CN215094773U

CN215094773U - Cutting device of quartz substrate for MEMS (micro-electromechanical systems) technology

Info

Publication number: CN215094773U
Application number: CN202120811669.4U
Authority: CN
Inventors: 窦广彬; 董一德; 郑嵩; 夏良军
Original assignee: Nanjing Core Optoelectronic Research Institute Co ltd; Southeast University
Current assignee: Nanjing Core Optoelectronic Research Institute Co ltd; Southeast University
Priority date: 2021-04-20
Filing date: 2021-04-20
Publication date: 2021-12-10
Anticipated expiration: 2031-04-20

Abstract

The utility model discloses a MEMS technique is with quartz substrate's cutting device, comprises an operation bench, be equipped with the motor on the mounting panel, motor output end fixedly connected with pivot, fixedly connected with cutting blade in the pivot, operation panel bottom surface fixedly connected with dust collection box, it has the dwang to rotate the interlude on the dust collection box, be equipped with drive mechanism between pivot and the dwang, be equipped with a plurality of flabellum on the dwang, be equipped with dust fall mechanism on the dust collection box, sliding connection has the dirty box of collection, two in the dust collection box common sliding connection has the board of placing on the spout, it is equipped with a plurality of fixture to place the symmetry on the board. The utility model discloses starter motor, cutting blade rotate, cut the quartz substrate, and in the time of pivot pivoted, the flabellum rotates, carries out convulsions to the dust collection box in, and the dust that produces gets into the dust collection box together with the air current in, and the dust that gets into in the dust collection box is adsorbed by water smoke and descends to the collection dirt box in afterwards.

Description

Cutting device of quartz substrate for MEMS (micro-electromechanical systems) technology

Technical Field

The utility model relates to a quartz substrate processing technology field especially relates to a cutting device of quartz substrate for MEMS technique.

Background

The quartz plate is usually prepared by smelting quartz, cutting and grinding, and the content of silicon dioxide can reach more than 99.99%. The hardness is Mohs seven grade, and the material has the characteristics of high temperature resistance, low thermal expansion coefficient, good thermal shock resistance, good electrical insulation performance and the like. Usually colorless and transparent, and has a visible light transmittance of 85% or more. Micro-electro-mechanical systems (MEMS) technology utilizes IC processing technology to achieve micro-nano scale processing, which has inherent advantages in processing precision, processing means, EDA (computer aided design), and the like, so that the combination of quartz crystal technology and MEMS technology is a necessary trend.

In to quartz substrate course of working, need cut quartz substrate to make things convenient for subsequent production and processing, then current cutting device needs the staff to manually press and cuts, has certain potential safety hazard, and takes place the skew easily during the cutting, and cutting accuracy is lower, can produce a large amount of dusts during the cutting simultaneously, makes operational environment suffer the pollution, and inhales for a long time and is unfavorable for staff's physical and mental health.

SUMMERY OF THE UTILITY MODEL

The utility model aims at solving among the prior art "current cutting device needs the staff to manually press and cuts, has certain potential safety hazard, and takes place the skew easily during the cutting, and cutting accuracy is lower, can produce a large amount of dusts during the cutting simultaneously for operational environment suffers the pollution, and inhales the defect that is unfavorable for staff's physical and mental health" for a long time, thereby provides a MEMS technical quartz substrate's cutting device.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

a cutting device of a quartz substrate for MEMS technology comprises an operation table, wherein a plurality of supporting legs are symmetrically and fixedly connected to the bottom surface of the operation table, a cutting through hole is formed in the operation table, a mounting plate is fixedly connected to the operation table, a motor is arranged on the mounting plate, a rotating shaft is fixedly connected to the output end of the motor, the rotating shaft is rotatably inserted into the operation table, the rotating shaft is rotatably connected to the inner wall of the cutting through hole on the side away from the motor, a cutting blade is fixedly connected to the rotating shaft, a dust collection box is fixedly connected to the bottom surface of the operation table, a rotating rod is rotatably inserted into the dust collection box, a transmission mechanism is arranged between the rotating shaft and the rotating rod, a plurality of fan blades are arranged on the rotating rod, a plurality of air outlets are formed in the dust collection box, a dust falling mechanism is arranged on the dust collection box, a dirt collection box is slidably connected with a dirt collection box, and a handle is fixedly connected to the dirt collection box, the operating table is symmetrically provided with sliding grooves, the two sliding grooves are connected with a placing plate in a sliding mode, and the placing plate is symmetrically provided with a plurality of clamping mechanisms.

Preferably, drive mechanism includes the action wheel, follows driving wheel and drive belt, action wheel fixed connection is in the pivot, follow driving wheel fixed connection on the dwang, be equipped with the connection opening on the mounting panel, the drive belt passes the connection opening setting at the action wheel and from between the driving wheel.

Preferably, fixture includes splint and bolt, place and seted up the standing groove on the board, splint sliding connection is on the diapire in the standing groove, bolt thread alternates on placing the board, the bolt rotation is connected on splint.

Preferably, the dust fall mechanism includes inlet tube and atomizer, the inlet tube is fixed to be alternates on the dust collection box, the atomizer sets up and is close to dust collection box one end at the inlet tube and serve.

Preferably, a baffle is fixedly connected in the dust collection box, and the baffle and the inner wall of the dust collection box close to one side of the driven wheel are arranged in a forty-five degree inclined manner.

Preferably, the operating platform is fixedly connected with a protective cover, and the protective cover is provided with a rectangular opening.

Compared with the prior art, the beneficial effects of the utility model are that:

1. during the use, the user can place the quartz substrate who treats the cutting in the standing groove, rotates the bolt afterwards for the bolt inwardly movable drives splint inwardly movable, treats the quartz substrate of cutting and carries out the centre gripping, promotes afterwards to place the board cut can, need not the user and manually presses, has eliminated the potential safety hazard, and has avoided the phenomenon that the quartz substrate takes place the skew when the cutting, has guaranteed the device's cutting accuracy.

2. When the water-saving dust collection box is used, the water inlet pipe is connected with an external pipeline, so that a water source is sprayed out through the atomizing nozzle, the motor is started at the same time, the rotating shaft rotates to drive the cutting blade to rotate, the quartz substrate is cut, the rotating shaft rotates to drive the driving wheel to rotate, the driven wheel rotates through the action of the driving belt to drive the rotating rod to rotate, the fan blade rotates to exhaust air in the dust collection box, negative pressure is formed in the dust collection box, air flow enters the dust collection box through the cutting through opening, when the cutting blade cuts the quartz substrate, generated dust and the air flow enter the dust collection box together, the dust entering the dust collection box is adsorbed by water mist and then falls into the dust collection box, after the use is finished, a user pulls the handle to drive the dust collection box to move outwards to clean dirt in the dust collection box, and the condition that the working environment is polluted is avoided, meanwhile, the phenomenon that the physical and psychological health is influenced by long-term inhalation of workers is avoided.

Drawings

Fig. 1 is a front view of a cutting apparatus for a quartz substrate for MEMS technology according to the present invention;

fig. 2 is a schematic cross-sectional structural view of a cutting apparatus for a quartz substrate for MEMS technology according to the present invention;

fig. 3 is a side view of fig. 1.

In the figure: 1 operation panel, 2 cutting openings, 3 mounting panels, 4 motors, 5 pivots, 6 cutting blades, 7 dust-collecting boxes, 8 dwang, 9 flabellum, 10 gas outlets, 11 action wheels, 12 follow driving wheels, 13 drive belts, 14 baffles, 15 inlet tubes, 16 atomizer, 17 dirty box, 18 handles, 19 protection covers, 20 rectangle openings, 21 spout, 22 place board, 23 standing groove, 24 splint, 25 bolt.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.

In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.

Referring to fig. 1-3, a cutting device for a quartz substrate for MEMS technology, comprising an operation table 1, wherein a plurality of supporting legs are symmetrically and fixedly connected to the bottom surface of the operation table 1, a cutting through opening 2 is formed on the operation table 1, a mounting plate 3 is fixedly connected to the operation table 1, a motor 4 is arranged on the mounting plate 3, a rotating shaft 5 is fixedly connected to the output end of the motor 4, the rotating shaft 5 is rotatably inserted into the operation table 1, the rotating shaft 5 is rotatably connected to the inner wall of the cutting through opening 2 on the side away from the motor 4, a cutting blade 6 is fixedly connected to the rotating shaft 5, a dust collection box 7 is fixedly connected to the bottom surface of the operation table 1, a rotating rod 8 is rotatably inserted into the dust collection box 7, a transmission mechanism is arranged between the rotating shaft 5 and the rotating rod 8, the transmission mechanism comprises a driving wheel 11, a driven wheel 12 and a transmission belt 13, the driving wheel 11 is fixedly connected to the rotating shaft 5, the driven wheel 12 is fixedly connected to the rotating rod 8, the mounting plate 3 is provided with a connecting opening, a transmission belt 13 passes through the connecting opening and is arranged between the driving wheel 11 and the driven wheel 12, when the rotating shaft 5 rotates, the driving wheel 11 can be driven to rotate, the driven wheel 12 rotates through the action of the transmission belt 13, so as to drive the rotating rod 8 to rotate, the rotating rod 8 is provided with a plurality of fan blades 9, the dust collection box 7 is provided with a plurality of air outlets 10, the dust collection box 7 is provided with a dust falling mechanism, the dust falling mechanism comprises a water inlet pipe 15 and an atomizing nozzle 16, the water inlet pipe 15 is fixedly inserted on the dust collection box 7, the atomizing nozzle 16 is arranged at one end of the water inlet pipe 15 close to the dust collection box 7, when in use, a user can connect the water inlet pipe 15 with an external pipeline for water communication, so that a water source is sprayed out through the atomizing nozzle 16, dust entering the dust collection box 7 is adsorbed, and dust generated by cutting is prevented from flying in the dust collection box 7 and is discharged to the air outlets 10 along with the external air flow, fixedly connected with baffle 14 in the dust collection box 7, baffle 14 and dust collection box 7 are close to follow driving wheel 12 one side inner wall and are the slope setting of forty-five degrees, avoid being stained with the water smoke of dust along with the air current adsorb to flabellum 9 on, and sliding connection has the dirty box 17 of collection in the dust collection box 7, fixedly connected with handle 18 on the dirty box 17 of collection.

The symmetry is equipped with spout 21 on the operation panel 1, common sliding connection has places board 22 on two spout 21, place the symmetry on board 22 and be equipped with a plurality of fixture, fixture includes splint 24 and bolt 25, place and seted up standing groove 23 on the board 22, splint 24 sliding connection is on diapire in standing groove 23, bolt 25 screw thread alternates on placing board 22, bolt 25 rotates to be connected on splint 24, make when the user uses, can place the quartz substrate in standing groove 23, rotate bolt 25 afterwards, make splint 24 inwards move, carry out the centre gripping to the quartz substrate, the person of facilitating the use operates, fixedly connected with protection casing 19 on the operation panel 1, rectangular opening 20 has been seted up on protection casing 19, play the guard action through protection casing 19, avoid touching cutting blade 6 during operation, the security of the device has been improved.

In the utility model, when the user uses the device, the user can place the quartz substrate to be cut in the placing groove 23, then the bolt 25 is rotated to move the bolt 25 inwards to drive the clamping plate 24 to move inwards to clamp the quartz substrate to be cut, then the placing plate 22 is pushed to cut, when the device is used, the water inlet pipe 15 is connected with the external pipeline to spray out the water source through the atomizing nozzle 16, the motor 4 is started simultaneously to rotate the rotating shaft 5 to drive the cutting blade 6 to rotate to cut the quartz substrate, when the rotating shaft 5 rotates, the driving wheel 11 is driven to rotate, the driven wheel 12 is driven to rotate through the action of the driving belt 13 to drive the rotating rod 8 to rotate, the fan blade 9 rotates to exhaust air in the dust collection box 7 to form negative pressure in the dust collection box 7, the air flow enters the dust collection box 7 through the cutting through hole 2, when cutting blade 6 cuts the quartz substrate, the dust that produces gets into dust collection box 7 with the air current together, and the dust that gets into in the dust collection box 7 is adsorbed by water smoke and descends to the dirty box 17 of collection afterwards in, and the use is accomplished the back, and user pulling handle 18 drives the dirty box 17 of collection and outwards moves, clears up the filth in the dirty box 17 of collection.

The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.

Claims

1. The utility model provides a cutting device of quartz substrate for MEMS technique, includes operation panel (1), its characterized in that, operation panel (1) bottom surface symmetry fixedly connected with a plurality of supporting legs, seted up cutting opening (2) on operation panel (1), fixedly connected with mounting panel (3) on operation panel (1), be equipped with motor (4) on mounting panel (3), motor (4) output end fixedly connected with pivot (5), pivot (5) rotate and alternate on operation panel (1), pivot (5) rotate to be connected on cutting opening (2) keep away from motor (4) one side inner wall, fixedly connected with cutting blade (6) on pivot (5), operation panel (1) bottom surface fixedly connected with dust collection box (7), it has dwang (8) to rotate to alternate on dust collection box (7), be equipped with drive mechanism between pivot (5) and dwang (8), be equipped with a plurality of flabellum (9) on dwang (8), a plurality of gas outlet (10) have been seted up on dust collection box (7), be equipped with dust fall mechanism on dust collection box (7), sliding connection has dirty box (17) of collection in dust collection box (7), fixedly connected with handle (18) are gone up in dirty box (17) of collection, the symmetry is equipped with spout (21) on operation panel (1), two common sliding connection has place board (22) on spout (21), it is equipped with a plurality of fixture to place the symmetry on board (22).

2. The cutting device of a quartz substrate for MEMS technology according to claim 1, characterized in that, the transmission mechanism comprises a driving wheel (11), a driven wheel (12) and a transmission belt (13), the driving wheel (11) is fixedly connected to the rotating shaft (5), the driven wheel (12) is fixedly connected to the rotating rod (8), the mounting plate (3) is provided with a connecting opening, and the transmission belt (13) passes through the connecting opening and is arranged between the driving wheel (11) and the driven wheel (12).

3. The cutting device for the quartz substrate for the MEMS technology according to claim 1, wherein the clamping mechanism comprises a clamping plate (24) and a bolt (25), the placing plate (22) is provided with a placing groove (23), the clamping plate (24) is slidably connected to the inner bottom wall of the placing groove (23), the bolt (25) is threaded on the placing plate (22), and the bolt (25) is rotatably connected to the clamping plate (24).

4. The cutting device for the quartz substrate for the MEMS technology as recited in claim 1, wherein the dust falling mechanism comprises a water inlet pipe (15) and an atomizing nozzle (16), the water inlet pipe (15) is fixedly inserted on the dust collection box (7), and the atomizing nozzle (16) is arranged at one end of the water inlet pipe (15) close to the dust collection box (7).

5. The cutting device for the quartz substrate for the MEMS technology as recited in claim 1, wherein a baffle (14) is fixedly connected in the dust box (7), and the baffle (14) and the inner wall of the dust box (7) at the side close to the driven wheel (12) are arranged in a forty-five degree inclined manner.

6. The cutting device of the quartz substrate for the MEMS technology is characterized in that a protective cover (19) is fixedly connected to the operating platform (1), and a rectangular opening (20) is formed in the protective cover (19).