduced, meanwhile, the time for reaching the index that the oxygen concentration is less than 1PPM in the upper cavity is short, and the time for filling the nitrogen is shortened.

Drawings

FIG. 1 is a schematic structural view of an embodiment of a middle sealed chamber according to the present invention;

FIG. 2 is a schematic side view of an embodiment of the sealed chamber of the present invention;

fig. 3 is a schematic cross-sectional structure diagram of the middle side plate of the present invention.

In the figure:

100. sealing the cavity; 110. a device main body; 111. a cavity; 1111. a partition plate; 112. a side plate; 1121. an air inlet; 1123. air holes; 113. a flow homogenizing cavity; 1131. a first flow homogenizing chamber; 1132. a second flow homogenizing cavity; 1133. a third flow homogenizing cavity; 114. a first separator plate; 115. a second separator plate; 116. and a third separator plate.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.

Referring to fig. 1 and 2, the present invention provides a sealed chamber with a partition, as shown in fig. 1 and 2, the sealed chamber 100 includes a device main body 110, a chamber 111 is disposed in the device main body 110, and the chamber 111 is a sealed chamber for filling nitrogen gas for laser annealing. It should be noted that other processing operations besides laser annealing may be performed in the cavity 111. The cavity 111 is internally provided with the partition board 1111, the partition board 1111 divides the cavity 111 into an upper cavity and a lower cavity, the laser annealing operation can be performed in the upper cavity, and the lower cavity is used for performing other process operations, so that the space of the cavity for performing the laser annealing operation is reduced, the use amount of nitrogen is reduced, the time for reaching the index that the oxygen concentration is less than 1PPM in the upper cavity is short, the time for filling nitrogen is shortened, and the efficiency of laser annealing is improved.

As shown in fig. 1, the device main body 110 includes two side plates 112 disposed opposite to each other, wherein one side plate 112 is provided with an air inlet 1121, the other side plate 112 is provided with an air outlet, the air inlet 1121 is used for injecting nitrogen gas into the upper cavity, and the air outlet is used for discharging nitrogen gas from the upper cavity. The provision of the air inlet 1121 and the air outlet on the two opposite side plates 112, respectively, facilitates the arrangement of the entire structure and the arrangement of the air pipes.

In addition, the utility model discloses a closed cavity 100 still includes even flow cavity 113, and even flow cavity 113 sets up between air inlet 1121 and the last cavity to and set up between last cavity and gas vent. When air is fed, nitrogen enters from the air inlet 1121, passes through the uniform flow cavity 113 on the air inlet side and then enters the upper cavity; during the exhaust, the nitrogen in the upper chamber passes through the uniform flow chamber 113 on the exhaust side and is exhausted from the exhaust port. The even flow cavity 113 is arranged, so that nitrogen can flow into and out of the upper cavity more uniformly and gently, the concentration of the nitrogen in the upper cavity is more uniform, the use amount of the nitrogen can be reduced, and the time required by filling the nitrogen can be shortened.

In one embodiment, there are a plurality of flow equalizing chambers 113, and the plurality of flow equalizing chambers 113 are sequentially disposed along the flowing direction of the nitrogen gas flow. The uniform flow cavities 113 are arranged to enable nitrogen to sequentially flow through the uniform flow cavities 113, so that the uniform flow effect can be improved.

The adjacent uniform flow cavities 113 are separated by the partition plate, the partition plate is provided with air holes 1123, the number of the air holes 1123 on each partition plate is inconsistent, and the number of the air holes 1123 on the partition plate is gradually increased in the direction from outside to inside. Specifically, referring to fig. 3, in an embodiment, there are three uniform flow cavities 113, which are respectively a first uniform flow cavity 1131, a second uniform flow cavity 1132 and a third uniform flow cavity 1133 sequentially arranged from outside to inside. As shown in fig. 3, the inlet side is taken as an example from outside to inside, and the direction from the direction far away from the upper cavity to the direction close to the upper cavity is taken along the flowing direction of the nitrogen. The uniform flow cavity 113 and the partition plate structure on the exhaust side are arranged symmetrically with respect to the intake side. As shown in fig. 3, a first separation plate 114 is disposed between the first flow equalizing chamber 1131 and the second flow equalizing chamber 1132, a second separation plate 115 is disposed between the second flow equalizing chamber 1132 and the third flow equalizing chamber 1133, and a third separation plate 116 is disposed between the third flow equalizing chamber 1133 and the upper chamber. The number of the air holes 1123 on the first isolation plate 114 is 15-25, the number of the air holes 1123 on the second isolation plate 115 is 35-45, and the number of the air holes 1123 on the third isolation plate 116 is 300-380. The number of the air holes 1123 is increased in sequence from the first isolation plate 114 to the second isolation plate 115 to the third isolation plate 116 to form a static pressure chamber, the number of the air holes 1123 on the third isolation plate 116 is the largest, so that the air holes 1123 can be distributed on the third isolation plate 116, nitrogen can be uniformly input from all parts of the upper chamber body, the inflation efficiency is improved, and the nitrogen consumption is reduced. The three uniform flow cavities 113 are arranged, so that the uniform flow effect is ensured, the number of the uniform flow cavities 113 is not too many, the overall size is reduced, the structure is simplified, and the cost is controlled.

In one embodiment, the number of the air holes 1123 on the first isolation plate 114 is 20, the number of the air holes 1123 on the second isolation plate 115 is 40, and the number of the air holes 1123 on the third isolation plate 116 is 340.

Referring to fig. 3, the separating plate is integrally formed with the side plate 112, such that the first flow equalizing cavity 1131, the second flow equalizing cavity 1132 and the third flow equalizing cavity 1133 are formed in the side plate 112. That is, the first partition plate 114, the second partition plate 115 and the third partition plate 116 are formed in the side plate 112, so that the first uniform flow cavity 1131, the second uniform flow cavity 1132 and the third uniform flow cavity 1133 are formed in the side plate 112. Integrating the partition plates into the side plates 112 reduces the overall size and weight of the device.

Further, as shown in fig. 3, the first distribution cavity 1131 is located below the second distribution cavity 1132 and the third distribution cavity 1133. The air inlet 1121 is communicated with the first flow equalizing cavity 1131, as shown in fig. 3, nitrogen enters the first flow equalizing cavity 1131 from the air inlet 1121, then flows upwards into the second flow equalizing cavity 1132, then flows into the third flow equalizing cavity 1133, and then enters the upper cavity. The first flow equalizing cavity 1131 is arranged below the second flow equalizing cavity 1132 and the third flow equalizing cavity 1133, so that the space in the height direction of the side plate 112 can be fully utilized, and the thickness of the side plate 112 can be reduced.

With reference to fig. 3, the second uniform flow cavity 1132 and the third uniform flow cavity 1133 are stacked along the thickness direction of the side plate 112, so that the arrangement of the first uniform flow cavity 1131, the second uniform flow cavity 1132 and the third uniform flow cavity 1133 is completed without increasing the original thickness of the side plate 112, and the arrangement of the whole structure is optimized.

As shown in fig. 3, two air inlets 1121 and two air outlets are provided, and the two air inlets 1121 and the two air outlets are spaced apart from each other along the length direction of the side plate 112. The two air inlets 1121 and the two air outlets are arranged to increase air inflow and air discharge respectively, and efficiency is improved.

In the description of the present invention, unless expressly stated or limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, e.g., as meaning permanently connected, detachably connected, or integral to one another; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

In the present disclosure, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact between the first and second features, or may comprise contact between the first and second features not directly.

In the description of the present embodiment, the terms "upper", "lower", "right", etc. are used in an orientation or positional relationship based on that shown in the drawings only for convenience of description and simplicity of operation, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used only for descriptive purposes and are not intended to have a special meaning.

It is obvious that the above embodiments of the present invention are only examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Numerous obvious variations, rearrangements and substitutions will now occur to those skilled in the art without departing from the scope of the invention. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. The utility model provides a take airtight cavity of baffle which characterized in that includes:

the device comprises a device main body (110), wherein a cavity (111) is arranged in the device main body (110), and the cavity (111) is used for filling nitrogen to perform laser annealing; the device main body (110) comprises two side plates (112) which are oppositely arranged, wherein one side plate (112) is provided with an air inlet (1121), and the other side plate (112) is provided with an air outlet;

the baffle (1111) is arranged in the cavity (111), the baffle (1111) divides the cavity (111) into an upper cavity and a lower cavity, the air inlet (1121) is used for injecting nitrogen into the upper cavity, and the air outlet is used for discharging the nitrogen in the upper cavity.

2. The sealed chamber with a partition according to claim 1, further comprising:

a uniform flow cavity (113) arranged between the air inlet (1121) and the upper cavity and between the upper cavity and the air outlet; the flow homogenizing cavities (113) are arranged in a plurality, and the flow homogenizing cavities (113) are sequentially arranged along the flowing direction of the nitrogen flow.

3. The sealed chamber with partition of claim 2, wherein adjacent uniform flow cavities (113) are separated by partition plates, each partition plate is provided with air holes (1123), the number of the air holes (1123) on each partition plate is not uniform, and the number of the air holes (1123) on the partition plate is gradually increased from outside to inside.

4. The sealed chamber with the partition according to claim 3, wherein the number of the flow equalizing chambers (113) is three, and the three flow equalizing chambers are respectively a first flow equalizing chamber (1131), a second flow equalizing chamber (1132) and a third flow equalizing chamber (1133) which are arranged from outside to inside in sequence.

5. The sealed chamber with the partition according to claim 4, wherein a first isolation plate (114) is arranged between the first flow equalizing chamber (1131) and the second flow equalizing chamber (1132), a second isolation plate (115) is arranged between the second flow equalizing chamber (1132) and the third flow equalizing chamber (1133), and a third isolation plate (116) is arranged between the third flow equalizing chamber (1133) and the upper chamber;

the number of the air holes (1123) on the first isolation plate (114) is 15-25, the number of the air holes (1123) on the second isolation plate (115) is 35-45, and the number of the air holes (1123) on the third isolation plate (116) is 300-380.

6. The sealed chamber with partition according to claim 5, characterized in that the number of said air holes (1123) on said first partition plate (114) is 20, the number of said air holes (1123) on said second partition plate (115) is 40, and the number of said air holes (1123) on said third partition plate (116) is 340.

7. The baffled closed chamber of claim 4, wherein the baffle is integrally formed with the side plate (112) such that the first flow homogenizing chamber (1131), the second flow homogenizing chamber (1132) and the third flow homogenizing chamber (1133) are formed within the side plate (112).

8. The baffled closed chamber of claim 7, wherein the first flow equalization chamber (1131) is located below the second flow equalization chamber (1132) and the third flow equalization chamber (1133).

9. The sealed chamber with partition according to claim 8, wherein the second flow equalization chamber (1132) and the third flow equalization chamber (1133) are stacked in a thickness direction of the side plate (112).

10. The sealed chamber with partition according to any of claims 1 to 9, wherein there are two air inlets (1121) and two air outlets, and the two air inlets (1121) and the two air outlets are spaced apart along the length direction of the side plate (112).