CN214893894U - Vacuum cavity leak hunting auxiliary spray gun - Google Patents
Vacuum cavity leak hunting auxiliary spray gun Download PDFInfo
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- CN214893894U CN214893894U CN202121119056.0U CN202121119056U CN214893894U CN 214893894 U CN214893894 U CN 214893894U CN 202121119056 U CN202121119056 U CN 202121119056U CN 214893894 U CN214893894 U CN 214893894U
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Abstract
The utility model relates to a vacuum cavity leak detection auxiliary spray gun, belonging to the technical field of cavity leak detection; the device comprises a control module, a vacuum pump, a helium gas storage cavity, a helium gas recovery cavity and a collection cover; the helium storage cavity is provided with a gas flow meter and a jet orifice, the upper end of the collection cover is closed, the lower end of the collection cover is open, the jet orifice is arranged inside the collection cover, a hollow air exhaust pipeline is arranged inside the side wall of the end part of the collection cover, the lower end face of the side wall is provided with a plurality of air exhaust ports, the air exhaust ports are communicated with the air exhaust pipeline, an air inlet of a vacuum pump is respectively communicated with the air exhaust pipeline and the inside of the collection cover through a two-way electromagnetic valve, an air outlet is respectively communicated with the outside and the inside of the helium recovery cavity through the two-way electromagnetic valve, and a control module is electrically connected with a first two-way electromagnetic valve, a second two-way electromagnetic valve, the gas flow meter and the vacuum pump; the problems that the positions of leak points are not accurately judged and the leak points are mutually influenced during detection in the conventional helium mass spectrometer method are solved.
Description
Technical Field
The utility model belongs to the technical field of the cavity leak hunting, concretely relates to vacuum cavity leak hunting auxiliary spray gun.
Background
At present, when a vacuum cavity has a leak point and the location of the leak point is confirmed, a commonly used method is a negative pressure method, and the method comprises the following steps: and (4) vacuumizing under the condition of sealing equipment, and then externally connecting a helium mass spectrometer for leak detection. As shown in fig. 1, after the vacuum system finishes vacuumizing the cavity, a tester may blow helium gas on the surface of the cavity, when the helium gas passes through a leak point, a small amount of helium gas enters the cavity along with the air, and then the helium gas is pumped into a vacuum pipeline and an external leak detector and is detected. Because the density of helium is small, the sprayed helium is easy to diffuse in the air, when the area of a leak point is small, the helium in a large range exists around the leak point, only the approximate direction of the leak point can be judged, and the accurate position of the leak point cannot be judged. When the leak point is more than or equal to 2, the helium sprayed out before can also influence the judgment of the position of the leak point when the second and later point positions are subjected to leak detection, and the efficiency and the accuracy of leak detection are greatly influenced.
SUMMERY OF THE UTILITY MODEL
The utility model overcomes the defects of the prior art and provides a vacuum cavity leak detection auxiliary spray gun; the method solves the problems that the judgment of the positions of the leaking points is inaccurate and the mutual influence is caused when different leaking points are detected in the existing helium mass spectrometer method.
In order to achieve the above purpose, the present invention is achieved by the following technical solutions.
A vacuum cavity leakage detection auxiliary spray gun comprises a control module, a vacuum pump, a helium storage cavity, a helium recovery cavity and a collection cover; the helium recovery cavity and the helium storage cavity are of hollow cavity structures, the helium storage cavity is provided with an inflation inlet and a jet orifice, a gas flowmeter is arranged at the jet orifice, and the helium recovery cavity is provided with a pressure release valve; the collecting cover is arranged at the lower end of the helium storage cavity, the upper end of the collecting cover is closed, the lower end of the collecting cover is open, the jet orifice is arranged inside the collecting cover, the collecting cover comprises a collecting cover main body and a collecting cover end part which are arranged up and down, the collecting cover end part is of an annular cylindrical structure, a hollow air exhaust pipeline is arranged inside the side wall of the collecting cover end part, a plurality of air exhaust ports are arranged on the lower end surface of the side wall, an air exhaust port is arranged on the outer side surface of the side wall, and the air exhaust port and the air exhaust pipeline are communicated; a first double-electrified magnetic valve and a second double-electrified magnetic valve are respectively arranged at an air inlet and an air outlet of the vacuum pump, a first valve of the first double-electrified magnetic valve is connected with an evacuation port on the collection cover through an evacuation pipeline, a second valve of the first double-electrified magnetic valve is communicated with the interior of the collection cover through a first recovery air exhaust pipeline, a first valve of the second double-electrified magnetic valve is communicated with the outside atmosphere through an exhaust pipeline, and a second valve of the second double-electrified magnetic valve is communicated with the interior of the helium recovery cavity through a second recovery air exhaust pipeline; the control module is electrically connected with the first dual-way electromagnetic valve, the second dual-way electromagnetic valve, the gas flowmeter and the vacuum pump.
Furthermore, the helium recovery cavity and the helium storage cavity are arranged in the middle of the spray gun and are respectively of a semi-cylindrical cavity structure, the cross section of the helium recovery cavity and the cross section of the helium storage cavity are semi-circular, and the helium recovery cavity and the helium storage cavity are spliced to form a complete cylinder.
Furthermore, barometers are arranged on the side walls of the helium recovery cavity and the helium storage cavity, and a numerical display screen is arranged on the outer side of each barometer.
Furthermore, the inflation inlet is arranged at the upper part of the outer side surface of the helium gas storage cavity.
Furthermore, the collecting cover main body is of a horn-shaped structure with a narrow upper part and a wide lower part, and is a corrugated pipe which is made of rubber and can stretch up and down.
Furthermore, the lower end of the end part of the collecting cover is provided with a collecting port, the collecting port is of a circular structure, and the area of the collecting port is less than or equal to 2 square centimeters.
Further, the air exhaust pipeline is not communicated with the collecting port in the end part of the collecting cover.
Further, the vacuum pump is arranged at the upper part of the helium recovery cavity.
Furthermore, the communication position of the first recovery air exhaust pipeline and the collection cover is a recovery port.
Furthermore, the control module is arranged on the upper end surface of the helium gas storage cavity.
The utility model discloses produced beneficial effect for prior art does:
(1) the utility model provides a spray gun, the area of collecting the mouth is 2 square centimeters, just so can be with the position determination of leak source within 2 square centimeters, the position judgement precision of leak source is more accurate.
(2) The utility model provides a spray gun is provided with on collecting the cover and collects the cover tip, is provided with hollow exhaust duct in collecting the cover tip, and exhaust duct closely laminates mutually through extraction opening and vacuum cavity's surface, can fix spray gun and vacuum cavity mutually more firmly, can avoid collecting the inside helium of cover simultaneously and leak through the edge of collecting the cover tip, guarantees to examine the accuracy nature of time measuring.
(3) The utility model provides a spray gun through retrieving exhaust duct and helium recovery cavity, can retrieve the helium after detecting again to the helium recovery cavity inside, both saved the helium, can avoid interfering mutually when detecting different leak sources simultaneously.
Drawings
The invention will be described in further detail with reference to the accompanying drawings:
FIG. 1 is a schematic structural diagram of a prior vacuum chamber leak detection method;
fig. 2 is an overall elevation view of the present invention;
fig. 3 is an overall bottom view of the present invention;
wherein, 1 is a helium storage cavity, 2 is a helium recovery cavity, 3 is an inflation inlet, 4 is an injection port, 5 is a gas flow meter, 6 is a pressure release valve, 7 is a barometer, 8 is a collection cover main body, 9 is a collection cover end part, 10 is an air exhaust pipeline, 11 is an air exhaust port, 12 is an air exhaust port, 13 is a vacuum pump, 14 is a first double-electrified magnetic valve, 15 is a second double-electrified magnetic valve, 16 is an air exhaust pipeline, 17 is a first recovery air exhaust pipeline, 18 is an air exhaust pipeline, 19 is a second recovery air exhaust pipeline, 20 is a recovery port, 21 is a control module, and 22 is a vacuum cavity.
Detailed Description
In order to make the technical problem, technical scheme and beneficial effect that the utility model will solve more clearly understand, combine embodiment and attached drawing, it is right to go on further detailed description the utility model discloses. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. The technical solution of the present invention is described in detail below with reference to the embodiments and the drawings, but the scope of protection is not limited thereto.
As shown in fig. 2 and 3, the utility model provides a vacuum cavity leak hunting auxiliary spray gun, including control module 21, vacuum pump 13, helium storage cavity 1, helium recovery cavity 2, collection cover.
The helium recovery cavity 2 and the helium storage cavity 1 are arranged in the middle of the spray gun and are of semi-cylindrical cavity structures respectively, the cross section of each cavity structure is semi-circular, and the helium recovery cavity 2 and the helium storage cavity 1 are spliced to form a complete cylinder.
Be provided with barometer 7 on the lateral wall of helium recovery cavity 2 and helium storage cavity 1, the outside of barometer 7 is provided with numerical display screen, can real-time supervision state the inside atmospheric pressure of helium recovery cavity 2 and helium storage cavity 1 and will monitor atmospheric pressure numerical value demonstration on numerical display screen.
And a gas filling port 3 is arranged at the upper part of the outer side surface of the helium gas storage cavity 1, and helium gas can be injected into the helium gas storage cavity 1 through the gas filling port 3. The bottom end face of the helium storage cavity 1 is provided with a jet orifice 4, the jet orifice 4 is provided with a gas flowmeter 5, helium in the helium storage cavity 1 can be jetted through the gas flowmeter 5 and the jet orifice 4, and meanwhile, the jet flow and frequency are controlled.
The outer side bottom that the helium recovered cavity 2 arrived is provided with relief valve 6, relief valve 6 is linked together with the inside of helium recovered cavity 2, and when the pressure of helium recovered cavity 2 inside exceeded the setting value, relief valve 6 can be opened automatically, discharges inside partly helium to external environment in.
The collecting cover is arranged on the lower end face of a cylinder formed by the helium gas storage cavity 1 and the helium gas recovery cavity 2 and comprises a collecting cover main body 8 and a collecting cover end part 9. The collecting cover main body 8 is of a horn-shaped structure with a narrow upper part and a wide lower part, and a corrugated pipe made of rubber can stretch up and down. The jet orifice 4 at the lower end of the helium gas storage cavity 1 is positioned inside the collection cover main body 8.
The collecting cover end part 9 is of a circular main structure and is arranged at the lower end of the collecting cover main body 8, the lower end of the collecting cover end part 9 is a collecting opening, the collecting opening is of a circular structure, and the area of the collecting opening is 2 square centimeters. The side wall of the end part 9 of the collecting cover is internally provided with an annular air exhaust pipeline 10, the air exhaust pipeline 10 is not communicated with the collecting port in the end part 9 of the collecting cover, the lower end face of the side wall of the end part 9 of the collecting cover is provided with a plurality of air exhaust ports 11, the side face of the side wall of the end part 9 of the collecting cover is provided with an air exhaust port 12, and the air exhaust ports 11 and the air exhaust port 12 are communicated with the air exhaust pipeline 10 in the side wall.
The vacuum pump 13 is arranged at the upper part of the helium recovery cavity 2, a first dual-purpose electromagnetic valve 14 is arranged on an air inlet of the vacuum pump 13, and a second dual-purpose electromagnetic valve 15 is arranged on an air outlet of the vacuum pump 13. The first double-current electromagnetic valve 14 on the air inlet of the vacuum pump 13 has two valves, the first valve is connected with the evacuation port 12 on the collection cover through an evacuation pipeline 16, the second valve is communicated with the interior of the collection cover through a first recovery air exhaust pipeline 17, and the communication part of the first recovery air exhaust pipeline 17 and the collection cover is a recovery port 20.
The second dual-current solenoid valve 15 on the outlet of the vacuum pump 13 has two valves, the first valve is connected to the outside atmosphere through an exhaust duct 18, and the second valve is connected to the inside of the helium recovery cavity 2 through a second recovery pumping duct 19.
The control module 21 is arranged on the upper end surface of the helium gas storage cavity 1, and the control module 21 is electrically connected with the first dual-purpose electromagnetic valve 14, the second dual-purpose electromagnetic valve 15, the gas flow meter 5 and the vacuum pump 13.
The utility model discloses a theory of operation does:
before treating and detecting the cavity and leak hunting, store 1 inside helium to be full of the helium through gas charging port 3, will wait to detect the inside vacuum state that takes out of cavity simultaneously, the external helium mass spectrometer of vacuum cavity 22 this moment, when the inside helium that appears of vacuum cavity 22, the helium mass spectrometer can detect in time.
When leak detection is needed for the vacuum cavity 22, the collection port of the collection cover end portion 9 at the lower portion of the spray gun is tightly attached to the equipment cavity, the control module 21 controls the first dual-purpose electromagnetic valve 14 to communicate the air inlet of the vacuum pump 13 with the evacuation pipeline 16, the second dual-purpose electromagnetic valve 15 is controlled to connect the air outlet of the vacuum pump 13 with the exhaust pipeline 18, the vacuum pump 13 is controlled to be opened simultaneously, air in the air exhaust pipeline 10 inside the side wall of the collection cover end portion 9 is gradually evacuated and exhausted to the external environment, the air exhaust pipeline 10 inside is in a vacuum state at the moment, the inside of the air exhaust ports 11 is also in a vacuum state at the moment, and therefore the air exhaust ports 11 are tightly attached to the surface of the vacuum cavity 22, and the whole spray gun is tightly attached to the surface of the vacuum cavity 22.
After the air in the air exhaust pipeline 10 is completely exhausted, the control module 21 controls the gas flow meter 5 to gradually open, and simultaneously controls the first dual-purpose electromagnetic valve 14 to communicate the air inlet of the vacuum pump 13 with the first recovery air exhaust pipeline 17, and controls the second dual-purpose electromagnetic valve 15 to communicate the air outlet of the vacuum pump 13 with the second recovery air exhaust pipeline 19, at this time, the helium in the helium storage cavity 1 enters the inside of the collection cover through the gas flow meter 5 and the injection port 4, and then is recovered to the helium recovery cavity 2 through the first recovery air exhaust pipeline 17, the vacuum pump 13 and the second recovery air exhaust pipeline 19 under the action of the vacuum pump 13.
When a leak point occurs at the detected position, helium in the collection cover enters the vacuum cavity 22 from the leak point, so that the helium mass spectrometer can detect the helium, and the existence of the leak point is proved in the area covered by the collection port of the collection cover, so that the position of the leak point can be detected.
When the helium mass spectrometer does not detect helium after working for a period of time, it is proved that no leak point exists in the region covered by the collecting port, at this time, the control module 21 controls the gas flowmeter 5 to be closed, the vacuum pump 13 completely pumps the inside of the collecting cover into a vacuum state, and the collecting port of the collecting cover is tightly attached to the surface of the vacuum cavity 22.
Then the control module 21 controls the second dual-current electromagnetic valve 15 to connect the air outlet of the vacuum pump 13 with the exhaust pipeline 18, and simultaneously controls the vacuum pump 13 to stop working, at this time, the inside of the collecting cover is communicated with the outside atmosphere through the first recycling exhaust pipeline 17, the vacuum pump 13 which stops working and the exhaust pipeline 18, the outside air gradually enters the inside of the vacuum collecting cover, and the collecting port is separated from the close fit with the surface of the vacuum cavity 22.
Then the control module 21 controls the first dual-current electromagnetic valve 14 to communicate the air inlet of the vacuum pump 13 with the evacuation pipeline 16, at this time, the evacuation pipeline 10 inside the side wall of the end portion 9 of the collecting cover is communicated with the external atmosphere through the evacuation pipeline 16, the vacuum pump 13 which stops working and the exhaust pipeline 18, the external air gradually enters the evacuation pipeline 10, the air extraction opening 11 is separated from the close fit with the surface of the vacuum cavity 22, and thus the spray gun is completely separated from the surface of the vacuum cavity and is not attached any more.
After the operation is finished, the leakage detection work of the next suspected leakage point can be carried out.
Through observing the barometer 7 on the helium gas storage cavity 1, the surplus of the helium gas in the helium gas storage cavity 1 at the moment can be known, and the helium gas can be supplemented through the inflation inlet 3 in time.
When the pressure value of helium in the helium recovery cavity 2 exceeds the set value of the pressure release valve 6, the pressure release valve 6 can be automatically opened to release helium in the helium recovery cavity 2 to the external environment.
It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Claims (10)
1. The utility model provides a vacuum cavity leak hunting auxiliary spray gun which characterized in that: the device comprises a control module (21), a vacuum pump (13), a helium gas storage cavity (1), a helium gas recovery cavity (2) and a collection cover;
the helium recovery cavity (2) and the helium storage cavity (1) are of hollow cavity structures, the helium storage cavity (1) is provided with an inflation inlet (3) and a jet orifice (4), a gas flowmeter (5) is arranged at the jet orifice (4), and the helium recovery cavity (2) is provided with a pressure release valve (6);
the collecting cover is arranged at the lower end of the helium storage cavity (1), the upper end of the collecting cover is closed, the lower end of the collecting cover is open, the jet orifice (4) is arranged inside the collecting cover, the collecting cover comprises a collecting cover main body (8) and a collecting cover end part (9) which are arranged up and down, the collecting cover end part (9) is of an annular cylindrical structure, a hollow air exhaust pipeline (10) is arranged inside the side wall of the collecting cover end part (9), a plurality of air exhaust ports (11) are arranged on the lower end face of the side wall, an air exhaust port (12) is arranged on the outer side face of the side wall, and the air exhaust port (12) and the air exhaust port (11) are communicated with the air exhaust pipeline (10);
a first dual-purpose electromagnetic valve (14) and a second dual-purpose electromagnetic valve (15) are respectively arranged at an air inlet and an air outlet of the vacuum pump (13), a first valve of the first dual-purpose electromagnetic valve (14) is connected with an evacuation port (12) on the collection cover through an evacuation pipeline (16), a second valve is communicated with the interior of the collection cover through a first recovery evacuation pipeline (17), a first valve of the second dual-purpose electromagnetic valve (15) is communicated with the outside atmosphere through an exhaust pipeline (18), and a second valve is communicated with the interior of the helium recovery cavity (2) through a second recovery evacuation pipeline (19);
the control module (21) is electrically connected with the first dual-way electromagnetic valve (14), the second dual-way electromagnetic valve (15), the gas flow meter (5) and the vacuum pump (13).
2. The vacuum chamber leak detection auxiliary lance according to claim 1, wherein: the helium recovery cavity (2) and the helium storage cavity (1) are arranged in the middle of the spray gun and are of semi-cylindrical cavity structures respectively, the cross section of each cavity structure is semicircular, and the helium recovery cavity and the helium storage cavity are spliced to form a complete cylinder.
3. The vacuum chamber leak detection auxiliary lance according to claim 1, wherein: be provided with barometer (7) on the lateral wall of helium recovery cavity (2) and helium storage cavity (1), the outside of barometer (7) is provided with the numerical display screen.
4. The vacuum chamber leak detection auxiliary lance according to claim 1, wherein: the inflation inlet (3) is arranged on the upper portion of the outer side face of the helium gas storage cavity (1).
5. The vacuum chamber leak detection auxiliary lance according to claim 1, wherein: the collecting cover main body (8) is of a horn-shaped structure with a narrow upper part and a wide lower part, and is a corrugated pipe which is made of rubber and can stretch up and down.
6. The vacuum chamber leak detection auxiliary lance according to claim 1, wherein: the lower end of the end part (9) of the collecting cover is a collecting opening which is of a circular structure, and the area of the collecting opening is less than or equal to 2 square centimeters.
7. The vacuum chamber leak detection auxiliary lance according to claim 1, wherein: the air exhaust pipeline (10) is not communicated with the collection port in the end part (9) of the collection cover.
8. The vacuum chamber leak detection auxiliary lance according to claim 1, wherein: the vacuum pump (13) is arranged at the upper part of the helium recovery cavity (2).
9. The vacuum chamber leak detection auxiliary lance according to claim 1, wherein: the communication part of the first recovery air extraction pipeline (17) and the collection cover is a recovery port (20).
10. The vacuum chamber leak detection auxiliary lance according to claim 1, wherein: the control module (21) is arranged on the upper end face of the helium gas storage cavity (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121119056.0U CN214893894U (en) | 2021-05-24 | 2021-05-24 | Vacuum cavity leak hunting auxiliary spray gun |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121119056.0U CN214893894U (en) | 2021-05-24 | 2021-05-24 | Vacuum cavity leak hunting auxiliary spray gun |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214893894U true CN214893894U (en) | 2021-11-26 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121119056.0U Active CN214893894U (en) | 2021-05-24 | 2021-05-24 | Vacuum cavity leak hunting auxiliary spray gun |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214893894U (en) |
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2021
- 2021-05-24 CN CN202121119056.0U patent/CN214893894U/en active Active
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