CN214836928U - High-viscosity efficient glue conveying pump - Google Patents
High-viscosity efficient glue conveying pump Download PDFInfo
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- CN214836928U CN214836928U CN202121627225.1U CN202121627225U CN214836928U CN 214836928 U CN214836928 U CN 214836928U CN 202121627225 U CN202121627225 U CN 202121627225U CN 214836928 U CN214836928 U CN 214836928U
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Abstract
The utility model discloses a high-efficient defeated gluey pump of high viscosity, include: the high-pressure vacuum pump comprises a pump body, wherein a feeding hole and a discharging hole are respectively formed in the left side wall and the right side wall of the pump body, a pressure sealing valve is respectively arranged on the feeding hole and the discharging hole, a soft piston made of polytetrafluoroethylene is arranged in the pump body in a sliding mode, a connecting groove is formed in the top of the soft piston, a connecting piece is embedded in the connecting groove, a sliding rod is arranged on the connecting piece, a sliding hole is formed in the upper side wall of the pump body, the sliding rod extends out of the pump body upwards after penetrating through the sliding hole, a threaded hole is formed in the sliding rod, a screw rod is connected into the threaded hole in a threaded mode, a connecting frame is arranged on the pump body, a servo motor is arranged on the connecting frame, and an output shaft of the servo motor is connected with the screw rod. The utility model has the advantages that: the servo motor is used as power, and the soft piston is driven to move in the pump body through thread transmission, so that the glue conveying precision and efficiency are improved, and the condition of medium leakage is avoided.
Description
Technical Field
The utility model relates to a high-efficient defeated gluey pump of high viscosity.
Background
In a semiconductor photoetching process, photoresist is required to be input into a photoetching machine through a photoresist pump, and then a wafer is coated by the photoetching machine. In the past, the occasions of using low-viscosity photoresist are more, so that the traditional pneumatic or hydraulic glue conveying pump can meet the production requirements, but due to the development of a new process, the occasions of using high-viscosity photoresist are more and more, when the traditional pneumatic or hydraulic glue conveying pump is used for conveying high-viscosity photoresist, higher loading force is needed for pushing, and gas and liquid media in the glue conveying pump are easy to leak after bearing excessive load for a long time, and the leaked gas and liquid media pollute the photoresist, so that the photoresist is scrapped.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a high-efficient glue pump of failing of high viscosity to improve the life to high viscosity photoresist conveying efficiency and improve glue pump of failing.
In order to achieve the above object, the utility model adopts the following technical scheme: a high viscosity, high efficiency glue delivery pump comprising: the pump body, be provided with feed inlet and discharge gate on the left and right sides lateral wall of the pump body respectively, be provided with a pressure seal valve on feed inlet and discharge gate respectively, the pressure seal valve includes: the T-shaped shell is provided with a cavity, the T-shaped shell is provided with a conical inlet and a cylindrical outlet which are connected with the cavity, the conical inlet and the cylindrical outlet are vertically arranged, balls are arranged in the cavity in a rolling manner, the cavity is connected with a spring, the balls abut against the spring, the balls are blocked at the conical inlet under the action of the elastic force of the spring, a feeding hole of the pump body is connected with the cylindrical outlet of the pressure sealing valve, and a discharging hole of the pump body is connected with the conical inlet of the pressure sealing valve; the soft piston is arranged in the pump body in a sliding mode and made of polytetrafluoroethylene, a main sealing portion and an auxiliary sealing portion are arranged on the outer edge of the soft piston, the main sealing portion and the auxiliary sealing portion are tightly attached to the inner side wall of the pump body, the cross section between the main sealing portion and the auxiliary sealing portion is of a V-shaped structure, a corrugated groove is formed in the bottom of the soft piston, a connecting groove is formed in the top of the soft piston, a connecting piece is inlaid in the connecting groove, a sliding rod is arranged on the connecting piece, a sliding hole is formed in the upper side wall of the pump body, the sliding rod stretches out of the pump body upwards after penetrating through the sliding hole, a threaded hole is formed in the sliding rod, a screw rod is connected in the threaded hole in a threaded mode, a connecting frame is arranged on the pump body, a servo motor is arranged on the connecting frame, and the output shaft of the servo motor is connected with the screw rod.
Further, the high-viscosity high-efficiency glue conveying pump is characterized in that a compensation groove is formed in the top of the soft piston, and a chrysanthemum spring plate is arranged in the compensation groove.
Further, the high-efficient glue pump of failing of high viscosity, wherein, be provided with the stopper on the inside wall in compensation groove, the stopper supports and leans on the roof of chrysanthemum shell fragment.
Further, the high-viscosity high-efficiency glue conveying pump is characterized in that a sliding plate is arranged on a sliding rod extending upwards out of the pump body.
Further, the high-viscosity high-efficiency glue conveying pump is characterized in that two guide posts are arranged between the pump body and the connecting frame, and the sliding plate is arranged on the two guide posts in a sliding manner.
Further, the high-viscosity efficient glue conveying pump is characterized in that a sealing ring is arranged in the sliding hole, and the outer side wall of the sliding rod is tightly attached to the sealing ring.
Further, aforementioned high-viscosity efficient glue conveying pump, wherein link to each other through the shaft coupling between servo motor's the output shaft and the screw rod.
The utility model has the advantages that: the servo motor is used as power, and the soft piston is driven to move in the pump body through thread transmission, so that the glue conveying precision and efficiency are improved, and the condition of medium leakage is avoided; the soft piston made of polytetrafluoroethylene has the characteristics of acid resistance, corrosion resistance and high temperature resistance, and the service life of the soft piston can be prolonged; the chrysanthemum spring plate is arranged on the soft piston, so that elasticity can be provided for the main sealing part, and when the main sealing part is slightly worn, a gap between the main sealing part and the pump body can be made up, so that the sealing property between the soft piston and the pump body is ensured; when the soft piston extrudes the high-viscosity photoresist, the high-viscosity photoresist fills and props up the thread groove, so that the sealing property between the sealing part of the soft piston pair and the pump body can be improved.
Drawings
Fig. 1 is a schematic structural view of a high-viscosity high-efficiency glue conveying pump of the present invention.
Fig. 2 is a schematic structural view of the high-viscosity high-efficiency glue pump during glue suction.
Fig. 3 is a schematic structural view of the high-viscosity high-efficiency glue-delivering pump during glue delivery.
Detailed Description
The technical solution of the present invention will be further explained with reference to the accompanying drawings and preferred embodiments.
As shown in figure 1, the utility model discloses a high-efficient defeated gluey pump of high viscosity, include: the pump body 1, there are feed inlet 11 and discharge gate 12 on the left and right sidewalls of the pump body 1 respectively, there is a pressure seal valve 2 on feed inlet 11 and discharge gate 12 respectively, the pressure seal valve 2 includes: the T-shaped shell 21 is provided with a cavity 22 in the T-shaped shell 21, a conical inlet 23 and a cylindrical outlet 24 which are connected with the cavity 22 are arranged on the T-shaped shell 21, the conical inlet 23 and the cylindrical outlet 24 are vertically arranged, balls 25 are arranged in the cavity 22 in a rolling mode, a spring 26 is connected in the cavity 22, the balls 25 abut against the spring 26, the balls 25 are blocked at the conical inlet 23 under the action of the elastic force of the spring 26, a feed port 11 of the pump body 1 is connected with the cylindrical outlet 24 of the pressure sealing valve 2, and a discharge port 12 of the pump body 1 is connected with the conical inlet 23 of the pressure sealing valve 2; the soft piston 3 made of polytetrafluoroethylene is arranged in the pump body 1 in a sliding mode, a main sealing portion 31 and an auxiliary sealing portion 32 are arranged on the outer edge of the soft piston 3, the main sealing portion 31 and the auxiliary sealing portion 32 are tightly attached to the inner side wall of the pump body 1, the cross section between the main sealing portion 31 and the auxiliary sealing portion 32 is of a V-shaped structure, a corrugated groove 33 is formed in the bottom of the soft piston 3, a compensation groove 34 is formed in the top of the soft piston 3, a chrysanthemum spring plate 4 is arranged in the compensation groove 34, a limiting block 35 is arranged on the inner side wall of the compensation groove 34, and the limiting block 35 abuts against the top wall of the chrysanthemum spring plate 4. The top of the soft piston 3 is also provided with a connecting groove, a connecting piece 5 is embedded in the connecting groove, a sliding rod 6 is arranged on the connecting piece 5, a sliding hole is formed in the upper side wall of the pump body 1, a sealing ring 13 is arranged in the sliding hole, the sliding rod 6 extends upwards out of the pump body 1 after penetrating through the sliding hole, the outer side wall of the sliding rod 6 is tightly attached to the sealing ring 13, a threaded hole 61 is formed in the sliding rod 6, a screw 7 is connected to the threaded hole 61 in a threaded manner, a connecting frame 8 is arranged on the pump body 1, a servo motor 81 is arranged on the connecting frame 8, the output shaft of the servo motor 81 is connected with the screw 7 through a coupler 71, a sliding plate 62 is arranged on the sliding rod 6 extending upwards out of the pump body 1, two guide posts 82 are arranged between the pump body 1 and the connecting frame 8, and the sliding plate 62 is arranged on the two guide posts 82 in a sliding manner.
The working principle of the utility model is as follows: as shown in fig. 2, when it is needed to suck the photoresist into the pump body 1 from the photoresist barrel, the servo motor 81 is started to drive the screw 7 to rotate reversely, the screw 7 rotating reversely drives the slide rod 6 to drive the soft piston 3 to move upwards in the pump body 1 through screw transmission, the soft piston 3 generates negative pressure in the pump body 1 during the upward movement, the ball 25 in the pressure sealing valve 2 at the discharge port 12 blocks the tapered inlet 23 under the dual action of the negative pressure and the spring 26, and the ball 15 in the pressure sealing valve 2 at the feed port 11 will overcome the elastic force of the spring 26 to release the tapered inlet 23 under the action of negative pressure, and the photoresist will enter the pump body 1 through the tapered inlet 23, the cylindrical outlet 24 and the feed port 11 under the action of negative pressure, in the process, the high viscosity photoresist pushes the ball 15 upwards, so that the ball 15 overcomes the elastic force of the spring 26 and completely loosens the tapered inlet 23. As shown in fig. 3, when the photoresist in the pump body 1 needs to be input into the lithography machine, the servo motor 81 is started to drive the screw rod 7 to rotate in a forward direction, the screw rod 7 rotating in the forward direction drives the sliding rod 6 to drive the soft piston 3 to move downward in the pump body 1 through screw transmission, the soft piston 3 will squeeze the photoresist in the pump body 1 during the downward movement, the ball 15 in the pressure sealing valve 2 at the feed port 11 blocks the tapered inlet 23 under the thrust of the photoresist and the elastic force of the spring 26, the ball 15 in the pressure sealing valve 2 at the discharge port 12 overcomes the elastic force of the spring 26 to release the tapered inlet 23 under the thrust of the photoresist, and the photoresist in the pump body 1 will enter the lithography machine through the discharge port 12, the tapered inlet 23 and the cylindrical outlet 24.
The utility model has the advantages that: the servo motor is used as power, and the soft piston is driven to move in the pump body through thread transmission, so that the glue conveying precision and efficiency are improved, and the condition of medium leakage is avoided; the soft piston made of polytetrafluoroethylene has the characteristics of acid resistance, corrosion resistance and high temperature resistance, and the service life of the soft piston can be prolonged; the chrysanthemum spring plate is arranged on the soft piston, so that elasticity can be provided for the main sealing part, and when the main sealing part is slightly worn, a gap between the main sealing part and the pump body can be made up, so that the sealing property between the soft piston and the pump body is ensured; when the soft piston extrudes the high-viscosity photoresist, the high-viscosity photoresist fills and props up the thread groove, so that the sealing property between the sealing part of the soft piston pair and the pump body can be improved.
Claims (7)
1. A high viscosity, high efficiency glue delivery pump comprising: the pump body is provided with feed inlet and discharge gate, its characterized in that respectively on the lateral wall about the pump body: the feed inlet and the discharge outlet are respectively provided with a pressure sealing valve, and the pressure sealing valves comprise: the T-shaped shell is provided with a cavity, the T-shaped shell is provided with a conical inlet and a cylindrical outlet which are connected with the cavity, the conical inlet and the cylindrical outlet are vertically arranged, balls are arranged in the cavity in a rolling manner, the cavity is connected with a spring, the balls abut against the spring, the balls are blocked at the conical inlet under the action of the elastic force of the spring, a feeding hole of the pump body is connected with the cylindrical outlet of the pressure sealing valve, and a discharging hole of the pump body is connected with the conical inlet of the pressure sealing valve; the soft piston is arranged in the pump body in a sliding mode and made of polytetrafluoroethylene, a main sealing portion and an auxiliary sealing portion are arranged on the outer edge of the soft piston, the main sealing portion and the auxiliary sealing portion are tightly attached to the inner side wall of the pump body, the cross section between the main sealing portion and the auxiliary sealing portion is of a V-shaped structure, a corrugated groove is formed in the bottom of the soft piston, a connecting groove is formed in the top of the soft piston, a connecting piece is inlaid in the connecting groove, a sliding rod is arranged on the connecting piece, a sliding hole is formed in the upper side wall of the pump body, the sliding rod stretches out of the pump body upwards after penetrating through the sliding hole, a threaded hole is formed in the sliding rod, a screw rod is connected in the threaded hole in a threaded mode, a connecting frame is arranged on the pump body, a servo motor is arranged on the connecting frame, and the output shaft of the servo motor is connected with the screw rod.
2. The high-viscosity high-efficiency glue conveying pump as claimed in claim 1, wherein: the top of the soft piston is provided with a compensation groove, and a chrysanthemum spring plate is arranged in the compensation groove.
3. The high-viscosity high-efficiency glue conveying pump as claimed in claim 2, wherein: be provided with the stopper on the inside wall in compensation groove, the stopper supports and leans on the roof of chrysanthemum shell fragment.
4. A high viscosity high efficiency glue delivery pump according to claim 1 or 2 or 3, characterized in that: a slide plate is arranged on the slide rod which extends out of the pump body upwards.
5. The high-viscosity high-efficiency glue conveying pump as claimed in claim 4, wherein: two guide posts are arranged between the pump body and the connecting frame, and the sliding plate is arranged on the two guide posts in a sliding manner.
6. A high viscosity high efficiency glue delivery pump according to claim 1 or 2 or 3, characterized in that: and a sealing ring is arranged in the sliding hole, and the outer side wall of the sliding rod is tightly attached to the sealing ring.
7. A high viscosity high efficiency glue delivery pump according to claim 1 or 2 or 3, characterized in that: the output shaft of the servo motor is connected with the screw through a coupler.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121627225.1U CN214836928U (en) | 2021-07-17 | 2021-07-17 | High-viscosity efficient glue conveying pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121627225.1U CN214836928U (en) | 2021-07-17 | 2021-07-17 | High-viscosity efficient glue conveying pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214836928U true CN214836928U (en) | 2021-11-23 |
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ID=78832722
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121627225.1U Active CN214836928U (en) | 2021-07-17 | 2021-07-17 | High-viscosity efficient glue conveying pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214836928U (en) |
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2021
- 2021-07-17 CN CN202121627225.1U patent/CN214836928U/en active Active
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