CN215069802U - High-strength self-heating getter - Google Patents
High-strength self-heating getter Download PDFInfo
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- CN215069802U CN215069802U CN202120811015.1U CN202120811015U CN215069802U CN 215069802 U CN215069802 U CN 215069802U CN 202120811015 U CN202120811015 U CN 202120811015U CN 215069802 U CN215069802 U CN 215069802U
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Abstract
A high-strength self-heating getter comprises a heating wire, a reinforced insulating metal tube, a getter metal and a porous metal reinforcing layer; the outer side of the reinforced insulating metal pipe is manufactured with air suction metal through pressing and sintering, and the porous metal reinforcing layer is arranged outside the surface of the air suction metal; the method is characterized in that: the reinforced insulating metal pipe is arranged in the middle of the heating wire, penetrates through the air suction metal and extends out of two ends of the porous metal reinforcing layer. The utility model adds a reinforced insulated metal pipe which penetrates the air suction metal and extends out of the two ends outside the heating wire, thus not only having the self-heating activation function, but also avoiding the damage of the root of the heating wire in the vibration impact; the porous metal reinforcing layer on the surface does not damage the air suction performance and has high strength, and the phenomena of cracking, damage and powder falling in the vibration impact of the getter are completely avoided.
Description
Technical Field
The utility model relates to a sensor components and parts field of making, in particular to high strength self-heating getter.
Background
The getter is a functional material which is applied to vacuum, ultra-high vacuum and extremely high vacuum environment and effectively absorbs active gases (H2, CO, O2, H2O, CO2 and the like) through physical and chemical actions.
The getter is commonly used in three activation methods, namely, the getter is heated by heat radiation baked outside, the getter is inductively heated by a high-frequency induction coil, and a heater is embedded in the getter and is heated after being electrified and heated. Thermal radiation and induction heating are limited by device packaging materials, processes, etc., and are not available in many cases, and can only be activated using a third method.
The general preparation method is as shown in figure 2, after coating aluminum oxide on the surface of a heating wire of tungsten, molybdenum, nickel chromium and the like, forming porcelain at high temperature, and then sintering a layer of getter metal outside a heater. This structure and the preparation method have the fatal disadvantages as follows:
1. during assembly, the getter is fixed by only two hot wires, and when violent vibration or impact occurs, the wire feet at the root of the heater are easy to bend and extrude the getter metal, so that powder falling occurs at the root of the heating wire;
2. in order to avoid brittle fracture caused by recrystallization of the heating wire when the alumina is porcelainized, the porcelainizing temperature of the alumina insulating layer is low, and porcelainizing is not thorough, so that the alumina exposed outside the getter is easy to peel off after being impacted and vibrated;
3. in order to avoid the damage of the insulating coating on the surface of the heating wire by external force, the air suction alloy can be sintered only by adopting a loose sintering mode or a sintering mode after coating by slurry, so that the firmness of the air suction alloy is insufficient, and air suction alloy particles fall off on the surface when the air suction alloy is subjected to impact vibration. And the getter particles in the device can bring destructive results when falling off, such as an infrared imager chip, the getter particles can cover pixels to cause imaging defects, and the product is unqualified. In devices such as vacuum high voltage switches, the getter particles cause internal sparking and device failure due to the very high voltage between internal electrodes.
In order to improve the reliability of the getter with the heater, chinese patent 201820194297.3 proposes another new preparation method, and the product structure is shown in fig. 3. The preparation method comprises the steps of firstly manufacturing a heater composed of heating wires such as tungsten and molybdenum and insulating materials, and welding two sections of metal sleeves at positions of two ends of the heating element, which are ready to penetrate out of the air suction metal, to form an assembly; and sintering a layer of getter metal on the assembly, and sintering a metal reinforcing layer on the surface of the getter metal. Although the preparation method solves the problem that the getter alloy at the root of the getter heater is easy to fall off, the preparation of the insulating layer can not be carried out at high temperature, the porcelain is not enough, and the getter alloy is easy to crack and fall off when bearing impact vibration; and the pressure can not be too large to avoid damaging the insulating layer during pressing, so the firmness of the getter alloy on the surface is still not very high, and although the defects of the common preparation method are partially avoided, the new problems of difficult welding of the metal sleeve and the insulating layer, complex forming and positioning of the getter metal and the like are caused.
Disclosure of Invention
The utility model aims at providing a high strength is from hot type getter of cracking, destruction, the powder falling phenomenon in high strength, the vibration of avoiding the getter to rush.
The purpose of the utility model is realized like this: a high-strength self-heating getter comprises a heating wire, a reinforced insulating metal tube, a getter metal and a porous metal reinforcing layer; the outer side of the reinforced insulating metal pipe is manufactured with air suction metal through pressing and sintering, and the porous metal reinforcing layer is arranged outside the surface of the air suction metal; the reinforced insulating metal pipe is arranged in the middle of the heating wire, penetrates through the air suction metal and extends out of two ends of the porous metal reinforcing layer.
Preferably, an insulating layer is manufactured outside the reinforced insulating metal pipe, and the insulating layer is coated and sintered by adopting ceramic slurry.
Preferably, the reinforcing insulated metal pipe and the heating wire are fixed by welding.
Preferably, the electrical resistivity of the reinforced insulated metal tube is greater than the electrical resistivity of the heating wire.
Preferably, the heating wire is made of metal materials such as tungsten, molybdenum, tantalum, nichrome, iron-chromium-aluminum alloy and the like.
Preferably, the reinforced insulated metal tube is made of high resistivity materials such as stainless steel, nickel-chromium alloy, iron-chromium-aluminum alloy, titanium or titanium alloy, zirconium or zirconium alloy, ceramic tube, quartz tube and the like.
Preferably, the insulating layer can also be manufactured by physical vapor deposition, chemical vapor deposition, electrophoretic deposition and the like.
Preferably, the getter metal is an alloy consisting of one or more of titanium, zirconium, yttrium; or a multi-component alloy formed by the alloy and rare earth elements or transition metals.
Preferably, the porous metal reinforcing layer is formed by mixing one or more metal powders of iron, aluminum, copper, nickel, titanium, zirconium, hafnium and chromium or sintering one or more alloy powders of the metals.
Compared with the prior art, the utility model discloses an useful part lies in:
1. the reinforcing insulating metal pipe penetrating through and extending out of the two ends of the air suction metal can prevent the heating wire from bending at the root connected with the getter when the getter bears vibration impact and extruding the air suction metal to cause falling off.
2. Through the optimization of the material of the reinforced insulating metal pipe, the ceramic pipe and the metal sleeve which are subjected to high-temperature porcelain forming in advance can avoid the problem that the traditional insulating porcelain layer breaks and falls off powder under the vibration impact. The adoption of the porous metal reinforcing layer can greatly enhance the surface strength of the air suction metal on the premise of hardly influencing the air suction performance, and avoid the problems of breakage, powder falling and the like when the air suction metal bears vibration impact.
3. By adopting the metal reinforcing layer alloy material, the preparation process of the porous metal reinforcing layer can be adjusted more flexibly.
Drawings
Fig. 1 is a schematic structural view of the present invention;
wherein, 1 heating wire, 2 reinforcing insulated metal pipe, 3 air suction metal, 4 porous metal reinforcing layer;
FIG. 2 is a schematic view of a conventional self-heating getter structure;
wherein, 1 heating wire, 2 gettering metal;
FIG. 3 is a structural view of a getter of the improved self-heating type proposed in patent No. 201820194297.3;
wherein, 1 heating wire, 2 air suction metal, 3 metal layer and 4 metal sleeve.
Detailed Description
In order to make the technical field of the invention better understand, the following detailed description of the invention is provided in conjunction with the accompanying drawings and the detailed description.
As shown in fig. 1, a high-strength self-heating getter comprises a heating wire, a reinforced insulating metal tube, a getter metal, and a porous metal reinforcing layer; the outer side of the reinforced insulating metal pipe is manufactured with air suction metal through pressing and sintering, and the porous metal reinforcing layer is arranged outside the surface of the air suction metal; the reinforced insulating metal pipe is arranged in the middle of the heating wire, penetrates through the air suction metal and extends out of two ends of the porous metal reinforcing layer.
An insulating layer is manufactured outside the reinforced insulating metal pipe, and the insulating layer is coated and sintered by adopting ceramic slurry.
The reinforced insulating metal pipe and the heating wire are fixed by welding.
The electrical resistivity of the reinforced insulated metal pipe is greater than that of the heating wire.
The heating wire is made of metal materials such as tungsten, molybdenum, tantalum, nickel-chromium alloy, iron-chromium-aluminum alloy and the like.
The reinforced insulated metal tube is made of high-resistivity materials such as stainless steel, nickel-chromium alloy, iron-chromium-aluminum alloy, titanium or titanium alloy, zirconium or zirconium alloy, ceramic tubes, quartz tubes and the like.
The insulating layer can also be made by physical vapor deposition, chemical vapor deposition, electrophoretic deposition and the like.
The getter metal is an alloy consisting of one or more of titanium, zirconium and yttrium; or a multi-component alloy formed by the alloy and rare earth elements or transition metals.
The porous metal reinforcing layer is formed by mixing one or more metal powders of metal iron, aluminum, copper, nickel, titanium, zirconium, hafnium and chromium or sintering one or more alloy powders of the metals.
As shown in FIG. 2, according to the first embodiment of the present invention, a stainless steel tube with a length of 9mm, an outer diameter of 0.5 and an inner diameter of 0.3 is sleeved on a molybdenum wire with a length of 18mm and a diameter of 0.2mm, and is extruded and fixed to form a heating member. And sintering the mixed powder of metal zirconium, titanium and zirconium-vanadium-iron alloy with the length of 7.8mm and the outer diameter of 1.8mm around the assembly by using a die after pressing, and sintering a layer of titanium, zirconium and nickel alloy powder porous metal protective layer on the surface. The getter was intact after vibration test and 500g impact test according to GJB548B, and no powder falling occurred under microscopic observation.
The principles and embodiments of the present invention are explained herein using specific examples, which are presented only to aid in understanding the method and its core concepts. It should be noted that, for those skilled in the art, without departing from the principle of the present invention, the present invention can be further modified and modified, and such modifications and modifications also fall within the protection scope of the appended claims.
Claims (4)
1. A high-strength self-heating getter comprises a heating wire, a reinforced insulating metal tube, a getter metal and a porous metal reinforcing layer; the outer side of the reinforced insulating metal pipe is manufactured with air suction metal through pressing and sintering, and the porous metal reinforcing layer is arranged outside the surface of the air suction metal; the method is characterized in that: the reinforced insulating metal pipe is arranged in the middle of the heating wire, penetrates through the air suction metal and extends out of two ends of the porous metal reinforcing layer.
2. A high strength self-heating getter according to claim 1, wherein: an insulating layer is manufactured outside the reinforced insulating metal pipe, and the insulating layer is coated and sintered by adopting ceramic slurry.
3. A high strength self-heating getter according to claim 1, wherein: the reinforced insulating metal pipe and the heating wire are fixed through welding.
4. A high strength self-heating getter according to claim 1, wherein: the electrical resistivity of the reinforced insulated metal pipe is greater than that of the heating wire.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120811015.1U CN215069802U (en) | 2021-04-20 | 2021-04-20 | High-strength self-heating getter |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120811015.1U CN215069802U (en) | 2021-04-20 | 2021-04-20 | High-strength self-heating getter |
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| Publication Number | Publication Date |
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| CN215069802U true CN215069802U (en) | 2021-12-07 |
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| CN202120811015.1U Active CN215069802U (en) | 2021-04-20 | 2021-04-20 | High-strength self-heating getter |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115185169A (en) * | 2022-09-07 | 2022-10-14 | 上海晶维材料科技有限公司 | Adsorption pump with anti-pulverization capability for space hydrogen atomic clock |
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2021
- 2021-04-20 CN CN202120811015.1U patent/CN215069802U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115185169A (en) * | 2022-09-07 | 2022-10-14 | 上海晶维材料科技有限公司 | Adsorption pump with anti-pulverization capability for space hydrogen atomic clock |
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