CN214846067U - Grating waveguide element and near-to-eye display equipment - Google Patents

Grating waveguide element and near-to-eye display equipment Download PDF

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Publication number
CN214846067U
CN214846067U CN202121524081.7U CN202121524081U CN214846067U CN 214846067 U CN214846067 U CN 214846067U CN 202121524081 U CN202121524081 U CN 202121524081U CN 214846067 U CN214846067 U CN 214846067U
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grating
turning
light
incident
exit
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王丙杰
李会会
史晓刚
李双龙
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Beijing Xloong Technologies Co ltd
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Beijing Xloong Technologies Co ltd
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Abstract

The utility model discloses a grating waveguide element, which comprises an optical substrate, wherein the optical substrate comprises a first optical surface and a second optical surface parallel to the first optical surface; the first optical surface is provided with an incident grating, a first turning grating and a first emergent grating; the second optical surface is provided with a second turning grating and a second emergent grating, the structure has larger light beam expansion performance and can be adapted to a projection light beam system with a smaller exit pupil, so that the whole near-to-eye display device is smaller in size and weight and has higher light efficiency. The utility model also provides a near-to-eye display device, including above-mentioned grating waveguide component, the grating waveguide near-to-eye display device of this equipment mainstream has less volume and weight, higher light efficiency than present, and simple structure. The utility model discloses the effect is showing, is suitable for extensive popularization.

Description

Grating waveguide element and near-to-eye display equipment
Technical Field
The utility model relates to a grating waveguide technical field, in particular to, a grating waveguide component and near-to-eye display device.
Background
The grating waveguide display technology is to realize the incidence, turning and emergence of light rays by using a diffraction grating, realize light ray transmission by using the total reflection principle, transmit an image of a micro display to human eyes and further see a virtual image. The near-eye display device manufactured by the grating waveguide element usually uses LCOS or DMD as a micro display element, uses an LED light source as a light source to irradiate the micro display element to generate image light, and the image light is collimated by a relay collimating optical system and then coupled into a diffraction waveguide component. The LED light source is low in luminous efficiency, the brightness of a virtual image is limited, although the grating waveguide lens can be as thin as a common spectacle lens, the size and the weight of a projection system are large, and further application and development of the grating waveguide lens in the AR industry are limited. Therefore, the current grating waveguide near-eye display device is complex in system, large in volume and weight and not beneficial to practical use.
The grating structure is only manufactured on one side of the existing grating waveguide element, so that the light beam is only copied on the surface of one side with the grating in the transmission process, and is not copied on the surface of one side without the grating, so that the existing grating waveguide element has low light beam copying capability and insufficient light beam expansion capability, and is not suitable for a projection system of an ultra-fine light beam (or an ultra-small exit pupil). The reduction of the exit pupil (beam-thinning) is beneficial to the reduction of the volume and weight of the projection system, which makes the current grating waveguide component not beneficial to the further reduction of the volume and weight of the whole near-eye display system.
SUMMERY OF THE UTILITY MODEL
In view of the above-mentioned drawbacks, the present invention provides a grating waveguide device and a near-to-eye display device, so as to solve the problems of the prior art that the system is complicated, the volume and the weight are large, and the actual use is not facilitated; poor light beam replication capability and low transmission efficiency.
The utility model provides a grating waveguide component, include: an optical substrate comprising a first optical surface and a second optical surface parallel to the first optical surface; the first optical surface is provided with an incident grating, a first turning grating and a first emergent grating; and a second turning grating and a second emergent grating are arranged on the second optical surface.
Preferably, the first turning grating and the second turning grating are oppositely arranged; the first emergent grating and the second emergent grating are arranged oppositely.
Preferably, the first turning grating and the second turning grating are arranged in mirror symmetry; the first emergent grating and the second emergent grating are arranged symmetrically in a mirror direction.
Preferably, the grating groove directions of the first emergent grating and the second emergent grating are respectively perpendicular to the grating groove direction of the incident grating.
Preferably, the grating line groove directions of the first turning grating and the second turning grating respectively form a certain included angle with the grating line groove direction of the incident grating.
Preferably, the included angle is 45 degrees, 60 degrees or other angles.
Preferably, the incident grating is disposed above the first turning grating; the first exit grating is arranged on one side of the first turning grating.
The utility model also provides a near-to-eye display device, including above-mentioned arbitrary grating waveguide component.
Preferably, the method further comprises the following steps:
a light source generator for supplying a laser beam for displaying an image to the grating waveguide element;
the collimating lens is arranged at one side of the light source generator and is used for receiving and collimating the laser beam;
the MEMS galvanometer is used for receiving the collimated laser beam and reflecting the laser beam to the grating waveguide element;
and the controller is electrically connected with the light source generator and the MEMS galvanometer respectively.
Preferably, the light source generator is a monochromatic laser or a polychromatic laser.
According to the above technical scheme, the utility model provides a pair of grating waveguide component has bigger light beam expanding performance, can adapt the projection beam system of the less exit pupil to can make whole near-to-eye display device volume and weight littleer, still have higher light efficiency. The utility model also provides a near-to-eye display device based on above-mentioned grating waveguide component, the grating waveguide near-to-eye display device of present mainstream has less volume and weight, higher light efficiency, and simple structure. The utility model solves the problems of the prior art that the system is complex, the volume and the weight are large, and the actual use is not facilitated; poor light beam copying capability, low transmission efficiency, obvious effect and wide popularization.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a conventional grating waveguide element structure;
FIG. 2 illustrates the operation of a conventional grating waveguide;
FIG. 3 illustrates the operation of a conventional near-eye display device;
fig. 4 is a schematic structural diagram of a grating waveguide device according to an embodiment of the present invention;
FIG. 5 is a schematic front view of a grating waveguide element shown in FIG. 4;
FIG. 6 is a schematic diagram illustrating the process of transmitting and diffracting the diffracted light generated by the incident grating to the turning grating;
FIG. 7 is a schematic diagram illustrating the process of transmitting and diffracting the diffracted light generated by the turning grating to the exit grating;
FIG. 8 is a schematic diagram of the process of incident light beam propagating and being diffracted within the incident grating and the optical substrate;
fig. 9 is a schematic structural diagram of a near-eye display device according to an embodiment of the present invention;
fig. 10 is a schematic diagram of a MEMS galvanometer of the near-eye display device shown in fig. 9.
In FIGS. 1-10:
101. an existing optical substrate; 102. existing incident gratings; 103. existing turning gratings; 104. existing emergent gratings; 111. an incident beam; 112. an array of outgoing beams; 121. a microdisplay; 122. an LED light source; 123. a dioptric prism; 124. a relay collimating optical system; 201. an optical substrate; 202. an incident grating; 203a, a first turning grating; 203b, a second turning grating; 204a, a first emergent grating; 204b, a second emergent grating; 210. collimating the laser beam; 211. incident light; 212. an outgoing light array; 214. incident diffracted light; 216. inflected diffracted light; 220. the second diffracted light; 221. a first optical surface; 222. a second optical surface; 231. a light source generator; 232. a collimating lens; 233. MEMS galvanometers; 240. the human eye; 250. and a controller.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Near-eye display devices have evolved rapidly as virtual reality and augmented reality technologies have become recognized and accepted. The near-to-eye display in the augmented reality technology can superimpose a virtual image onto a real scene, and simultaneously has perspective characteristic, so that the normal observation of the real scene is not influenced. Various optical elements have been used to couple the virtual image into the human eye 240, including prisms, transflective lenses, free-form waveguides, mirror array waveguides, grating waveguides, etc.
Because the total reflection principle the same as that of the optical fiber technology is adopted, the grating waveguide display component can be made as light, thin and transparent as common spectacle lenses. And because the turning of the light is realized by the diffraction grating on the surface of the lens, the shape of the lens is basically irrelevant to the shape of the bottom plate, the lens is easy to manufacture in batches, and the production cost is low.
As shown in fig. 1 to 2, the entire element is composed of an existing optical substrate 101 and a grating on one side surface of the existing optical substrate 101. The grating is located on one of the surfaces of the existing optical substrate 101, and there are typically three grating regions: an existing entrance grating 102, an existing turning grating 103 and an existing exit grating 104. An incident beam 111 with image information from the projection system is projected onto the existing incident grating 102, and the existing incident grating 102 diffracts to generate a diffracted beam facing the y direction. When the diffracted light satisfies the total reflection condition of the conventional optical substrate 101, the light beam is reflected nearly without loss from the upper and lower surfaces in the substrate and propagates along the substrate. When the light beam enters the region of the conventional turning grating 103, the light beam is diffracted by the conventional turning grating 103 and is transmitted toward the conventional exit grating 104 while being transmitted in the y direction.
Since the diffracted light generated by the conventional incident grating 102 is reflected and transmitted many times in the region of the conventional turning grating 103, and the light beam is diffracted each time it is incident on the surface having the grating, a series of diffracted lights transmitted toward the conventional exit grating 104 are generated, i.e., the light beam is replicated in the y direction during the transmission of the light beam in the conventional turning grating 103. The series of diffracted lights generated by the conventional turning grating 103 are transmitted to the conventional exit grating 104, and are reflected and transmitted in the x direction in the region of the conventional exit grating 104, and are diffracted by the conventional exit grating 104 to generate diffracted lights, and the diffracted lights generated by the conventional exit grating 104 are guided out of the conventional optical substrate 101 without satisfying the total reflection condition of the conventional optical substrate, and enter the human eye 240 to be perceived.
Since the light propagating in the x direction in the waveguide element is reflected and propagated many times, diffraction occurs each time the light is incident on the surface of the existing exit grating 104, and therefore a series of diffracted lights are generated to be guided out of the substrate, that is, the light beam is replicated in the x direction during the propagation and diffraction process in the existing exit grating 104. During the propagation process of the grating waveguide, one incident beam 111 will be expanded in the y direction in the existing turning grating 103, and expanded in the x direction in the existing exit grating 104, so that one incident beam 111 will generate a beam array after passing through the grating waveguide element, and the grating waveguide realizes the amplification of the beam.
As shown in fig. 3, the microdisplay 121 of the conventional diffractive waveguide display device usually adopts an lcos (liquid Crystal on silicon) or dmd (digital micro mirror device) microdisplay chip, light emitted from the LED light source 122 is irradiated onto the microdisplay 121 through the prism 123, and an image is generated by the microdisplay 121 under the modulation effect, the image light is collimated by the relay collimating optical system 124 and enters the existing incident grating 102 of the grating waveguide element, and the diffraction angle of the specific order (usually ± 1 order) diffracted light generated by the existing incident grating 102 is larger than the critical angle of total reflection of the existing optical substrate 101, so that the diffracted light can be transmitted in the diffractive waveguide element without loss. When light is transmitted to the exiting grating 104, a portion of the light energy is diffracted out of the waveguide assembly and into the human eye 240, so that the human eye 240 perceives the light energy as a virtual image.
Example 1
Referring to fig. 4 to 8, an embodiment of a grating waveguide device according to the present invention will now be described. The grating waveguide element comprises an optical substrate 201 comprising a first optical surface 221 and a second optical surface 222 parallel to the first optical surface 221; the first optical surface 221 is provided with an incident grating 202, a first refractive index grating 203a and a first exit grating 204 a; the second turning grating 203b and the second exit grating 204b are disposed on the second optical surface 222.
For convenience of description, referring to fig. 4, a rectangular coordinate system is established with any point of a plane as an origin, the thickness direction of the optical substrate 201 as a Z-axis, the length direction of the optical substrate 201 as an X-axis, and the width direction of the optical substrate 201 as a Y-axis.
In this embodiment, the first turning grating 203a and the second turning grating 203b have substantially the same area shape and are oppositely disposed; the first exit grating 204a and the second exit grating 204b have substantially the same area shape and are oppositely disposed. The optical substrate 201 is generally a planar structure, and the material thereof may be optical material such as optical glass, optical plastic, etc.
Incident light 211 incident on the incident grating 202 generates incident diffracted light 214, and the incident diffracted light 214 satisfies the total reflection condition of the waveguide substrate and is reflected and transmitted in the y direction in the waveguide. When the incident diffracted light 214 propagates through the waveguide, it may be incident on the incident grating 202 again and diffracted, and second diffracted light 220 may be generated and guided out of the waveguide substrate. Energy is wasted because second diffracted light 220 cannot be transmitted to human eye 240.
Compared with the prior art, the grating waveguide component adopts a double-sided grating structure, namely, the structures of the turning grating and the emergent grating are arranged on the upper surface and the lower surface of the grating waveguide substrate, so that the density of the emergent light beam array 212 is effectively improved. Compared with the diffraction waveguide element structure in which the incident grating 202 is arranged on only one of the optical surfaces, the diffraction waveguide element structure in which the incident grating 202 is arranged on both sides of the optical surface has the advantages that as the incident diffraction light 214 is reflected and conducted in the area of the incident grating 202, the number of times of diffraction of the incident grating 202 is smaller, so that more energy is conducted to the turning grating and the area of the exit grating, the intensity of the exit light array 212 is higher, and the waveguide element efficiency is higher.
Because the outgoing light array 212 enters the human eye 240 and is sensed during the working process of the grating waveguide element, the distance between the adjacent light beams of the outgoing light array 212 needs to be smaller than the size of the human pupil, otherwise, the human eye 240 may not receive the outgoing light. The spacing between adjacent beams of exiting light array 212 depends on the beam diameter of incident light ray 211 and the density of exiting light array 212. Such a grating waveguide component can produce a denser array of outgoing light 212 than conventional grating waveguides, thus allowing operation with finer incident light. The finer incident light contributes to a reduction in the volume and weight of the projection system, and thus the grating waveguide element can make the grating waveguide near-eye display system smaller in volume and weight.
In the present embodiment, the grating groove direction of the incident grating 202 is along the x-axis direction, so that the incident light 211 generates diffracted light which is guided toward the first turning grating 203a and the second turning grating 203b along the y-direction, and the grating groove directions of the first exit grating 204a and the second exit grating 204b are respectively perpendicular to the grating groove direction of the incident grating 202, that is, the grating groove directions of the first exit grating 204a and the second exit grating 204b are along the y-axis direction, so that the light which is guided to the first exit grating 204a and the second exit grating 204b by the first turning grating 203a and the second turning grating 203b is diffracted and guided out of the grating waveguide.
In this embodiment, the grating line groove directions of the first turning grating 203a and the second turning grating 203b respectively form a certain included angle with the grating line groove direction of the incident grating 202, for example, the included angle is 45 degrees, 60 degrees or other angles, so that the diffracted light beam generated by the incident grating 202 is transmitted to the first turning grating 203a and the second turning grating 203b, and then is diffracted by the first turning grating 203a and the second turning grating 203b to generate the diffracted light transmitted toward the first exit grating 204a and the second exit grating 204 b. The incident grating 202 is arranged above the first refractive grating 203 a; the first exit grating 204a is disposed at one side of the first turning grating 203 a. It is to be understood that the terms "length," "width," "upper," "lower," "left," "right," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the present invention and to simplify the description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are not to be construed as limiting the present invention.
Incident light ray 211 is diffracted by incident grating 202, producing transmitted incident diffracted light 214. The incident diffracted light 214 is directed toward the first turning grating 203a and the second turning grating 203b, and when incident on the surface areas of the first turning grating 203a and the second turning grating 203b, the turning diffracted light 216 directed toward the first exit grating 204a and the second exit grating 204b is generated. Since most of the incident diffracted light 214 is reflected in the optical substrate 201 and transmitted continuously, except for a part of the energy-generating diffracted light 216, when the incident diffracted light 214 is incident on the substrate surface having the turning grating, the incident diffracted light 214 is diffracted multiple times in the first turning grating 203a and the second turning grating 203b to generate a plurality of turning diffracted light 216 transmitted toward the exit grating, i.e., the light beam is replicated and expanded in the y direction in the turning grating region.
In the present embodiment, the first turning grating 203a and the second turning grating 203b are arranged in mirror symmetry; the first exit grating 204a and the second exit grating 204b are arranged in mirror symmetry. The structure is characterized in that the turning gratings are arranged on the two surfaces of the waveguide substrate, and light beams incident to the two surfaces can generate diffracted light, so that the intensity of a plurality of beams of diffracted light which are generated by the turning gratings and face the emergent grating is obviously superior to that of the traditional grating waveguide under the condition of the same substrate thickness.
When the diffracted light 216 is transmitted to the first exit grating 204a, the transmitted diffracted light is generated and guided out of the grating waveguide element from the surface of the first exit grating 204 a. When the diffracted light 216 is transmitted to the second emission grating 204b, reflected diffracted light is generated, and the reflected diffracted light is guided out of the grating waveguide element through the optical substrate 201 and the first emission grating 204 a. When the inflected diffraction light 216 enters the substrate surface with the exit grating, most of the light energy will be reflected in the optical substrate 201 and will continue to be transmitted except for a part of the energy generated by the inflected diffraction light 216, so the inflected diffraction light 216 will be diffracted many times in the first exit grating 204a and the second exit grating 204b area, and the generated light array 212 will be guided out from the grating waveguide element, i.e. the inflected diffraction light 216 will realize the replication and expansion in the x direction in the exit grating area. In the structure, because the emergent gratings are arranged on both surfaces of the optical substrate 201, and the incident light beams on both surfaces can generate diffracted light, the intensity of a plurality of beams of diffracted light generated by the emergent gratings and emitted towards the outside of the grating waveguide element is obviously better than that of the traditional grating waveguide under the condition of the same substrate thickness.
Since the inflected diffraction light 216 is a plurality of beams of light arranged along the y direction, the inflected diffraction light 216 is replicated and expanded along the x direction in the exit grating area to form a beam array, and thus the exit array 212 of the grating waveguide is a beam array. That is, an incident ray 211 is expanded in both the x and y directions by the grating waveguide elements.
Example 2
Referring to fig. 4 to fig. 10, a description will now be given of an embodiment of a near-eye display device according to the present invention. A near-eye display device of the kind comprising a grating waveguide element as described in any one of the embodiments above; miniature projection systems with very small exit pupil diameters are also included, and may be, for example, MEMS (Micro-Electro-Mechanical System) laser projection systems. The MEMS laser scanning system has the advantage of compact structure, and can enable the diffraction waveguide display device to have smaller volume and lighter weight. The MEMS laser scanning system adopts a semiconductor laser as a light source, and the light efficiency of the MEMS laser scanning system is far higher than that of an LED light source adopted in the traditional diffraction waveguide display device. The MEMS laser scanning system is in an active illumination display mode, namely the brightness of a displayed image is directly adjusted by the brightness of a light source, and the corresponding light source output power can be reduced or even turned off in areas with darker brightness and black areas in the image. However, the conventional LCOS (Liquid Crystal On Silicon Liquid Crystal) and DMD (Digital Micromirror Device) technologies all adopt a passive illumination display mode, i.e., no matter how the brightness of the displayed image changes, the light source is required to be in a high-brightness working state. Therefore, the light efficiency can be further improved by adopting the MEMS laser scanning system, and the display contrast ratio is extremely high.
In the present embodiment, the micro projection system includes a light source generator 231, the light source generator 231 supplying a laser beam for displaying an image to the grating waveguide member; a collimating lens 232 disposed at one side of the light source generator 231 for receiving and collimating the laser beam; the MEMS galvanometer 233 is configured to receive the collimated laser beam and reflect the beam to the grating waveguide element; the controller 250 is electrically connected to the light source generator 231 and the MEMS galvanometer 233, respectively. The light source generator 231 is a monochromatic laser or a polychromatic laser. It is within the scope of the present disclosure that the above-mentioned performance functions of the light source generator 231, the collimating lens 232, the MEMS mirror 233 and the controller 250 can be realized.
The laser light emitted from the light source generator 231 is collimated by the collimating lens 232 to generate the collimated laser beam 210. The collimated laser beam 210 is incident on the MEMS galvanometer 233, and the incident light 211 generated by reflection by the MEMS galvanometer 233 is incident on the incident grating 202 of the grating waveguide element. After being guided and expanded by the grating waveguide elements, the resulting emitted light array 212 is perceived by the human eye 240.
The MEMS galvanometer 233 and the light source generator 231 are modulated by a controller 250, and the controller 250 controls the intensity of the light source generator 231. When the light source generator 231 is a color laser, the controller 250 may further control the color of the light source generator 231, and the controller 250 may control the MEMS galvanometer 233 such that the MEMS galvanometer 233 oscillates at a high speed along the α axis and the β axis according to a specific frequency, so that the incident light 211 is scanned according to a certain trajectory. The incident light ray 211 is scanned while its brightness and color are changed in harmony with each other by the modulation of the controller 250, thereby generating image information.
The system formed by combining the MEMS galvanometer 233 and the light source generator 231 is small in size and high in light efficiency. The beam diameter of the scanning incident light 211 is limited by the size of the MEMS galvanometer 233 and is usually small, which requires a grating waveguide element with strong beam expansion capability to work cooperatively, and the ordinary grating waveguide is difficult to meet the requirements. The grating waveguide element provided by the invention has strong light beam expansion capability and emergent light density, and can be well matched with the MEMS galvanometer 233 and the light source generator 231, so that the advantages of small system volume and high light efficiency are exerted.
Compared with the prior art, the near-to-eye display equipment adopts the form of an MEMS laser scanning system and a grating waveguide, namely the structural form of 1 laser, 1 collimating lens 232, 1 two-dimensional MEMS galvanometer 233 and the grating waveguide, so that the power consumption is reduced, and the volume and the weight of a display device are reduced; the MEMS galvanometer 233 reflects the scanned laser to directly enter the incident grating 202, so that the system is as simple as possible, and the volume and the weight are reduced to the maximum extent; the light efficiency is greatly improved and the density of the emergent light beams is greatly increased by adopting the forms of single incident grating, double refraction gratings and double emergent gratings.
The embodiments are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same or similar parts among the embodiments are referred to each other. Details not described in the embodiments of the present invention belong to the prior art known to those skilled in the art.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (10)

1. A grating waveguide element, comprising: an optical substrate (201), the optical substrate (201) comprising a first optical surface (221) and a second optical surface (222) parallel to the first optical surface (221); the first optical surface (221) is provided with an incident grating (202), a first turning grating (203 a) and a first emergent grating (204 a); the second optical surface (222) is provided with a second turning grating (203 b) and a second emergent grating (204 b).
2. A grating waveguide component according to claim 1, wherein the first turning grating (203 a) and the second turning grating (203 b) are located opposite to each other; the first exit grating (204 a) and the second exit grating (204 b) are arranged oppositely.
3. A grating waveguide component according to claim 1, wherein the first turning grating (203 a) and the second turning grating (203 b) are arranged mirror-symmetrically; the first emergent grating (204 a) and the second emergent grating (204 b) are arranged in mirror symmetry.
4. A grating waveguide component according to claim 1, characterized in that the grating groove directions of the first exit grating (204 a) and the second exit grating (204 b) are perpendicular to the grating groove direction of the entrance grating (202), respectively.
5. A grating waveguide component according to claim 1, wherein the grating groove directions of the first turning grating (203 a) and the second turning grating (203 b) are respectively at an angle with respect to the grating groove direction of the incident grating (202).
6. A grating waveguide element according to claim 5 wherein the included angle is 45 degrees or 60 degrees.
7. A grating waveguide component according to claim 1, wherein the incident grating (202) is disposed above the first turning grating (203 a); the first exit grating (204 a) is arranged on one side of the first turning grating (203 a).
8. A near-eye display device comprising the grating waveguide element of any one of claims 1 to 7.
9. A near-eye display device as recited in claim 8, further comprising:
a light source generator (231) for providing a laser beam for displaying an image to the grating waveguide element;
a collimating lens (232) disposed at one side of the light source generator (231) for receiving and collimating the laser beam;
a MEMS galvanometer (233) for receiving the collimated laser beam and reflecting the beam onto the grating waveguide element;
and the controller (250) is electrically connected with the light source generator (231) and the MEMS galvanometer (233) respectively.
10. A near-eye display device as claimed in claim 9, wherein the light source generator (231) is a monochromatic laser or a polychromatic laser.
CN202121524081.7U 2021-07-06 2021-07-06 Grating waveguide element and near-to-eye display equipment Active CN214846067U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115877560A (en) * 2023-03-08 2023-03-31 杭州光粒科技有限公司 Laser scanning imaging module, device and AR display equipment

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115877560A (en) * 2023-03-08 2023-03-31 杭州光粒科技有限公司 Laser scanning imaging module, device and AR display equipment
CN115877560B (en) * 2023-03-08 2023-06-16 杭州光粒科技有限公司 Laser scanning imaging module, device and AR display equipment

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