CN214824973U - Wafer carrying device - Google Patents

Abstract

The utility model relates to a wafer carrying device, which comprises a first cover body and a second cover body matched with the first cover body, wherein the inner sides of the first cover body and the second cover body are provided with a closed accommodating cavity for accommodating wafers; a limiting structure for limiting the wafer accommodated in the accommodating cavity is arranged in the second cover body; the first cover body comprises a first body and a first reinforcing structure arranged on the first body to reinforce the strength of the first body; and/or the second cover body comprises a second body and a second reinforcing structure arranged on the second body to reinforce the strength of the second body. The wafer carrying device can effectively prevent wafers from being polluted, and moreover, the strength of the whole wafer carrying device can be effectively enhanced by arranging the first reinforcing structure on the first body and/or arranging the second reinforcing structure on the second body.

Description

Wafer carrying device

Technical Field

The utility model relates to a wafer is stored and the transportation field, more specifically says, relates to a wafer carrier.

Background

The following disadvantages exist in the conventional wafer carrying device in the market:

1. the clearance between the wafer and the carrier is large during storage and transport.

2. The sealing structure is not perfect, or the wafer is polluted.

3. The overall strength is not sufficient, and the product can still be damaged when a part of customers draw vacuum or when the impact amplitude is large during transportation.

SUMMERY OF THE UTILITY MODEL

The to-be-solved technical problem of the present invention is to provide an improved wafer carrying device.

The utility model provides a technical scheme that its technical problem adopted is: constructing a wafer carrying device, which comprises a first cover body and a second cover body matched with the first cover body, wherein the inner sides of the first cover body and the second cover body are provided with accommodating cavities which are used for accommodating wafers and are closed;

a limiting structure for limiting the wafer accommodated in the accommodating cavity is arranged in the second cover body;

the first cover body comprises a first body and a first reinforcing structure arranged on the first body to reinforce the strength of the first body; and/or the second cover body comprises a second body and a second reinforcing structure arranged on the second body to reinforce the strength of the second body.

Preferably, the first body includes a first end wall, the first reinforcing structure including a first reinforcing component disposed on the first end wall;

the first reinforcing component comprises a first reinforcing boss which is arranged on the first end wall and protrudes outwards and/or a plurality of first reinforcing ribs which are arranged on the first end wall and are radially arranged.

Preferably, the first body further includes a first sidewall connected to the first end wall and enclosing the first end wall to form the accommodating cavity;

the first reinforcing structure comprises a second reinforcing component which is arranged on the first side wall and protrudes towards the accommodating cavity;

the second reinforcing assembly includes a plurality of second reinforcing ribs disposed at intervals circumferentially along the first sidewall.

Preferably, the second body comprises a second end wall; the second reinforcement structure includes a third reinforcement member disposed on the second end wall;

the third reinforcing component comprises a second reinforcing boss and/or a plurality of third reinforcing ribs, wherein the second reinforcing boss is arranged on the second end wall and protrudes towards the outer side, and the third reinforcing ribs are arranged on the second end wall and are radially arranged.

Preferably, the second body further includes a second sidewall connected to the second end wall and enclosing the second end wall to form the accommodating cavity;

the second reinforcing structure further comprises a fourth reinforcing component which is arranged on the second side wall and protrudes towards the accommodating cavity;

the fourth reinforcement assembly includes a plurality of fourth reinforcing ribs disposed at circumferentially spaced intervals along the second sidewall.

Preferably, the limiting structure comprises a plurality of limiting retaining walls which are arranged on the inner side of the second body and are arranged in a protruding manner along the direction matched with the first cover body;

the plurality of limiting retaining walls are arranged at intervals along the circumferential direction of the accommodating cavity;

the size of the cavity formed by enclosing the plurality of limiting retaining walls is gradually increased towards the direction matched with the first cover body.

Preferably, the limiting retaining wall is provided with a notch for enhancing the deformation force of the limiting retaining wall; the breach is close to spacing barricade with the second body department of meeting sets up.

Preferably, the second body comprises a second side wall; a gap is reserved between the limit retaining wall and the second side wall to form a limit groove matched with the first cover body;

the first cover body comprises a limiting boss which is arranged on the inner side of the first body and protrudes towards the direction matched with the second cover body so as to be inserted into the limiting groove;

one side of the limiting boss, which is opposite to the limiting retaining wall, is provided with a limiting convex rib which is matched with the limiting retaining wall for limiting;

the limiting convex rib is provided with a first guiding inclined plane for guiding the limiting retaining wall;

and a second guide inclined plane is arranged on one side of the limiting retaining wall opposite to the limiting convex rib.

Preferably, the first cover body and the second cover body are provided with connecting structures for detachably connecting the first cover body and the second cover body;

the first cover body comprises a sinking platform which is arranged on the first body and is positioned at the periphery of the accommodating cavity;

the second cover body comprises a boss which is arranged on the second body and is positioned on the periphery of the accommodating cavity; the boss is arranged corresponding to the sinking platform;

the connecting structure comprises a buckling hole which is arranged on the sinking platform and is communicated with the two ends of the sinking platform, and a clamping hook which is arranged on the boss and protrudes out of the boss so as to be matched with the buckling hole.

Preferably, the first cover body and the second cover body are provided with a first sealing structure for sealing and connecting the first cover body and the second cover body;

the first cover body comprises a first opening; the second cover body comprises a second opening which is arranged corresponding to the first opening; the first sealing structure comprises a first slot on the first body and positioned at the first opening, and a first inserting convex part arranged on the second body and positioned at the second opening and matched with the first slot;

and/or a second sealing structure for sealing and connecting the first cover body and the second cover body is arranged on the first cover body and the second cover body;

the first body comprises a first side wall; the second body comprises a second side wall which is arranged corresponding to the first side wall; the second sealing structure comprises a second inserting convex part and a second slot, the second inserting convex part is arranged on the first side wall and extends out along the direction matched with the second cover body, and the second slot is arranged on the second body and corresponds to the second inserting convex part;

and a position-giving opening for the second inserting convex part to be inserted into the second slot is formed in the second side wall.

Implement the utility model discloses a wafer shiies device has following beneficial effect: this wafer carrier is through the inboard holding wafer and inclosed holding chamber that forms at first lid and second lid to can prevent effectively that the wafer from being contaminated, moreover, through set up first additional strengthening on first body and/or set up the second additional strengthening on the second body, can effectively strengthen whole wafer carrier's intensity, can effectively prevent the carrier damage when some customers need inhale the vacuum, in addition, through set up limit structure in the second lid, can carry on spacingly to the wafer, realize the minimizing of the horizontal activity space of wafer, can effectual protection wafer.

Drawings

The invention will be further explained with reference to the drawings and examples, wherein:

fig. 1 is a schematic diagram of a wafer carrier according to some embodiments of the present invention;

FIG. 2 is an exploded view of the wafer carrier of FIG. 1;

fig. 3 is a schematic view of the first cover of the wafer carrier of fig. 2;

fig. 4 is a schematic view of another angle of the first cover of the wafer carrier of fig. 3;

fig. 5 is a schematic diagram of a second cover of the wafer carrier of fig. 2;

fig. 6 is a schematic view of another angle of the second cover of the wafer carrier of fig. 5;

fig. 7 is a top view of a loaded wafer of the second cover of the wafer carrier of fig. 6;

fig. 8 is a schematic view of the wafer carrier of fig. 7 with a second cover loaded with wafers;

fig. 9 is a partial cross-sectional view of the wafer carrier of fig. 1;

fig. 10 is an enlarged view of a portion of the wafer carrier of fig. 1;

fig. 11 is another partial cross-sectional view of the wafer carrier of fig. 1.

Detailed Description

In order to clearly understand the technical features, objects, and effects of the present invention, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

Fig. 1 and 2 illustrate some preferred embodiments of the wafer carrier of the present invention. The wafer carrier may be used to load wafers 100 to facilitate transportation and storage of the wafers 100. In some embodiments, the wafer carrier has the advantages of good sealing performance, high strength and capability of effectively protecting wafers.

Further, as shown in fig. 1 and 2, in some embodiments, the wafer carrier may include a first cover 10 and a second cover 20; the first cover 10 can be engaged with the second cover 20. In some embodiments, the first cover 10 can be detachably connected to the second cover 20. The first cover 10 and the second cover 20 are hollow inside. The first cover 10 and the second cover 20 may form a receiving cavity 30 inside, and the receiving cavity 30 may be used for receiving the wafer 100. The receiving chamber 30 may be a sealed chamber, so that the wafer 100 can be effectively prevented from being contaminated.

As shown in fig. 3 and 4, further, in some embodiments, the first cover 10 may include a first body 11 and a first reinforcing structure 12. The first body 11 may be substantially rectangular and has a hollow structure with a first opening on one side, and in some embodiments, the cross section of the first body 11 may be substantially square. The first reinforcing structure 12 can be disposed on the first body 11 for reinforcing the strength of the first body 11.

Further, in some embodiments, the first body 11 may include a first end wall 111, and a first side wall 112. The first end wall 111 may be rounded square. The first sidewall 112 may be disposed on the first end wall 111, may be connected to the first end wall 111, and may extend downward to form the accommodating cavity 30 with the first end wall 111. The number of the first sidewalls 112 may be four, and the longitudinal sections of the four first sidewalls 112 are substantially arc-shaped, and are not limited to be planar. In some embodiments, the first cover 10 further includes a sinking platform 113, in some embodiments, the sinking platform 113 may be disposed on the first body 11, and specifically, in some embodiments, the sinking platform 113 may be disposed at four corners of the first end wall 111 of the first body 11, which may be formed by downward recessing of the four corners of the first end wall 111, and may protrude toward the inner side of the first body 11, and are uniformly distributed on the outer periphery of the accommodating cavity 30.

Further, in some embodiments, the first reinforcing structure 12 may include a first reinforcing element 121, and the first reinforcing element 121 may be disposed on the first end wall 111. In some embodiments, the first reinforcement assembly 121 can include a first reinforcement boss 1211 and a first reinforcement rib 1212. Of course, it is understood that in other embodiments, the first reinforcement member 121 may include only the first reinforcement bosses 1211 or only the first reinforcement ribs 1212. Further, in some embodiments, the first reinforcing protrusion 1211 may have a circular ring shape and may be disposed in the middle of the first end wall 111. The first ribs 1212 may be disposed on the first end wall 111 and may be radially arranged on the outer circumference of the first reinforcing protrusion 1211, i.e., the first ribs 1212 may extend along the radial direction of the first reinforcing protrusion 1211. In some embodiments, the first reinforcing member 121 may further include a square boss 1213, the square boss 1213 may be disposed in the first reinforcing boss 1211, four corners of the square boss 1213 may be connected to the first reinforcing boss 1211, and a central hollow portion may be connected by disposing the first reinforcing rib 1212. The top surface of the direction boss 1213 may be a smooth plane to facilitate the attachment of a label. The first reinforcing protrusion 1211, the first reinforcing rib 1212, and the square protrusion 1213 may be integrally formed with the first end wall 111. Specifically, in some embodiments, the first reinforcing protrusion 1211, the first reinforcing rib 1212, and the square protrusion 1213 may be integrally formed with the first end wall 111 by injection molding. By providing the first reinforcing bosses 1211, the first reinforcing ribs 1212, and the square bosses 1213, and by providing the first reinforcing bosses 1211 at a higher height, and providing a greater number of the first reinforcing ribs 1212, the strength of the first cover 10 can be greatly enhanced. It is understood that in other embodiments, the first reinforcement member 121 may be omitted.

In some embodiments, the first reinforcing structure 12 may further include a second reinforcing element 122, and the second reinforcing element 122 may be disposed on the first sidewall 112 and may protrude toward the accommodating cavity 30. In some embodiments, the second reinforcing member 122 may include a second reinforcing rib 1221, and the second reinforcing rib 1221 may be in a strip shape, may be disposed along the longitudinal extension of the first sidewall 112, and may protrude toward the accommodating cavity 30. The second reinforcing rib 1221 may be a plurality of reinforcing ribs 1221, and the plurality of second reinforcing ribs 1221 may be arranged at intervals along the circumferential direction of the first side wall 112. The strength of the first sidewall 112 can be greatly enhanced by providing the plurality of second reinforcing ribs 1221, thereby enhancing the strength of the entire upper cover 10. Of course, it is understood that in other embodiments, the second reinforcement member 122 may be omitted.

Further, in some embodiments, the first cover 10 may further include a limiting protrusion 13, the limiting protrusion 13 may be disposed inside the first body 11, and specifically, the limiting protrusion 13 may be disposed to protrude from the first end wall 111 toward a direction in which the first cover 10 is engaged with the second cover 20. In some embodiments, the limiting protrusion 13 may be annular, and the receiving cavity 30 may be formed in the limiting protrusion 13. The limit boss 13 can be matched with the second cover body 20 for limiting. In some embodiments, the limiting protrusion 13 may be provided with a limiting rib 131, and the limiting rib 131 may be in a strip shape and may extend along the axial direction of the limiting protrusion 13. In some embodiments, the limiting rib 131 may be a plurality of limiting ribs 131, and the plurality of limiting ribs 131 may be arranged at intervals along the circumferential direction of the limiting boss 13. In some embodiments, the first guiding inclined surface 1311 may be disposed on the limiting rib 131, and the first guiding inclined surface 1311 may be disposed at one end of the limiting rib 131 facing the second cover 20 and may extend to a side of the limiting rib 131 opposite to the limiting boss 13.

As shown in fig. 5 to 8, further, in some embodiments, the second cover 20 may include a second body 21 and a second reinforcing structure 22. The second body 21 may be substantially rectangular and has a hollow structure with a second opening on one side, and in some embodiments, the cross section of the second body 21 may be substantially square. The second reinforcing structure 22 can be disposed on the second body 21 for reinforcing the strength of the second body 21.

In some embodiments, the second body 21 may include a second end wall 211 and a second side wall 212. In some embodiments, the second end wall 211 may be rounded square-shaped. The second sidewall 212 may be disposed on the second end wall 211, may be connected to the second end wall 211, and may extend upward to form the receiving cavity 30 with the second end wall 211. The number of the second sidewalls 212 may be four, and the longitudinal sections of the four second sidewalls 212 are substantially arc-shaped, and are not limited to be planar. In some embodiments, the second cover 10 further includes bosses 213, in some embodiments, the bosses 213 may be disposed on the second body 21, in particular, in some embodiments, the bosses 213 may be disposed at four corners of the second end wall 211 of the second body 21, and may be disposed to protrude from the four corners of the second end wall 211 toward the second opening of the second body 21 and may be uniformly distributed at the periphery of the receiving cavity 30, in particular, in some embodiments, the bosses 213 may be formed by four corners of the bottom surface of the second end wall 211 being recessed. In some embodiments, the bosses 213 may be disposed in a one-to-one correspondence with the sinking platform 113, and when the first cover 10 and the second cover 20 are closed, the space between the bosses 213 and the sinking platform 113 may form finger positions 14, and the finger positions 14 may facilitate the user to carry the wafer carrier. In some embodiments, four top corners of the first sidewall 112 of the first body 11 are recessed inward to form first engagement grooves 1123, and four top corners of the second sidewall 212 of the second body 21 are recessed inward to form second engagement grooves 2123; the first engaging groove 1123 and the second engaging groove 2123 are correspondingly disposed, and an engaging flange 2123 may be disposed at an end of the second engaging groove 2123 connected to the first engaging groove 1123. When the first cover 10 and the second cover 20 are closed, the first engaging groove 1123 and the second engaging groove 2123 are integrally connected by the engaging flange 2123, so that the whole appearance is more beautiful and the edge is smoother.

Further, in some embodiments, the second reinforcement structure 22 may include a third reinforcement element 221, and the third reinforcement element 221 may be disposed on the second end wall 211. In some embodiments, the third reinforcement assembly 221 can include a second reinforcement boss 2211 and a third reinforcement bar 2212. Of course, it is to be understood that in other embodiments, the third reinforcement assembly 221 may include only the second reinforcement boss 2211 or only the third reinforcement bar 2212. In some embodiments, the second reinforcement boss 2211 may be a circular boss and may be disposed in the middle of the second end wall 211. The number of the third reinforcing ribs 2212 may be multiple, and the plurality of the third reinforcing ribs 2212 may be disposed on the second end wall 211 and radially arranged on the outer circumference of the second reinforcing boss 2211, i.e., may extend along the radial direction of the second reinforcing boss 2211. In some embodiments, the second reinforcing protrusion 2211 and the third reinforcing rib 2212 can reinforce the strength of the second end wall 211, and thus the second cover 20. In some embodiments, the second reinforcing boss 2211 and the third reinforcing rib 2212 can be integrally formed with the second end wall 211, and in particular, in some embodiments, the second reinforcing boss 2211 and the third reinforcing rib 2212 can be integrally formed with the second end wall 211 by injection molding. In some embodiments, the second reinforcement projection 2211 is formed to be higher, and a plurality of third reinforcement ribs 2212 are formed, so that the strength of the second cover body 20 can be increased.

Further, in some embodiments, the second reinforcing structure 22 may further include a fourth reinforcing element 222, and the fourth reinforcing element 222 may be disposed on the second sidewall 212 and may protrude toward the accommodating cavity 30. In some embodiments, the third reinforcing member 222 can include a plurality of fourth reinforcing ribs 2221, and the plurality of fourth reinforcing ribs 2221 can be spaced apart along the circumference of the second sidewall 212. The fourth reinforcing rib 2221 may have a bar shape, and the fourth reinforcing rib 2221 may be disposed to extend in the longitudinal direction of the second side wall 212. The strength of the second sidewall 212 can be greatly enhanced by the fourth reinforcing rib 2221, so as to enhance the strength of the second cover 20. It is to be appreciated that in some embodiments, the fourth reinforcement member 222 may be omitted.

As shown in fig. 9 to 11, in some embodiments, a limiting structure 23 is disposed in the second cover 20, and the limiting structure 23 can limit the wafer 100 accommodated in the accommodating chamber 30. In some embodiments, the retaining structure 23 may include a plurality of retaining walls 231, the retaining walls 231 may be disposed inside the second body 21, and specifically, in some embodiments, the retaining walls 231 may be disposed to protrude from the second end wall 211 of the second body 21 toward the direction matching with the first cover 10, and may be disposed at intervals along the circumferential direction of the receiving cavity 30, which may be used to retain the wafer 100, limit the horizontal movement space of the wafer 100, and minimize the horizontal movement space of the wafer 100, thereby effectively protecting the wafer 100. In some embodiments, the retaining wall 231 may be curved. The size of the cavity surrounded by the plurality of retaining walls 231 may be gradually increased toward the direction of matching with the first cover 10, so that the user may conveniently and quickly pick up and store the wafer 100. In some embodiments, the retaining wall 231 may be provided with a notch 2311, and the notch 2311 may be used to enhance the deformation force of the retaining wall 231, so as to facilitate the retaining wall 231 to swing, so as to better retain the wafer 100. In some embodiments, the position-limiting notch 2311 may be a V-shaped notch, may be disposed near the connection between the position-limiting wall 231 and the second body 21, and may open on the side wall of the position-limiting wall 231. In some embodiments, the position-limiting projection 13 can cooperate with the position-limiting wall 231 to limit the position of the first cover 10 and the second cover 20. A gap is left between the retaining wall 231 and the second end wall 212, the gap can form a retaining groove 24, the retaining groove 24 can cooperate with the first cover 10 for retaining, specifically, in some embodiments, the retaining boss 13 can be inserted into the retaining groove 24 to cooperate with the retaining wall 231 for retaining. In some embodiments, the position-limiting rib 131 may be disposed on a side of the position-limiting projection 13 opposite to the position-limiting retaining wall 231 and cooperate with the position-limiting retaining wall 231 for limiting. Further, in some embodiments, a guide slope 2312 may be disposed on a side of the retaining wall 231 opposite to the retaining rib 131, and the guide slope 2312 may be used to guide the insertion of the retaining rib 131 into the retaining groove 24. When the first cover 10 and the second cover 20 are closed, the first guiding inclined surface 1311 of the limiting rib 131 is guided by the second guiding inclined surface 2312 of the limiting wall 231, and the limiting rib 131 can straighten the limiting wall 231 in the downward process, so that the upper and lower inner diameters of the cavity formed by the enclosing of the limiting wall 231 are consistent, which is beneficial to realizing zero movement of the wafer 100, thereby better protecting the wafer 100.

Further, in some embodiments, a connection structure may be disposed on the first cover 10 and the second cover 20. The connecting structure can be used to detachably connect the first cover 10 and the second cover 20. The connecting structure may include a snap hole 1131, and a hook 25. The fastening hole 1131 may be disposed on the sinking platform 113, and may be disposed through two ends. The hooks 25 can be disposed on the bosses 213, and can protrude from the bosses 213, and can be disposed corresponding to the fastening holes 1131. The protrusion 213 can effectively shorten the length of the hook 25, thereby enhancing the strength of the hook 25. In some embodiments, when the first cover 10 is covered with the second cover 20, the hook 25 can be inserted into the fastening hole 1131 to fasten with the fastening hole 1131, so as to connect the first cover 10 with the second cover 20, thereby enhancing the stability after the first cover 10 and the second cover 20 are covered. In some embodiments, the hook 25 may include a first hook 251 and a second hook 252. The first hook 251 and the second hook 252 may be different hooks. The number of the first hooks 251 can be two, and the two first hooks 251 can be distributed on the diagonal of the second body 21. The number of the second hooks 252 may be two, and the two second hooks 252 may be distributed on the other diagonal line of the second body 21. The second hook 252 may have a rectangular notch 2521 at a middle portion of a sidewall thereof, and the rectangular notch 2521 may extend toward the boss 213. The first hooks 251 and the second hooks 252 are provided to provide directionality to the assembly of the first cover 10 and the second cover 20.

Further, in some embodiments, a first sealing structure is disposed on the first cover 10 and the second cover 20. The first sealing structure can be used to seal the first cover 10 and the second cover 20. In some embodiments, the first sealing structure may include a first insertion slot 1121 and a first insertion protrusion 2121. The first slot 1121 may be disposed on the first body 11 and may be located at the first opening. In some embodiments, the first slot 1121 can be disposed along the edge of the first sidewall 112. The first inserting protrusion 2121 can be disposed on the second body 21 and can be located at the second opening, in some embodiments, the first inserting protrusion 2121 can be disposed along the edge of the second sidewall 212 and can protrude from the second sidewall 212 and can be disposed corresponding to the first slot 1121, and when the first cover 10 and the second cover 20 are closed, the first inserting protrusion 2121 can be inserted into the first slot 1121. It will be appreciated that in other embodiments, the first sealing structure may be omitted.

Further, in some embodiments, a second sealing structure may be disposed on the first cover 10 and the second cover 20, and the second sealing structure may be used to seal the first cover 10 and the second cover 20 together. In some embodiments, the second sealing structure may include a second mating protrusion 1122 and a second slot 2111. The second inserting protrusion 1122 can be disposed on the first sidewall 112, and specifically, the second inserting protrusion 1122 can be disposed along the edge of the first sidewall 112 and extend toward the direction of engaging with the second cover 20. The second slot 2111 may be disposed on the second body 21 and may be disposed corresponding to the second inserting protrusion 1122. In some embodiments, the second slot 2111 may be disposed on the inner side of the second end wall 211 and may be disposed near the second side wall 212, and may be formed by a space left between a rib disposed on the inner side of the second end wall 211 and the second side wall 212. In some embodiments, an abdication hole 2122 may be formed on the second sidewall 212, and the abdication hole 2122 may be disposed corresponding to the second insertion protrusion 1122 for inserting the second insertion protrusion 1122 into the second slot 2111. When the first cover 10 and the second cover 20 are closed, the second inserting protrusion 1122 can block the relief opening 2122, so as to effectively prevent the wafer 100 from being contaminated, thereby protecting the wafer. In some embodiments, the relief opening 2122 can also form a hand position for a user to open the first cover 10 and the second cover 20.

Further, in some embodiments, the boss 213 may have a first through hole 2131 and a second through hole 2132. The first through hole 2131 may be a square hole, and is located at the root of the second hook 252 and located at a side of the second hook 252 opposite to the accommodating cavity 30. The second through hole 2132 may be disposed on each of the bosses 213, and the second through hole 2132 may be a circular through hole, or two circular through holes, which may be distributed at intervals on two opposite sides of the hook 25. In some embodiments, a third through hole 2133 may be further disposed on the boss 213. The third through hole 2133 may be opened at the root of the first hook 251 and located at a side of the first hook 251 opposite to the accommodating cavity 30, so as to enhance the elasticity of the first hook 251, and make it easier to be inserted into the fastening hole 1131. The third through hole 2133 may be a rectangular hole, which may be disposed through the boss 213. In some embodiments, the first through hole 2131, the second through hole 2132, and the third through hole 2133 can facilitate drainage during the screening process, preventing product pooling. In some embodiments, the boss with the second hook 252 may be provided with a positioning slot 2134 and a storage slot 2135, and both the positioning slot 2134 and the storage slot 2135 may be rectangular slots. The retention slot 2134 allows the product to be securely held in the user's machine, and the storage slot 2135 allows the user to insert items when desired.

The specific use method of the wafer carrying device comprises the following steps:

storing the wafer:

as shown in fig. 8, the second cover 20 is first horizontally placed on the platform, a plurality of wafer isolation rings 200 are first slowly placed in the second cover 20 along the position-limiting retaining wall 231 of the second cover 20, then the wafer 100 is placed, the wafer isolation rings 200 and the wafer 100 are sequentially stacked according to requirements, finally a corresponding number of wafer isolation rings 200 are placed at the top according to requirements, the second insertion boss 1122 of the first cover 10 is aligned with the second slot 2111 of the second cover 20 to be covered, the hook 25 in the second cover 20 passes through the buckle hole 1131 of the first cover 10, and the two thumbs slightly press along opposite angles, so that the first hook 251 and the second hook 252 of the second cover 20 are sequentially clamped into the sinking platform 113 of the first cover 10.

Picking up the wafer:

as shown in fig. 8, the utility model discloses to have placed wafer 100 at first places on the platform, and then the thumb of both hands is placed respectively on two pothooks 25 of second lid 20 symmetry, and other four fingers are pressed in second lid 20 bottom, and two thumbs outwards make power for first trip 251 breaks away from detaining hole 1131, and the same method breaks away from detaining hole 1131 with second trip 252, and perhaps makes second trip 252 break away from detaining hole 1131 earlier, makes first trip 251 break away from detaining hole 1131 again, takes up first lid 10 again, takes off first lid 10 and carries subassembly and wafer 100 in the device in proper order.

It is to be understood that the foregoing examples merely represent preferred embodiments of the present invention, and that the description thereof is more specific and detailed, but not intended to limit the scope of the invention; it should be noted that, for those skilled in the art, the above technical features can be freely combined, and several modifications and improvements can be made without departing from the concept of the present invention, which all belong to the protection scope of the present invention; therefore, all changes and modifications that come within the meaning and range of equivalency of the claims are to be embraced within their scope.

Claims (10)

1. The wafer carrying device is characterized by comprising a first cover body (10) and a second cover body (20) matched with the first cover body (10), wherein an accommodating cavity (30) which is used for accommodating a wafer (100) and is closed is formed on the inner sides of the first cover body (10) and the second cover body (20);

a limiting structure (23) for limiting the wafer (100) accommodated in the accommodating cavity (30) is arranged in the second cover body (20);

the first cover body (10) comprises a first body (11) and a first reinforcing structure (12) which is arranged on the first body (11) to reinforce the strength of the first body (11); and/or the second cover body (20) comprises a second body (21) and a second reinforcing structure (22) arranged on the second body (21) to reinforce the strength of the second body (21).

2. The wafer carrier of claim 1, wherein the first body (11) comprises a first end wall (111), the first reinforcement structure (12) comprising a first reinforcement member (121) disposed on the first end wall (111);

the first reinforcing assembly (121) comprises a first reinforcing boss (1211) which is arranged on the first end wall (111) and protrudes outwards and/or a plurality of first reinforcing ribs (1212) which are arranged on the first end wall (111) and are distributed in a radial mode.

3. The wafer carrier according to claim 2, wherein the first body (11) further comprises a first sidewall (112) connected to the first end wall (111) and enclosing the first end wall (111) to form the receiving cavity (30);

the first reinforcing structure (12) comprises a second reinforcing component (122) which is arranged on the first side wall (112) and is convexly arranged towards the accommodating cavity (30);

the second reinforcement assembly (122) includes a plurality of second reinforcing beads (1221) circumferentially spaced along the first sidewall (112).

4. The wafer carrier of claim 1, wherein the second body (21) comprises a second end wall (211); -said second reinforcing structure (22) comprises a third reinforcing component (221) arranged on said second end wall (211);

the third reinforcing assembly (221) comprises a second reinforcing boss (2211) which is arranged on the second end wall (211) and protrudes towards the outer side, and/or a plurality of third reinforcing ribs (2212) which are arranged on the second end wall (211) and are radially arranged.

5. The wafer carrier as claimed in claim 4, wherein the second body (21) further comprises a second sidewall (212) connected to the second end wall (211) and enclosing the second end wall (211) to form the receiving cavity (30);

the second reinforcing structure (22) further comprises a fourth reinforcing component (222) which is arranged on the second side wall (212) and is convexly arranged towards the accommodating cavity (30);

the fourth reinforcement assembly (222) includes a plurality of fourth reinforcing ribs (2221) circumferentially spaced along the second sidewall (212).

6. The wafer carrier device according to claim 1, wherein the retaining structure (23) comprises a plurality of retaining walls (231) disposed inside the second body (21) and protruding in a direction toward the first cover (10);

the plurality of limiting retaining walls (231) are arranged at intervals along the circumferential direction of the accommodating cavity (30);

the size of a cavity formed by enclosing the limiting retaining walls (231) is gradually increased towards the direction matched with the first cover body (10).

7. The wafer carrier as claimed in claim 6, wherein the retaining wall (231) is provided with a notch (2311) for enhancing the deformation force of the retaining wall (231); the notch (2311) is close to the joint of the limit retaining wall (231) and the second body (21).

8. The wafer carrier of claim 6, wherein the second body (21) comprises a second sidewall (212); a gap is reserved between the limit retaining wall (231) and the second side wall (212) to form a limit groove (24) matched with the first cover body (10);

the first cover body (10) comprises a limiting boss (13) which is arranged on the inner side of the first body (11) and protrudes towards the direction matched with the second cover body (20) so as to be inserted into the limiting groove (24);

one side of the limiting boss (13) opposite to the limiting retaining wall (231) is provided with a limiting convex rib (131) matched with the limiting retaining wall (231) for limiting;

the limiting convex rib (131) is provided with a first guiding inclined plane (1311) for guiding the limiting retaining wall (231);

and a second guide inclined plane (2312) is arranged on one side of the limiting retaining wall (231) opposite to the limiting convex rib (131).

9. The wafer carrier of claim 1, wherein the first cover (10) and the second cover (20) are provided with a connecting structure for detachably connecting the first cover (10) and the second cover (20);

the first cover body (10) comprises a sinking platform (113) which is arranged on the first body (11) and is positioned at the periphery of the accommodating cavity (30);

the second cover body (20) comprises a boss (213) which is arranged on the second body (21) and is positioned on the periphery of the accommodating cavity (30); the boss (213) is arranged corresponding to the sinking platform (113);

the connecting structure comprises a buckling hole (1131) which is arranged on the sinking platform (113) and is communicated with the two ends of the sinking platform and a clamping hook (25) which is arranged on the boss (213) and protrudes from the boss (213) and is matched with the buckling hole (1131).

10. The wafer carrier of claim 1, wherein the first cover (10) and the second cover (20) are provided with a first sealing structure for sealing the first cover (10) and the second cover (20) together;

the first cover (10) comprises a first opening; the second cover body (20) comprises a second opening which is arranged corresponding to the first opening; the first sealing structure comprises a first insertion groove (1121) which is arranged on the first body (11) and is positioned at the first opening, and a first insertion convex part (2121) which is arranged on the second body (21) and is positioned at the second opening and matched with the first insertion groove (1121);

and/or a second sealing structure for sealing and connecting the first cover body (10) and the second cover body (20) is arranged on the first cover body (10) and the second cover body (20);

the first body (11) comprises a first side wall (112); the second body (21) comprises a second side wall (212) arranged in correspondence with the first side wall (112); the second sealing structure comprises a second inserting convex part (1122) which is arranged on the first side wall (112) and extends out along the direction matched with the second cover body (20), and a second slot (2111) which is arranged on the second body (21) and corresponds to the second inserting convex part (1122);

and an abdicating opening (2122) for the second inserting convex part (1122) to be inserted into the second slot (2111) is formed in the second side wall (212).

Images