CN214773138U - Cooling device convenient for adjusting multi-wire cutting - Google Patents
Cooling device convenient for adjusting multi-wire cutting Download PDFInfo
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- CN214773138U CN214773138U CN202121114487.8U CN202121114487U CN214773138U CN 214773138 U CN214773138 U CN 214773138U CN 202121114487 U CN202121114487 U CN 202121114487U CN 214773138 U CN214773138 U CN 214773138U
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Abstract
A cooling device convenient for adjusting multi-wire cutting comprises cooling devices which are oppositely arranged, wherein each cooling device comprises a movable guide plate (2) and a support rod (3), one end of each movable guide plate (2) is arranged on the support rod (3), the other end of each movable guide plate guides cooling water to a cutting surface of a workpiece (9), one end of each support rod (3) is provided with a rotatable rolling part (7), and the other end of each support rod is movably arranged on a cooling pipe (10) through a telescopic device; the telescopic device comprises a fixed plate (6) arranged on the support rod (3), an elastic part (4) and a guide rod (5) are arranged between the fixed plate (6) and the cooling pipe (10), and the fixed plate (6) is movably arranged on the guide rod (5); the utility model relates to a conveniently adjust among the cooling device of multi-thread cutting, movable guide plate can remove along with the machined part dimensional change under the drive of telescoping device to realize lasting effectual cooling at the cutting in-process.
Description
Technical Field
The utility model relates to a technical field of buddha's warrior attendant line multi-wire cutting semiconductor wafer technology, concretely relates to conveniently adjust cooling device of multi-wire cutting.
Background
The cutting of the diamond wire multi-wire cutting machine for cutting the silicon wafer of the semiconductor wafer is evolved from a solar diamond wire cutting machine. Referring to fig. 1, in order to ensure an effective light receiving area of a subsequent cell, all solar photovoltaic silicon wafers are square wafers with small chamfers, and during diamond wire cutting, the position of cooling water is generally fixed at an optimal cooling position, but when a semiconductor wafer is cut, the method for fixing the position of cooling water cannot achieve the optimal cooling effect, so that uneven cooling is easily performed at a feed position and a discharge position, and the cut silicon wafers are uneven in thickness or too large in single TTV.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a cooling device of multi-wire cutting that cooling water position along with silicon rod diameter size automatic change in diamond wire-electrode cutting process.
The utility model aims at adopting the following technical scheme to realize. The foundation the utility model provides a conveniently adjust cooling device of multi-thread cutting, its characterized in that: the cooling device comprises a movable guide plate 2 and a support rod 3 which are oppositely arranged, one end of the movable guide plate 2 is arranged on the support rod 3, the other end of the movable guide plate guides cooling water to a cutting surface of a workpiece 9, one end of the support rod 3 is provided with a rotatable rolling part 7, and the other end of the support rod is movably arranged on a cooling pipe 10 through a telescopic device; the telescopic device comprises a fixing plate 6 arranged on the support rod 3, an elastic part 4 and a guide rod 5 are arranged between the fixing plate 6 and the cooling pipe 10, and the fixing plate 6 is movably arranged on the guide rod 5.
Preferably, the rolling elements 7 are ball bearings.
Preferably, the number of the support rods 3 is at least one, and the support rods 3 are mounted on the cooling pipe 10 through at least one telescopic device.
Preferably, the elastic member 4 is a spring.
Preferably, the fixing plate 6 is a flange.
The utility model provides a pair of conveniently adjust cooling device of multi-thread cutting has following advantage:
1. the utility model relates to a conveniently adjust among the cooling device of multi-thread cutting, movable guide plate can remove along with the machined part dimensional change under the drive of telescoping device to realize lasting effectual cooling at the cutting in-process.
2. The utility model relates to a conveniently adjust cooling device of multi-thread cutting can guarantee the unity and the stability of cutting in-process cooling condition, makes the cooling condition change minimum to can eliminate the silicon chip because of the silicon chip thickness inequality that the cooling is not enough to cause and the too big phenomenon of TTV.
The foregoing description is only an overview of the technical solutions of the present invention, and in order to make the technical means of the present invention more clearly understood, the present invention can be implemented according to the content of the description, and in order to make the above and other objects, features, and advantages of the present invention more obvious and understandable, the following preferred embodiments are mentioned below, and the detailed description is given below with reference to the accompanying drawings.
Drawings
Fig. 1 is a schematic structural view of a conventional cooling device.
Fig. 2 is a schematic structural diagram of a cooling device for conveniently adjusting multi-wire cutting according to the present embodiment.
[ reference numerals ]
1-fixed guide plate, 2-movable guide plate, 3-support rod, 4-elastic part, 5-guide rod, 6-fixed plate, 7-rolling part, 8-diamond wire, 9-machined part, 10-cooling pipe, 101-cover plate, 102-water outlet and 11-water inlet pipe.
Detailed Description
To further illustrate the technical means and effects of the present invention adopted to achieve the predetermined purpose, the following detailed description will be given with reference to the accompanying drawings and preferred embodiments of a cooling device for conveniently adjusting multi-line cutting according to the present invention.
In the description of the present invention, it should be noted that the terms "upper", "lower", "left", "right", and the like indicate orientations or positional relationships based on the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present invention.
Referring to fig. 2, the cooling device for adjusting multi-line cutting conveniently of the present invention includes a cooling tube 10, a cooling device symmetrically disposed on both sides of a workpiece, a cover plate 101, a water outlet 102, and a fixed guide plate 1 communicated with the water outlet 102 disposed on the cooling tube 10, wherein the bottom end of a water inlet tube 11 for cooling water passes through the cover plate 101 and extends into the cooling tube 10, and when the cooling tube 10 is full, water overflows from the water outlet 102 to the fixed guide plate 1.
Cooling device includes activity guide plate 2 and bracing piece 3, and activity guide plate 2's one end is installed on bracing piece 3, the other end will follow the cooling water drainage that fixed guide plate 1 flows to diamond wire 8 and machined part 9's cutting plane department, and rotatable rolling member 7 is installed to bracing piece 3's one end, the other end passes through the telescoping device movably to be installed on cooling tube 10, and rolling member 7 chooses for use ball bearing in this embodiment, certainly the utility model discloses in other embodiments, also can choose for use ball, cylinder or other substitution.
The telescoping device is including installing fixed plate 6 on bracing piece 3, installing elastic component 4 between fixed plate 6 and cooling tube 10, and the one end of elastic component 4 is installed on fixed plate 6, and the other end is installed on cooling tube 10, and in this embodiment, the spring is chooseed for use to elastic component 4, certainly the utility model discloses in other embodiments, the available torsional spring of elastic component or other substitutes. Still be equipped with between fixed plate 6 and the cooling tube 10 with guide bar 5, elastic component 4 suit is on guide bar 5, and fixed plate 6 is worn out to the one end of guide bar 5, and fixed plate 6 is movably installed at guide bar 5, and fixed plate 6 can move along the length direction of guide bar 5 under the exogenic action. In this embodiment, the flange is selected as the fixing plate 6, but other embodiments of the present invention may be substituted by other flanges.
In this embodiment, the number of the support rods 3 may be one, or two support rods may be respectively disposed on two sides of the movable guide plate, each support rod may be mounted on the cooling pipe 10 through at least one expansion device, or a plurality of support rods may share one expansion device.
The working principle is as follows:
when a workpiece 9 (silicon rod) is cut by a diamond wire, the outer circumference of the rolling part 7 is abutted against the outer circumference of the workpiece 9, when the workpiece 9 is cut, along with the gradual increase of the cutting width of the workpiece 9, the outer circumference of the workpiece 9 provides a rightward thrust for the rolling part, the rolling part transmits the thrust to the fixing plate 6 through the supporting rod 3, the elastic part 4 is compressed, the fixing plate 6 drives the supporting rod 3 to move rightwards, the movable guide plate 2 synchronously moves rightwards under the action of the supporting rod 3, and therefore cooling water flowing out of the movable guide plate 2 flows to the cutting surfaces of the workpiece and the diamond wire;
along with the gradual reduction of the cutting width of the workpiece 9, the compressed elastic part 4 applies leftward thrust to the rolling part 7 through the support rod, the support rod 3 drives the rolling part 7 to move leftward, the rolling part 7 is always tightly propped against the outer circumferential surface of the silicon rod, the movable guide plate 2 synchronously moves leftward under the driving of the support rod 3, and the cooling water flowing out of the movable guide plate 2 can be always guaranteed to flow to the cutting surfaces of the workpiece and the diamond wire.
By the method, when the machined part is cut, the rolling part 7 can be guaranteed to be tightly abutted against the side surface of the machined part no matter how the diameter of the machined part changes, so that cooling water flowing out of the movable guide plate can be guaranteed to flow to the machined part and the cutting surface of the diamond wire all the time, and the optimal cooling effect is achieved.
The utility model relates to a conveniently adjust cooling device of multi-thread cutting, in the process that machined part (silicon rod) cutting descends, make the rolling member support on the outer wall of machined part all the time, and can realize automatic flexible along with the change of chord length when the machined part (silicon rod) descends, drive the synchronous motion of movable guide plate 2 during flexible, this moving speed matches with the feed rate of cutting technology, thus make the cooling water that flows out from the movable guide plate keep the optimum distance with the machined part (silicon rod) all the time, thus reach the most effective cooling effect; furthermore, the utility model discloses a cooling device can satisfy the cutting cooling needs of the cylindrical work piece of different specification and dimension.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention in any way, and any person skilled in the art can make any simple modification, equivalent change and modification to the above embodiments according to the technical spirit of the present invention without departing from the technical scope of the present invention.
Claims (5)
1. The utility model provides a conveniently adjust cooling device of multi-wire saw which characterized in that: the cooling device comprises a movable guide plate (2) and a support rod (3), wherein one end of the movable guide plate (2) is arranged on the support rod (3), the other end of the movable guide plate guides cooling water to a cutting surface of a workpiece (9), one end of the support rod (3) is provided with a rotatable rolling piece (7), and the other end of the support rod is movably arranged on a cooling pipe (10) through a telescopic device; the telescopic device comprises a fixing plate (6) arranged on the supporting rod (3), an elastic piece (4) and a guide rod (5) are arranged between the fixing plate (6) and the cooling pipe (10), and the fixing plate (6) is movably arranged on the guide rod (5).
2. The cooling device for facilitating the adjustment of multi-wire sawing according to claim 1, wherein: the rolling elements (7) are ball bearings.
3. The cooling device for facilitating the adjustment of multi-wire sawing according to claim 1, wherein: the number of the supporting rods (3) is at least one, and the supporting rods (3) are at least arranged on the cooling pipe (10) through a telescopic device.
4. The cooling device for facilitating the adjustment of multi-wire sawing according to claim 1, wherein: the elastic part (4) is a spring.
5. The cooling device for facilitating the adjustment of multi-wire sawing according to claim 1, wherein: the fixed plate (6) is a flange.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121114487.8U CN214773138U (en) | 2021-05-20 | 2021-05-20 | Cooling device convenient for adjusting multi-wire cutting |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121114487.8U CN214773138U (en) | 2021-05-20 | 2021-05-20 | Cooling device convenient for adjusting multi-wire cutting |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214773138U true CN214773138U (en) | 2021-11-19 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121114487.8U Active CN214773138U (en) | 2021-05-20 | 2021-05-20 | Cooling device convenient for adjusting multi-wire cutting |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214773138U (en) |
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2021
- 2021-05-20 CN CN202121114487.8U patent/CN214773138U/en active Active
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Denomination of utility model: A cooling device for convenient adjustment of multi wire cutting Effective date of registration: 20230607 Granted publication date: 20211119 Pledgee: Bank of China Limited by Share Ltd. Luoyang branch Pledgor: LuoYang HongTai Semiconductor Co.,Ltd. Registration number: Y2023980043127 |