CN215045409U - Vacuumizing device and vacuum change-over valve thereof - Google Patents

Vacuumizing device and vacuum change-over valve thereof Download PDF

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Publication number
CN215045409U
CN215045409U CN202120355156.7U CN202120355156U CN215045409U CN 215045409 U CN215045409 U CN 215045409U CN 202120355156 U CN202120355156 U CN 202120355156U CN 215045409 U CN215045409 U CN 215045409U
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vacuum
sealing
seat
piston rod
seal
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CN202120355156.7U
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Inventor
陈先明
徐祖元
朱鸥飞
徐铭俊
曹家建
沈荣营
张景添
叶林
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Zhuhai Yueya Semiconductor Co ltd
Zhuhai Access Semiconductor Co Ltd
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Zhuhai Yueya Semiconductor Co ltd
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Abstract

The utility model discloses a vacuum change-over valve to a evacuating device with vacuum change-over valve is disclosed, wherein vacuum change-over valve includes: the vacuum pump comprises a conversion valve body, a vacuum channel is arranged in the conversion valve body, an air exhaust communication port is arranged at one end of the vacuum channel, a pump suction connection port is arranged on the conversion valve body, and the pump suction connection port is communicated with the inner side wall of the vacuum channel; the vacuumizing cylinder is arranged at the other end of the vacuum channel relative to the air exhaust communicating port, the vacuumizing cylinder comprises a piston rod arranged in the vacuum channel in a penetrating mode, a vacuum breaker is arranged at the end portion of the piston rod and abutted to the inner side wall of the vacuum channel, a first space and a second space which are separated from each other are formed in the vacuum channel, and a transition interval exists between the air exhaust communicating port and the pump suction connecting port. The utility model discloses improve the vacuum seal nature of vacuum valve, solved the defect that can not be repaired after traditional bellows damages, be convenient for maintain and restore.

Description

Vacuumizing device and vacuum change-over valve thereof
Technical Field
The utility model relates to a vacuum seal technical field, in particular to evacuating device and vacuum change-over valve thereof.
Background
The flow of gas in the vacuum system pipeline can be divided into turbulent flow, viscous flow, transitional flow, molecular flow and the like. The turbulence is the first transition period from atmospheric pressure to low pressure in the vacuum container, the existing vacuum pumping device directly pumps vacuum through the vacuum pump, because the suction of the vacuum pump is large, the whole pumping process is violent, so the dust in the vacuum container can be raised in a short time, the adsorption pollution to parts such as vacuum pipelines and valves is aggravated, finally, the sealing is poor or invalid, and the service life of the vacuum container and the connecting sealing pumping part is seriously shortened.
SUMMERY OF THE UTILITY MODEL
The utility model discloses aim at solving one of the technical problem that exists among the prior art at least. Therefore, the utility model provides a vacuum change-over valve can effectively reduce the influence of torrent raise dust to cavity and sealing member.
The utility model also provides an evacuating device who has above-mentioned vacuum change-over valve.
According to the utility model discloses a vacuum change-over valve of first aspect embodiment includes: the vacuum pump comprises a conversion valve body, a vacuum channel is arranged in the conversion valve body, an air exhaust communicating port is arranged at one end of the vacuum channel, a pump suction connecting port is arranged on the conversion valve body, and the pump suction connecting port is communicated with the inner side wall of the vacuum channel; the vacuumizing cylinder is arranged at the other end, opposite to the air exhaust communicating port, of the vacuum channel and comprises a piston rod penetrating through the piston rod in the vacuum channel, a vacuum breaker is arranged at the end of the piston rod and abutted against the inner side wall of the vacuum channel, a first space and a second space which are separated from each other are formed in the vacuum channel, a pump suction connecting port is connected with a transition interval which exists between the air exhaust communicating ports, the piston rod can drive the vacuum breaker to move back and forth in the vacuum channel, and the vacuum breaker is located in the first space after passing through the transition interval and is communicated with the pump suction connecting port.
According to the utility model discloses vacuum change-over valve has following beneficial effect at least: the utility model provides a low preparation, low maintenance cost and highly reliable's thick evacuation valve, utilize the evacuation cylinder as the transition part of bleeding, the vacuum force of transition to the vacuum pump from less evacuation power, can reduce the air torrent that instantaneous suction leads to, effectively avoid the raise dust phenomenon that the suction vacuum force leads to in the twinkling of an eye, the protection is by the evacuation container, evacuation pipeline and connecting piece, the vacuum seal nature of vacuum valve has been improved, can not repairable defect after solving traditional bellows damage, be convenient for maintain and restore.
According to some embodiments of the invention, the outer edge of the vacuum breaker is provided with a partition sealing ring in sealing abutment with the vacuum channel.
According to the utility model discloses a some embodiments, the bottom of conversion valve body is equipped with the vacuum seal dish, evacuation cylinder fixed connection installs on the vacuum seal dish, the vacuum seal dish with be equipped with teflon seal assembly between the evacuation cylinder.
According to some embodiments of the utility model, teflon seal assembly includes first seal receptacle and second seal receptacle, the sealed setting of first seal receptacle is in the vacuum seal dish with between the piston rod, be equipped with the connection end cover on the evacuation cylinder, the second seal receptacle is embedded connect the end and cover to sealed the setting is in the outside of piston rod.
According to the utility model discloses a some embodiments, first seal receptacle with be equipped with sealed butt between the second seal receptacle and be in the copper seal receptacle in the piston rod outside, the upper and lower both sides difference butt of copper seal receptacle is in the vacuum seal dish with the connection end is covered, the vacuum seal dish the connection end cover with be equipped with the copper seat sealing washer between the copper seal receptacle.
According to the utility model discloses a some embodiments, the second seal receptacle is equipped with dustproof recess, dustproof recess is located the second seal receptacle with in the clearance of copper seal receptacle.
According to some embodiments of the present invention, the first sealing seat is provided with a tapered guide surface facing upward and away from the piston rod.
According to some embodiments of the utility model, first seal receptacle second seal receptacle with all be equipped with the vacuum seal circle between the piston rod.
According to some embodiments of the present invention, the evacuation communication port and the vacuum passage are provided with a sealing step therebetween.
According to the utility model discloses an evacuating device of second aspect embodiment includes: the vacuum switching valve as described above; and the vacuum pump is connected to the pump suction connection opening.
According to the utility model discloses evacuating device has following beneficial effect at least: can satisfy the installation requirement, applicable in multiple occasion, it is convenient to connect, and the structure is reliable, low in production cost, and application field chamber has broken through traditional sealed design, the reduction of great aspect restoration and maintenance cost, effectively avoids the emergence of raise dust phenomenon, reaches stable evacuation process.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
fig. 1 is an isometric view of a vacuum switching valve in accordance with an embodiment of the first aspect of the present invention;
FIG. 2 is a schematic cross-sectional configuration of the vacuum switching valve shown in FIG. 1;
FIG. 3 is an enlarged view of a portion of FIG. 2 at A;
FIG. 4 is an enlarged view of a portion of FIG. 3 at B;
fig. 5 is a schematic structural diagram of a vacuum extractor according to a second aspect of the present invention.
The attached drawings are marked as follows:
a switching valve body 100, a vacuum passage 110, a first space 111, a second space 112, a suction communication port 120, a pump connection port 130, a transition space 140, a sealing step 150, a vacuum sealing disk 160;
the vacuum pumping device comprises a vacuum pumping cylinder 200, a piston rod 210, a cylinder body 220 and a connecting end cover 221;
a vacuum breaker 300, a breaking sealing ring 310;
the Teflon sealing assembly 400, the first sealing seat 410, the conical guide surface 411, the second sealing seat 420, the dustproof groove 421, the copper sealing seat 430, the copper seat sealing ring 431 and the vacuum sealing ring 440;
a vacuum pump 500.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present invention, and should not be construed as limiting the present invention.
In the description of the present invention, it should be understood that the orientation or positional relationship indicated with respect to the orientation description, such as up, down, front, rear, left, right, etc., is based on the orientation or positional relationship shown in the drawings, and is only for convenience of description and simplification of description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.
In the description of the present invention, a plurality of means are one or more, a plurality of means are two or more, and the terms greater than, less than, exceeding, etc. are understood as not including the present number, and the terms greater than, less than, within, etc. are understood as including the present number. If the first and second are described for the purpose of distinguishing technical features, they are not to be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of the technical features indicated.
In the description of the present invention, unless there is an explicit limitation, the words such as setting, installation, connection, etc. should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above words in combination with the specific contents of the technical solution.
Referring to fig. 1 to 5, a vacuum changeover valve according to an embodiment of the first aspect of the present invention will be described below.
As shown in fig. 1 to 5, a vacuum switching valve includes a switching valve body and a vacuum pumping cylinder 200, a vacuum channel 110 is disposed inside the switching valve body 100, the vacuum channel 110 is a straight channel, and the cross section of the vacuum channel 110 may be square, circular or other shapes, an air pumping communication port 120 is disposed at one end of the vacuum channel 110, the air pumping communication port 120 is used for connecting a vacuum container or other vacuum-pumped components, a pumping connection port 130 is disposed on the switching valve body 100 for outputting vacuum, the pumping connection port 130 is communicated with an inner side wall of the vacuum channel 110, that is, the pumping connection port 130 is disposed on an inner side wall at two ends of the vacuum channel 110, and an arrangement direction of the air pumping communication port 120 is perpendicular to an arrangement direction of the pumping connection port 130. The vacuum pumping cylinder 200 is used for a preliminary vacuum pumping process, and is arranged at the other end of the vacuum channel 110 opposite to the pumping communication port 120, the vacuum pumping cylinder 200 and the pumping communication port 120 are respectively arranged at two ends of the vacuum channel 110, the vacuum pumping cylinder 200 comprises a piston rod 210 penetrating the vacuum channel 110, a cylinder body 220 of the vacuum pumping cylinder 200 is fixedly connected at the outer side of the conversion valve body 100, the piston rod 210 is hermetically penetrated through the conversion valve body 100 and arranged in the vacuum channel 110 and can extend and retract in the vacuum channel 110, a vacuum breaker 300 is arranged at the end part of the piston rod 210, the vacuum breaker 300 is hermetically abutted against the inner side wall of the vacuum channel 110, in the embodiment, the vacuum breaker 300 is disc-shaped and is made of a vacuum breaker plate, the outer edge of the vacuum breaker 300 is hermetically abutted against the inner side wall of the vacuum channel 110, so as to divide the inside of the vacuum channel 110 into a first space 111 and a second space 112, there is transition interval 140 between pump suction connection mouth 130 and the intercommunication mouth 120 of bleeding, and piston rod 210 can drive vacuum breaker 300 reciprocating motion in vacuum channel 110, and transition interval 140 is the air exhaust stroke of vacuum breaker 300 in vacuum channel 110, and the intercommunication mouth 120 of bleeding sets up in first space 111, and after the air exhaust stroke was walked away to vacuum breaker 300, first space 111 intercommunication pump suction connection mouth 130, vacuum pump 500 carries out the evacuation process to the intercommunication mouth 120 of bleeding.
During specific implementation, push vacuum breaker 300 to the inboard of air extraction intercommunication mouth 120, air extraction intercommunication mouth 120 sealing connection external vacuum container or other evacuation parts, evacuation cylinder 200 pulling vacuum breaker 300 downstream, first space 111 enlarges gradually, form the negative pressure, produce suction, form the evacuation process of starting hand, the power of evacuating this moment is relatively weak, when vacuum breaker 300 has walked transition interval 140, pump suction connector 130 communicates with first space 111, extract air to air extraction intercommunication mouth 120, realized the transition from little vacuum suction to big vacuum suction, reduce the air torrent.
In some embodiments of the present invention, the outer edge of the vacuum breaker 300 is provided with a partition sealing ring 310 which seals the butt with the vacuum channel 110, the partition sealing ring 310 may be a rubber sealing ring, and may also be a sealing ring made of other materials, so that the vacuum breaker 300 seals the butt on the inner side wall of the vacuum channel 110. In addition, the vacuum breaker 300 may also maintain the sealing abutment process through other sealing structures.
The utility model discloses a in some embodiments, the bottom of conversion valve body 100 is equipped with vacuum seal dish 160, and fixed connection can be dismantled to the mode of evacuation cylinder 200 accessible screwed connection and install on vacuum seal dish 160, and vacuum seal dish 160 accessible screwed connection's mode is fixed in conversion valve body 100 bottom and is plugged up vacuum channel 110, and whole vacuum change-over valve easy dismounting can change and maintain.
A teflon sealing assembly 400 is arranged between the vacuum sealing disc 160 and the vacuum pumping cylinder 200, and the teflon sealing assembly 400 is used for the sealing process of the piston rod 210 stretching and retracting in the vacuum channel 110. Teflon seal assembly 400 includes first seal receptacle 410 and second seal receptacle 420, first seal receptacle 410 is sealed to be set up between vacuum seal dish 160 and piston rod 210, be used for the sealed between vacuum seal dish 160 and the piston rod 210, be equipped with on the evacuation cylinder 200 and connect end cover 221, connect end cover 221 and seal up cylinder body 220, second seal receptacle 420 inner chamber is on connecting end cover 221, and sealed the setting in the outside of piston rod 210, second seal receptacle 420 is used for connecting the sealed between end cover 221 and the piston rod 210, piston rod 210 realizes sealed flexible process through this Teflon seal assembly 400. The first sealing seat 410 and the second sealing seat 420 are both made of teflon materials, the teflon is also called teflon, the teflon has the characteristics of acid resistance, alkali resistance and various organic solvents resistance, and has good chemical stability, a vacuum sealing ring 440 is arranged between the first sealing seat 410 and the second sealing seat 420 and the piston, the vacuum sealing ring 440 is embedded in the inner sides of the first sealing seat 410 and the second sealing seat 420, the sealing performance is good, and the sealing requirement of the extension and retraction of the piston rod 210 can be met. Adopt the compound mode of the embedded sealing washer of teflon, under the prerequisite of effectively guaranteeing cylinder piston rod 210 dynamic seal, can solve the problem that the further invasion dynamic seal of dust leads to the cylinder to seal inefficacy, the application scope is stronger.
Specifically, a copper seal seat 430 is arranged between the first seal seat 410 and the second seal seat 420, the copper seal seat 430 is made of brass material, the upper side and the lower side of the copper seal seat 430 are respectively abutted to the vacuum seal disk 160 and the connecting end cover 221, a copper seat seal ring 431 is arranged between the vacuum seal disk 160 and the connecting end cover 221, the copper seat seal rings 431 are arranged between the copper seat seal ring 431 and the vacuum seal disk 160 and between the copper seat seal ring 431 and the connecting end cover 221, and two copper seat seal rings 431 are arranged between the copper seat seal ring 431 and the piston rod 210, so that the sealing requirements on the piston rod 210 and the vacuum channel 110 are met.
Furthermore, a dust-proof groove 421 is formed in the second seal seat 420, and the dust-proof groove 421 is located between the second seal seat 420 and the copper seal seat 430, so that dust is prevented from accumulating between the second seal seat 420 and the copper seal seat 430, and the sealing stability is maintained.
In some embodiments of the present invention, the first sealing seat 410 is provided with a tapered guiding surface 411 facing upward and away from the piston rod 210, and the first sealing seat 410 is inserted and embedded between the piston rod 210 and the vacuum sealing disk 160 through the tapered guiding surface 411. A sealing step 150 is provided between the evacuation communication port 120 and the vacuum passage 110, and when the vacuum breaker 300 is located inside the evacuation communication port 120, a sealing effect can be better achieved.
Note that, the seal rings used in this embodiment are all O-ring seals.
With reference to fig. 5, a vacuum evacuation apparatus according to an embodiment of the present invention will be described below.
The utility model provides an evacuating device, including vacuum pump 500 with the utility model discloses the vacuum change-over valve of first aspect embodiment, vacuum pump 500 is connected on pumping connection mouth 130, and after evacuation cylinder 200 evacuation in the change-over valve of real idle was accomplished, intercommunication vacuum pump 500, vacuum pump 500 carried out powerful evacuation process to vacuum vessel, can play fine guard action to vacuum vessel, solved to find time the problem that air turbulence brought in the twinkling of an eye.
The embodiments of the present invention have been described in detail with reference to the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made without departing from the spirit of the present invention within the knowledge of those skilled in the art.

Claims (10)

1. A vacuum switching valve, comprising:
the vacuum pump comprises a switching valve body (100), wherein a vacuum channel (110) is arranged inside the switching valve body (100), one end of the vacuum channel (110) is provided with an air exhaust communicating port (120), the switching valve body (100) is provided with a pump suction connecting port (130), and the pump suction connecting port (130) is communicated with the inner side wall of the vacuum channel (110);
a vacuum-pumping cylinder (200) disposed at the other end of the vacuum passage (110) with respect to the suction communicating port (120), the vacuum pumping cylinder (200) comprises a piston rod (210) which is arranged in the vacuum channel (110) in a penetrating way, a vacuum breaker (300) is arranged at the end part of the piston rod (210), the vacuum breaker (300) is abutted against the inner side wall of the vacuum channel (110), forming a first space (111) and a second space (112) in the vacuum passage (110) in a separated manner, a transition interval (140) is arranged between the pumping connection opening (130) and the air extraction communication opening (120), the piston rod (210) can drive the vacuum breaker (300) to reciprocate in the vacuum channel (110), the vacuum breaker (300) is located in the first space (111) after passing through the transition gap (140), and the air suction communication port (120) is communicated with the pump suction connection port (130).
2. Vacuum changeover valve according to claim 1, characterized in that the outer edge of the vacuum breaker (300) is provided with a breaking sealing ring (310) in sealing abutment with the vacuum channel (110).
3. The vacuum switching valve as claimed in claim 1, wherein a vacuum sealing disc (160) is disposed at the bottom of the switching valve body (100), the vacuum pumping cylinder (200) is fixedly connected to the vacuum sealing disc (160), and a teflon sealing assembly (400) is disposed between the vacuum sealing disc (160) and the vacuum pumping cylinder (200).
4. The vacuum switching valve as claimed in claim 3, wherein the teflon sealing assembly (400) comprises a first sealing seat (410) and a second sealing seat (420), the first sealing seat (410) is sealingly disposed between the vacuum sealing disk (160) and the piston rod (210), a connecting end cap (221) is disposed on the vacuum pumping cylinder (200), and the second sealing seat (420) is embedded in the connecting end cap (221) and is sealingly disposed outside the piston rod (210).
5. The vacuum switching valve according to claim 4, wherein a copper seal seat (430) is disposed between the first seal seat (410) and the second seal seat (420) and is in sealing contact with the outer side of the piston rod (210), the upper side and the lower side of the copper seal seat (430) are respectively in contact with the vacuum seal disc (160) and the connecting end cover (221), and a copper seat seal ring (431) is disposed between the vacuum seal disc (160), the connecting end cover (221) and the copper seal seat (430).
6. Vacuum changeover valve according to claim 5, characterized in that the second sealing seat (420) is provided with a dust-tight groove (421), which dust-tight groove (421) is located in the gap between the second sealing seat (420) and the copper sealing seat (430).
7. Vacuum changeover valve according to claim 4, characterized in that the first sealing seat (410) is provided with a conical guide surface (411) facing upwards and away from the piston rod (210).
8. The vacuum switching valve of claim 4, wherein vacuum sealing rings (440) are disposed between the first sealing seat (410), the second sealing seat (420), and the piston rod (210).
9. Vacuum changeover valve according to claim 1, characterized in that a sealing step (150) is provided between the suction communication port (120) and the vacuum channel (110).
10. An evacuation device, comprising:
a vacuum switching valve as claimed in any one of claims 1 to 9;
and a vacuum pump (500) connected to the pump connection port (130).
CN202120355156.7U 2021-02-08 2021-02-08 Vacuumizing device and vacuum change-over valve thereof Active CN215045409U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202120355156.7U CN215045409U (en) 2021-02-08 2021-02-08 Vacuumizing device and vacuum change-over valve thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202120355156.7U CN215045409U (en) 2021-02-08 2021-02-08 Vacuumizing device and vacuum change-over valve thereof

Publications (1)

Publication Number Publication Date
CN215045409U true CN215045409U (en) 2021-12-07

Family

ID=79255906

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202120355156.7U Active CN215045409U (en) 2021-02-08 2021-02-08 Vacuumizing device and vacuum change-over valve thereof

Country Status (1)

Country Link
CN (1) CN215045409U (en)

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