CN203242607U - Guide wheel, substrate conveying device and substrate processing equipment - Google Patents
Guide wheel, substrate conveying device and substrate processing equipment Download PDFInfo
- Publication number
- CN203242607U CN203242607U CN 201320276243 CN201320276243U CN203242607U CN 203242607 U CN203242607 U CN 203242607U CN 201320276243 CN201320276243 CN 201320276243 CN 201320276243 U CN201320276243 U CN 201320276243U CN 203242607 U CN203242607 U CN 203242607U
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- China
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- ring body
- inner ring
- support bar
- directive wheel
- outer ring
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Abstract
The utility model discloses a guide wheel, a substrate conveying device and substrate processing equipment. The guide wheel of the substrate conveying device comprises a supporting rod, an inner ring body, and an outer ring body, wherein the outer ring body can be sleeved on the periphery of the inner ring body around the axis of the outer ring body in a rotating manner; and the inner ring body can be sleeved on the periphery of the supporting rod along the extending direction of the axis of the inner ring body in a sliding manner, and a locking mechanism for locking the relative position between the supporting rod and the inner ring body is arranged between the supporting rod and the inner ring body. When a part, which is in contact with a substrate, of the outer ring body of the guide wheel is worn, the inner ring body can slide along the extending direction of the axis of the inner ring body, so as to adjust the position between the inner ring body and the supporting rod, the worn part of the outer ring body can be moved away, a part which is not in contact with the substrate is adjusted to a position in contact with the substrate, and the relative position between the inner ring body and the supporting rod is locked through the locking mechanism, thereby ensuring that the guide wheel can be used continually. Therefore, the utilization rate of the outer ring body in the guide wheel is high, and the service life of the guide wheel is long.
Description
Technical field
The utility model relates to the semiconductor processing technology field, particularly a kind of directive wheel, base plate transfer device and substrate processing equipment.
Background technology
In the semiconductor processing technology field, particularly in the preparation course of processing of the devices such as thin-film transistor LCD device TFT-LCD, substrate in each process equipment need base plate transfer device to transmit the time the transmission track determine.
When using base plate transfer device that substrate is transmitted, base plate transfer device is provided with the transmission track that many directive wheels to mutual correspondence limit substrate by the bilateral symmetry that the substrate that is arranged on its conveyer belt transmits track.
As shown in Figure 1, the directive wheel of available technology adopting comprises: it is peripheral and be located at the outer ring body 01 of inner ring body 03 periphery with fixing inner ring body 03, the coaxial sleeve of support bar 04 relative position that support bar 04, coaxial sleeve are located at support bar 04; Be provided with ball 02 between inner ring body 03 and the outer ring body 01, outer ring body 01 can be with respect to the rotation rotation of inner ring body 03 around above-mentioned inner ring body 03.
As shown in Figure 2, in the concrete transport process to substrate, support bar 04 with in the both sides of the conveyer belt 06 of base plate transfer device, the relative both sides of the outer ring body of every a pair of mutual correspondence 01 contact with the side of the substrate 05 placed on the conveyer belt 06 respectively; The inside thrust that the outer ring body 01 of directive wheel and the contacts side surfaces of substrate 05 produce is limited in substrate 05 centre of conveyer belt 06; guarantee that substrate does not break away from it and transmits track in transport process; thereby avoided being offset because break away from transmitting track in transport process at substrate 05 risk that reduction substrate 05 bumps with the miscellaneous part of conveyer belt 06 both sides in transport process.
But, directive wheel of the prior art is after long-time the use, position that the outer ring body 01 of directive wheel contacts with substrate 05 can owing to and substrate 05 between friction wear and tear and groove occurs, continuing to use, the directive wheel of fray groove can cause the adverse consequencess such as substrate damage, therefore, when appearring in the position that the outer ring body 01 of directive wheel contacts with substrate 05, the wearing and tearing groove just can not re-use, the directive wheel that must more renew, and directive wheel of the prior art is lower to the utilance of outer ring body 01.
The utility model content
The utility model provides a kind of directive wheel, base plate transfer device and substrate processing equipment, and the utilance of directive wheel China and foreign countries ring body is higher, and the useful life of directive wheel is longer.
For achieving the above object, the utility model provides following technical scheme:
A kind of directive wheel of base plate transfer device comprises support bar, inner ring body and outer ring body, and it is peripheral that described outer ring body can be sheathed on described inner ring body rotatably around its axis; Described inner ring body can be sheathed on slidably along its Axis Extension direction the periphery of described support bar, has the lockable mechanism of the described support bar of locking and described inner ring body relative position between described support bar and the described inner ring body.
Preferably, described lockable mechanism comprises:
Be arranged at described inner ring body inwall, along a plurality of draw-in grooves that the bearing of trend of described outer ring body axis is arranged, each described draw-in groove is recessed to described outer ring body;
Be arranged at the stopping means of described support bar, described stopping means has and stretches into described draw-in groove and can bounce back at least one fixture block concordant with the inwall of described inner ring body.
Preferably, described stopping means comprises that an end is fixed in the spring leaf of described support bar, and the termination of the described spring leaf other end forms described fixture block.
Preferably, along the bearing of trend of described outer ring body axis:
Described fixture block stretch into described draw-in groove an end the longitudinal section be shaped as arc, the deep-slotted chip breaker of each described draw-in groove for agreeing with described fixture block;
Perhaps, described fixture block stretch into described draw-in groove an end the longitudinal section be shaped as wedge shape, the wedge-shaped slot of each described draw-in groove for agreeing with described fixture block.
Preferably, described lockable mechanism also comprises:
The bearing of trend that described support bar is provided with is perpendicular to the groove of described outer ring body axis, and described fixture block is two, and two described fixture blocks and described groove be slidingly matched, and is provided with between the two described fixture blocks to be in the spring that the power state is held in compression.
Preferably, described lockable mechanism comprises:
Be arranged at the external screw thread of described support bar, and be arranged at the internal thread of described inner ring body inwall.
Preferably, described lockable mechanism also comprises: the locking nut of locking described inner ring body and support bar after the position adjustments.
Preferably, has ball between described outer ring body and the described inner ring body.
The utility model also provides a kind of base plate transfer device, and any directive wheel that provides in the technique scheme is provided.
The utility model also provides a kind of substrate processing equipment, and the base plate transfer device that provides in the technique scheme is provided.
The directive wheel of the base plate transfer device that the utility model provides comprises support bar, inner ring body and outer ring body, and it is peripheral that described outer ring body can be sheathed on described inner ring body rotatably around its axis; Described inner ring body can be sheathed on slidably along its Axis Extension direction the periphery of described support bar, has the lockable mechanism of the described support bar of locking and described inner ring body relative position between described support bar and the described inner ring body.
Above-mentioned directive wheel, after the part wearing and tearing of its outer ring body and substrate contacts, can be along the Axis Extension direction of the inner ring body above-mentioned inner ring body that slides, regulate the position between inner ring body and the support bar, the position that outer ring body has worn and torn is removed, with not being adjusted to position with substrate contacts with the part of substrate contacts, then by the relative position between locking structure locking inner ring body and the support bar, thereby guarantee that directive wheel can continue to use.
So the utilance of the directive wheel China and foreign countries ring body that the utility model provides is higher, the useful life of directive wheel is longer.
Description of drawings
Accompanying drawing described herein is used to provide further understanding of the present utility model, consists of a part of the present utility model, and illustrative examples of the present utility model and explanation thereof are used for explaining the utility model, do not consist of improper restriction of the present utility model.In the accompanying drawings:
Fig. 1 is the structural representation of a kind of directive wheel of the prior art;
Fig. 2 is the principle schematic when directive wheel leads in the prior art;
The first structural representation of the directive wheel that Fig. 3 provides for the utility model;
A kind of structural representation of support bar and stopping means in the directive wheel that Fig. 4 provides for the utility model;
The second structural representation of the directive wheel that Fig. 5 provides for the utility model;
The third structural representation of the directive wheel that Fig. 6 provides for the utility model;
The 4th kind of structural representation of the directive wheel that Fig. 7 provides for the utility model.
Embodiment
Below in conjunction with the accompanying drawing among the utility model embodiment, the technical scheme among the utility model embodiment is clearly and completely described, obviously, described embodiment only is the utility model part embodiment, rather than whole embodiment.Based on the embodiment in the utility model, those of ordinary skills are not making the every other embodiment that obtains under the creative work prerequisite, all belong to the scope of the utility model patent protection.
Please refer to Fig. 3, the directive wheel of the base plate transfer device that the utility model provides, comprise support bar 4, inner ring body 3 and outer ring body 1, above-mentioned outer ring body 1 can be sheathed on inner ring body 3 peripheries rotatably around its axis, above-mentioned inner ring body 3 can be sheathed on slidably along its Axis Extension direction the periphery of support bar 3, and, have the lockable mechanism 5 of lock support bar 4 and inner ring body 3 relative positions between inner ring body 3 and the support bar 4.
Above-mentioned directive wheel in use, after its outer ring body 1 weares and teares with the part of substrate contacts, can be along the Axis Extension direction slip inner ring body 3 of inner ring body 3, regulate the position between inner ring body 3 and the support bar 4, inner ring body 3 drives outer ring body 1 along the Axis Extension direction displacement of inner ring body 3, the position that outer ring body 1 has worn and torn can be removed, to not be adjusted to position with substrate contacts with the part of substrate contacts, then the relative position that locks between inner ring bodies 3 and the support bar 4 by above-mentioned lockable mechanism 5, thus guarantee that directive wheel can continue to use.
So the utilance of the directive wheel China and foreign countries ring body that the utility model provides is higher, the useful life of directive wheel is longer.
Particularly, the lockable mechanism that provides in above-described embodiment can have multiple set-up mode:
Mode one please continue with reference to figure 3, and above-mentioned lockable mechanism 5 can comprise:
Be arranged at inner ring body 3 inwalls, along a plurality of draw-in grooves 52 that the bearing of trend of the axis of outer ring body 1 is arranged, each draw-in groove 52 is recessed to outer ring body 1;
Be arranged at the stopping means of support bar 4, stopping means has and stretches into draw-in groove 52 and can bounce back at least one fixture block 51 concordant with the inwall of inner ring body 3.
Please refer to Fig. 4, particularly, the stopping means that provides in the aforesaid way one comprises that an end is fixed in the spring leaf 511 of support bar 4, and the termination 512 of spring leaf 511 other ends forms fixture block 51.
When needs were regulated relative position between inner ring body 3 and the support bar 4, spring leaf 511 to the Direction distortion that is adjacent to support bar 4 surfaces, and then made its termination 512 shift out draw-in groove 52 under the effect of extruding force.
More specifically, along the bearing of trend of outer ring body 1 rotation:
Perhaps, fixture block 51 stretch into draw-in groove 52 an end the longitudinal section be shaped as wedge shape, the wedge-shaped slot of each draw-in groove 52 for agreeing with fixture block 51, as shown in Figure 5.
Deep-slotted chip breaker and wedge-shaped slot all have spigot surface, are convenient to the adjusting of inner ring body 3 with support bar 4 relative positions.
Mode two, please refer to Fig. 6, above-mentioned lockable mechanism 5 also comprises bearing of trend that support bar 4 is provided with perpendicular to the groove of outer ring body 1 axis, and fixture block 51 is two, and two fixture blocks 51 are slidingly matched with groove, are provided with between two fixture blocks 51 to be in the spring 53 that the power state is held in compression.
Under the elastic force effect of spring 53, two fixture blocks 51 can go deep in the draw-in groove 52, has spigot surface between two fixture blocks 51 and the draw-in groove 52, orientation as shown in Figure 6, firmly press outer ring body 1 downwards, can make the effect of the spigot surface of fixture block 51 between fixture block 51 and draw-in groove 52 draw-in groove 52 that glides out, remove the lock-out state between inner ring body 3 and the support bar 4, and then can regulate the relative position between inner ring body 3 and the support bar 4.
Mode three please refer to Fig. 7, and above-mentioned lockable mechanism 5 can also comprise:
Be arranged at the external screw thread of support bar 4, and be arranged at the internal thread of inner ring body 3 inwalls, when the relative position between needs adjusting support bar 4 and the inner ring body 3, only inner ring body 3 can need to be regulated by threaded engagement around the rotation rotation of outer ring body 1.
Please continue with reference to figure 7, preferably, the stability when guaranteeing to lock between inner ring body 3 and the support bar 4, above-mentioned lockable mechanism 5 also comprises: the locking nut 56 of locking inner ring body 3 and support bar 4 carry out position adjustments between inner ring body 3 and support bar 4 after.
Certainly, above-mentioned lockable mechanism 5 can also have other concrete structure, as, draw-in groove can be arranged on the support bar 4, fixture block is arranged on inner ring body 3 first-class structures, give unnecessary details no longer one by one here.
Please continue with reference to figure 3, on the basis of the respective embodiments described above, in a kind of embodiment, have ball 2 between above-mentioned outer ring body 1 and the inner ring body 3.By the circumferential movement that ball 2 is realized between inner ring body 3 and the outer ring body 1, outer ring body 1 can be rotated around its rotation with respect to inner ring body 3.
The utility model also provides a kind of base plate transfer device, and any directive wheel that provides in the respective embodiments described above is provided this base plate transfer device.
The utility model also provides a kind of substrate processing equipment, and this substrate processing equipment comprises the base plate transfer device that above-mentioned execution mode provides.
Obviously, those skilled in the art can carry out various changes and modification to the utility model and not break away from spirit and scope of the present utility model.Like this, if of the present utility model these are revised and modification belongs within the scope of the utility model claim and equivalent technologies thereof, then the utility model also is intended to comprise these changes and modification interior.
Claims (10)
1. the directive wheel of a base plate transfer device comprises support bar, inner ring body and outer ring body, and it is peripheral that described outer ring body can be sheathed on described inner ring body rotatably around its axis; It is characterized in that, described inner ring body can be sheathed on slidably along its Axis Extension direction the periphery of described support bar, has the lockable mechanism of the described support bar of locking and described inner ring body relative position between described support bar and the described inner ring body.
2. directive wheel according to claim 1 is characterized in that, described lockable mechanism comprises:
Be arranged at described inner ring body inwall, along a plurality of draw-in grooves that the bearing of trend of described outer ring body axis is arranged, each described draw-in groove is recessed to described outer ring body;
Be arranged at the stopping means of described support bar, described stopping means has and stretches into described draw-in groove and can bounce back at least one fixture block concordant with the inwall of described inner ring body.
3. directive wheel according to claim 2 is characterized in that, described stopping means comprises that an end is fixed in the spring leaf of described support bar, and the termination of the described spring leaf other end forms described fixture block.
4. directive wheel according to claim 3 is characterized in that, along the bearing of trend of described outer ring body axis:
Described fixture block stretch into described draw-in groove an end the longitudinal section be shaped as arc, the deep-slotted chip breaker of each described draw-in groove for agreeing with described fixture block;
Perhaps, described fixture block stretch into described draw-in groove an end the longitudinal section be shaped as wedge shape, the wedge-shaped slot of each described draw-in groove for agreeing with described fixture block.
5. directive wheel according to claim 2 is characterized in that, described lockable mechanism also comprises:
The bearing of trend that described support bar is provided with is perpendicular to the groove of described outer ring body axis, and described fixture block is two, and two described fixture blocks and described groove be slidingly matched, and is provided with between the two described fixture blocks to be in the spring that the power state is held in compression.
6. directive wheel according to claim 1 is characterized in that, described lockable mechanism comprises:
Be arranged at the external screw thread of described support bar, and be arranged at the internal thread of described inner ring body inwall.
7. directive wheel according to claim 6 is characterized in that, described lockable mechanism also comprises: the locking nut of locking described inner ring body and support bar after the position adjustments.
8. each described directive wheel is characterized in that according to claim 1～7, has ball between described outer ring body and the described inner ring body.
9. a base plate transfer device is characterized in that, comprises such as each described directive wheel of claim 1～8.
10. a substrate processing equipment is characterized in that, comprises base plate transfer device as claimed in claim 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320276243 CN203242607U (en) | 2013-05-20 | 2013-05-20 | Guide wheel, substrate conveying device and substrate processing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320276243 CN203242607U (en) | 2013-05-20 | 2013-05-20 | Guide wheel, substrate conveying device and substrate processing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203242607U true CN203242607U (en) | 2013-10-16 |
Family
ID=49319872
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320276243 Expired - Lifetime CN203242607U (en) | 2013-05-20 | 2013-05-20 | Guide wheel, substrate conveying device and substrate processing equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203242607U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105858213A (en) * | 2016-05-16 | 2016-08-17 | 武汉华星光电技术有限公司 | Guide roller |
| CN116344423A (en) * | 2023-05-29 | 2023-06-27 | 上海新创达半导体设备技术有限公司 | Material handling crown block based on wireless power supply and control method thereof |
-
2013
- 2013-05-20 CN CN 201320276243 patent/CN203242607U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105858213A (en) * | 2016-05-16 | 2016-08-17 | 武汉华星光电技术有限公司 | Guide roller |
| CN105858213B (en) * | 2016-05-16 | 2018-06-15 | 武汉华星光电技术有限公司 | A kind of guide roller |
| CN116344423A (en) * | 2023-05-29 | 2023-06-27 | 上海新创达半导体设备技术有限公司 | Material handling crown block based on wireless power supply and control method thereof |
| CN116344423B (en) * | 2023-05-29 | 2023-08-11 | 上海新创达半导体设备技术有限公司 | Material handling crown block based on wireless power supply and control method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20131016 |
|
| CX01 | Expiry of patent term |