CN214917766U

CN214917766U - Spin coating instrument tray and spin coating instrument

Info

Publication number: CN214917766U
Application number: CN202121300675.XU
Authority: CN
Inventors: 向芸颉; 王国景; 王姝
Original assignee: Southwest University
Current assignee: Southwest University
Priority date: 2021-06-08
Filing date: 2021-06-08
Publication date: 2021-11-30
Anticipated expiration: 2031-06-08

Abstract

The application provides a spin coating appearance tray and spin coating appearance relates to the technical field of film preparation. Spin coating appearance tray, include hollow cylinder and install the slide holder that is used for loading the substrate in hollow position department, the perforating hole has been seted up in the middle of the slide holder, hollow cylinder's upper end is equipped with 3 guide ways along circumference evenly spaced, install the jack catch in the guide way, the jack catch bottom is provided with the screw thread, the annular mounting groove has been seted up to hollow cylinder's lower tip, the annular mounting groove with the guide way link up, install in the annular mounting groove with the thread engagement's of jack catch equidistance helicla flute, the rotation of equidistance helicla flute make with 3 of equidistance helicla flute meshing the jack catch is close to simultaneously or keeps away from the slide holder. The application provides a spin coating appearance tray and spin coating appearance utilizes the jack catch to realize the automation of substrate to centering and chucking effect, improves the stability of substrate in rotatory in-process with vacuum adsorption mechanism together.

Description

Spin coating instrument tray and spin coating instrument

Technical Field

The application relates to the technical field of film preparation, in particular to a spin coater tray and a spin coater.

Background

The spin coating instrument mainly utilizes vacuum generated by a vacuum pump to adsorb a substrate on a tray, so that the substrate rotates along with the tray driven by a motor, and a uniform film is formed on the surface of the substrate by glue solution dripped in the center of the substrate under the combined action of centrifugal force and surface tension. The center position of tray is seted up the aperture that communicates with vacuum tube, places the substrate on the tray, need pay attention to the aperture at tray center with the center alignment of substrate for the glue solution on substrate surface can realize even coating under centrifugal effect.

Patent document No. CN103302002B discloses a heatable automatic centering spin coater, which is provided with an induction heating controller and an automatic centering platform; the induction heating controller is arranged at the upper part of the automatic centering platform, the automatic centering platform is provided with 3 clamping and positioning devices, and the 3 clamping and positioning devices are uniformly arranged around an annular body protruding from the lower surface of the slide holder; the induction heating controller is provided with a heating cover and an eddy current generating coil, and the eddy current generating coil is arranged on the heating cover; 3 guide grooves are uniformly formed in the slide holder, the clamping and positioning devices are positioned at the guide grooves in a one-to-one correspondence manner and are fixedly connected through screws, the 3 clamping and positioning devices synchronously rotate along with the slide holder, and the guide grooves and the clamping and positioning devices point to the center of the slide holder; the clamping and positioning devices are provided with pneumatic cylinders and piston rods which are matched with each other, one side of a rodless cavity of each of the 3 clamping and positioning devices is close to and points to the center of the slide holder, and one side of a rod cavity of each of the pneumatic cylinders points to the edge of the automatic centering platform.

Adopt above-mentioned correlation technique's spin coater, when the vacuum pump starts, 3 press from both sides tight positioner and realize the heart effect, however, when avoiding the vacuum pump to start, the substrate of vacuum adsorption tray central authorities for can't carry out the heart through pressing from both sides tight positioner, the central point of tray puts and does not set up the aperture with the vacuum pipe intercommunication, does not exert the effect of the fixed substrate of vacuum adsorption in fact.

SUMMERY OF THE UTILITY MODEL

In order to realize that the substrate can be from the heart in the time, can realize again that the vacuum pump adsorbs the effect to the substrate, improve the stability of substrate in the rotation process, this application provides a spin coating appearance tray and spin coating appearance.

The application provides a pair of spin coating appearance tray and spin coating appearance adopts following technical scheme:

the utility model provides a spin coating appearance tray which the key lies in: include hollow cylinder and install the slide holder that is used for loading the substrate in hollow position department, the perforating hole has been seted up in the middle of the slide holder, hollow cylinder's upper end is equipped with 3 guide ways along circumference evenly spaced apart, install the jack catch in the guide way, the jack catch bottom is provided with the screw thread, the annular mounting groove has been seted up to hollow cylinder's lower tip, the annular mounting groove with the guide way link up, install in the annular mounting groove with the thread engagement's of jack catch equidistance helicla flute, and drive equidistance helicla flute pivoted bevel gear group, the rotation of equidistance helicla flute make with equidistance helicla flute engaged 3 the jack catch is close to simultaneously or keeps away from the slide holder.

By adopting the technical scheme, the bevel gear set is utilized to drive the equidistant spiral grooves to rotate, so that 3 clamping jaws meshed with the equidistant spiral grooves are driven to move at a constant speed in the guide grooves, the substrate arranged on the slide holder is centered, the clamping force of the clamping jaws and the adsorption force of the vacuum adsorption mechanism fix the substrate together, and the stability of the substrate in the rotating process is improved.

Optionally, the bevel gear set comprises a large bevel gear and a small bevel gear which are meshed with each other, the large bevel gear is fixedly connected with the equidistant spiral groove, the small bevel gear is rotatably connected with the annular mounting groove, and a wrench insertion hole is formed in the end of the small bevel gear.

Through adopting above-mentioned technical scheme, after placing the substrate, utilize the spanner to insert in the bevel pinion, drive bevel pinion and rotate to drive bevel pinion and rotate, and then drive the equidistance helicla flute and rotate, order about 3 jack catchs to the substrate constant velocity motion, thereby realize the centering effect.

Optionally, the number of the bevel pinions is 3, and the bevel pinions are uniformly distributed in the annular mounting groove at intervals along the circumferential direction.

By adopting the technical scheme, the meshing stability of the large bevel gear and the small bevel gear can be improved.

Optionally, the working surface of the jaw is provided with anti-slip lines, and the side wall of the jaw is provided with wing plates.

Through adopting above-mentioned technical scheme, improved the clamp force of jack catch and with guide way complex stability.

Optionally, an annular bracket is arranged on the inner surface of the hollow cylinder, a protective cover is arranged on the annular bracket, and the guide groove penetrates through the protective cover along the radial direction.

Through adopting above-mentioned technical scheme, utilize the protection casing can prevent that the glue solution on the substrate from throwing away the internal surface that pollutes the tray in rotatory in-process, conveniently in time takes out the protection casing and clears up.

Optionally, the spin coating instrument tray further comprises a lower end cover, a thread section is formed by extending the lower end part of the annular mounting groove, the thread section is in threaded connection with the lower end cover, the slide holder is fixedly connected to the lower end cover, and the through hole of the slide holder penetrates through the lower end cover and the vacuum pipeline.

Through adopting above-mentioned technical scheme, utilize the inner structure of lower extreme lid protection tray and realize that the perforating hole at slide holder center communicates with the vacuum pipe, realize the effect of vacuum adsorption substrate.

A spin coater comprises a body and the spin coater tray arranged in the body.

By adopting the technical scheme, the stability of the spin coater is improved, and the quality of the film prepared on the substrate by spin coating is improved.

Optionally, the machine body is provided with a horizontal bubble, and the bottom of the machine body is provided with a supporting structure with adjustable height.

By adopting the technical scheme, the horizontal leveling of the spin coater can be realized, and the adaptability of the spin coater is improved.

Optionally, the supporting structure includes 4 supporting leg assemblies, each supporting leg assembly includes a support, a screw rod, a nut and a threaded pipe, the screw rod is fixedly connected to the support, the threaded pipe is fixedly connected to the machine body, the screw rod is in threaded connection with the threaded pipe, and the nut is in threaded connection with the screw rod.

By adopting the technical scheme, the horizontal leveling of the spin coating instrument can be conveniently and continuously realized.

In summary, the present application includes at least one of the following beneficial technical effects:

1. the application provides a spin coating appearance tray utilizes the jack catch can realize the automation of substrate to the heart and press from both sides tight not unidimensional substrate to the clamp force and the vacuum adsorption power combined action of jack catch improve the stability of substrate in rotatory in-process, and then improve the quality of spin coating preparation film on the substrate.

2. The application provides a pair of spin coating appearance tray utilizes bevel gear group drive, simple structure, and the integrated level is high, convenient operation.

3. The application provides a spin coating appearance has improved the stability that the spin coating appearance used and spin-coated the quality of preparing the film on the substrate.

Drawings

FIG. 1 is a schematic structural view of a spin coater according to an embodiment of the present application;

FIG. 2 is a schematic structural view of a spin coater tray according to an embodiment of the present disclosure;

FIG. 3 is a half sectional view of a spin coater tray according to an embodiment of the present application;

fig. 4 is an exploded view of a spin coater tray according to an embodiment of the present application.

Description of reference numerals: 1. a hollow cylinder; 11. a guide groove; 12. an annular mounting groove; 13. an annular bracket; 2. a slide stage; 21. a through hole; 3. a claw; 31. anti-skid lines; 32. a wing plate; 4. equidistant spiral grooves; 5. a bevel gear set; 51. a large bevel gear; 52. a bevel pinion gear; 6. a protective cover; 7. a lower end cover; 8. a body; 9. horizontal bubble; 10. a support structure; 101. a support; 102. a screw; 103. a nut; 104. a threaded pipe.

Detailed Description

The present application is described in further detail below with reference to figures 1-4.

The embodiment of the application discloses spin coating instrument tray and spin coating instrument. Referring to fig. 1 and 2, a spin coater includes a body 8 and a spin coater tray mounted in the body 8. The machine body 8 is provided with a horizontal bubble 9, and the bottom of the machine body is provided with a supporting structure 10 with adjustable height. The supporting structure 10 includes 4 supporting leg assemblies disposed at the bottom of the machine body 8, each supporting leg assembly includes a support 101, a screw 102, a nut 103 and a threaded pipe 104, the screw 102 is fixedly connected to the support 101, the threaded pipe 104 is fixedly connected to the bottom of the machine body 8, the screw 102 is in threaded connection with the threaded pipe 104, and the nut 103 is in threaded connection with the screw 102. The horizontal leveling of the spin coater is achieved by turning the screws 102 of the leg assemblies, respectively, so that the screws 102 rise or fall in the threaded pipes 104 until the bubble of the horizontal bubble 9 is centered. The fixing method can be welding, bonding, integral molding and the like. In other embodiments, the stand-off 101 may be used as the leg assembly, and the number of the supporting assemblies may be 1 or more.

Referring to fig. 2 to 4, the spin coater tray includes a hollow cylinder 1 and a stage 2 installed at the hollow position for loading a substrate, the stage 2 being located at the center of the hollow cylinder 1. The upper end of the hollow cylinder 1 is provided with 3 guide grooves 11 at equal intervals along the circumferential direction, the central lines of the 3 guide grooves intersect on the central line of the slide holder 2, the guide grooves 11 radially penetrate through the hollow cylinder 1, the clamping jaws 3 are installed in the guide grooves 11, and the clamping jaws 3 can be installed in the guide grooves 11 in an inserting mode, so that the clamping jaws 3 can move towards the slide holder 2 in the guide grooves 11, and substrates placed on the slide holder 2 are clamped.

The bottom of the clamping jaw 3 is provided with threads, the lower end part of the hollow cylinder 1 is provided with an annular mounting groove 12, and the annular mounting groove 12 is communicated with the guide groove 11. The end of the annular mounting groove 12 adjacent to the guide groove 11 is provided with equidistant spiral grooves 4 engaged with the threads of the jaws 3, and the annular mounting groove 12 is internally provided with a bevel gear set 5 driving the equidistant spiral grooves 4 to rotate. The bevel gear set 5 drives the equidistant spiral groove 4 to rotate, so that 3 clamping jaws 3 meshed with the equidistant spiral groove 4 are close to the substrate carrying table 2 at the same time, and the self-centering of the substrate is realized.

The bevel gear set 5 comprises a large bevel gear 51 and a small bevel gear 52 which are meshed with each other, the large bevel gear is fixedly connected to the lower end face of the equidistant spiral groove 4, and the small bevel gear 52 is rotatably connected with the annular mounting groove 12. In this embodiment, the number of the small bevel gears 52 is 3, so as to improve the stability of meshing and mounting of the large bevel gear 51 and the small bevel gear 52. The bevel pinion 52 is rotatably connected to the outer end of the annular mounting groove 12 and is provided with a wrench insertion hole 521. After the substrate is placed on the slide holder 2, a wrench is inserted into the wrench insertion hole 521, the small bevel gear 52 is rotated, the small bevel gear 52 rotates to drive the meshed large bevel gear 51 to rotate, the equidistant spiral groove 4 is driven to rotate, 3 clamping jaws 3 are driven to be close to the slide holder 2 simultaneously, and the automatic centering and clamping effects of the substrate are achieved. The working surface of the clamping jaw 3 is provided with anti-skid lines 31 for improving clamping force, the side wall of the clamping jaw 3 is provided with wing plates 32, and the corresponding geometric dimension of the guide groove 11 is matched with the wing plates, so that the binding force between the clamping jaw 3 and the guide groove 11 is improved. The way of fixedly connecting the large bevel gear 51 to the equidistant spiral groove 4 can be integrated, bonded, bolted, keyed, plugged, welded, etc. In other embodiments, the number of bevel pinions 52 may be 2 or more.

The spin coating instrument tray further comprises a lower end cover 7, a thread section is formed in the lower end portion of the annular mounting groove 12 in an extending mode, and the thread section is in threaded connection with the lower end cover 7. The slide holder 2 is fixedly connected to the center of the lower end cover 7, a through hole 21 is formed in the center of the slide holder 2, and the through hole 21 penetrates through the lower end cover 7 and is communicated with a vacuum pipeline at the motor axis position of the machine body 8.

An annular bracket 13 is integrally formed on the inner surface of the annular mounting groove 12, and a protective cover 6 is arranged on the annular bracket 13 and used for preventing the glue solution on the substrate 2 from polluting the inner surface of the tray when being thrown out. The guide grooves 11 extend radially through the protective cover 6 so that the claws 3 can be moved through the cover close to a substrate placed on the stage 2. During operation, the claw 3 compresses the protective cover 6 on the annular bracket 13, and after the work is stopped, the claw 3 is withdrawn from the protective cover 6, so that the protective cover 6 can be taken down for cleaning.

The above embodiments are preferred embodiments of the present application, and the protection scope of the present application is not limited by the above embodiments, so: all equivalent changes in the mechanism, shape and principle of the present application shall be covered by the protection scope of the present application.

Claims

1. A spin coating appearance tray which characterized in that: comprises a hollow cylinder (1) and a slide holder (2) arranged at the hollow position for loading substrates, a through hole (21) is arranged in the middle of the slide holder (2), 3 guide grooves (11) are uniformly arranged at intervals along the circumferential direction at the upper end part of the hollow cylinder (1), a clamping jaw (3) is arranged in the guide groove (11), threads are arranged at the bottom of the clamping jaw (3), the lower end part of the hollow cylinder (1) is provided with an annular mounting groove (12), the annular mounting groove (12) is communicated with the guide groove (11), an equidistant spiral groove (4) meshed with the thread of the clamping jaw (3) is mounted in the annular mounting groove (12), and a bevel gear set (5) driving the equidistant spiral grooves (4) to rotate, the equidistant spiral groove (4) rotates to enable 3 claws (3) engaged with the equidistant spiral groove (4) to simultaneously approach or depart from the slide holder (2).

2. The spin coater tray of claim 1, wherein: bevel gear group (5) are including intermeshing's big bevel gear (51) and bevel pinion (52), big bevel gear (51) with equidistance helicla flute (4) fixed connection, bevel pinion (52) with annular mounting groove (12) rotate and are connected, spanner patchhole (521) have been seted up to the tip of bevel pinion (52).

3. The spin coater tray of claim 2, wherein: the number of the small bevel gears (52) is 3, and the small bevel gears are uniformly distributed in the annular mounting groove (12) at intervals along the circumferential direction.

4. The spin coater tray of claim 1, wherein: be provided with anti-skidding line (31) on the working face of jack catch (3), be formed with pterygoid lamina (32) on the jack catch lateral wall.

5. The spin coater tray of claim 1, wherein: the inner surface of the hollow cylinder (1) is provided with an annular bracket (13), the annular bracket (13) is provided with a protective cover (6), and the guide groove (11) penetrates through the protective cover (6) along the radial direction.

6. The spin coater tray of claim 1, wherein: the spin coating instrument tray further comprises a lower end cover (7), a thread section is formed by extending the lower end part of the annular mounting groove (12), the thread section is connected with the lower end cover (7) in a threaded mode, the wafer carrying table (2) is fixedly connected onto the lower end cover (7), and the through hole (21) of the wafer carrying table (2) penetrates through the lower end cover (7) and the vacuum pipeline.

7. A spin coater is characterized in that: comprising a body (8) and a spin coater tray according to any one of claims 1-6 mounted in said body (8).

8. The spin coater of claim 7, wherein: the novel multifunctional washing machine is characterized in that a horizontal bubble (9) is arranged on the machine body (8), and a supporting structure (10) with adjustable height is arranged at the bottom of the machine body (8).

9. The spin coater of claim 8, wherein: the supporting structure (10) comprises 4 supporting leg assemblies, each supporting leg assembly comprises a support (101), a screw (102), a nut (103) and a threaded pipe (104), the screw (102) is fixedly connected with the support (101), the threaded pipe (104) is fixedly connected with the machine body (8), the screw (102) is in threaded connection with the threaded pipe (104), and the nut (103) is in threaded connection with the screw (102).