CN214892606U

CN214892606U - Furnace door assembly and vacuum equipment

Info

Publication number: CN214892606U
Application number: CN202120519101.5U
Authority: CN
Inventors: 刘强; 左敏; 吴兴华; 胡彬; 黎微明
Original assignee: Jiangsu Leadmicro Nano Technology Co Ltd
Current assignee: Jiangsu Leadmicro Nano Technology Co Ltd
Priority date: 2021-03-11
Filing date: 2021-03-11
Publication date: 2021-11-26
Anticipated expiration: 2031-03-11

Abstract

The utility model relates to a furnace gate subassembly and vacuum apparatus. The furnace door assembly is used for closing or opening a furnace opening, and comprises: a furnace door; the connecting plate is movably connected to one side of the furnace door and is configured to drive the furnace door to close or open the furnace opening; and the elastic piece is arranged between the oven door and the connecting plate so as to provide elastic force for enabling the oven door to move away from the connecting plate. Compared with the prior art, the utility model discloses a furnace gate subassembly can self-adaptation regulation furnace gate and vacuum chamber's furnace gate department's the depth of parallelism of the contact surface when contacting vacuum chamber's furnace gate department, and then reaches better sealed effect, has reduced the gas leakage risk that furnace gate and furnace gate sealed not good area were taken, improve equipment's reliability greatly, and has avoided the straightness debugging link that hangs down of closing door track and the sealed face of furnace gate, is favorable to reducing the installation accuracy of furnace gate, has improved the installation effectiveness.

Description

Furnace door assembly and vacuum equipment

Technical Field

The utility model relates to a PECVD equipment technical field especially relates to a furnace gate subassembly and vacuum apparatus.

Background

In a Plasma Enhanced Chemical Vapor Deposition (PECVD) apparatus, a vacuum chamber thereof needs to reach a predetermined degree of vacuum before entering a process step. As such, the sealing of the oven door assembly to the vacuum chamber is particularly important. In the prior art, because the sealing surface of the flange at the furnace door assembly and the vacuum cavity furnace mouth is difficult to guarantee the parallelism, the perpendicularity of the door closing track and the sealing surface of the flange needs to be debugged repeatedly, so that the furnace door assembly is in sealing connection with the flange surface, time and labor are wasted, the air leakage risk exists, and the operation reliability of equipment is low.

SUMMERY OF THE UTILITY MODEL

Therefore, the furnace door assembly and the vacuum equipment which overcome the defects are provided for solving the problems that the parallelism of the sealing surfaces of the furnace door and the flange in the prior art is difficult to meet the process requirements, the debugging difficulty is high, the time is long, and the equipment reliability is low.

An oven door assembly for closing or opening an oven opening, the oven door assembly comprising:

a furnace door;

the connecting plate is movably connected to one side of the furnace door and is configured to drive the furnace door to close or open the furnace opening; and

and the elastic piece is arranged between the oven door and the connecting plate so as to provide elastic force for enabling the oven door to move away from the connecting plate.

In one embodiment, the gap between the connecting plate and the oven door is less than or equal to 5 mm.

In one embodiment, the oven door assembly further comprises a connecting column, one of the oven door and the connecting plate is provided with a guide hole, the connecting column is arranged in the guide hole in a penetrating way, and the connecting column is provided with a first end which is fixedly connected to the other one of the oven door and the connecting plate;

and a gap is reserved between the guide hole and the connecting column.

In one embodiment, the connecting column further comprises a second end opposite to the first end, the first end and the second end are respectively located at two opposite ends of the guide hole, the second end is provided with a limiting boss, and the radial dimension of the limiting boss is larger than that of the guide hole.

In one embodiment, the first end is threadedly connected to the oven door or the connecting plate.

In one embodiment, one end of the elastic element is fixedly connected with one of the connecting plate and the oven door, and the other end of the elastic element is abutted against the other of the connecting plate and the oven door.

In one embodiment, the resilient member is a resilient plunger.

In one embodiment, the number of the connecting columns and the number of the elastic pieces are both multiple;

the connecting columns are uniformly distributed along the circumferential direction of the connecting plate, and the elastic pieces are uniformly distributed along the circumferential direction of the connecting plate.

In one embodiment, a sealing ring is arranged on one side of the furnace door, which faces away from the connecting plate, and the sealing ring is used for being in sealing connection with the furnace opening.

In one embodiment, the oven door assembly further comprises a driving mechanism, and the driving mechanism is in transmission connection with the connecting plate and is used for driving the connecting plate to drive the oven door to close or open the oven opening.

In addition, a vacuum device is also provided, which comprises the furnace door assembly in any embodiment.

According to the furnace door assembly, in actual operation, the connecting plate drives the furnace door to close or open the furnace opening of the vacuum cavity, and the furnace door has a certain degree of freedom relative to the connecting plate. When the furnace door assembly closes the furnace opening of the vacuum cavity, firstly, the connecting plate drives the furnace door to be just contacted with the furnace opening of the vacuum cavity. Then, the connecting plate drives the furnace door to tightly press the vacuum cavity, and because the contact surface of the furnace door and the contact surface of the furnace opening of the vacuum cavity have installation parallelism errors, the furnace door can overcome the elasticity provided by the elastic piece and float relative to the connecting plate under the action of the reaction force provided by the vacuum cavity, so that the angle of the furnace door pressed on the furnace opening of the vacuum cavity is dynamically adjusted to adapt to the installation parallelism error of the furnace opening of the vacuum cavity between the furnace openings, and the contact surface of the furnace door and the contact surface of the furnace opening of the vacuum cavity are completely and hermetically connected. Meanwhile, when the furnace door opens the furnace opening, the elastic piece can drive the furnace door to float relative to the connecting plate and return to the initial state.

Compared with the prior art, the parallelism of the contact surface of the furnace door and the furnace mouth of the vacuum cavity can be adaptively adjusted when the furnace door component is in contact with the furnace mouth of the vacuum cavity, so that a better sealing effect is achieved, the air leakage risk brought by poor sealing of the furnace mouth and the furnace door is reduced, the reliability of equipment is greatly improved, the verticality debugging link of a door closing track and the sealing surface of the furnace mouth is avoided, the installation precision of the furnace door is favorably reduced, and the installation efficiency is improved.

Drawings

Fig. 1 is an expanded view of a partial structure of a vacuum apparatus according to an embodiment of the present invention;

FIG. 2 is a front view of an oven door assembly of the vacuum apparatus shown in FIG. 1;

figure 3 is a cross-sectional view at a-a of the oven door assembly shown in figure 2;

figure 4 is an enlarged view at I of the oven door assembly shown in figure 3.

Description of reference numerals:

1. a vacuum device; 11. an oven door assembly; 111. a furnace door; 1111. a seal ring; 112. a connecting plate; 1131. connecting columns; 1132. an elastic member; 114. a drive mechanism; 1141. a drive transmission plate; 12. a vacuum chamber; 121. a furnace mouth; 122. and (4) a flange.

Detailed Description

In order to make the above objects, features and advantages of the present invention more comprehensible, embodiments of the present invention are described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein, as those skilled in the art will be able to make similar modifications without departing from the spirit and scope of the present invention.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like, indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.

In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

In the present application, unless expressly stated or limited otherwise, the first feature may be directly on or directly under the second feature or indirectly via intermediate members. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like as used herein are for illustrative purposes only and do not denote a unique embodiment.

Referring to fig. 1, 2 and 3, in one embodiment of the present invention, a furnace door assembly 11 is provided for opening or closing a furnace opening 121 of a vacuum chamber 12. The door assembly 11 includes a door 111, a connecting plate 112 and an elastic member 1132.

The connecting plate 112 is movably connected to one side of the oven door 111, and the connecting plate 112 is configured to drive the oven door 111 to close or open the oven opening 121. The elastic member 1132 is disposed between the oven door 111 and the connection plate 112 to provide an elastic force that tends to move the oven door 111 away toward the connection plate 112.

In the above-mentioned oven door assembly 11, during actual operation, the connecting plate 112 drives the oven door 111 to close or open the oven opening 121 of the vacuum chamber 12, and the oven door 111 has a certain degree of freedom relative to the connecting plate 112. In the process of closing the furnace door 111 to the furnace opening 121 of the vacuum chamber 12, the connecting plate 112 brings the furnace door 111 into contact with the furnace opening 121 of the vacuum chamber 12. Then, the connecting board 112 continues to advance to drive the oven door 111 to press the vacuum cavity 12, and because there is an installation parallelism error between the contact surface of the oven door 111 and the contact surface at the oven opening 121 of the vacuum cavity 12, the oven door 111 can overcome the elastic force provided by the elastic member 1132 and float relative to the connecting board 112 under the action of the reaction force provided by the vacuum cavity 12, so as to dynamically adjust the angle of the oven door 111 pressed on the oven opening 121 of the vacuum cavity 12, so as to adapt to the installation parallelism error between the oven opening 121 of the vacuum cavity 12 and the oven door 111, and thus, the contact surface of the oven door 111 and the contact surface of the oven opening 121 of the vacuum cavity 12 are completely and hermetically connected. Meanwhile, the elastic member 1132 may drive the oven door 111 to float relative to the connection plate 112 to return to the initial state when the oven door 111 opens the oven opening 121 (i.e., the oven door 111 is separated from the vacuum chamber 12).

Compared with the prior art, the parallelism of the contact surface between the furnace door 111 and the furnace mouth 121 of the vacuum cavity 12 can be adaptively adjusted when the furnace door assembly 11 contacts the furnace mouth 121 of the vacuum cavity 12, so that a better sealing effect is achieved, the risk of gas leakage caused by poor sealing between the furnace mouth 121 and the furnace door 111 is reduced, the reliability of the equipment is greatly improved, the verticality debugging link of a door closing track and the sealing surface of the furnace mouth 121 is avoided, the installation precision of the furnace door 111 is favorably reduced, and the installation efficiency is improved.

The embodiment of the utility model provides a furnace gate assembly 11, when using, through installing the verification many times and opening and shutting the door action repeatedly, leak the back and examine all once through furnace gate 111 closes, and vacuum reaches the technological requirement.

In some embodiments, the gap between the oven door 111 and the connection plate 112 is no greater than 5mm, for example, the gap between the oven door 111 and the connection plate 112 is 4 mm. Therefore, the purpose of self-adaptive adjustment of the sealing performance between the furnace opening 121 and the furnace door 111 can be achieved, the pressing strength of the furnace door 111 pressed at the furnace opening 121 can be ensured, and the reliability of sealing connection between the furnace door 111 and the furnace opening 121 is improved.

In some embodiments, referring to fig. 2 and 4, the oven door assembly 11 further includes a connecting column 1131, one of the oven door 111 and the connecting plate 112 has a guiding hole, the connecting column 1131 is disposed through the guiding hole, and the connecting column 1131 has a first end fixedly connected to the other of the oven door 111 and the connecting plate 112; there is a gap between the pilot hole and the connecting post 1131.

In actual use, because a gap is formed between the guide hole and the connecting column 1131, when the oven door 111 is not flat with the oven opening 121, the oven door 111 can move along the guide hole along with the connecting column 1131, and can swing with a small amplitude in the gap between the connecting column 1131 and the guide hole along with the connecting column 1131, so as to adjust the pressing angle of the oven door 111 and adapt to the installation parallelism error of the oven door 111 and the oven opening 121.

Further, the connecting column 1131 further includes a second end opposite to the first end thereof, the first end of the connecting column 1131 and the second end of the connecting column 1131 are respectively located at two opposite ends of the guide hole, and the second end of the connecting column 1131 is provided with a limit boss, and the radial size of the limit boss is greater than that of the guide hole.

In the time of in-service use, because the radial dimension of spacing boss is greater than the radial dimension of guiding hole, when furnace gate 111 opened fire door 121, elastic member 1132 drive furnace gate 111 kept away from the connecting plate 112 in order to reply to initial condition, the first end of spliced pole 1131 was kept away from the guiding hole gradually and spacing boss is close to the guiding hole gradually, and the distance that furnace gate 111 can keep away from this moment receives the restriction of spacing boss, so can avoid furnace gate 111 and connecting plate 112 to break away from.

In the embodiment, the first end of the connecting column 1131 is connected with the oven door 111 or the connecting plate 112 by screw threads, and the screw threads are reliable in structure, simple in structure and convenient to process

In practical use, the oven door 111 may be in threaded connection with the first end of the connecting column 1131, and the connecting plate 112 is provided with a guide hole. The first end of the connecting column 1131 is in threaded connection with the oven door 111, and the limit boss on the second end of the connecting column 1131 is positioned in the connecting plate 112, which helps to simplify the structure of the whole oven door 111.

In other embodiments, the first ends of the connecting columns 1131 can be fixedly connected to one of the oven door 111 and the connecting plate 112 by other methods, such as by interference fit, or by flat key.

In some embodiments, one end of the elastic member 1132 is fixedly connected to one of the connecting plate 112 and the oven door 111, and the other end of the elastic member 1132 abuts against the other of the connecting plate 112 and the oven door 111. In practical use, when the oven door 111 does not contact the oven opening 121 of the vacuum chamber 12, the elastic member 1132 is in a free state, and when the oven door 111 is pressed on the oven opening 121 of the vacuum chamber 12, the elastic member 1132 is in a compressed state; when the door 111 leaves the door 121 of the vacuum chamber 12, the elastic member 1132 drives the door 111 and the connecting plate 112 to return to the original state. One end of the elastic member 1132 is fixedly connected and the other end is abutted, and compared with the fixedly connected two ends, the structure can be simplified and the installation time can be shortened.

The elastic member 1132 may be a spring body, or an elastic member such as rubber.

In one embodiment, the resilient member 1132 is a resilient plunger. It is understood that the resilient plunger comprises a cylinder housing, a compression spring and an abutment; the column shell is provided with a cavity with one end opened, one end of the compression spring is connected with the inner wall of the column shell opposite to the opening, the other end of the compression spring extends towards the opening of the column shell and is connected with the abutting part, and the abutting part is driven to slide along the cavity when the compression spring deforms; the outer wall of the column shell is provided with a connecting part for fixedly connecting with one of the connecting plate 112 and the oven door 111111, and one end of the abutting part, which is far away from the compression spring, abuts against the other one of the connecting plate 112 and the oven door 111.

In practical use, when the oven door 111 floats to adjust the pressing angle, the oven door 111 or the connecting plate 112 acts on the abutting part, the compression spring is compressed through the abutting part, and the abutting part slides towards the inside of the cavity along with the compression of the compression spring; when the door assembly 11 is away from the door opening 121, the abutting portion moves toward a position away from the cavity along the cavity by a restoring force of the compression spring to push the door 111 and the connection plate 112 away from each other to an initial position.

The elastic plunger can be a commercially available product, and contributes to reduction of manufacturing cost and development cost.

Wherein, the compression spring can be fixedly connected with the inner wall of the column shell, and the abutting part is connected with the cavity in a sliding way; the compression spring can be abutted against the inner wall of the column shell, the position, located in the cavity, of the abutting part is provided with a limiting part, and when the abutting part slides to the position of the maximum floating gap along the cavity, the limiting part can be in limited abutting against the cavity. The specific form is determined according to the type of the elastic plunger, and is not limited herein.

In other embodiments, the elastic member 1132 may also be a spring sleeved on the connecting column 1131, and the spring is limited between the oven door 111 and the connecting plate 112.

In an embodiment, a mounting hole is formed in one of the oven door 111 and the connecting plate 112, and a fastening portion connected to the connecting portion on the outer wall of the column casing is formed in the mounting hole. At this time, the column housing is mounted in the mounting hole, and one end of the abutting portion extends out of the mounting hole and abuts against the other of the oven door 111 and the connecting plate 112. So, install the column casing in the mounting hole and be favorable to guaranteeing the installation stability of elasticity plunger.

Further, the connecting portion is an external thread, and the fixed connection portion is located in an internal thread of the external thread adaptation of the connecting portion. So, be convenient for installation, connect reliable and simple structure.

Further, one end of the abutting portion, which is used for abutting, is in a ball shape, and at this time, the abutting portion is in point contact with one of the oven door 111 or the connecting plate 112, which is beneficial to improving the self-adaptive effect of the oven door 111.

In some embodiments, the number of the connecting columns 1131 and the number of the elastic members 1132 are multiple, the connecting columns 1131 are uniformly arranged along the circumferential direction of the connecting plate 112, and the springs are uniformly arranged along the axial direction of the connecting plate 112. Therefore, in actual use, the included angle between the axial direction of each connecting column 1131 and the axial direction of the guide hole is different, and the compression deformation amount of each spring is different according to the different parallelism of each position, so that the retraction distance of each position of the furnace door 111 along the first direction is different, and the small-angle adjustment of the furnace door 111 is realized, the parallelism of the furnace door 111 and the furnace mouth 121 is adaptively adjusted, and the sealing effect is improved. In addition, set up a plurality of spliced poles 1131 and a plurality of elastic component 1132 both can make the furnace gate 111 pressure that receives everywhere even, also be favorable to guaranteeing operating stability.

In some embodiments, referring to fig. 1 and 3, a side of the oven door 111 facing away from the connection plate 112 is provided with a sealing ring 1111, the sealing ring 1111 being adapted to be in sealing connection with the oven opening 121. In practical use, the sealing ring 1111 contacts the fire door 121 and is in sealing connection with the fire door 121, and the sealing ring 1111 is an elastic member, so that the sealing connection between the fire door 121 and the fire door 111 is facilitated.

Further, the seal 1111 is an O-ring.

In some embodiments, referring to fig. 1, the oven door assembly 11 further includes a driving mechanism 114, and the driving mechanism 114 is in transmission connection with the connecting plate 112 for driving the connecting plate 112 to drive the oven door 111 to open or close the oven opening 121. In this way, the driving mechanism 114 drives the connecting plate 112 to move, which facilitates automation of the device compared with manual driving of the connecting plate 112.

In an embodiment, the driving mechanism 114 includes a driving transmission plate 1141 and a driving member, the driving member is in transmission connection with the driving transmission plate 1141, the driving transmission plate 1141 is connected with the connecting plate 112, and a longitudinal direction of the driving transmission plate 1141 is perpendicular to an axial direction of the oven door 111. In actual use, when the driving member drives the driving transmission plate 1141 to move along the first direction, the driving transmission plate 1141 is driven to move along the first direction to be close to or far away from the furnace opening 121.

Wherein, the driving piece can be a telescopic cylinder.

The driving plate 1141 is disposed vertically to the axis of the oven door 111, so that the driving member is located in a second direction perpendicular to the first direction of the oven door 111, which helps to simplify the structure of the vacuum apparatus 1.

Wherein the driving member may be a rodless cylinder, for example, a magnetic couple type rodless cylinder, and the driving transmission plate 1141 is mounted on a slider of the rodless cylinder.

The embodiment of the utility model provides a furnace gate subassembly 11, compared with the prior art, furnace gate subassembly 11 can the self-adaptation adjust the depth of parallelism of the contact surface of furnace gate 111 and the furnace gate 121 department of vacuum cavity 12 when contacting the furnace gate 121 department of vacuum cavity 12, and then reach better sealed effect, the gas leakage risk that furnace gate 121 and furnace gate 111 are sealed not well to take has been reduced, improve equipment's reliability greatly, and the straightness debugging link that hangs down of the sealed face of track of closing the door and furnace gate 121 has been avoided, be favorable to reducing the installation accuracy of furnace gate 111, and the installation effectiveness is improved.

And simultaneously, the utility model discloses in utilize connecting plate 112 to be connected with the power supply transmission, because the production requirement of connecting plate 112 is lower than furnace gate 111, consequently help reducing the plant maintenance cost low.

In addition, referring to fig. 1, the embodiment of the present invention further provides a vacuum apparatus 1, and the vacuum apparatus 11 includes the above-mentioned furnace door assembly 11. Since the vacuum device 1 includes the oven door assembly 11, the vacuum device has all the advantages of the oven door assembly 11, particularly, the oven door 111 has good sealing performance when closing the oven opening 121, and other advantages are not described herein again.

The vacuum apparatus 1 may be a PECVD apparatus, particularly a PECVD coating apparatus.

It is understood that the vacuum apparatus 1 includes a vacuum chamber 12, the vacuum chamber 12 has an oven port 121, and the oven port 111 of the oven port assembly 1111 is sealably connected to the oven port 121 to seal the vacuum chamber 12.

In some embodiments, a flange 122 is disposed at the furnace opening 121 of the vacuum chamber 12, and the furnace door 111 is sealably connected to an end surface of the flange 122. Specifically, the sealing ring 1111 of the oven door 111 is sealably connected with the end surface of the flange 122.

The technical features of the above embodiments can be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the above embodiments are not described, but should be considered as the scope of the present specification as long as there is no contradiction between the combinations of the technical features.

The above examples only represent some embodiments of the present invention, and the description thereof is more specific and detailed, but not to be construed as limiting the scope of the present invention. It should be noted that, for those skilled in the art, without departing from the spirit of the present invention, several variations and modifications can be made, which are within the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the appended claims.

Claims

1. An oven door assembly for closing or opening an oven opening, the oven door assembly comprising:

a furnace door;

2. The oven door assembly of claim 1, wherein a gap between the web and the oven door is less than or equal to 5 millimeters.

3. The oven door assembly of claim 1, further comprising a connecting column, wherein one of the oven door and the connecting plate has a guide hole, the connecting column is disposed through the guide hole, and the connecting column has a first end fixedly connected to the other of the oven door and the connecting plate;

wherein a gap is formed between the guide hole and the connecting column.

4. The oven door assembly of claim 3, wherein the attachment stud further comprises a second end opposite the first end, the first and second ends being located at opposite ends of the guide hole, respectively, and the second end having a stop boss with a radial dimension greater than a radial dimension of the guide hole.

5. The oven door assembly of claim 3, wherein the first end is threaded with the oven door or the web.

6. The oven door assembly of claim 1, wherein one end of the elastic member is fixedly connected to one of the connecting plate and the oven door, and the other end of the elastic member abuts against the other of the connecting plate and the oven door.

7. The oven door assembly of claim 5, wherein the resilient member is a resilient plunger.

8. The oven door assembly according to claim 1, characterized in that a side of the oven door facing away from the connection plate is provided with a sealing ring for sealing connection with the oven opening.

9. The oven door assembly of claim 1, further comprising a driving mechanism in transmission connection with the connecting plate for driving the connecting plate to drive the oven door to close or open the oven opening.

10. A vacuum apparatus, characterized in that it comprises a furnace door assembly according to any one of claims 1 to 9.