CN214792486U

CN214792486U - Silicon nitride sintering furnace convenient to overhaul

Info

Publication number: CN214792486U
Application number: CN202121216065.1U
Authority: CN
Inventors: 夏静豪; 王运宝
Original assignee: Anyang Henri Hi Tech Industrial Co ltd
Current assignee: Anyang Henri Hi Tech Industrial Co ltd
Priority date: 2021-06-02
Filing date: 2021-06-02
Publication date: 2021-11-19
Anticipated expiration: 2031-06-02

Abstract

A silicon nitride sintering furnace convenient to overhaul comprises a furnace shell, wherein a furnace door is arranged at one end of the furnace shell, an inner rail is arranged at the bottom of the furnace shell, a furnace core is placed on the inner rail, a furnace core door is arranged at one end of the furnace core, a roller is fixedly connected to the bottom of the furnace core, and the roller can move along the inner rail; an air inlet pipe and a junction box are arranged at one end, close to a furnace door, of the furnace shell, an air distribution pipe is arranged in the furnace core, the air inlet end of the air distribution pipe is close to the furnace core door, and the air inlet pipe is detachably connected with the air distribution pipe through an air connector; the heating furnace comprises a furnace core and is characterized in that a plurality of sets of heating modules are arranged on the furnace core, the heating modules are detachably connected with the furnace core, silicon-molybdenum rods are arranged in the heating modules, and the silicon-molybdenum rods are detachably connected with a junction box through binding posts. This patent can conveniently overhaul the maintenance to the fritting furnace.

Description

Silicon nitride sintering furnace convenient to overhaul

Technical Field

The utility model particularly relates to a silicon nitride fritting furnace convenient to overhaul belongs to silicon nitride fritting furnace technical field.

Background

The preparation of silicon nitride powder usually adopts a silicon powder nitriding method, the basic principle is that silicon powder reacts with nitrogen-containing gas such as nitrogen, ammonia and the like at high temperature in a sintering furnace to generate silicon nitride, and the operational process flow mainly comprises the following steps: filling silicon powder into a sintering furnace, vacuumizing, introducing nitrogen-containing reaction gas into the sintering furnace, gradually heating to about 1300 ℃, preserving heat for a certain time to perform a nitriding reaction, cooling to obtain a silicon nitride plate, and crushing to a certain particle size to obtain silicon nitride powder. Because the reaction raw materials are powder, frequent vacuumizing, ventilation and exhaust are needed in the reaction process, the interior of the sintering furnace has frequent gas flow, the furnace is full of dust, the dust is dispersed seriously, and the silicon-molybdenum rod resistance wire and the like depending on the heating of the sintering furnace have certain service life, so that the interior of the sintering furnace needs to be maintained and overhauled regularly, cleaned of dust, replaced of the resistance wire and the like. In the existing sintering furnace structure, a hearth and a furnace shell are fixedly connected together, and people are required to drill in each time of maintenance and cleaning, so that the operation is not convenient, and the maintenance work efficiency is low.

Disclosure of Invention

Problem to prior art existence, the utility model provides a convenient to overhaul's silicon nitride fritting furnace, aim at solve current fritting furnace and overhaul inconvenient problem.

The technical scheme of the utility model is that: a silicon nitride sintering furnace convenient to overhaul comprises a furnace shell, wherein a furnace door is arranged at one end of the furnace shell, an inner guide rail is arranged at the bottom of the furnace shell, a furnace core is placed on the inner guide rail, a furnace core door is arranged at one end of the furnace core, a roller is fixedly connected to the bottom of the furnace core, and the roller can move along the inner guide rail; an air inlet pipe and a junction box are arranged at one end, close to a furnace door, of the furnace shell, an air distribution pipe is arranged in the furnace core, the air inlet end of the air distribution pipe is close to the furnace core door, and the air inlet pipe is detachably connected with the air distribution pipe through an air connector; the heating furnace comprises a furnace core and is characterized in that a plurality of sets of heating modules are arranged on the furnace core, the heating modules are detachably connected with the furnace core, silicon-molybdenum rods are arranged in the heating modules, and the silicon-molybdenum rods are detachably connected with a junction box through binding posts.

Furthermore, the furnace shell is of a double-layer structure, a water inlet pipe is arranged at the bottom of the furnace shell, a water outlet pipe is arranged at the top of the furnace shell, and the water inlet pipe and the water outlet pipe are communicated with the inner space of the double-layer structure.

Furthermore, the furnace core sequentially comprises a shell, a heat insulation layer and refractory bricks from outside to inside.

Furthermore, the sintering furnace also comprises an inspection vehicle, wheels are arranged at the bottom of the inspection vehicle, an outer guide rail is arranged at the upper part of the inspection vehicle, and the height and the width of the outer guide rail and the width of the inner guide rail are the same.

Furthermore, the bottom of the front end of the maintenance vehicle is also provided with an upright post, and the tail end of the outer guide rail is also provided with a stop block.

Has the advantages that: the silicon nitride sintering furnace adopts a double-layer structure of the furnace shell and the furnace core, and the furnace core is contacted with the inner guide rail through the roller and can slide along the inner guide rail, so that the furnace core can conveniently enter and exit the furnace shell; meanwhile, the air inlet pipe on the furnace shell is detachably connected with the air distribution pipe on the furnace core through an air connector, and the junction box on the furnace shell is detachably connected with the heating module on the furnace core through a binding post, so that the connection or disconnection of air and electricity between the furnace core and the furnace shell is facilitated; during maintenance, the furnace door is opened to enable the outer guide rail of the maintenance vehicle to be aligned to the inner guide rail of the furnace shell, the connection between the furnace core and the furnace shell is disconnected, the furnace core can be easily pulled out, and the sintering furnace is conveniently cleaned and maintained.

Drawings

FIG. 1 is a schematic diagram of the composition structure of a sintering furnace.

Fig. 2 is a right side view of fig. 1.

FIG. 3 is a schematic view of the overhaul state of the sintering furnace.

The labels in the figure are: the furnace comprises a furnace shell, a furnace core, a maintenance vehicle, a base, a guide rail, an inner guide rail, an outer guide rail, an inner guide rail, an outer guide rail, an inner guide rail, an outer guide rail, an inner guide rail, a second guide rail, a third guide rail, a second guide rail, a third guide rail, a heating module, a second guide rail, a third guide rail, a second guide rail, a heating module, a second guide rail, a third guide rail, a fourth guide rail, a heating module, a fourth guide rail.

Detailed Description

The following description of the present invention will be made for clarity and completeness with reference to the accompanying drawings.

As shown in FIG. 1, the silicon nitride sintering furnace convenient for maintenance comprises a furnace shell 1, wherein the furnace shell 1 is fixed on a ground plane 0 through two bases 10. The stove outer covering is bilayer structure, is provided with inlet tube 12 in the bottom of stove outer covering, is provided with outlet pipe 13 at the top of stove outer covering, inlet tube and outlet pipe all communicate with bilayer structure's inner space, let in the cooling water and can cool off the stove outer covering in bilayer framework. A furnace core 2 is arranged in the furnace shell, the structure of the furnace core sequentially comprises a shell, a heat insulation layer and refractory bricks from outside to inside, and a hearth 21 is arranged in the furnace core and can be used for placing raw materials to be sintered. The right end of the furnace core is provided with a furnace core door 22, the right end of the furnace shell 1 is provided with a furnace door 15, and both the furnace core door and the furnace door can be opened or closed. An inner guide rail 11 is arranged at the inner bottom of the furnace shell, a roller 23 is fixedly connected to the bottom of the furnace core 2, the furnace core is placed on the inner guide rail through the roller, and the roller 23 can move left and right along the inner guide rail 11, so that the furnace core can be moved out of or into the furnace shell.

As shown in fig. 1-2, an air inlet pipe 16 and a junction box 16 are arranged at one end of a furnace shell 1 close to a furnace door, an air distribution pipe 24 is arranged in a furnace core, the air inlet end of the air distribution pipe is close to a furnace core door, the air inlet pipe 16 is detachably connected with the air distribution pipe 24 through a gas joint 17, and nitrogen-containing reaction gas can be introduced into a hearth by utilizing the air inlet pipe; the heating furnace comprises a furnace core, a heating element, a silicon-molybdenum rod 143 and a wiring box, wherein the furnace core is provided with a plurality of sets of heating modules 142, the heating modules 142 are embedded and clamped on the wall of the furnace core and are detachably connected with the furnace core, and the heating element, the silicon-molybdenum rod 143 is arranged in the heating modules and is detachably connected with the wiring box through a wiring terminal 141; meanwhile, a plurality of thermocouples 144 are arranged on the furnace core and used for detecting the temperature in the hearth, and the thermocouples are also connected with the junction box through binding posts. When the furnace core needs to be pulled out of the hearth for maintenance, the gas joint and the binding post can be detached, so that the gas and the electric connection between the furnace core and the furnace shell are disconnected. Because the gas connector and the binding post are both closer to the furnace door, the operation is more convenient.

As shown in fig. 3, the sintering furnace further comprises an inspection vehicle 3, wheels 31 are arranged at the bottom of the inspection vehicle 3 to facilitate the movement of the inspection vehicle, an outer guide rail 32 is arranged at the upper part of the inspection vehicle 3, and the height and the width of the outer guide rail 32 are the same as those of the inner guide rail 12 in the furnace shell, so that the seamless butt joint of the inner guide rail and the outer guide rail is ensured. The bottom of the front end of the maintenance vehicle is also provided with a stand column 34 which is used for placing the rear end of the maintenance vehicle to tilt when the furnace core is just contacted with the maintenance vehicle, and the tail end of the outer guide rail is also provided with a stop block 33 for preventing the furnace core from falling down from the tail end of the maintenance vehicle.

When the silicon nitride sintering furnace needs to be overhauled, firstly opening the furnace door, opening the furnace core door, moving the maintenance vehicle to the front of the furnace door, aligning the inner guide rail and the outer guide rail with each other, and fixing the maintenance vehicle; then the gas joint is disassembled, and a gas connecting channel between a gas inlet pipe on the furnace shell and a gas distribution pipe on the furnace core is disconnected; after the silicon-molybdenum rod and the binding post between the thermocouple and the junction box are disassembled, the electric connection between the furnace core and the furnace shell is disconnected; then the furnace core is pulled outwards along the inner guide rail, and the furnace core completely enters the outer guide rail of the maintenance vehicle, so that the furnace core can be completely separated from the furnace shell; and finally, the furnace shell can be cleaned and checked, the heating module on the furnace core can be replaced and maintained, and the like. After the overhaul is finished, the furnace core can be pushed into the furnace shell in the opposite direction to carry out electrical connection and air pipe connection, then silicon powder materials to be sintered are added into the hearth, a furnace core door and a furnace door are closed, vacuumizing and exhausting are carried out, nitrogen-containing reaction gas is introduced, a heating system is opened to heat, cooling water is introduced to cool the furnace shell, parameters such as temperature, pressure, time and the like in the hearth are controlled according to set process parameters, and finally, the final product silicon nitride can be generated.

It is above only the utility model discloses a preferred embodiment, the utility model discloses a scope of protection does not only confine above-mentioned embodiment, the all belongs to the utility model discloses a technical scheme under the thinking all belongs to the utility model discloses a scope of protection. It should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.

Claims

1. The utility model provides a silicon nitride fritting furnace convenient to overhaul, includes the stove outer covering, is provided with furnace gate, its characterized in that in the one end of stove outer covering: an inner guide rail is arranged at the bottom of the furnace shell, a furnace core is placed on the inner guide rail, a furnace core door is arranged at one end of the furnace core, and a roller is fixedly connected to the bottom of the furnace core and can move along the inner guide rail; an air inlet pipe and a junction box are arranged at one end, close to a furnace door, of the furnace shell, an air distribution pipe is arranged in the furnace core, the air inlet end of the air distribution pipe is close to the furnace core door, and the air inlet pipe is detachably connected with the air distribution pipe through an air connector; the heating furnace comprises a furnace core and is characterized in that a plurality of sets of heating modules are arranged on the furnace core, the heating modules are detachably connected with the furnace core, silicon-molybdenum rods are arranged in the heating modules, and the silicon-molybdenum rods are detachably connected with a junction box through binding posts.

2. The silicon nitride sintering furnace convenient for maintenance according to claim 1, characterized in that: the furnace shell is of a double-layer structure, a water inlet pipe is arranged at the bottom of the furnace shell, a water outlet pipe is arranged at the top of the furnace shell, and the water inlet pipe and the water outlet pipe are communicated with the inner space of the double-layer structure.

3. The silicon nitride sintering furnace convenient for maintenance according to claim 1, characterized in that: the furnace core is sequentially provided with a shell, a heat insulation layer and refractory bricks from outside to inside.

4. The silicon nitride sintering furnace convenient for maintenance according to claim 1, characterized in that: the sintering furnace further comprises an inspection vehicle, wheels are arranged at the bottom of the inspection vehicle, an outer guide rail is arranged at the upper part of the inspection vehicle, and the outer guide rail and the inner guide rail are the same in height and width.

5. The silicon nitride sintering furnace convenient for maintenance according to claim 4, characterized in that: the bottom of the front end of the maintenance vehicle is also provided with a stand column, and the tail end of the outer guide rail is also provided with a stop block.