CN214732462U

CN214732462U - Chuck with a locking mechanism

Info

Publication number: CN214732462U
Application number: CN202120373305.2U
Authority: CN
Inventors: 许璐; 赵宏宇
Original assignee: Beijing Naura Microelectronics Equipment Co Ltd
Current assignee: Beijing Naura Microelectronics Equipment Co Ltd
Priority date: 2021-02-10
Filing date: 2021-02-10
Publication date: 2021-11-16
Anticipated expiration: 2031-02-10

Abstract

The utility model discloses a chuck, which comprises a base body; a rotating member and a plurality of eccentric clamping members mounted on the base; the eccentric clamping pieces are arranged around the rotating piece and are in transmission connection with the rotating piece, and the eccentric clamping pieces are used for clamping a semiconductor processed piece; the adjustable connecting piece is connected with the base body through the adjustable connecting piece, the adjustable connecting piece is provided with a plurality of limiting states, and under the condition that the adjustable connecting piece is in different limiting states, the clamping force of the eccentric clamping pieces on the semiconductor processed piece is different. The chuck that above-mentioned technical scheme provided can provide different clamping-force to the semiconductor work piece, and then when wasing the semiconductor work piece of different materials, need not to change the chuck, can promote cleaning efficiency, reduction in production cost.

Description

Chuck with a locking mechanism

Technical Field

The utility model relates to a semiconductor processing technology field especially relates to a chuck.

Background

A chuck is a common device for holding a workpiece to be processed in a semiconductor manufacturing process. In cleaning a semiconductor work piece, a mechanical chuck is generally used which holds the semiconductor work piece by applying a clamping force to the semiconductor work piece to prevent the semiconductor work piece from falling off during the cleaning process. However, since the thickness of the semiconductor workpiece is relatively small, when the semiconductor workpiece is fixed, the model of the used chuck needs to be changed according to parameters such as the material of the semiconductor workpiece to be fixed, so that the chuck can provide reliable fixing effect for the semiconductor workpiece, and meanwhile, the semiconductor workpiece cannot be damaged due to too large clamping acting force, so that in the processing process, if the semiconductor workpiece with different materials needs to be cleaned, the chuck needs to be stopped and replaced, the cleaning efficiency is reduced, and the production cost is increased.

SUMMERY OF THE UTILITY MODEL

The utility model discloses a chuck to solve present chuck can only cooperate with the semiconductor work piece that corresponds material isoparametric, when wasing the semiconductor work piece of different materials, need shut down and change the chuck, the cleaning efficiency is lower, the higher problem of manufacturing cost.

In order to solve the above problem, the utility model adopts the following technical scheme:

in a first aspect, an embodiment of the present invention discloses a chuck, which includes:

a substrate;

a rotating member and a plurality of eccentric clamping members mounted on the base;

the eccentric clamping pieces are arranged around the rotating piece and are in transmission connection with the rotating piece, and the eccentric clamping pieces are used for clamping a semiconductor processed piece;

the adjustable connecting piece is connected with the base body through the adjustable connecting piece, the adjustable connecting piece is provided with a plurality of limiting states, and under the condition that the adjustable connecting piece is in different limiting states, the clamping force of the eccentric clamping pieces on the semiconductor processed piece is different.

In a second aspect, embodiments of the present invention disclose a semiconductor processing apparatus, which includes a process chamber and the above chuck, the chuck set in the process chamber.

The utility model discloses a technical scheme can reach following beneficial effect:

the embodiment of the application discloses a chuck, wherein a rotating part is rotatably arranged on a base body, a plurality of eccentric clamping pieces are arranged around the rotating part, each eccentric clamping piece is arranged on the base body and is in transmission connection with the rotating part, and the distance between each eccentric clamping piece and a rotating shaft of the rotating part can be changed along with the rotation of the rotating part, so that a semiconductor processed part can be arranged among the plurality of eccentric clamping pieces; and the rotating part is connected with the base body through the adjustable connecting part, the adjustable connecting part can apply acting force to the rotating part to enable the rotating part to generate a reset trend, and under the condition that the rotating part has the reset trend, the plurality of eccentric clamping parts can form a clamping fixed relation with the semiconductor processed part. Simultaneously, adjustable connecting piece has multiple limit state, and under the limit state's of adjustable connecting piece difference condition, the interaction force between adjustable connecting piece and the rotation piece is different, makes the eccentric holder act on the clamping-force of semiconductor work piece also different to when wasing the semiconductor work piece of different materials, only need adjust adjustable connecting piece's limit state can, and need not to shut down and change the chuck, and then can promote cleaning efficiency, reduction in production cost.

Drawings

The accompanying drawings, which are described herein, serve to provide a further understanding of the invention and constitute a part of this specification, and the exemplary embodiments and descriptions thereof are provided for explaining the invention without unduly limiting it. In the drawings:

fig. 1 is a schematic structural diagram of a chuck according to an embodiment of the present invention;

fig. 2 is a schematic structural view of a pull buckle positioned in a first limit groove in the chuck according to an embodiment of the present invention;

fig. 3 is a schematic structural view of the chuck middle pull buckle positioned in the second limit groove according to the embodiment of the present invention;

fig. 4 is a schematic view illustrating a pull tab moving from a first limit groove to a second limit groove in a chuck according to an embodiment of the present invention;

fig. 5 is a schematic view of the pull tab moving from the second limit groove to the first limit groove in the chuck disclosed in the embodiment of the present invention.

Description of reference numerals:

100-base body,

200-rotating part, 210-wheel shaft, 220-wheel hub, 230-gear ring,

300-eccentric clamping piece,

400-limit piece, 410-first limit groove, 420-second limit groove, 430-first switching track, 440-second switching track,

500-elastic connecting piece,

600-pulling and buckling.

Detailed Description

To make the purpose, technical solution and advantages of the present invention clearer, the following will combine the embodiments of the present invention and the corresponding drawings to clearly and completely describe the technical solution of the present invention. It is to be understood that the embodiments described are only some embodiments of the invention, and not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

The technical solutions disclosed in the embodiments of the present invention are described in detail below with reference to the accompanying drawings.

As shown in fig. 1-5, the embodiment of the present invention discloses a chuck, which can clamp a semiconductor workpiece to fix the position of the semiconductor workpiece, and ensure the normal processing or cleaning process of the semiconductor workpiece. The chuck includes a base 100, a rotation member 200, an adjustable connection member, and a plurality of eccentric holders 300.

The base 100 is a main body structure of the chuck, and is a mounting base for other components in the chuck, so that the other components can be mounted on the base 100. The base 100 may be made of a relatively strong material such as metal, and considering that the shape of the semiconductor workpiece is generally circular, the overall shape of the base 100 of the chuck may also be circular, so as to improve the load bearing effect on the semiconductor workpiece.

The rotating member 200 is connected to the base 100, the rotating member 200 can rotate relative to the base 100, and the rotating member 200 is engaged with the eccentric clamping member 300, thereby achieving the purpose of clamping a semiconductor workpiece. Specifically, the rotating member 200 may be a gear, the rotating member 200 includes a hub 210, a hub 220 and a ring gear 230, the hub 210 is rotatably connected to the base 100, such that the rotating member 200 can be rotatably connected to the base 100, the ring gear 230 is connected to the hub 210 through the hub 220, and the ring gear 230 can be in a driving fit relationship with the plurality of eccentric holders 300.

Eccentric holder 300 includes transmission connection structure and eccentric structure, and eccentric structure sets up on transmission connection structure eccentrically, and transmission connection structure can be connected with rotating 200 transmission, and specifically, transmission connection structure can rotate and install on base member 100, perhaps, can set up other installation infrastructure such as frame for transmission connection structure to guarantee that transmission connection structure can be stable with rotate 200 transmission cooperation, so that transmission connection structure can rotate along with the rotation of rotating 200. Also, the distance between the eccentric structure and the wheel shaft 210 of the rotation member 200 (or the transmission connection member) can be changed during the rotation of the eccentric structure with the rotation member 200. In detail, in the case where the eccentric structure is located between the center of the rotation member 200 (i.e., the wheel shaft 210) and the center of the driving connection structure, the distance between the eccentric structure and the center of the rotation member 200 is minimized; correspondingly, when the eccentric structure is located on the side of the center of the transmission connection structure departing from the center of the rotation member 200, the distance between the eccentric structure and the center of the rotation member 200 is the largest. Based on this, the state of the eccentric clamping member 300 can be adjusted according to the size of the semiconductor workpiece, so that the semiconductor workpiece can be clamped and fixed among the plurality of eccentric clamping members 300, and at this time, the diameter of a circle formed by the eccentric structures of the plurality of eccentric clamping members 300 is equal to the diameter of the semiconductor workpiece.

The number of the eccentric clamping pieces 300 is multiple, and the plurality of eccentric clamping pieces 300 are arranged around the rotating piece 200, so that the eccentric clamping pieces 300 are arranged around the rotating piece 200, and the eccentric clamping pieces 300 can provide clamping effect for the semiconductor processed piece from multiple positions of the semiconductor processed piece. The specific number of the eccentric clamps 300 may be determined according to practical situations and is not limited herein. Also, a plurality of eccentric clamping members 300 can be uniformly distributed around the rotation member 200 to improve the clamping effect. The eccentric clamping member 300 and the rotating member 200 may be in a transmission connection relationship through a gear engagement manner, and of course, they may be connected to each other through other transmission connection manners.

The adjustable connecting member can connect the rotating member 200 and the base member 100, so that a certain acting force is formed between the rotating member 200 and the base member 100, and a plurality of eccentric clamping members 300 can provide stable and reliable clamping force for a semiconductor workpiece. The adjustable connector has a plurality of limit states, and the clamping force of the plurality of eccentric clamping members 300 on the semiconductor machined workpiece is different when the adjustable connector is in different limit states.

That is, the adjustable connection member may change the magnitude of the force applied to the rotation member 200 and the base member 100 by the adjustable connection member by changing its state or connection position, and further change the magnitude of the clamping force applied to the semiconductor workpiece by each of the eccentric clamping members 300.

As described above, each of the eccentric holders 300 is rotatably connected to the rotating member 200, and during the rotation of the rotating member 200, the eccentric holder 300 can be rotated, so that the distance between the eccentric structure of the eccentric holder 300 and the center of the rotating member 200 is changed. In the process of mounting the semiconductor workpiece, the rotating member 200 is rotated by a corresponding angle according to the size of the semiconductor workpiece, and further, the distance between the centers of the eccentric clamping member 300 and the rotating member 200 is increased, so that the size of the semiconductor workpiece is satisfied, and the semiconductor workpiece can be mounted between the plurality of eccentric clamping members 300. Since the rotation member 200 is also connected to the base 100 through the adjustable connection member, the eccentric clamping member 300 can provide a clamping force to the semiconductor workpiece by the force applied to the rotation member 200 through the adjustable connection member. In other words, after the rotating member 200 rotates through a certain angle, the adjustable connecting member applies a force to the rotating member 200, so that the rotating member 200 tends to be reset, thereby reducing the distance between the eccentric clamping members 300 and the center of the rotating member 200, and ensuring that the semiconductor workpiece can be stably clamped between the plurality of eccentric clamping members 300.

Specifically, the component of the adjustable connection element for providing acting force to the rotation element 200 may be an elastic connection element 500, opposite ends of the elastic connection element 500 are respectively connected to the rotation element 200 and the base 100, and after the rotation element 200 rotates by a certain angle relative to its initial position, the elastic connection element 500 is stretched, so that the elastic connection element 500 can apply a certain elastic acting force to the rotation element 200, and the rotation element 200 has a tendency to return. Of course, during the process of installing the elastic connection member 500, it is necessary to make the elastic direction of the elastic connection member 500 not parallel to the axial direction of the rotation member 200, and to ensure the rotation prevention ability of the elastic connection member 500.

Alternatively, the elastic connection member 500 may be mounted on the base body 100 and the rotation member 200 by providing a plurality of connection structures on the base body 100 and connecting any one of the plurality of connection structures with the elastic connection member 500. Further, by designing the positions of the plurality of connection structures on the base 100, the elastic connection member 500 can be connected to different connection structures, and further, the degree of extension of the elastic connection member 500 is made different, so that when the rotary member 200 rotates at the same angle with respect to the base 100, the clamping force between the eccentric clamping member 300 and the semiconductor workpiece is made different, and further, the chuck can clamp semiconductor workpieces of different materials.

The embodiment of the application discloses a chuck, a rotating part 200 is rotatably mounted on a base body 100, a plurality of eccentric clamping pieces 300 are arranged around the rotating part 200, each eccentric clamping piece 300 is mounted on the base body 100 and is in transmission connection with the rotating part 200, and the eccentric clamping pieces 300 can change the distance between the eccentric clamping pieces and a wheel shaft 210 of the rotating part 200 along with the rotation of the rotating part 200, so that a semiconductor processed piece can be mounted among the plurality of eccentric clamping pieces 300; also, the rotation member 200 is connected to the base 100 through an adjustable connection member, which can apply a force to the rotation member 200 to cause a reset tendency of the rotation member 200, and in the case where the rotation member 200 has the reset tendency, the plurality of eccentric holders 300 can be in a fixed relationship with the semiconductor work piece. Meanwhile, the adjustable connecting piece has multiple limit states, and under the condition that the adjustable connecting piece is in different limit states, the interaction force between the adjustable connecting piece and the rotating piece 200 is different, so that the clamping force of the eccentric clamping piece 300 acting on the semiconductor processed piece is also different, and when the semiconductor processed pieces made of different materials are cleaned, the limit states of the adjustable connecting piece are only required to be adjusted, a chuck is not required to be stopped and replaced, the cleaning efficiency can be improved, and the production cost is reduced.

Further, the adjustable connector includes a limiting member 400 and an elastic connector 500, the limiting member 400 is fixed on the base 100, and the limiting member 400 is provided with a plurality of limiting grooves. Specifically, the number of the limiting grooves may be two, three or more, and is not limited herein. The first end of the elastic connecting piece 500 is connected with the rotating piece 200, the second end of the elastic connecting piece 500 is limited and arranged in one of the plurality of limiting grooves, and under the condition that the second end is limited and arranged in different limiting grooves, the clamping force of the plurality of eccentric clamping pieces 300 on the semiconductor processed piece is different.

Adopt under the condition of above-mentioned technical scheme for the structure of being connected with elastic connection spare 500 directly contains in adjustable connection spare, also promptly, adjustable connection spare self possesses the ability of interval between the looks back both ends in adjusting elastic connection spare 500 promptly, thereby only need with locating part 400 snap-on the base member 100 of chuck, and need not to reform transform the base member 100 of chuck, can accomplish the improvement to current chuck, this replacement cost that can reduce the chuck.

The limiting member 400 may be specifically fixed to the base 100 by a connector such as a screw, or the limiting member 400 may be fixed to the base 100 by other methods such as bonding or welding. The limiting member 400 may be provided with a plurality of connecting blocks, and each connecting block is located at a different position on the limiting member 400. Each connecting block all is equipped with the spacing groove, and the spacing inslot can be provided with spliced poles such as couple, and the one end of elastic connection spare 500 can stretch into the spacing inslot and articulate with the spliced pole. In the above embodiment, by connecting the elastic connection member 500 to different connection posts, the distance between the opposite ends of the elastic connection member 500 can be changed, thereby changing the initial elastic force of the elastic connection member 500. Of course, similar to the arrangement manner of the elastic connection element 500, in the process of arranging the positions of the connection columns, it is necessary to ensure that the distances between the connection columns and the wheel axle 210 of the rotating element 200 are different, that is, in the process of arranging the connection columns, the connection columns cannot be arranged on the same circumference centering on the wheel axle 210 of the rotating element 200, so as to ensure that the connection columns have the capability of adjusting the distance between the two opposite ends of the elastic connection element 500.

As described above, the elastic connecting member 500 may be connected to the position-limiting groove in a hanging manner, in another embodiment of the present application, the adjustable connecting member may further include a pull buckle 600, the second end of the elastic connecting member 500 is connected to the position-limiting member 400 through the pull buckle 600, and a certain position-limiting groove on the elastic connecting member 500 and the position-limiting member 400 may also form a reliable connection relationship. Moreover, the pull tab 600 is rotatably engaged with the limiting groove, so that in the process that the first end of the elastic limiting member 400 rotates along with the rotating member 200 relative to the base 100 (or the limiting member 400), the distribution directions of the two opposite ends of the elastic connecting member 500 can be ensured to be always parallel to the elastic direction of the elastic connecting member 500, the elastic action effect of the elastic connecting member 500 is better, and the magnitude and direction of the elastic acting force of the elastic connecting member 500 can be controlled more easily and more accurately.

Specifically, the tab 600 may be a cylindrical structure, which enables the tab 600 to rotate within the limit groove. With the aid of the connecting piece detachable with locating part 400, can make to draw and detain 600 and can be fixed in arbitrary spacing inslot, guarantee to draw detain 600 can not separate with the spacing groove, can provide stable spacing effect for elastic connection 500. Correspondingly, when the limit groove matched with the pull buckle 600 needs to be replaced, the connecting piece can be detached from the limit piece 400, then the pull buckle 600 is taken out from the limit groove, the pull buckle 600 is installed in another limit groove, and then the connecting piece is fixed on the limit piece 400, so that the relative position between the pull buckle 600 and the limit piece 400 can be changed, and the distance between the two opposite ends of the elastic connecting piece 500 is changed. The connection mode between the elastic connection member 500 and the tab 600 is various, and optionally, the second end of the elastic connection member 500 may be sleeved and fixed on the tab 600, or the elastic connection member 500 may be connected to the tab 600 through a connection member such as a hook.

In another embodiment of the present application, optionally, each of the position-limiting grooves includes an arc-shaped mating surface, and the arc-shaped mating surface can be rotatably mated with the tab 600, which also ensures that the tab 600 can form a rotatable mating relationship with the position-limiting groove. Moreover, under the condition of adopting the above technical solution, the matching precision between the tab 600 and the limiting groove of the limiting member 400 can be further improved, so as to further improve the control precision of the elastic acting force on the elastic connecting member 500.

Specifically, the span range of the arc-shaped matching surface on each limiting groove, that is, the radian of the arc-shaped matching surface can be determined according to the position of the limiting groove, so that when the elastic connecting piece 500 is matched with the limiting groove, the pull buckle 600 can still be matched with the arc-shaped matching surface of the limiting groove after the rotating piece 200 rotates to the preset position. Under the condition of adopting the above technical scheme, optionally, the tab 600 is a cylindrical structural member, which can further improve the matching stability between the tab 600 and the limiting groove.

As described above, in order to change the degree to which the elastic connection member 500 is stretched when the second end of the elastic connection member 500 is engaged with the different spacing grooves, it is necessary that the plurality of spacing grooves are not distributed in the direction around the hub 210 of the rotation member 200. Alternatively, as shown in fig. 2, the plurality of limiting grooves are distributed along the elastic direction of the elastic connection member 500, in this case, when the second end of the elastic connection member 500 is respectively matched with the two adjacent limiting grooves, the interval between the two adjacent limiting grooves can basically act on the elastic connection member 500, so that the amount of expansion and contraction of the elastic connection member 500 is changed, and even if the interval between the two adjacent limiting grooves is small, the elastic connection member 500 can generate a larger amount of expansion and contraction, thereby reducing the size of the entire limiting member 400.

As described above, the tab 600 can rotate relative to the limiting groove along with the rotation of the rotation member 200, and when the limiting groove is disposed in the distribution manner provided in the above embodiment, when the rotation angle of the rotation member 200 relative to the base 100 is the same, compared to the case where the tab 600 is located in the limiting groove closer to the first end of the elastic connection member 500, under the condition that the tab 600 is matched with the limiting groove farther from the first end of the elastic connection member 500, the distance between the position of the tab 600 and the position of the first end of the elastic connection member 500 is larger, and further, the relative rotation angle between the tab 600 and the first end of the elastic connection member 500 is also larger.

In order to ensure that each limiting groove can keep a better rotation fit effect with the tab 600, as shown in fig. 2, in any two limiting grooves, the curvature of the limiting groove close to the first end of the elastic connecting piece 500 is smaller than the curvature of the limiting groove far away from the first end, or in a plurality of limiting grooves, the curvature of the limiting groove far away from the first end of the elastic connecting piece 500 is larger. Under the condition of adopting above-mentioned technical scheme, along with rotating piece 200 and rotating relative base member 100, can guarantee that arbitrary spacing groove all can keep comparatively reliable normal running fit relation with drawing buckle 600 all the time, promptly, draws buckle 600 can cooperate with the arc fitting surface in the spacing groove all the time. Moreover, in the case of adopting the above technical solution, the size of the limiting groove near the first end of the elastic connection member 500 can be relatively small, and the size of the limiting member 400 can be further reduced.

As described above, the fastener 600 can be stably engaged with any one of the position-limiting grooves by connecting the detachable connector to the position-limiting member 400. In order to further reduce the switching degree of difficulty of the pull buckle 600 between the limiting grooves, optionally, the limiting part 400 is provided with a switching track, and two adjacent limiting grooves are communicated through the switching track, so that when the limiting groove matched with the pull buckle 600 needs to be replaced and pulled, the pull buckle 600 can move between different limiting grooves along the switching track, the adjusting degree of difficulty of the adjustable connecting piece can be greatly reduced, the time of adjusting procedures is shortened, and the processing efficiency is improved.

Specifically, the switching track and the plurality of limiting grooves may be formed on the limiting member 400, and the size of the switching track may be determined according to the size of the tab 600, so as to ensure that the tab 600 may move in the switching track. In the process of forming the switching track, the switching track can be made as smooth as possible, and the moving difficulty of the tab 600 in the switching track is reduced. The quantity of switching the track is relevant with the quantity of spacing groove, as above, the quantity of spacing groove can be two, three or more, then the track that switches can correspond and be provided with one, two or more, guarantee all be provided with between two adjacent spacing grooves switch the track can, and then guarantee to draw and detain 600 and can freely switch at a plurality of spacing inslots.

Optionally, the number of the switching tracks is multiple, and the two ends of the opposite side of one limiting groove in the two adjacent limiting grooves are respectively connected with the two ends of the opposite side of the other limiting groove through the switching tracks. That is to say, two adjacent spacing grooves can switch the track intercommunication each other through two, and under this condition, the one end that flexible connector 500 and spacing groove are connected can switch between the spacing groove through different switching tracks, further reduces the switching degree of difficulty between flexible connector 500 and the spacing groove.

In addition, under the condition of adopting the technical scheme, the extending directions of the two switching tracks connected between the two limiting grooves can be correspondingly determined according to the actual positions of the two adjacent limiting grooves, so that the two switching tracks can play different roles.

Specifically, as shown in fig. 2 to 5, two adjacent limiting grooves may be a first limiting groove 410 and a second limiting groove 420, respectively, and two switching tracks connected between the first limiting groove 410 and the second limiting groove 420 are a first switching track 430 and a second switching track 440, respectively. As described above, the first switching track 430 and the second switching track 440 can perform different functions, specifically, can perform a reciprocating function respectively, that is, the first switching track 430 can move the second end of the elastic connection member 500 from the first limiting groove 410 to the second limiting groove 420, and the second switching track 440 can move the second end of the elastic connection member 500 from the second limiting groove 420 back to the first limiting groove 410, which can further improve the convenience of switching the elastic connection member 500 between different limiting grooves.

Alternatively, as shown in fig. 1, the number of the adjustable connection members is plural, each of the adjustable connection members is capable of connecting the base body 100 and the rotation member 200, and the connection reliability between the base body 100 and the rotation member 200 can be improved by the plural adjustable connection members. Optionally, the structures of the plurality of adjustable connectors are the same, so as to reduce the difficulty of spare parts. And, can make a plurality of adjustable connecting pieces set up around the shaft 210 interval of rotating piece 200, under this condition, guarantee that each position on the piece 200 of rotating can all receive the effort that the adjustable connecting piece provided, guarantee that the atress homogeneity of rotating piece 200 is better to prevent to rotate piece 200 and the skew jamming's condition from appearing because of the atress is uneven at the pivoted in-process.

As described above, the adjustable connection member may include the elastic connection member 500, and opposite ends of the elastic connection member 500 are respectively connected to the base 100 and the rotation member 200, so that the elastic connection member 500 may be stretched during the rotation of the rotation member 200 with respect to the base 100, thereby applying the restoring force to the rotation member 200. As described above, the number of the adjustable connection members may be plural, and further, the straight lines along which the extending directions of the plural elastic connection members 500 are located may be tangent lines of the same circumference. Under the condition, the action effect of the interaction force between the elastic connecting piece 500 and the rotating piece 200 is basically to limit the rotating piece 200 to rotate relative to the base body 100, so that the elastic connecting piece 500 can generate a clamping force meeting the requirement by generating a small deformation amount, and the service life of the elastic connecting piece 500 can be prolonged.

The utility model discloses what the key description in the above embodiment is different between each embodiment, and different optimization characteristics are as long as not contradictory between each embodiment, all can make up and form more preferred embodiment, consider that the literary composition is succinct, then no longer describe here.

The above description is only an example of the present invention, and is not intended to limit the present invention. Various modifications and changes may occur to those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the scope of the claims of the present invention.

Claims

1. A chuck, comprising:

a substrate;

2. The chuck according to claim 1, wherein the adjustable connecting member includes a limiting member and an elastic connecting member, the limiting member is fixed to the base, the limiting member has a plurality of limiting grooves, a first end of the elastic connecting member is connected to the rotating member, a second end of the elastic connecting member is disposed in one of the plurality of limiting grooves, and when the second end is disposed in a different one of the limiting grooves, a clamping force of the plurality of eccentric clamping members on the semiconductor workpiece is different.

3. The chuck according to claim 2, wherein the adjustable connecting member further comprises a pulling buckle, the second end of the elastic connecting member is connected to the position-limiting member through the pulling buckle, and the pulling buckle is rotatably engaged with the position-limiting groove.

4. The chuck according to claim 3, wherein each of the retaining grooves includes an arcuate mating surface that is rotationally mated with the tab.

5. The chuck according to claim 4, wherein a plurality of the stopper grooves are distributed along an elastic direction of the elastic connection member.

6. The chuck according to claim 5, wherein in any two of the retaining grooves, the curvature of the retaining groove near the first end is smaller than the curvature of the retaining groove far from the first end.

7. The chuck according to claim 3, wherein the retaining members are provided with switching rails, and adjacent two of the retaining grooves communicate through the switching rails.

8. The chuck according to claim 7, wherein the number of the switching rails is plural, and opposite ends of one of the two adjacent limiting grooves are respectively communicated with opposite ends of the other limiting groove through the switching rails.

9. The chuck as in claim 1, wherein said adjustable connecting member is provided in a plurality, said plurality being spaced about said rotatable shaft of said rotatable member.

10. The chuck according to claim 9, wherein the adjustable connecting members each comprise an elastic connecting member, opposite ends of the elastic connecting member are respectively connected to the base and the rotating member, and straight lines of the elastic connecting members in the elastic direction are all tangent lines of the same circumference.