CN214809072U - Photoresist stripping liquid waste liquid filtering equipment - Google Patents
Photoresist stripping liquid waste liquid filtering equipment Download PDFInfo
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- CN214809072U CN214809072U CN202121018769.8U CN202121018769U CN214809072U CN 214809072 U CN214809072 U CN 214809072U CN 202121018769 U CN202121018769 U CN 202121018769U CN 214809072 U CN214809072 U CN 214809072U
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Abstract
The utility model belongs to the technical field of photoresist stripping liquid treatment, and discloses a photoresist stripping liquid waste liquid filtering device, which comprises a vertically arranged liquid storage tank, wherein the liquid storage tank is of a box structure with an opening at the top end, and two ends of the liquid storage tank are respectively provided with a liquid inlet and a liquid outlet; a horizontally arranged partition plate is arranged in the liquid storage tank, the partition plate divides the inner cavity of the liquid storage tank into an upper cavity and a lower cavity, a suction filtration device which penetrates through the partition plate and is communicated with the upper cavity is arranged in the lower cavity of the liquid storage tank, a filtration unit is arranged in the upper cavity of the liquid storage tank, a stirring device is also arranged in the upper cavity of the liquid storage tank, and the filtration unit is arranged between the stirring device and the suction filtration device; the utility model provides a filter membrane among the current device change inconvenient, the low problem of recovery efficiency.
Description
Technical Field
The utility model relates to a photoresist stripper handles technical field, concretely relates to photoresist stripper waste liquid filtration equipment.
Background
In the manufacturing process of the technologies such as a printed circuit board, a liquid crystal display panel, a semiconductor integrated circuit and the like, a plurality of precise microcircuits are formed on a silicon wafer or a glass substrate through the processes of mask irradiation exposure, etching and the like, and after the microcircuits are formed, photoresist which is coated on a microcircuit protection area and serves as a mask is further removed by photoresist stripping liquid; the photoresist stripping solution used in industry is mainly a composition of organic amine and a polar organic solvent, the photoresist is stripped and removed through a swelling and dissolving mode, a large amount of photoresist stripping solution is used, a large amount of photoresist stripping solution waste liquid is also generated, and the photoresist stripping solution waste liquid contains a small amount of polymer resin and a photosensitizer, and most of the photoresist stripping solution with recycling value, so the photoresist stripping solution is usually recycled.
The process of recovering the photoresist stripping solution is complex, and relates to a plurality of processes such as distillation, separation, additive supplement and the like, the photoresist in the waste liquid is usually removed by filtering for many times in the separation process, the filtering process usually adopts filter membranes with different diameters of filter holes for filtering, but the photoresist is polymer and is very easy to block the filter membranes and the filter holes, the filter membranes in the existing device are very inconvenient to replace, and the recovery efficiency of the photoresist is greatly influenced.
SUMMERY OF THE UTILITY MODEL
For solving the problem that exists among the prior art, the utility model provides a photoresist stripper waste liquid filtration equipment that filter effect is good, filtration efficiency is high.
In order to achieve the above purpose, the technical scheme of the utility model is that:
a photoresist stripper waste liquid filtering device comprises a vertically arranged liquid storage tank, wherein the liquid storage tank is of a cylindrical structure with an opening at the top end, a liquid inlet and a liquid outlet are respectively arranged at two ends of the liquid storage tank, the liquid inlet is arranged close to the top end of the liquid storage tank, and the liquid storage tank is arranged close to the bottom end of the liquid storage tank; the liquid storage tank is internally provided with a horizontally arranged partition plate, the partition plate divides an inner cavity of the liquid storage tank into an upper cavity and a lower cavity, the lower cavity of the liquid storage tank is internally provided with a suction filtration device which penetrates through the partition plate and is communicated with the upper cavity, the upper cavity of the liquid storage tank is internally provided with a filtration unit, the upper cavity of the liquid storage tank is also internally provided with a stirring device, and the filtration unit is arranged between the stirring device and the suction filtration device.
Furthermore, the filtering unit is arranged in a rectangular drawer shape, the filtering unit is inserted into the liquid storage tank, and a sealing element and a fastening element are arranged between the filtering unit and the liquid storage tank.
Furthermore, the filtering unit is provided with three layers, including a filtering layer, an adsorption layer and a suction filtration layer which are sequentially arranged from top to bottom, wherein the filtering layer is provided with a filter screen, the adsorption layer is provided with active carbon, and the suction filtration layer is provided with a filter membrane.
Further, agitating unit is equipped with the stand of vertical setting including setting up the top cap on stock solution jar top below the top cap, and the cover is equipped with the puddler on the stand, is equipped with the rotatory rotating electrical machines of drive puddler on the top cap, and the rotating electrical machines sets up on the top cap.
Furthermore, the stirring rod comprises a sleeve sleeved on the stand column, the sleeve can rotate around the axis of the sleeve, four L-shaped rods are uniformly distributed on the outer ring of the sleeve, an annular positioning boss is arranged on the stand column, and the sleeve is arranged between the positioning boss and the top plate.
Furthermore, the suction filtration device comprises a plug body which is arranged in the upper chamber of the liquid storage tank and is in sliding connection with the liquid storage tank, the plug body is of a cylindrical structure, a sealing ring is arranged on the outer ring of the plug body and is arranged between the plug body and the inner wall of the liquid storage tank, the bottom end of the plug body is connected with a lifting device, and the lifting device penetrates through the partition plate and is arranged in the lower chamber of the liquid storage tank.
Further, the lifting device is a lead screw lifting device or an air cylinder or a hydraulic cylinder.
Further, the top cover is detachably connected with the liquid storage tank through a knob.
Further, the liquid inlet and the liquid outlet are both provided with valves for controlling the on-off of the liquid inlet and the liquid outlet, the liquid inlet is arranged above the filtering unit, and the liquid outlet is arranged between the partition board and the filtering unit.
Furthermore, one side of any filter unit is provided with a handle.
Compared with the prior art, the beneficial effects of the utility model are that:
the utility model discloses set up the multilayer and be the filter unit of drawer form, be equipped with the multilayer filtering layer in the filter unit, the filter effect is better, and the filter unit can pull out and put back into in the stock solution jar, thereby made things convenient for the device to change the filter membrane greatly and collected the filter residue, and simultaneously, the device has set up the suction filtration device in the bottom, suction filtration and filter unit's cooperation through the suction filtration device are used, can peel off the liquid to the photoresist fast and filter, decoloration and get rid of metal ion, the photoresist after filtering peels off the liquid and carries down one process rapidly through the liquid outlet, the work efficiency is greatly improved.
Drawings
FIG. 1 is an exploded view of the present invention;
fig. 2 is a schematic three-dimensional structure of the present invention;
fig. 3 is a half sectional view of the present invention.
In the figure: knob 1, top cap 2, rotating electrical machines 3, stand 4, puddler 5, liquid storage pot 6, filter layer 7, adsorbed layer 8, suction filtration layer 9, handle 10, cock body 11, sealing washer 12, baffle 13, elevating gear 14, inlet 15, liquid outlet 16.
Detailed Description
In order to make the technical solution of the present invention better understood by those skilled in the art, the present invention is further explained below with reference to the accompanying drawings.
Example 1
Referring to fig. 1-3, a photoresist stripper waste liquid filtering apparatus comprises a vertically arranged liquid storage tank 6, the liquid storage tank 6 is a cylindrical structure with an open top end, a horizontally arranged partition plate 13 is arranged in the liquid storage tank 6, the partition plate 13 divides an inner cavity of the liquid storage tank 6 into an upper cavity and a lower cavity, one side of the liquid storage tank 6 close to the top end of the liquid storage tank 6 is provided with a radially arranged liquid inlet 15, one side of the liquid storage tank 6 close to the bottom end of the liquid storage tank 6 is provided with a radially arranged liquid outlet 16, the liquid outlet 16 is arranged above the partition plate 13, the liquid inlet 15 and the liquid outlet 16 are both communicated with the upper cavity, and valves for controlling the opening and closing of passages of the liquid inlet 15 and the liquid outlet 16 are arranged on the liquid inlet 15 and the liquid outlet 16.
The stirring device is arranged at the opening at the top end of the liquid storage tank 6 and comprises a top cover 2 arranged at the top end of the liquid storage tank 6, the top cover 2 is of a disc-shaped structure, and the top cover 2 is detachably connected with the liquid storage tank 6 through four knobs 1 which are uniformly arranged; a vertical column 4 is arranged below the top cover 2, the vertical column 4 is of a cylindrical structure coaxially arranged with the top cover 2, and a stirring rod 5 is sleeved on the outer ring of the vertical column 4; the stirring rod 5 comprises a cylindrical sleeve, the outer wall of the sleeve is provided with an external thread which is vertically arranged, and four L-shaped rods are uniformly distributed on the outer ring of the sleeve; the upright post 4 is also provided with an annular positioning boss, the stirring rod 5 is arranged between the top cover 2 and the positioning boss, and the positioning boss and the top cover 2 jointly limit the axial displacement of the stirring rod 5 on the upright post 4; the stirring device further comprises a rotating motor 3 vertically arranged on the top surface of the top cover 2, an output shaft of the rotating motor 3 penetrates through the top cover 2 to be provided with a gear matched with the stirring rod 5, and the gear is arranged below the top cover 2.
The upper chamber of the liquid storage tank 6 is also provided with a filtering unit, the filtering unit is arranged between the liquid inlet 15 and the liquid outlet 16, the filtering unit is in a rectangular drawer-shaped structure, one side of the filtering unit is provided with a handle 10, the middle section of the liquid storage tank 6 is in a rectangular structure matched with the filtering unit, one side of the liquid storage tank 6 is also provided with an opening for the filtering unit to be drawn out and placed back into the liquid storage tank 6, the filtering unit is spliced with the liquid storage tank 6, and the liquid storage tank 6 is in a closed box body structure when the filtering unit is placed back into the liquid storage tank 6; the filtering unit is provided with three layers, including a filtering layer 7, an adsorption layer 8 and a suction filtration layer 9 which are sequentially arranged from top to bottom, wherein the filtering layer 7 is provided with a filter screen, the adsorption layer 8 is provided with active carbon, and the suction filtration layer 9 is provided with a filter membrane; and a sealing element and a fastening element are arranged between the filtering unit and the liquid storage tank 6, and when the filtering unit is placed back into the liquid storage tank 6, the position of the filtering unit is fixed and a gap between the filtering unit and the liquid storage tank is sealed through the fastening element and the sealing element, so that the photoresist stripping liquid in the liquid storage tank 6 is prevented from leaking.
A suction filtration device is arranged in the lower cavity of the liquid storage tank 6, the suction filtration device comprises a plug body 11 which is arranged in the upper cavity of the liquid storage tank 6 and is in sliding connection with the liquid storage tank 6, the plug body 11 is of a cylindrical structure, an annular sealing ring 12 is arranged on the outer ring of the plug body 11, the sealing ring 12 is arranged between the plug body 11 and the inner wall of the liquid storage tank 6, the bottom end of the plug body 11 is connected with a lifting device 14, the lifting device 14 penetrates through a partition plate 13 and is arranged in the lower cavity of the liquid storage tank 6, and the lifting device 14 is a screw rod lifting device 14; the position is an initial position when the lifting device 14 drives the plug body 11 to rise above the liquid outlet 16, the position is a lower limit position when the lifting device 14 drives the plug body 11 to fall to a plane where the top surface of the plug body 11 and the lowest point of the inner wall of the liquid outlet 16 are located, and at the moment, liquid which is subjected to suction filtration can be discharged through the liquid outlet 16.
The utility model discloses a use does: in the initial position, the plug body 11 is located above the liquid outlet 16, and the liquid outlet 16 is in a closed state; filtering, opening a valve of the liquid outlet 16, and allowing the photoresist stripping liquid waste liquid to enter the upper chamber through the liquid inlet 15; opening the stirring device, and stirring the stripping liquid waste liquid by the stirring device to prevent filter residues accumulated above the filter layer 7 from blocking the topmost filter layer 7; the photoresist waste liquid reaches the suction filter layer 9 after being filtered by the filter layer 7 and adsorbed by the adsorption layer 8; the suction filtration device is opened, the lifting device 14 drives the plug body 11 to descend, and the liquid subjected to suction filtration is gradually accumulated on the plug body 11; the plug body 11 moves to a lower limit position, at the moment, the passage of the liquid outlet 16 is opened, and the filtrate enters the next working procedure through the liquid outlet 16; when filter residues of the filter layer need to be cleaned or activated carbon needs to be replaced, only the filter unit needs to be drawn out to replace consumables, then the filter unit is placed back into the liquid storage tank 6, a gap between the liquid storage tank 6 and the filter unit is sealed through a sealing piece, and the filter unit is fixed through a fastening piece.
Example 2
A photoresist stripper waste liquid filtering device is different from the device in embodiment 1 only in that a telescopic hydraulic cylinder is adopted as a lifting device 14, the hydraulic cylinder is vertically arranged, and a piston rod of the hydraulic cylinder penetrates through a partition plate 13 and extends into an upper chamber to be connected with a plug body 11.
Example 3
A photoresist stripper waste liquid filtering device is different from the device in embodiment 1 only in that a telescopic cylinder is adopted as a lifting device 14, the cylinder is vertically arranged, and a piston rod of the cylinder penetrates through a partition plate 13 and extends into an upper chamber to be connected with a plug body 11.
Claims (10)
1. A photoresist stripping liquid waste liquid filtering device is characterized by comprising a vertically arranged liquid storage tank, wherein the liquid storage tank is of a box body structure with an opening at the top end, and a liquid inlet and a liquid outlet are respectively arranged at two ends of the liquid storage tank; the liquid storage tank is internally provided with a horizontally arranged partition plate, the partition plate divides an inner cavity of the liquid storage tank into an upper cavity and a lower cavity, the lower cavity of the liquid storage tank is internally provided with a suction filtration device which penetrates through the partition plate and is communicated with the upper cavity, the upper cavity of the liquid storage tank is internally provided with a filtration unit, the upper cavity of the liquid storage tank is also internally provided with a stirring device, and the filtration unit is arranged between the stirring device and the suction filtration device.
2. The apparatus of claim 1, wherein the filter unit is in the form of a drawer, and the filter unit is inserted into the liquid storage tank.
3. The apparatus as claimed in claim 2, wherein the filtering unit comprises a filtering layer, an adsorbing layer and a pumping layer, the filtering layer, the adsorbing layer and the pumping layer are sequentially arranged from top to bottom, the filtering layer is provided with a filter screen, the adsorbing layer is provided with activated carbon, and the pumping layer is provided with a filter screen.
4. The apparatus of claim 3, wherein the stirring device comprises a top cover disposed on the top of the liquid storage tank, a vertical column is disposed below the top cover, a stirring rod is sleeved on the vertical column, a rotating motor for driving the stirring rod to rotate is disposed on the top cover, and the rotating motor is disposed on the top cover.
5. The apparatus of claim 4, wherein the stirring rod comprises a sleeve sleeved on the column, four L-shaped rods are uniformly distributed on the outer ring of the sleeve, an annular positioning boss is arranged on the column, and the sleeve is arranged between the positioning boss and the top plate.
6. The apparatus of claim 5, wherein the suction filtration device comprises a plug body disposed in the upper chamber of the liquid storage tank and slidably connected to the liquid storage tank, the plug body is cylindrical, a sealing ring is disposed on an outer ring of the plug body, a lifting device is connected to a bottom end of the plug body, and the lifting device is disposed in the lower chamber of the liquid storage tank through the partition plate.
7. The apparatus for filtering a waste liquid of a resist stripping liquid according to claim 6, wherein the lifting device is a screw lifting device or an air cylinder or a hydraulic cylinder.
8. The apparatus of claim 7, wherein the top cap is removably connected to the reservoir via a knob.
9. The apparatus for filtering waste photoresist stripper solution according to claim 8, wherein the liquid inlet and the liquid outlet are provided with valves.
10. The apparatus for filtering a waste liquid of a resist stripping liquid according to claim 9, wherein a handle is provided on one side of the filter unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121018769.8U CN214809072U (en) | 2021-05-13 | 2021-05-13 | Photoresist stripping liquid waste liquid filtering equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121018769.8U CN214809072U (en) | 2021-05-13 | 2021-05-13 | Photoresist stripping liquid waste liquid filtering equipment |
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| Publication Number | Publication Date |
|---|---|
| CN214809072U true CN214809072U (en) | 2021-11-23 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121018769.8U Active CN214809072U (en) | 2021-05-13 | 2021-05-13 | Photoresist stripping liquid waste liquid filtering equipment |
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| Country | Link |
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| CN (1) | CN214809072U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114481148A (en) * | 2022-02-15 | 2022-05-13 | 南通宝正环保科技有限公司 | Recycling process of stainless steel waste acid |
-
2021
- 2021-05-13 CN CN202121018769.8U patent/CN214809072U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114481148A (en) * | 2022-02-15 | 2022-05-13 | 南通宝正环保科技有限公司 | Recycling process of stainless steel waste acid |
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