CN215005616U

CN215005616U - Square resistance measuring device

Info

Publication number: CN215005616U
Application number: CN202121308915.0U
Authority: CN
Inventors: 李�杰; 成松涛; 狄宏静; 孙祖军
Original assignee: Jiangsu Weaving Product Quality Supervision And Examination Research Institute
Current assignee: Jiangsu Weaving Product Quality Supervision And Examination Research Institute
Priority date: 2021-06-11
Filing date: 2021-06-11
Publication date: 2021-12-03
Anticipated expiration: 2031-06-11

Abstract

A sheet resistance measuring device comprises a control box, an X-direction electric sliding table, a first adapter, a Y-direction electric sliding table, a second adapter, a Z-direction electric sliding table, a cross beam, a sheet resistance probe, a force sensor controller, a controller supporting plate and a vertical beam; the X-direction electric sliding table, the Y-direction electric sliding table and the Z-direction electric sliding table are arranged on the control box; the vertical beams driven by the X-direction electric sliding table, the Y-direction electric sliding table and the Z-direction electric sliding table are arranged on the control box in a sliding manner; the cross beam is arranged on the vertical beam; the square resistance probe is arranged on the cross beam; the force sensor is connected with the square resistance probe; the controller supporting plate is arranged on the vertical beam; the force sensor controller is in communication connection with the force sensor. The utility model realizes the measurement of the sample sheet resistance under different pressures; the automatic positioning of the sheet resistance measurement at different positions of the same sample is realized, and the measurement accuracy is improved; by the three-dimensional movement of the square resistance probe, the dynamic measurement of the square resistance of the sample in the shape change process can be realized.

Description

Square resistance measuring device

Technical Field

The utility model relates to a measuring device technical field especially relates to a measuring device is hindered to side.

Background

The best method for measuring the thickness of thin film conductive materials such as evaporated aluminum films, conductive paint films, printed circuit board copper foil films and the like is to test the sheet resistance of the thin film conductive materials. The sheet resistance is the square resistance, which refers to the resistance between the edges of a square thin film conductive material. The square resistor has a characteristic that the side-to-side resistance of a square with any size is the same, and the square resistance of the square resistor is the same whether the side length is 1 meter or 0.1 meter, and the resistance value of the square resistor is only related to factors such as the thickness of a conductive film.

The sheet resistance probe of the conventional sheet resistance measuring device cannot realize the sheet resistance measurement of samples under different pressures, has poor automation performance, cannot realize the automatic positioning of the sheet resistance measurement at different positions of the same sample, and causes lower measurement accuracy; and dynamic measurement of sheet resistance of the sample in the process of shape change cannot be realized.

SUMMERY OF THE UTILITY MODEL

Objects of the invention

In order to solve the technical problems existing in the background technology, the utility model provides a sheet resistance measuring device, which realizes the measurement of the sheet resistance of samples under different pressures; the automatic positioning of the sheet resistance measurement at different positions of the same sample is realized, and the measurement accuracy is improved; by the three-dimensional movement of the square resistance probe, the dynamic measurement of the square resistance of the sample in the shape change process can be realized.

(II) technical scheme

The utility model provides a square resistance measuring device, which comprises a control box, an X-direction electric sliding table, a first adapter, a Y-direction electric sliding table, a second adapter, a Z-direction electric sliding table, a cross beam, a square resistance probe, a force sensor controller, a controller supporting plate and a vertical beam; the X-direction electric sliding table, the Y-direction electric sliding table and the Z-direction electric sliding table are arranged on the control box; the X-direction electric sliding table and the Y-direction electric sliding table are connected through a first adapter; the Y-direction electric sliding table and the Z-direction electric sliding table are connected through a second adapter; the vertical beams driven by the X-direction electric sliding table, the Y-direction electric sliding table and the Z-direction electric sliding table are arranged on the control box in a sliding manner; the cross beam is arranged on the vertical beam; the square resistance probe is arranged on the cross beam; the force sensor is connected with the square resistance probe; the controller supporting plate is arranged on the vertical beam; the force sensor controller is in communication connection with the force sensor and is arranged on the controller supporting plate.

Preferably, the control box comprises a bottom plate, a shell, an upper plate and a control module; the bottom plate and the upper plate are respectively arranged at two ends of the shell; the control module is disposed within the housing.

Preferably, the sheet resistance probe is arranged at one end of the cross beam far away from the control box.

Preferably, the control module is in communication connection with the X-direction electric sliding table, the Y-direction electric sliding table, the Z-direction electric sliding table, the square resistance probe, the force sensor and the force sensor controller.

Preferably, the control box is provided with a plurality of groups of cable joint holes.

Preferably, the control box is provided with a plurality of groups of communication connector holes.

Preferably, the control box is provided with an indicator lamp hole.

Compared with the prior art, the above technical scheme of the utility model following profitable technological effect has: the device realizes the measurement of the sheet resistance of the sample under different pressures; the automatic positioning of the sheet resistance measurement at different positions of the same sample is realized, and the measurement accuracy is improved; by the three-dimensional movement of the square resistance probe, the dynamic measurement of the square resistance of the sample in the shape change process can be realized.

Drawings

Fig. 1 is a main view of the sheet resistance measuring device provided by the present invention.

Fig. 2 is a left side view of the sheet resistance measuring device provided by the present invention.

Fig. 3 is a right side view of the sheet resistance measuring device provided by the present invention.

Reference numerals: 1. a base plate; 2. a housing; 3. an upper plate; 4. an X-direction electric sliding table; 5. a first transfer member; 6. a Y-direction electric sliding table; 7. a second adaptor; 8. a Z-direction electric sliding table; 9. a cross beam; 10. a sheet resistance probe; 11. a force sensor; 12. a force sensor controller; 13. a controller pallet; 14. erecting a beam; 16. an indicator light hole; 17. a cable splice hole.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in detail with reference to the accompanying drawings. It should be understood that the description is intended to be illustrative only and is not intended to limit the scope of the present invention. Moreover, in the following description, descriptions of well-known structures and techniques are omitted so as to not unnecessarily obscure the concepts of the present invention.

As shown in fig. 1-3, the utility model provides a sheet resistance measuring device, which comprises a control box, an X-direction electric sliding table 4, a first adaptor 5, a Y-direction electric sliding table 6, a second adaptor 7, a Z-direction electric sliding table 8, a cross beam 9, a sheet resistance probe 10, a force sensor 11, a force sensor controller 12, a controller supporting plate 13 and a vertical beam 14; the X-direction electric sliding table 4, the Y-direction electric sliding table 6 and the Z-direction electric sliding table 8 are arranged on the control box; the X-direction electric sliding table 4 is connected with the Y-direction electric sliding table 6 through a first adaptor 5; the Y-direction electric sliding table 6 and the Z-direction electric sliding table are connected through a second adaptor 7; the vertical beam 14 driven by the X-direction electric sliding table 4, the Y-direction electric sliding table 6 and the Z-direction electric sliding table 8 is arranged on the control box in a sliding manner; the cross beams 9 are arranged on the vertical beams 14; the square resistance probe 10 is arranged on the cross beam 9; the force sensor 11 is connected with the square resistance probe 10; the controller supporting plate 13 is arranged on the vertical beam 14; the force sensor controller 12 is in communication with the force sensor 11 and is disposed on a controller carrier 13.

In an alternative embodiment, the control box comprises a base plate 1, a housing 2, an upper plate 3 and a control module; the bottom plate 1 and the upper plate 3 are respectively arranged at two ends of the shell 2; the control module is disposed within the housing 2.

In an alternative embodiment, the sheet resistance probe 10 is arranged at the end of the beam 9 remote from the control box.

In an alternative embodiment, the control module is in communication connection with the X-direction electric sliding table 4, the Y-direction electric sliding table 6, the Z-direction electric sliding table 8, the sheet resistance probe 10, the force sensor 11 and the force sensor controller 12.

In an alternative embodiment, the control box is provided with a plurality of sets of cable lug holes 17.

In an alternative embodiment, the control box is provided with a plurality of sets of communication connector holes.

In an alternative embodiment, the control box is provided with indicator light holes 16.

It should be noted that the X-direction electric sliding table 4, the Y-direction electric sliding table 6 and the Z-direction electric sliding table 8 are connected together through the first adaptor 5 and the second adaptor 7, so as to realize accurate positioning in the X-direction, the Y-direction and the Z-direction; the square resistance probe 10 for measuring the square resistance is fixed through the vertical beam 14 and the cross beam 9, and the three-dimensional positioning of the square resistance probe 10 is realized in space; the force sensor 11 is connected with the sheet resistance probe 10 together, so that the sheet resistance of the sample is measured under a certain pressure, and the sheet resistance is accurately measured; especially when the influence of the pressure on the sheet resistance is large when the flexible electronic material is measured, the method has great significance for measuring the sheet resistance under certain pressure; the force sensor 11 acquires force value data through the force sensor controller 12; the control of the whole device is controlled by a control box.

It is to be understood that the above-described embodiments of the present invention are merely illustrative of or explaining the principles of the invention and are not to be construed as limiting the invention. Therefore, any modification, equivalent replacement, improvement and the like made without departing from the spirit and scope of the present invention should be included in the protection scope of the present invention. Further, it is intended that the appended claims cover all such variations and modifications as fall within the scope and boundaries of the appended claims or the equivalents of such scope and boundaries.

Claims

1. A square resistance measuring device is characterized by comprising a control box, an X-direction electric sliding table (4), a first adapter (5), a Y-direction electric sliding table (6), a second adapter (7), a Z-direction electric sliding table (8), a cross beam (9), a square resistance probe (10), a force sensor (11), a force sensor controller (12), a controller supporting plate (13) and a vertical beam (14);

the X-direction electric sliding table (4), the Y-direction electric sliding table (6) and the Z-direction electric sliding table (8) are arranged on the control box; the X-direction electric sliding table (4) is connected with the Y-direction electric sliding table (6) through a first adapter (5); the Y-direction electric sliding table (6) is connected with the Z-direction electric sliding table through a second adaptor (7);

a vertical beam (14) driven by the X-direction electric sliding table (4), the Y-direction electric sliding table (6) and the Z-direction electric sliding table (8) is arranged on the control box in a sliding manner; the cross beam (9) is arranged on the vertical beam (14);

the square resistance probe (10) is arranged on the cross beam (9); the force sensor (11) is connected with the square resistance probe (10); the controller supporting plate (13) is arranged on the vertical beam (14); the force sensor controller (12) is in communication connection with the force sensor (11) and is arranged on the controller supporting plate (13).

2. The sheet resistance measuring device according to claim 1, wherein the control box comprises a bottom plate (1), a shell (2), an upper plate (3) and a control module; the bottom plate (1) and the upper plate (3) are respectively arranged at two ends of the shell (2); the control module is arranged in the shell (2).

3. The sheet resistance measuring device according to claim 1, wherein the sheet resistance probe (10) is arranged at an end of the cross beam (9) remote from the control box.

4. The square resistance measuring device according to claim 2, wherein the control module is in communication connection with the X-direction electric sliding table (4), the Y-direction electric sliding table (6), the Z-direction electric sliding table (8), the square resistance probe (10), the force sensor (11) and the force sensor controller (12).

5. The sheet resistance measuring device according to claim 1, wherein the control box is provided with a plurality of cable connector holes (17).

6. The sheet resistance measuring device of claim 1, wherein the control box is provided with a plurality of sets of communication connector holes.

7. The sheet resistance measuring device according to claim 1, wherein the control box is provided with an indicator light hole (16).