CN214950129U - Semiconductor industry cooling water recovery unit - Google Patents
Semiconductor industry cooling water recovery unit Download PDFInfo
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- CN214950129U CN214950129U CN202121605905.3U CN202121605905U CN214950129U CN 214950129 U CN214950129 U CN 214950129U CN 202121605905 U CN202121605905 U CN 202121605905U CN 214950129 U CN214950129 U CN 214950129U
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Abstract
The utility model relates to a cooling water recovery device in semiconductor industry, which comprises a cooling water treatment tank, wherein a servo motor is fixedly connected at the center of the top of the cooling water treatment tank, the output end of the servo motor is fixedly connected with a transmission shaft, the periphery of the transmission shaft is fixedly connected with a paddle, a baffle is arranged below the transmission shaft, a first electric telescopic rod is arranged below the baffle, a scraper is fixedly connected at the end of the first electric telescopic rod, a filter plate is arranged below the scraper, a bracket is fixedly connected with the periphery of the cooling water treatment tank, a bottom plate is fixedly connected with the bottom of the bracket, a cooling frame is arranged at the top of the bottom plate near one side of the cooling water treatment tank, a cooling cavity is fixedly connected inside the cooling frame, a cooling coil pipe is arranged above the cooling cavity, the cooling water can be cooled and filtered by the cooling water recovery device, and the pipeline blockage caused by impurities in the cooling water is avoided, meanwhile, the filter plate can be cleaned, and the filter effect of the filter plate is prevented from being influenced.
Description
Technical Field
The utility model relates to a cooling water recovery unit specifically is a semiconductor industry cooling water recovery unit, belongs to cooling water and retrieves technical field.
Background
The semiconductor refers to a material with electric conductivity between a conductor and an insulator at normal temperature, and has applications in the fields of integrated circuits, consumer electronics, communication systems, photovoltaic power generation, illumination, high-power conversion and the like, for example, a diode is a device manufactured by adopting the semiconductor, the importance of the semiconductor is very great from the viewpoint of science and technology or economic development, and a cooling water recovery device is required in the production and manufacturing process of the semiconductor.
Current cooling water recovery unit is when carrying out recycle to the cooling water, and the inside impurity that easily contains of cooling water, and the pipeline is easily blockked up to impurity after long-term the use, influences cooling water recovery efficiency, and the cooling water cools off the back to equipment again, and cooling water temperature can rise to some extent, retrieves back direct use, can reduce the cooling effect.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a semiconductor industry cooling water recovery unit just in order to solve above-mentioned problem, can cool down the cooling water and filter, avoid the inside impurity that contains of cooling water to cause the pipeline to block up, can wash the filter simultaneously, avoid influencing the filter effect of filter.
The utility model realizes the above purpose by the following technical proposal, a cooling water recovery device in semiconductor industry, which comprises a cooling water treatment tank, one side of the top of the cooling water treatment tank is fixedly connected with a water inlet pipeline, a first throttle valve is fixedly connected on the water inlet pipeline, a servo motor is fixedly connected at the center of the top of the cooling water treatment tank, the output end of the servo motor is fixedly connected with a transmission shaft, the periphery of the transmission shaft is fixedly connected with a paddle, a baffle is arranged below the transmission shaft, a first electric telescopic rod is arranged below the baffle, the end of the first electric telescopic rod is fixedly connected with a scraper, a filter plate is arranged below the scraper, a bracket is fixedly connected at the periphery of the cooling water treatment tank, a bottom plate is fixedly connected at the bottom of the bracket, a cooling frame is arranged at the top of the bottom plate near one side of the cooling water treatment tank, a cooling cavity is fixedly connected inside the cooling frame, and a cooling coil is arranged above the cooling cavity.
Preferably, filter one end is connected with the cooling water treatment tank inner wall rotation, the filter bottom is rotated and is connected with second electric telescopic handle, second electric telescopic handle end is connected with the cooling water treatment tank inner wall rotation.
Preferably, cooling water treatment tank bottom center department fixedly connected with drainage pipe, drainage pipe one side fixedly connected with circulating pipe, fixedly connected with second choke valve on the drainage pipe, drainage pipe end fixedly connected with third choke valve, fixedly connected with fourth choke valve on the circulating pipe.
Preferably, the tail end of the circulating water pipe is fixedly connected with a cooling coil pipe, and the tail end of the cooling coil pipe is fixedly connected with a micro water pump.
Preferably, the inside fixedly connected with controller of cooling chamber, the controller top is equipped with the mounting panel, the inside fixedly connected with refrigeration piece of mounting panel, the refrigeration piece passes through wire and controller electric connection, the mounting panel top is equipped with cross flow fan, cooling chamber top is hollow out type structure.
The utility model has the advantages that:
1. the utility model discloses a set up servo motor and drive the transmission shaft and rotate and make the paddle can carry out synchronous rotation, be convenient for carry out intensive mixing to the cooling water, make the impurity of cooling water inside spread more evenly, can adjust the filter to the horizontality through controlling the second electric telescopic handle, be convenient for filter the cooling water, clear away the impurity of cooling water inside, avoid the impurity of cooling water inside to cause the pipeline to block up, can adjust the filter to the tilt state through retracting the second electric telescopic handle, can control the scraper blade through setting up first electric telescopic handle and clear up the filter plate surface, avoid impurity adhesion on the filter plate surface, influence the filter effect;
2. the utility model discloses can open second choke valve and third choke valve when clearing up the filter, close the fourth choke valve, inside avoiding clearing up the commodity circulation and going into cooling coil, cause the pipe blockage, can open second choke valve and fourth choke valve when equipment normal operating, close the third choke valve, avoid the cooling water to take place to leak, can carry cold wind to cooling coil through setting up the cooling chamber, improve the cooling rate of cooling water, it is too high to avoid the cooling water temperature, influence the cooling effect of reuse.
Drawings
Fig. 1 is a schematic view of the overall structure of the present invention.
Fig. 2 is a schematic diagram of the internal structure of the cooling cavity of the present invention.
Reference numbers in the figures: 1. a cooling water treatment tank; 2. a water inlet pipe; 3. a servo motor; 4. a drive shaft; 5. a baffle plate; 6. a first electric telescopic rod; 7. a filter plate; 8. a cooling frame; 9. a cooling cavity; 10. a cooling coil; 11. a second electric telescopic rod; 12. a water discharge pipeline; 13. a circulating water pipe; 14. a micro water pump; 15. a controller; 16. a refrigeration plate; 17. a cross flow fan.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, rather than all embodiments, and all other embodiments obtained by a person of ordinary skill in the art without creative work belong to the protection scope of the present invention based on the embodiments of the present invention.
Referring to fig. 1-2, a cooling water recycling device in semiconductor industry comprises a cooling water treatment tank 1, a water inlet pipe 2 is fixedly connected to one side of the top of the cooling water treatment tank 1, a first throttle valve is fixedly connected to the water inlet pipe 2, a servo motor 3 is fixedly connected to the center of the top of the cooling water treatment tank 1, a transmission shaft 4 is fixedly connected to the output end of the servo motor 3, blades are fixedly connected to the periphery of the transmission shaft 4, a baffle 5 is arranged below the transmission shaft 4, a first electric telescopic rod 6 is arranged below the baffle 5, a scraper is fixedly connected to the tail end of the first electric telescopic rod 6, a filter plate 7 is arranged below the scraper, a support is fixedly connected to the periphery of the cooling water treatment tank 1, a bottom plate is fixedly connected to the bottom of the support, and a cooling frame 8 is arranged on the top of the bottom plate near the cooling water treatment tank 1, the inside fixedly connected with cooling chamber 9 of cooling frame 8, cooling chamber 9 top is equipped with cooling coil 10.
As the utility model discloses a preferred technical scheme, 7 one ends of filter are connected with 1 inner wall rotation of cooling water treatment tank, 7 bottoms of filter are rotated and are connected with second electric telescopic handle 11, 11 ends of second electric telescopic handle are connected with 1 inner wall rotation of cooling water treatment tank, can adjust filter 7 to the horizontality through controlling second electric telescopic handle 11, are convenient for filter the cooling water, clear away the impurity of cooling water inside, avoid the impurity of cooling water inside to cause the pipe blockage, can adjust filter 7 to the tilt state through retracting second electric telescopic handle 11, clear up 7 surfaces of filter through setting up 6 steerable scraper blades of first electric telescopic handle, avoid impurity adhesion at 7 surfaces of filter, influence the filter effect.
As an optimal technical scheme of the utility model, 1 bottom center fixedly connected with drainage pipe 12 of cooling water treatment tank, drainage pipe 12 one side fixedly connected with circulating pipe 13, fixedly connected with second choke valve on the drainage pipe, the terminal fixedly connected with third choke valve of drainage pipe, fixedly connected with fourth choke valve on circulating pipe 13 can open second choke valve and third choke valve when clearing up filter 7, closes the fourth choke valve, avoids clearing up inside the commodity circulation income cooling coil 10, causes the pipeline to block up, can open second choke valve and fourth choke valve when equipment normal operating, closes the third choke valve, avoids the cooling water to take place to leak.
As an optimal technical scheme of the utility model, circulating pipe 13 is terminal and cooling coil 10 fixed connection, the miniature water pump 14 of 10 terminal fixedly connected with of cooling coil, the time of flowing through of the multiplicable cooling water of cooling coil 10 makes cooling chamber 9 can carry out abundant cooling to cooling coil 10.
As an optimal technical scheme of the utility model, the inside fixedly connected with controller 15 in cooling chamber 9, 15 tops of controller are equipped with the mounting panel, the inside fixedly connected with refrigeration piece 16 of mounting panel, refrigeration piece 16 passes through wire and 15 electric connection of controller, the mounting panel top is equipped with cross flow fan 17, cooling chamber 9 top is fretwork formula structure, can carry cold wind to cooling coil 10 through setting up cooling chamber 9, improves the cooling rate of cooling water, avoids the cooling water temperature too high, influences the cooling effect of reuse.
When the utility model is used, the propeller blade can synchronously rotate by arranging the servo motor 3 to drive the transmission shaft 4 to rotate, thereby being convenient for fully stirring cooling water and leading the impurities in the cooling water to be more uniformly dispersed, the filter plate 7 can be adjusted to be in a horizontal state by controlling the second electric telescopic rod 11, thereby being convenient for filtering the cooling water, the impurities in the cooling water can be removed, the pipeline blockage caused by the impurities in the cooling water can be avoided, the filter plate 7 can be adjusted to be in an inclined state by retracting the second electric telescopic rod 11, the surface of the filter plate 7 can be cleaned by arranging the scraper controllable by the first electric telescopic rod 6, the impurities are prevented from being adhered to the surface of the filter plate 7, the filtering effect is influenced, the second throttle valve and the third throttle valve can be opened when the filter plate 7 is cleaned, the fourth throttle valve is closed, the cleaning material is prevented from flowing into the cooling coil pipe 10, cause the pipeline to block up, can open second choke valve and fourth choke valve when equipment normal operating, close the third choke valve, avoid the cooling water to take place to leak, can carry cold wind to cooling coil 10 through setting up cooling chamber 9, improve the cooling rate of cooling water, avoid the cooling water temperature too high, influence the cooling effect of reuse.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof, and therefore, the present invention is considered to be exemplary and not restrictive in any way, since the scope of the present invention is defined by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein, without any reference thereto being construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (5)
1. The utility model provides a semiconductor industry cooling water recovery unit, includes cooling water treatment tank (1), its characterized in that: a water inlet pipeline (2) is fixedly connected to one side of the top of the cooling water treatment tank (1), a first throttle valve is fixedly connected to the water inlet pipeline (2), a servo motor (3) is fixedly connected to the center of the top of the cooling water treatment tank (1), a transmission shaft (4) is fixedly connected to the output end of the servo motor (3), paddles are fixedly connected to the periphery of the transmission shaft (4), a baffle (5) is arranged below the transmission shaft (4), a first electric telescopic rod (6) is arranged below the baffle (5), a scraper is fixedly connected to the tail end of the first electric telescopic rod (6), a filter plate (7) is arranged below the scraper, a support is fixedly connected to the periphery of the cooling water treatment tank (1), a bottom plate is fixedly connected to the bottom of the support, and a cooling frame (8) is arranged on one side, close to the cooling water treatment tank (1), of the top of the bottom plate, the cooling frame (8) is internally and fixedly connected with a cooling cavity (9), and a cooling coil (10) is arranged above the cooling cavity (9).
2. The cooling water recovery device in the semiconductor industry according to claim 1, wherein: filter (7) one end is rotated with cooling water treatment tank (1) inner wall and is connected, filter (7) bottom is rotated and is connected with second electric telescopic handle (11), second electric telescopic handle (11) end is rotated with cooling water treatment tank (1) inner wall and is connected.
3. The cooling water recovery device in the semiconductor industry according to claim 1, wherein: fixedly connected with drainage pipe (12) is located at cooling water treatment tank (1) bottom center, drainage pipe (12) one side fixedly connected with circulating pipe (13), fixedly connected with second choke valve on drainage pipe (12), drainage pipe (12) terminal fixedly connected with third choke valve, fixedly connected with fourth choke valve on circulating pipe (13).
4. The semiconductor industry cooling water recovery device of claim 3, wherein: the tail end of the circulating water pipe (13) is fixedly connected with the cooling coil (10), and the tail end of the cooling coil (10) is fixedly connected with the miniature water pump (14).
5. The cooling water recovery device in the semiconductor industry according to claim 1, wherein: the utility model discloses a cooling device, including cooling chamber (9), controller (15) top are equipped with the mounting panel, the inside fixedly connected with of mounting panel refrigeration piece (16), refrigeration piece (16) are through wire and controller (15) electric connection, the mounting panel top is equipped with crossing current fan (17), cooling chamber (9) top is hollow out construction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121605905.3U CN214950129U (en) | 2021-07-15 | 2021-07-15 | Semiconductor industry cooling water recovery unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121605905.3U CN214950129U (en) | 2021-07-15 | 2021-07-15 | Semiconductor industry cooling water recovery unit |
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| Publication Number | Publication Date |
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| CN214950129U true CN214950129U (en) | 2021-11-30 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202121605905.3U Active CN214950129U (en) | 2021-07-15 | 2021-07-15 | Semiconductor industry cooling water recovery unit |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115591485A (en) * | 2022-11-25 | 2023-01-13 | 石家庄昊普科技有限公司（Cn） | Pyromellitic dianhydride reactor |
-
2021
- 2021-07-15 CN CN202121605905.3U patent/CN214950129U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115591485A (en) * | 2022-11-25 | 2023-01-13 | 石家庄昊普科技有限公司（Cn） | Pyromellitic dianhydride reactor |
| CN115591485B (en) * | 2022-11-25 | 2023-03-10 | 石家庄昊普科技有限公司 | Pyromellitic dianhydride reactor |
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