CN209854244U - Adaptive adjustment air inlet switching structure - Google Patents
Adaptive adjustment air inlet switching structure Download PDFInfo
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- CN209854244U CN209854244U CN201920409595.4U CN201920409595U CN209854244U CN 209854244 U CN209854244 U CN 209854244U CN 201920409595 U CN201920409595 U CN 201920409595U CN 209854244 U CN209854244 U CN 209854244U
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- 230000003044 adaptive effect Effects 0.000 title claims abstract description 17
- 238000007789 sealing Methods 0.000 claims abstract description 81
- 238000003825 pressing Methods 0.000 claims abstract description 22
- 238000009826 distribution Methods 0.000 claims abstract description 14
- 230000000694 effects Effects 0.000 abstract description 6
- 238000005229 chemical vapour deposition Methods 0.000 abstract description 4
- 238000009434 installation Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000003068 static effect Effects 0.000 description 3
- 238000005452 bending Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 210000001503 joint Anatomy 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
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Abstract
The utility model relates to a chemical vapor deposition equipment field discloses an adaptive control switching structure that admits air, include: a step hole arranged on the cavity door; the air inlet movable module is matched with the step hole, and the air inlet movable module is provided with a large round hole and a small round hole; the pressing plate is fixed on the cavity door and used for sealing the step hole, a plate hole and a gas pipeline connected with the gas distribution mechanism are arranged on the pressing plate, and the gas pipeline is communicated with the step hole through the plate hole; the spring is pressed on the air inlet movable module by the pressure plate; the air inlet is arranged on the cavity body and can be communicated with the small round hole; the first sealing ring seals the pressure plate and the cavity door; a second sealing ring sealing the pneumatic inlet module and the cavity door; and a third sealing ring for sealing the pneumatic module and the cavity body after the cavity door is closed. In this way, the utility model discloses can make many places sealed conflict not, guarantee everywhere sealed effect, basically eliminate because of the inside seal is bad to cause in the cavity gas leakage and influence the problem of film forming homogeneity.
Description
Technical Field
The utility model relates to a chemical vapor deposition equipment field especially relates to an adaptive control switching structure that admits air.
Background
In the chemical vapor deposition equipment, gas components enter a chamber in two modes according to different requirements of a processing technology. The first is entering from a static cavity body and belongs to static connection; the gas distribution mechanism in the mode is fixedly arranged on the inner wall of the cavity body, the cavity body is provided with a gas inlet communicated with the gas distribution mechanism, and the cavity body is fixed, so that the gas inlet is in static connection with the gas distribution mechanism. The second type is entering from a dynamic cavity door and belongs to dynamic connection; the gas distribution structure in the mode is fixedly arranged on the inner wall of the cavity door, and the cavity door is always opened and closed, so that the connection between the air inlet mechanism and the gas distribution mechanism is dynamic.
For the dynamic connection gas distribution mechanism, either a flexible connection or a gas switching module is used. The flexible connection has many defects such as air leakage, winding and the like in the using and maintaining processes, and is basically not used any more. The existing gas switching module is positioned in the cavity and connected with the inner side wall of the cavity body; when the cavity door is closed, the gas switching module is in plane butt joint with the cavity door and is communicated with the gas distribution mechanism; a plurality of seals are arranged between the gas switching module and the cavity door to prevent gas from leaking outside in the entering process; the cavity door and the cavity body are sealed, so that the sealing performance inside the cavity can be ensured in the working process. The two or more hard connecting structures adopting O-shaped ring sealing simultaneously are easy to leak gas in the working process of equipment, so that the uniformity of film forming can be influenced; because a plurality of sealing positions are required to be met simultaneously, the requirements on the processing precision and the assembling and matching precision of each part are higher; the gas switching module has larger volume, occupies the internal space of the cavity, needs to correspondingly increase the size of the cavity and has high equipment manufacturing cost; the structure is complicated, and the equipment degree of difficulty is high.
SUMMERY OF THE UTILITY MODEL
The utility model discloses the main technical problem who solves provides an adaptive control adapter structure that admits air, can make many places sealed conflict, guarantees everywhere sealed effect, does not influence the homogeneity of film forming.
In order to solve the technical problem, the utility model discloses a technical scheme be: provided is an adaptive adjustment air inlet switching structure, comprising:
the step hole is formed in the cavity door; the stepped hole comprises a large hole and a small hole, the large hole is communicated with the outer side of the cavity door, the small hole is communicated with the inner side of the cavity door, the inner diameter of the large hole is larger than that of the small hole, and an inner annular surface is formed between the large hole and the small hole;
the air inlet module is arranged in the step hole in a matched mode and comprises a large cylindrical part matched with the large hole and a small cylindrical part matched with the small hole, and an outer annular surface is formed between the large cylindrical part and the small cylindrical part; the end part of the large cylindrical part on the pneumatic inlet module is provided with a large round hole, the end part of the small cylindrical part on the pneumatic inlet module is provided with a small round hole, the inner diameter of the small round hole is smaller than that of the large round hole, and the small round hole is communicated with the large round hole;
the pressing plate is fixed on the outer side wall of the cavity door and seals the step hole; the pressure plate is provided with a plate hole communicated with the stepped hole and a gas pipeline connected with a gas distribution mechanism on the cavity door, and the gas pipeline is communicated with the stepped hole through the plate hole;
the spring is pressed on the air inlet module by the pressure plate; under the action of the spring, the outer annular surface abuts against the inner annular surface, and the end part of a small cylindrical part on the pneumatic inlet module protrudes out of the cavity door;
the air inlet is arranged on the cavity body, one end of the air inlet is communicated to the outside of the cavity body, and the other end of the air inlet is opposite to the small round hole; when the cavity door is closed, the air inlet is communicated with the small round hole;
the first sealing ring seals the pressing plate and the cavity door;
a second seal ring sealing the pneumatic feed module and the cavity door;
and the third sealing ring seals the air inlet module and the cavity body after the cavity body door is closed.
Preferably, a fourth sealing ring for sealing a gap between the cavity body and the cavity door when the cavity door is closed is arranged on the inner side wall of the cavity door or the outer side wall of the cavity body; the stepped hole is correspondingly positioned in the fourth sealing ring.
Preferably, one end of the spring abuts against the bottom of the large round hole, and the other end of the spring abuts against the pressing plate.
Preferably, the outer diameter of the spring is matched with the inner diameter of the large round hole.
Preferably, the axis of the small round hole and the axis of the large round hole are coincided with the axis of the air inlet module.
Preferably, the air inlet is positioned on the other side of the cavity body where the hinge is positioned; the air inlet may be particularly provided on a flange of the cavity body.
Preferably, one side of the first sealing ring is embedded and pressed on the pressing plate, and the other side of the first sealing ring protrudes out of the pressing plate and abuts against the cavity door.
Preferably, the second sealing ring is fixedly sleeved on the large cylindrical part, and the outer ring of the second sealing ring protrudes out of the outer side wall of the large cylindrical part and abuts against the large hole.
Preferably, there are two of the second sealing rings.
Preferably, one side of the third sealing ring is embedded and pressed on the end surface of the small cylindrical part, the other side of the third sealing ring protrudes out of the end surface of the small cylindrical part, and the third sealing ring can be abutted against the cavity body when the cavity body door is closed.
The utility model has the advantages that: the utility model can ensure that a plurality of sealing parts do not conflict, ensure the sealing effect at each part, and basically eliminate the problem that the film forming uniformity is influenced by air leakage in the cavity caused by poor internal sealing; the precision requirement on each part is low; the structure is simple, the installation is easy, the internal space of the cavity is not occupied, the size of the equipment is reduced, and the processing, manufacturing and manpower installation costs are reduced.
Drawings
Fig. 1 is a schematic cross-sectional view of a preferred embodiment of an adaptive air inlet adjusting adapter structure according to the present invention;
fig. 2 is a schematic diagram of a planar structure of the self-adaptive air inlet adjusting and switching structure of the present invention after the device is separated.
The parts in the drawings are numbered as follows: 11. a cavity body; 12. a cavity door; 13. a gas distribution mechanism; 14. a fourth seal ring; 15. a hinge; 2. a stepped bore; 21. an inner annular surface; 3. a pneumatic inlet module; 31. a large circular hole; 32. a small circular hole; 4. pressing a plate; 41. plate holes; 42. a gas line; 5. a spring; 6. an air inlet; 7. a first seal ring; 8. a second seal ring; 9. and a third sealing ring.
Detailed Description
The following detailed description of the preferred embodiments of the present invention will be provided in conjunction with the accompanying drawings, so as to enable those skilled in the art to more easily understand the advantages and features of the present invention, and thereby define the scope of the invention more clearly and clearly.
Referring to fig. 1 and 2, an embodiment of the present invention includes:
a self-adaptive air inlet adjusting and switching structure is applied to chemical vapor deposition equipment with an air distribution mechanism 13 arranged on a cavity door 12. The air inlet switching structure comprises: the pneumatic sealing device comprises an air inlet 6 arranged on a cavity body 11, an air inlet module 3 and a pressure plate 4 arranged on a cavity door 12, an air pipeline 42 connected with an air distribution mechanism 13, a spring 5 used for self-adaptive adjustment of the air inlet module 3, a first sealing ring 7 used for sealing between the pressure plate 4 and the cavity door 12, a second sealing ring 8 used for sealing between the air inlet module 3 and the cavity door 12, and a third sealing ring 9 used for sealing between the air inlet module 3 and the cavity body 11.
And a fourth sealing ring 14 for sealing a gap between the cavity body 11 and the cavity door 12 when the cavity body 12 is closed is arranged on the inner side wall of the cavity body 12 or the outer side wall of the cavity body 11. When the fourth sealing ring 14 is disposed on the inner sidewall of the chamber door 12, a sealed chamber is formed between the chamber door 12 and the chamber body 11 at a portion of the inner sidewall of the chamber door 12 surrounded by the fourth sealing ring 14. The cavity door 12 is provided with a step hole 2 for accommodating the air inlet pneumatic module 3, and the air inlet movable module 3 can be limited on the cavity door 12 by the step hole 2, so that the installation is convenient; the stepped hole 2 is correspondingly positioned in the fourth sealing ring 14, so that the air inlet movable module 3 can be positioned in the cavity, and the stability, reliability and safety of air inlet are ensured. The stepped hole 2 comprises a large hole and a small hole, the large hole is communicated with the outer side of the cavity body door 12, the small hole is communicated with the inner side of the cavity body door 12, the inner diameter of the large hole is larger than that of the small hole, and an inner annular surface 21 is formed between the large hole and the small hole.
The pneumatic feeding module 3 comprises a large cylindrical part matched with the large hole and a small cylindrical part matched with the small hole, and an outer annular surface is formed between the large cylindrical part and the small cylindrical part. A large round hole 31 is formed in the end part where the large cylindrical part is located on the air intake module 3, a small round hole 32 is formed in the end part where the small cylindrical part is located on the air intake module 3, the inner diameter of the small round hole 32 is smaller than that of the large round hole 31, and the small round hole 32 is communicated with the large round hole 31; the axis of the small round hole 32 and the axis of the large round hole 31 are coincident with the axis of the air inlet module 3.
The pressing plate 4 is fixedly installed on the outer side wall of the cavity door 12 through screws, and the pressing plate 4 seals the step hole 2; and a plate hole 41 communicated with the stepped hole 2 is formed in the pressure plate 4. The pressure plate 4 can limit the air inlet module 3 in the stepped hole 2, and the installation and the operation are convenient. The gas inlet end of the gas pipeline 42 is fixed on the pressing plate 4, the gas pipeline 42 is communicated with the plate hole 41, and the pressing plate 4 can be communicated with the stepped hole 2 and the gas pipeline 42, so that gas in the stepped hole 2 flows into the gas pipeline 42 and then enters the gas distribution mechanism 13.
The spring 5 is positioned between the air inlet module 3 and the pressing plate 4, one end of the spring 5 abuts against the bottom of the large circular hole 31, and the other end of the spring 5 abuts against the pressing plate 4, so that the fixing and mounting effects are good, and the operation is simple and convenient; under the action of the spring 5, the outer annular surface on the air inlet movable module 3 abuts against the inner annular surface 21 of the step hole 2, and the end part of the small cylindrical part on the air inlet movable module 3 protrudes out of the cavity door 12, so that the air inlet movable module 3 can adapt to the closed cavity door 12 and achieve the purpose of sealing at multiple positions without collision. The outer diameter of the spring 5 is matched with the inner diameter of the large round hole 31, so that the spring 5 can be limited in the large round hole 31 to prevent the middle part of the spring 5 from bending under the stress, and the elasticity of the spring 5 is ensured.
One end of the air inlet 6 is communicated with the outside of the cavity body 11, and the other end of the air inlet 6 is opposite to the small round hole 32; when the chamber door 12 is closed, the air inlet 6 is communicated with the small round hole 32, so as to be sequentially communicated with the large round hole 31, the large hole, the plate hole 41 and the gas pipeline 42. The air inlet 6 is positioned on the other side of the cavity body 11 where the hinge 15 is positioned, so that air can be conveniently introduced; the hinge 15 is a hinge structure connecting the chamber door 12 and the chamber body 11. The air inlet 6 can be specifically arranged on a flange of the cavity body 11, is convenient and easy to process, and can ensure the integral structural strength.
One side of the first sealing ring 7 is embedded and pressed on the pressing plate 4, and the other side of the first sealing ring 7 protrudes out of the pressing plate 4 and is abutted against the cavity door 12; can guarantee the leakproofness between step hole 2 and the diaphragm orifice 41, prevent that gas from leaking between step hole 2 and diaphragm orifice 41, when clamp plate 4 corresponds step hole 2 fixed mounting on cavity door 12 lateral wall, step hole 2 can directly seal the intercommunication with diaphragm orifice 41, simple to operate. The second sealing ring 8 is fixedly sleeved on the large cylindrical part, and the outer ring of the second sealing ring 8 protrudes out of the outer side wall of the large cylindrical part and abuts against the large hole; the sealing performance between the large hole and the large round hole 31 or between the large hole and the plate hole 41 can be ensured, namely, the large hole and the small hole are sealed and separated, and gas is prevented from leaking from the small hole; the number of the second sealing rings 8 is two, so that the large holes and the small holes can be better sealed and separated, and the sealing performance of the large holes is guaranteed. One end of the large hole is sealed by the large cylindrical part and the second sealing ring 8 and is only communicated with the large circular hole 31, and the other end of the large hole is sealed by the pressing plate 4 and the first sealing ring 7 and is only communicated with the plate hole 41. One side of the third sealing ring 9 is embedded and pressed on the end face of the small cylindrical part, the other side of the third sealing ring 9 protrudes out of the end face of the small cylindrical part, the third sealing ring 9 can be abutted against the cavity body 11 when the cavity door 12 is closed so as to ensure the sealing performance between the cavity body 11 and the air inlet movable module 3 after the cavity door 12 is closed, and further, the small round hole 32 is only communicated with the air inlet 6 after the cavity door 12 is closed, so that the air is prevented from leaking out between the air inlet movable module 3 and the cavity body 11. The first sealing ring 7, the second sealing ring 8, the third sealing ring 9 and the fourth sealing ring 14 are all O-shaped sealing rings; the O-shaped sealing ring is low in price, simple to manufacture, reliable in function and simple in installation requirement.
When the cavity door 12 is opened, the outer annular surface is abutted against the inner annular surface 21 under the action of the spring 5, and the end part of the small cylindrical part protrudes out of the inner side wall of the cavity door 12; when the cavity door 12 is closed, the pneumatic inlet module 3 is forced to overcome the elastic force of the spring 5 and move towards the direction of the pressure plate 4 until the third sealing ring 9 and the fourth sealing ring 14 are fully abutted against the cavity body 11 at the same time. The design of the pneumatic inlet module 3 and the spring 5 enables the third sealing ring 9 and the fourth sealing ring 14 to have respective sealing effects.
The utility model can ensure that a plurality of sealing parts do not conflict, ensure the sealing effect at each part, and basically eliminate the problem that the film forming uniformity is influenced by air leakage in the cavity caused by poor internal sealing; the precision requirement on each part is low; the structure is simple, the installation is easy, the internal space of the cavity is not occupied, the size of the equipment is reduced, and the processing, manufacturing and manpower installation costs are reduced.
The above only is the embodiment of the present invention, not limiting the patent scope of the present invention, all the equivalent structures or equivalent processes that are used in the specification and the attached drawings or directly or indirectly applied to other related technical fields are included in the patent protection scope of the present invention.
Claims (10)
1. An adaptive adjustment air intake changeover structure is characterized by comprising:
the step hole is formed in the cavity door; the stepped hole comprises a large hole and a small hole, the large hole is communicated with the outer side of the cavity door, the small hole is communicated with the inner side of the cavity door, the inner diameter of the large hole is larger than that of the small hole, and an inner annular surface is formed between the large hole and the small hole;
the air inlet module is arranged in the step hole in a matched mode and comprises a large cylindrical part matched with the large hole and a small cylindrical part matched with the small hole, and an outer annular surface is formed between the large cylindrical part and the small cylindrical part; the end part of the large cylindrical part on the pneumatic inlet module is provided with a large round hole, the end part of the small cylindrical part on the pneumatic inlet module is provided with a small round hole, the inner diameter of the small round hole is smaller than that of the large round hole, and the small round hole is communicated with the large round hole;
the pressing plate is fixed on the outer side wall of the cavity door and seals the step hole; the pressure plate is provided with a plate hole communicated with the stepped hole and a gas pipeline connected with a gas distribution mechanism on the cavity door, and the gas pipeline is communicated with the stepped hole through the plate hole;
the spring is pressed on the air inlet module by the pressure plate; under the action of the spring, the outer annular surface abuts against the inner annular surface, and the end part of a small cylindrical part on the pneumatic inlet module protrudes out of the cavity door;
the air inlet is arranged on the cavity body, one end of the air inlet is communicated to the outside of the cavity body, and the other end of the air inlet is opposite to the small round hole; when the cavity door is closed, the air inlet is communicated with the small round hole;
the first sealing ring seals the pressing plate and the cavity door;
a second seal ring sealing the pneumatic feed module and the cavity door;
and the third sealing ring seals the air inlet module and the cavity body after the cavity body door is closed.
2. The adaptive adjustment intake air changeover structure according to claim 1, wherein: a fourth sealing ring for sealing a gap between the cavity body and the cavity body when the cavity body is closed is arranged on the inner side wall of the cavity body or the outer side wall of the cavity body; the stepped hole is correspondingly positioned in the fourth sealing ring.
3. The adaptive adjustment intake air changeover structure according to claim 1, wherein: one end of the spring is abutted against the bottom of the large round hole, and the other end of the spring is abutted against the pressing plate.
4. The adaptive adjustment intake air changeover structure according to claim 3, wherein: the outer diameter of the spring is matched with the inner diameter of the large round hole.
5. The adaptive adjustment intake air changeover structure according to claim 1, 2, 3 or 4, wherein: the axis of the small round hole and the axis of the large round hole are coincided with the axis of the pneumatic feeding module.
6. The adaptive adjustment intake air changeover structure according to claim 1, 2, 3 or 4, wherein: the air inlet is positioned on the other side of the cavity body where the hinge is positioned; the air inlet may be particularly provided on a flange of the cavity body.
7. The adaptive adjustment intake air changeover structure according to claim 1, 2, 3 or 4, wherein: one side of the first sealing ring is embedded and pressed on the pressing plate, and the other side of the first sealing ring protrudes out of the pressing plate and abuts against the cavity door.
8. The adaptive adjustment intake air changeover structure according to claim 1, 2, 3 or 4, wherein: the second sealing ring is fixedly sleeved on the large cylindrical part, and the outer ring of the second sealing ring protrudes out of the outer side wall of the large cylindrical part and abuts against the large hole.
9. The adaptive control intake air changeover structure according to claim 8, wherein: the number of the second sealing rings is two.
10. The adaptive adjustment intake air changeover structure according to claim 1, 2, 3 or 4, wherein: one side of the third sealing ring is embedded and pressed on the end face of the small cylindrical part, the other side of the third sealing ring protrudes out of the end face of the small cylindrical part, and the third sealing ring can be abutted against the cavity body when the cavity body door is closed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920409595.4U CN209854244U (en) | 2019-03-28 | 2019-03-28 | Adaptive adjustment air inlet switching structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920409595.4U CN209854244U (en) | 2019-03-28 | 2019-03-28 | Adaptive adjustment air inlet switching structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209854244U true CN209854244U (en) | 2019-12-27 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920409595.4U Withdrawn - After Issue CN209854244U (en) | 2019-03-28 | 2019-03-28 | Adaptive adjustment air inlet switching structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209854244U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109825818A (en) * | 2019-03-28 | 2019-05-31 | 爱发科真空技术（苏州）有限公司 | A kind of automatic adjusument air inlet exchanging structure |
| CN112342530A (en) * | 2020-10-21 | 2021-02-09 | 南开大学 | Gravity-driven spatial resolution powder atomic layer deposition equipment, method and application |
-
2019
- 2019-03-28 CN CN201920409595.4U patent/CN209854244U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109825818A (en) * | 2019-03-28 | 2019-05-31 | 爱发科真空技术（苏州）有限公司 | A kind of automatic adjusument air inlet exchanging structure |
| CN109825818B (en) * | 2019-03-28 | 2024-01-23 | 爱发科真空技术（苏州）有限公司 | Self-adaptation regulation switching structure that admits air |
| CN112342530A (en) * | 2020-10-21 | 2021-02-09 | 南开大学 | Gravity-driven spatial resolution powder atomic layer deposition equipment, method and application |
| CN112342530B (en) * | 2020-10-21 | 2021-10-19 | 南开大学 | Gravity-driven spatial resolution powder atomic layer deposition equipment, method and application |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20191227 Effective date of abandoning: 20240123 |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20191227 Effective date of abandoning: 20240123 |
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| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |