CN214743112U

CN214743112U - Transmission mechanism and reloading device thereof

Info

Publication number: CN214743112U
Application number: CN202120987258.0U
Authority: CN
Inventors: 张明
Original assignee: Jiangsu Gexi Optical Technology Co ltd
Current assignee: Jiangsu Gexi Optical Technology Co ltd
Priority date: 2021-05-10
Filing date: 2021-05-10
Publication date: 2021-11-16
Anticipated expiration: 2031-05-10

Abstract

The utility model relates to a transmission mechanism and a material changing device thereof, belonging to the technical field of coating, comprising a supporting component; one end of the driving component is rotationally connected with the supporting component; one end of the driven component is rotatably connected with the supporting component; and one end of the transmission component is connected with the driving component, the other end of the transmission component is connected with the driven component and used for driving the driven component, and the rotating angle of the driven component is smaller than that of the driving component. The utility model discloses a set up drive assembly and be connected drive assembly and driven subassembly, realized drive assembly clockwise rotation 90 take driven subassembly anticlockwise rotation 60, overcome the restriction in space, avoid influencing the setting of power input shaft.

Description

Transmission mechanism and reloading device thereof

Technical Field

The utility model relates to a coating film technical field specifically is a drive mechanism and device that reloads thereof.

Background

The vacuum coating machine mainly refers to a coating machine needing to be carried out under a higher vacuum degree, and specifically comprises vacuum resistance heating evaporation, ion beam sputtering, MBE molecular beam epitaxy and the like. The material to be coated is called a substrate and the material to be coated is called a target. The substrate and the target material are in the vacuum cavity.

A material changing mechanism is required to be arranged in the vacuum coating machine, a transmission mechanism is required to be used in the material changing mechanism, and the existing transmission mechanism is mainly driven by a gear.

The existing gear transmission mechanism influences the arrangement of a power input shaft and SiO due to the limitation of the space in a vacuum furnace₂Automatic reloading of the rings.

Disclosure of Invention

An object of the utility model is to provide a drive mechanism and device of reloading thereof to solve the problem that proposes among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme:

a transmission mechanism comprising:

a support assembly;

one end of the driving component is rotationally connected with the supporting component;

one end of the driven component is rotatably connected with the supporting component;

and one end of the transmission component is connected with the driving component, the other end of the transmission component is connected with the driven component and used for driving the driven component, and the rotating angle of the driven component is smaller than that of the driving component.

The utility model also discloses a device of reloading, including the body of reloading, this internal foretell drive mechanism of installing of reloading.

Compared with the prior art, the beneficial effects of the utility model are that: the driving assembly is connected with the driven assembly through the transmission assembly, the driving assembly is driven to rotate 90 degrees clockwise to rotate 60 degrees anticlockwise, the limitation of space is overcome, and the setting of a power input shaft is prevented from being influenced.

Drawings

FIG. 1 is a schematic structural view of a transmission mechanism;

FIG. 2 is a schematic diagram of a transmission assembly of the transmission mechanism;

fig. 3 is a cross-sectional view of a drive assembly in the drive mechanism.

In the figure: 1-housing, 2-power input shaft, 3-first slide arm, 4-clamping plate, 5-slide pin, 6-stop screw, 7-crucible driven shaft, 8-adjusting screw, 9-second slide arm, 10-rotating shaft, 11-pin sheet, 12-rotating shaft hole and 13-threaded hole.

Detailed Description

The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.

In an embodiment of the present invention, the transmission mechanism shown in fig. 1 includes:

a support assembly;

In this embodiment, the during operation drives through the initiative subassembly, and under transmission assembly's cooperation, when the initiative subassembly clockwise turning, driven subassembly anticlockwise rotation, just driven subassembly's turned angle is less than the turned angle of initiative subassembly to the restriction in space has been overcome.

In an embodiment of the present invention, the support assembly includes:

the housing 1 is provided with a first rotating groove matched with the driving component and a second rotating groove matched with the driven component.

The utility model discloses an in the embodiment, housing 1 is used for overall structure's support, and for the convenience is fixed with it, can set up corresponding fixing bolt on the housing 1, the dismouting of being convenient for, first rotating groove and second rotating groove set up in the both sides of housing 1, guarantee that drive assembly can stably set up in housing 1 and carry out stable transmission.

The utility model discloses an in the embodiment, supporting component is the epitheca and the inferior valve of mutually supporting, and both cooperate, are convenient for improve the rotational stability of initiative subassembly and driven subassembly, and in the condition of this embodiment, supporting component is actually the installation carrier of initiative subassembly and driven subassembly, and it can have multiple structure or expression form, only need it possess the function of installation carrier can, and this embodiment does not carry out specific injecing here.

Referring to fig. 1, in an embodiment of the present invention, the active component includes:

one end of the driving piece is arranged in the first rotating groove and is rotationally connected with the first rotating groove, and the other end of the driving piece is connected with driving equipment;

the first follower is sleeved outside the driving piece and fixedly connected with the driving piece, and a first sliding channel matched with the transmission assembly is arranged on the first follower;

the driven assembly includes:

one end of the driven piece is arranged in the second rotating groove and is rotationally connected with the second rotating groove, and the other end of the driven piece is connected with the crucible assembly;

and the second follower is sleeved outside the follower and is fixedly connected with the follower, and a second sliding channel matched with the transmission assembly is arranged on the second follower.

In the embodiment of the present invention, the driving member is a power input shaft 2, and the power input shaft 2 is driven by the driving device to rotate, preferably, the rotation angle is 0-300 °, the first follower is a first sliding arm 3, which can be fixed on the power input shaft 2 through a clamping plate 4, or can be welded or bolted, so as to ensure that the first sliding arm 3 can stably rotate along with the power input shaft 2, and the first sliding channel is a first sliding groove matched with the transmission assembly; in this embodiment, the driving member may also be a driving rod connected to the driving device, the first follower is a first sliding rod sleeved outside the driving rod and fixedly connected to the driving rod, and when the driving device drives the driving rod to rotate, the first sliding rod stably rotates in the housing 1; the driven piece is a crucible driven shaft 7, one end of the driven piece is connected with the existing crucible component, the other end of the driven piece is arranged in the second rotating groove and is rotationally connected with the second rotating groove, the second driven piece is a second sliding arm 9, one end of the second sliding arm 9 is sleeved outside the crucible driven shaft 7 and is fixedly connected with the second sliding arm, when the second sliding arm 9 rotates, the crucible driven shaft 7 is driven to synchronously rotate, and the second sliding channel is a second sliding groove matched with the transmission component; alternatively, the driven member is a driven rod, the second follower is a second sliding rod, the driven rod is driven by the second sliding rod to rotate stably under the action of the transmission assembly, and the rotation angle of the second sliding rod is smaller than that of the first sliding rod.

In an embodiment of the present invention, the driving assembly includes a driving shaft, the driving shaft is connected to a driving motor, the driving shaft is driven by the driving motor to rotate, in order to realize stable driving, a first sliding plate is installed in the housing 1, one end of the first sliding plate is sleeved outside the driving shaft and is fixedly connected to the driving shaft, and the driving shaft drives the first sliding plate to rotate to realize stable driving; the driven assembly comprises a crucible shaft, one end of the crucible shaft is arranged in the second rotating groove and is rotatably connected with the second rotating groove, the other end of the crucible shaft penetrates through the housing 1 and is rotatably connected with the housing, a second sliding plate is further arranged in the housing 1, one end of the second sliding plate is sleeved outside the crucible shaft and is fixedly connected with the crucible shaft, and the crucible shaft is driven to stably rotate through the rotation of the second sliding plate.

Referring to fig. 1-3, in one embodiment of the present invention, the transmission assembly includes:

and a connecting member having one end disposed in the first follower and the other end disposed in the second follower, wherein when the first follower rotates counterclockwise with the driving member, the connecting member slides in the second follower and carries the second follower and the driven member together counterclockwise, preferably, when the driving member rotates 90 ° clockwise, the driven member rotates 60 ° counterclockwise.

The utility model discloses an in the embodiment, the connecting piece is sliding

5, and 5 one ends of sliding pin are fixed mounting in first follower, and the other end rotates to be set up in the second follower and rather than sliding connection, for easy to assemble, set up the first spacing spout that cooperatees with sliding pin 5 in the first follower, set up the second spacing spout rather than sliding pin 5 cooperatees in the second follower, first spacing spout is used for fixing sliding pin 5 in suitable position, and the spacing spout of second supplies sliding pin 5 to slide and rotate, and when first follower rotates, like this, drives the second follower through sliding pin 5 activity in the spacing spout of second and rotates to make when first follower rotates 90 clockwise, second follower anticlockwise rotation 60.

Referring to fig. 2 and 3, in an embodiment of the present invention, the transmission assembly further includes:

an adjustment member for adjusting the position of the link member within the first follower;

and the fixing piece is used for fixing the position of the connecting piece in the first follower.

In the embodiment of the utility model, the adjusting part is an adjusting screw 8, for convenient adjustment, the adjusting screw 8 is fixedly installed on the first follower, the sliding pin 5 is sleeved outside the adjusting screw 8 and is connected with the adjusting screw in a sliding manner, for convenient installation, one end of the adjusting screw 8 arranged in the first limiting chute is fixedly provided with a rotating shaft 10, a rotating shaft hole 12 matched with the rotating shaft 10 is arranged in the sliding pin 5, and for limiting the sliding pin 5, a pin sheet 11 is installed on the rotating shaft 10 outside the sliding pin 5 for fixation; the fixing piece is a stop screw 6, in order to facilitate installation, a threaded hole 13 communicated with a rotating shaft hole 12 is formed in the sliding pin 5, the stop screw 6 is installed in the threaded hole 13, and the sliding pin 5 is connected and fixed with the adjusting screw 8 through the contact of the stop screw 6 and the rotating shaft 10; alternatively, the adjusting part is a threaded rod rotatably connected with the first follower, the fixing part is sleeved on the outer portion of the threaded rod and is connected with a nut in a threaded manner, the sliding pin 5 is sleeved on the outer portion of the threaded rod, the threaded rod is rotated during adjustment, the sliding pin 5 slides in the first limiting sliding groove to be adjusted due to the limitation of the first limiting sliding groove, and the adjusting part is fixed by rotating the nut after the adjustment is completed.

In an embodiment of the present invention, the transmission assembly includes a transmission rod, the transmission rod is fixedly mounted on the first follower, and the second follower is rotatably sleeved outside the transmission rod and slidably connected thereto, so as to ensure that the second follower can rotate 60 ° counterclockwise when the first follower rotates 90 ° clockwise, thereby completing stable transmission; preferably, the transmission rod is slidably disposed in the first follower, a screw rod rotatably connected to the transmission rod is installed in the transmission rod, and one end of the screw rod penetrates through the first follower and is in threaded connection with the first follower, so that the position of the transmission rod in the first rotating member can be adjusted by rotating the screw rod, and the operation is convenient.

In an embodiment of the utility model, a refueling device is provided, including the body, install the drive mechanism in the above-mentioned embodiment in the body.

It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims

1. A transmission mechanism, comprising:

a support assembly;

2. The transmission mechanism as recited in claim 1, wherein the support assembly comprises:

and the housing is provided with a first rotating groove matched with the driving component and a second rotating groove matched with the driven component.

3. The transmission mechanism as claimed in claim 2, wherein the active component comprises:

the driven assembly includes:

4. The transmission mechanism as claimed in claim 3, wherein the transmission assembly comprises:

and one end of the connecting piece is arranged in the first follower and fixedly connected with the first follower, the other end of the connecting piece is rotatably arranged in the second follower and is in sliding connection with the second follower, and when the first follower rotates 90 degrees along with the driving piece, the connecting piece drives the second follower and the driven piece to rotate together by 60 degrees.

5. The transmission mechanism as recited in claim 4, wherein the transmission assembly further comprises:

and the fixing piece is used for fixing the connecting piece and the adjusting piece.

6. A refueling device comprising a body, wherein a transmission mechanism according to any one of claims 1 to 5 is mounted in the body.