CN214793495U - Online temperature monitoring system for preparing high-temperature superconducting strip by MOCVD method - Google Patents
Online temperature monitoring system for preparing high-temperature superconducting strip by MOCVD method Download PDFInfo
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- CN214793495U CN214793495U CN202120795503.8U CN202120795503U CN214793495U CN 214793495 U CN214793495 U CN 214793495U CN 202120795503 U CN202120795503 U CN 202120795503U CN 214793495 U CN214793495 U CN 214793495U
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Abstract
The utility model discloses an online temperature monitoring system of MOCVD method preparation high temperature superconducting tape, it relates to high temperature superconducting tape preparation technical field. The key points of the technical scheme are that the equipment comprises an equipment main body, wherein a flange interface is arranged on the equipment main body; the light-transmitting plate is arranged on the flange interface; the baffle is arranged on the inner wall of the equipment main body, a light transmitting opening is formed in the baffle, and a light transmitting cavity is formed among the light transmitting plate, the flange interface and the baffle; the blowing assembly enables the light-transmitting chamber to keep positive pressure; the infrared temperature measuring assembly is arranged outside the equipment main body and comprises an infrared thermometer probe; the sprayer is arranged in the equipment main body, and a through hole is formed in the sprayer; the infrared thermometer probe is opposite to the light-transmitting plate, the light-transmitting opening and the through hole. The utility model discloses can need not to consider harsh measuring environment, install simple and easy, low cost moreover, and can guarantee the accuracy of temperature measurement.
Description
Technical Field
The utility model relates to a high temperature superconducting tape prepares technical field, and more specifically says that it relates to an online temperature monitoring system of high temperature superconducting tape is prepared to MOCVD method.
Background
The functional material is used as a new material, shows excellent performances in the aspects of electricity, magnetism, light, heat and the like, and plays an increasingly important role in the fields of scientific research, industrial production and the like. Most of the applications of the materials adopt the form of a thin film so as to realize the practical application such as high performance, low cost, easy processing and the like. Functional material films are of various types and show different performances, such as ferroelectric, piezoelectric, superconducting, hot spot, dielectric and other applications, however, no matter what kind of film material is, development of film technology is not left. We can simply divide the thin film production technology into CVD (chemical vapor deposition) and PVD (physical vapor deposition), and both different thin film preparation routes are intended to grow functional materials as thin films on a substrate.
Since film growth is a nanoscale production process, the entire growth process requires strict control of various process conditions. Particularly, the temperature is a very sensitive condition in the film growth process, and any deviation and fluctuation of the temperature may directly affect the film quality and reduce the product performance, so that in many vacuum coating processes, technicians need to accurately control the temperature to ensure the quality and stability of the product.
Monitoring of the temperature not only occurs before production begins, but also requires real-time detection and timely adjustment as the process progresses. In addition to the need for on-line temperature monitoring, some production process product thermometry cannot be measured by conventional thermocouples, which means a need for a non-contact measurement method. Therefore, some vacuum coating equipment manufacturers provide a temperature measurement solution which is infrared temperature measurement.
The existing infrared temperature measurement method mainly adopts a probe to extend into a system for installation so as to realize temperature monitoring, and the mode can meet the requirement of non-contact measurement, but has the following problems:
1. because the probe is arranged in the vacuum cavity, additional cost is caused by the modification of the cavity, and better requirements are provided for the vacuum of the system;
2. the process temperature in some deposition processes is very high, a common infrared probe cannot work at high temperature, the type selection range of the infrared thermometer is very small in the working environment, and instruments capable of meeting temperature measurement conditions are often very expensive and complicated to install;
3. in the MOCVD equipment, if the temperature measurement method is adopted, a large amount of chemical dust generated in the deposition process can quickly pollute the probe, so that serious measurement errors are caused.
SUMMERY OF THE UTILITY MODEL
Not enough to prior art exists, the utility model aims to provide an online temperature detecting system of MOCVD method preparation high temperature superconducting tape, it can need not to consider harsh measuring environment, and the installation is simple and easy moreover, low cost, and can guarantee the accuracy of temperature measurement.
In order to achieve the above purpose, the utility model provides a following technical scheme:
an on-line temperature monitoring system for preparing a high-temperature superconducting strip by an MOCVD method comprises:
the equipment comprises an equipment main body, a flange connector and a flange connector, wherein the flange connector is arranged on the equipment main body;
the light-transmitting plate is arranged on the flange interface;
the baffle is arranged on the inner wall of the equipment main body, a light transmitting opening is formed in the baffle, and a light transmitting chamber is formed among the light transmitting plate, the flange interface and the baffle;
the blowing assembly enables the light-transmitting chamber to keep positive pressure;
the infrared temperature measuring assembly is arranged outside the equipment main body and comprises an infrared thermometer probe; and the number of the first and second groups,
the sprayer is arranged in the equipment main body and is provided with a through hole;
the infrared thermometer probe is opposite to the light-transmitting plate, the light-transmitting opening and the through hole.
Further, the light-transmitting plate is made of quartz glass.
Further, the number of the baffle plates is two, and the light transmission opening is formed between the two baffle plates.
Further, the baffle is fixedly connected with the inner wall of the equipment main body.
Further, the baffle is a stainless steel thin plate.
Furthermore, the blowing assembly comprises a first air pipe and a second air pipe communicated with the first air pipe, and the second air pipe penetrates through the baffle and then extends into the light-transmitting cavity.
Furthermore, the first air pipe and the second air pipe are both stainless steel pipes.
Further, the gas source of the blowing assembly is inert gas.
Further, the gas source of the blowing assembly is argon.
Furthermore, the infrared temperature measurement assembly further comprises an infrared thermometer controller connected with the infrared thermometer probe, and a computer connected with the infrared thermometer controller.
To sum up, the utility model discloses following beneficial effect has:
1. the utility model discloses set up the through-hole that is used for infrared signal to pass on the spray thrower, then set up the infrared temperature measurement subassembly outside the main part of the equipment and realize on-line temperature monitoring, need not to consider the measuring environment, thus have the advantage that the installation is simple and easy and low cost;
2. the surface of the light-transmitting plate can be cleaned by adopting the air blowing assembly, and positive pressure is kept in the light-transmitting cavity, so that chemical dust cannot enter the light-transmitting cavity, the light-transmitting plate is not polluted, and the accuracy of temperature measurement can be ensured;
3. the flange interface reserved on the equipment main body is adopted to install the light transmission plate, and the light transmission plate mounting device has the advantages of being easy to install and low in cost.
Drawings
FIG. 1 is a schematic structural diagram of an on-line temperature monitoring system for preparing a high-temperature superconducting tape by an MOCVD method according to an embodiment of the present invention.
In the figure: 1. an apparatus main body; 11. a flange interface; 2. a light-transmitting plate; 21. a light-transmissive chamber; 3. a baffle plate; 31. a light-transmitting opening; 41. a first air pipe; 42. a second air pipe; 51. an infrared thermometer probe; 52. an infrared thermometer controller; 53. a computer; 6. a sprayer; 61. a through hole; 7. and (5) measuring the object.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
The present embodiment is only for explaining the present invention, and it is not limited to the present invention, and those skilled in the art can make modifications to the present embodiment without inventive contribution as required after reading the present specification, but all of them are protected by patent laws within the scope of the claims of the present invention.
Example (b):
an online temperature monitoring system for preparing a high-temperature superconducting strip by an MOCVD method refers to FIG. 1, and comprises an equipment main body 1, a blowing assembly and an infrared temperature measuring assembly; a reserved flange interface 11 is arranged on the equipment main body 1, and a light transmitting plate 2 is arranged at an opening of the flange interface 11 in a sealing manner; a baffle 3 is arranged on the inner wall of the equipment main body 1, a light transmission opening 31 is formed in the baffle 3, and a semi-closed light transmission chamber 21 is formed among the light transmission plate 2, the flange interface 11 and the baffle 3; the air blowing assembly blows air into the semi-closed light-transmitting cavity 21 to keep the interior of the light-transmitting cavity 21 at positive pressure, so that the light-transmitting plate 2 can be effectively prevented from being polluted by chemical dust; the infrared temperature measurement component is arranged outside the equipment main body 1 and comprises an infrared thermometer probe 51, so that the strict measurement environment in the equipment main body 1 does not need to be considered; a sprayer 6 is arranged in the equipment main body 1, and a through hole 61 is formed in the sprayer 6; the infrared thermometer probe 51 is opposite to the transparent plate 2, the transparent opening 31 and the through hole 61, so that infrared rays emitted by the object to be measured 7 can be received by the infrared thermometer probe 51.
Referring to fig. 1, the material of the light-transmitting plate 2 needs to be determined according to the temperature range of the object to be measured 7, and the temperature range of the object to be measured 7 in this embodiment is about 800 ℃, so the light-transmitting plate 2 is made of quartz glass, and thus, the infrared rays with corresponding wavelengths can be ensured to have good passing performance; in this embodiment, the number of the baffles 3 is two, and the light-transmitting opening 31 is formed between the two baffles 3, in other optional embodiments, there may be one baffle 3, and then the baffle 3 is provided with the light-transmitting opening 31, which is not limited herein; specifically, the baffle 3 in this embodiment is a stainless steel thin plate and is fixedly connected to the inner wall of the apparatus main body 1, which has the advantages of easy installation and low cost.
Referring to fig. 1, the baffle 3 in this embodiment has two functions, one is to reduce the internal opening area of the flange interface 11 by shielding, and the other is to fix the blowing assembly, which is arranged inside the device body 1; specifically, the insufflation assembly comprises a first air tube 41 and a second air tube 42 communicated with the first air tube, wherein the second air tube 42 passes through one of the baffles 3 and then extends into the light-transmitting chamber 21; specifically, in this embodiment, the pipe orifice of the second air pipe 42 is opposite to the light-transmitting plate 2, so that the surface of the light-transmitting plate 2 can be cleaned by blowing, and the positive pressure can be maintained after blowing air into the light-transmitting chamber 21; in the embodiment, the first air pipe 41 and the second air pipe 42 are both stainless steel pipes, and the second air pipe 42 and the baffle 3 are fixed by welding; the second air pipe 42 is fixed on the baffle 3, so that the equipment main body 1 does not need to be modified, the cost can be reduced, and the sealing property can be ensured; in the embodiment, the gas source of the blowing assembly is inert gas, specifically argon; the first air pipe 41 can be led out by means of an original air passage on the equipment main body 1, or a hole position is additionally arranged, so that the sealing performance can be ensured; the first air pipe 41 is perpendicular to the second air pipe 42 in this embodiment, which facilitates the installation arrangement; meanwhile, the inert gas is blown into the light-transmitting chamber 21 in the embodiment, which does not affect the production of the film.
Referring to fig. 1, the infrared temperature measurement assembly further includes an infrared thermometer controller 52 connected to the head of the infrared thermometer probe 51, and a computer 53 connected to the infrared thermometer controller 52; specifically, in this embodiment, the infrared thermometer probe 51 is installed right above the transparent plate 2, and the position is adjusted so that the collimated laser is aligned with the measured object 7, so as to ensure that the infrared ray emitted by the measured object 7 can be received by the infrared thermometer probe 51, and the infrared thermometer controller 52 transmits a signal to the computer 53 through photoelectric conversion to realize temperature monitoring; in the embodiment, the infrared temperature measurement component is arranged outside the equipment main body 1, so that the installation is convenient, and the infrared temperature measurement component with lower cost can be adopted; in this embodiment, a specific installation manner of the infrared thermometer probe 51 is not indicated, and the installation manner is not limited, and various structures in the prior art may be adopted, so that the stability of the probe can be ensured.
The working principle is as follows:
in this embodiment, the metal oxide film is deposited on the metal base band plated with the buffer layer by the MOCVD method, and since the metal base band adopts a roll-to-roll continuous tape transport manner, it can be considered that the thickness of the metal oxide film is always consistent at a certain fixed measurement point from the beginning to the end of production, that is, the infrared radiation rate is kept unchanged.
Infrared rays emitted by the object to be measured 7 (namely, the metal oxide film) pass through the through hole 61, the light-transmitting opening 31, the light-transmitting chamber 21 and the light-transmitting plate 2 on the sprayer 6 and are received by the infrared thermometer probe 51, and the infrared thermometer controller 52 transmits signals into the computer 53 through photoelectric conversion to realize online temperature monitoring.
In this embodiment, argon gas is blown into the light-transmitting chamber 21 through the first gas pipe 41 and the second gas pipe 42, so that positive pressure is maintained in the light-transmitting chamber 21, and chemical dust generated in the deposition process cannot enter the light-transmitting chamber 21 to pollute the light-transmitting plate 2, thereby ensuring the accuracy of temperature measurement.
Claims (10)
1. An online temperature monitoring system for preparing a high-temperature superconducting strip by an MOCVD method is characterized by comprising the following steps:
the equipment comprises an equipment main body, a flange connector and a flange connector, wherein the flange connector is arranged on the equipment main body;
the light-transmitting plate is arranged on the flange interface;
the baffle is arranged on the inner wall of the equipment main body, a light transmitting opening is formed in the baffle, and a light transmitting chamber is formed among the light transmitting plate, the flange interface and the baffle;
the blowing assembly enables the light-transmitting chamber to keep positive pressure;
the infrared temperature measuring assembly is arranged outside the equipment main body and comprises an infrared thermometer probe; and the number of the first and second groups,
the sprayer is arranged in the equipment main body and is provided with a through hole;
the infrared thermometer probe is opposite to the light-transmitting plate, the light-transmitting opening and the through hole.
2. The system for monitoring the temperature of a high-temperature superconducting tape prepared by the MOCVD method according to claim 1, wherein: the light-transmitting plate is made of quartz glass.
3. The system for monitoring the temperature of a high-temperature superconducting tape prepared by the MOCVD method according to claim 1, wherein: the number of the baffle is two, and the light-transmitting opening is formed between the two baffles.
4. The system for monitoring the temperature of a high-temperature superconducting tape prepared by the MOCVD method according to claim 1, wherein: the baffle is fixedly connected with the inner wall of the equipment main body.
5. The system for monitoring the temperature of a high-temperature superconducting tape prepared by the MOCVD method according to claim 4, wherein the system comprises: the baffle is a stainless steel sheet.
6. The system for monitoring the temperature of a high-temperature superconducting tape prepared by the MOCVD method according to any one of claims 1 to 5, wherein: the blowing assembly comprises a first air pipe and a second air pipe communicated with the first air pipe, and the second air pipe penetrates through the baffle and then extends into the light-transmitting cavity.
7. The system for monitoring the temperature of a high-temperature superconducting tape prepared by the MOCVD method according to claim 6, wherein: the first air pipe and the second air pipe are both stainless steel pipes.
8. The system for monitoring the temperature of a high-temperature superconducting tape prepared by the MOCVD method according to any one of claims 1 to 5, wherein: the gas source of the blowing assembly is inert gas.
9. The system for monitoring the temperature of a high-temperature superconducting tape prepared by the MOCVD method according to claim 8, wherein: the gas source of the blowing assembly is argon.
10. The system for monitoring the temperature of a high-temperature superconducting tape prepared by the MOCVD method according to any one of claims 1 to 5, wherein: the infrared temperature measurement assembly further comprises an infrared thermometer controller connected with the infrared thermometer probe, and a computer connected with the infrared thermometer controller.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120795503.8U CN214793495U (en) | 2021-04-19 | 2021-04-19 | Online temperature monitoring system for preparing high-temperature superconducting strip by MOCVD method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120795503.8U CN214793495U (en) | 2021-04-19 | 2021-04-19 | Online temperature monitoring system for preparing high-temperature superconducting strip by MOCVD method |
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| CN214793495U true CN214793495U (en) | 2021-11-19 |
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| CN202120795503.8U Active CN214793495U (en) | 2021-04-19 | 2021-04-19 | Online temperature monitoring system for preparing high-temperature superconducting strip by MOCVD method |
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2021
- 2021-04-19 CN CN202120795503.8U patent/CN214793495U/en active Active
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