CN214694456U - Protective cover of crystal pulling furnace - Google Patents
Protective cover of crystal pulling furnace Download PDFInfo
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- CN214694456U CN214694456U CN202120893582.6U CN202120893582U CN214694456U CN 214694456 U CN214694456 U CN 214694456U CN 202120893582 U CN202120893582 U CN 202120893582U CN 214694456 U CN214694456 U CN 214694456U
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- sleeve
- protective cover
- sliding
- corrugated sleeve
- crystal pulling
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Abstract
The utility model relates to a safety cover of furnace is carried to crystal, it includes support frame, ripple sleeve pipe and at least one clamping piece, the support frame sets up on the furnace body, ripple sleeve pipe presss from both sides and establishes in the clamping piece, just ripple sleeve pipe passes through clamping piece and support frame sliding connection, and the position that exposes in the air at the single crystal lifting rod is established to this application ripple sleeve pipe cover, and the single crystal lifting rod is at reciprocating the in-process, helps hindering the dust in the air to adsorb on the single crystal lifting rod, has the effect that improves product quality.
Description
Technical Field
The application relates to the technical field of crystal production, in particular to a protective cover of a crystal pulling furnace.
Background
The Czochralski method is a method for growing high-quality single crystals by pulling from a melt, and in the 60 s of the 20 th century, the Czochralski method is further developed into a more advanced method for forming crystal growth, namely a melt mold guiding method, which is a growth technology for directly pulling crystals with various cross-sectional shapes from a melt.
Chinese patent with publication number CN204825116U in the related art discloses a sintering furnace for single crystal production, which comprises a furnace body with a vacuum interface, a crucible, a single crystal lifting rod, a support, a rotating motor and a lifting motor, wherein the support is provided with a furnace body and a fixing frame, the furnace body is provided with a large furnace cover, an electrode is installed on the large furnace cover, the large furnace cover is provided with a small furnace cover, a supporting plate is arranged right above the small furnace cover, the supporting plate is provided with the rotating motor, the output end of the rotating motor penetrates through the supporting plate to be connected with the single crystal lifting rod in a rotating manner, the fixing frame is provided with a guide rail, the lateral part of the supporting plate is connected with the fixing frame in a sliding manner through the guide rail, the furnace body is internally provided with a crucible, the crucible is arranged on a crucible tray, the crucible cover is arranged above the crucible, the crucible cover is provided with an upper heat insulation layer, the outer layer of the crucible is provided with a heating body, and the tops of two sides of the heating body are connected with the electrode on the large furnace cover.
According to the related technology, the single crystal lifting rod moves up and down under the driving of the lifting motor, part of the single crystal lifting rod is exposed in the air, and some dust in the air is adsorbed on the single crystal lifting rod, so that the quality of the manufactured product is reduced.
SUMMERY OF THE UTILITY MODEL
In order to improve the quality of product, this application provides a crystal and draws safety cover of stove.
The application provides a protective cover of crystal pulling furnace adopts following technical scheme:
the utility model provides a protective cover of crystal pulling furnace, includes support frame, ripple sleeve pipe and at least one clamping spare, the support frame sets up on the furnace body, ripple sleeve pipe presss from both sides and establishes in the clamping spare, just the ripple sleeve pipe passes through clamping spare and support frame sliding connection.
By adopting the technical scheme, the corrugated sleeve is sleeved at the part of the single crystal lifting rod exposed in the air, and the single crystal lifting rod is beneficial to preventing dust in the air from being adsorbed on the single crystal lifting rod in the up-and-down moving process, so that the quality of a product is improved.
The utility model discloses further set up to: the support frame comprises at least one guide rod, the guide rod is vertically arranged, the bottom end of the guide rod is fixedly connected to the top wall of the furnace body, and the corrugated sleeve is connected to the guide rod in a sliding mode through a clamping piece.
By adopting the technical scheme, the single crystal lifting rod moves up and down under the driving of the lifting motor, the corrugated sleeve is compressed and stretched along the axial direction, the clamping piece slides on the guide rod along with the corrugated sleeve, and the guide rod plays a role in guiding the sliding of the clamping piece.
The utility model discloses further set up to: the support frame includes two guide bars, two the guide bar is located corrugated pipe's both sides respectively, two the vertical setting of guide bar and the bottom fixed connection of two guide bars are on the roof of furnace body.
Through adopting above-mentioned technical scheme, two guide bars are located corrugated sleeve's both sides respectively, have both played the guide effect to sliding of clamping piece, have increased the stability of sliding of clamping piece again.
The utility model discloses further set up to: the support frame includes four guide bars, four the guide bar is located corrugated sleeve's all around respectively, four the vertical setting of guide bar and the bottom fixed connection of four guide bars are on the roof of furnace body.
By adopting the technical scheme, the four guide rods are respectively positioned at the periphery of the corrugated sleeve, so that the guide function is realized on the sliding of the clamping piece, and the stability of the sliding of the clamping piece is further improved; the overall stability of the support frame is also improved by the four guide rods.
The utility model discloses further set up to: the clamping member comprises a clamping ring and at least one sliding plate, the clamping ring is sleeved on the outer pipe wall of the corrugated sleeve, one end of the sliding plate is fixedly connected with the outer ring wall of the clamping ring, and the other end of the sliding plate is slidably connected with the guide rod.
By adopting the technical scheme, the single crystal lifting rod moves up and down under the driving of the lifting motor, the corrugated sleeve is compressed and stretched along the axial direction, the clamping ring is clamped on the outer pipe wall of the corrugated sleeve, and the clamping piece slides on the guide rod along with the corrugated sleeve; the clamping ring is attached to the outer pipe wall of the corrugated sleeve, so that the corrugated sleeve cannot bend in the process of being compressed, the corrugated sleeve is prevented from touching the single crystal lifting rod, and the single crystal lifting rod can stably and smoothly work.
The utility model discloses further set up to: and a sliding ring is embedded in the sliding plate, two ends of the sliding ring extend out of the sliding plate, and the guide rod is connected in an inner ring of the sliding ring in a sliding manner.
Through adopting above-mentioned technical scheme, when the bellows sleeve was stretched, the external diameter can diminish, and the slip ring set up the area that slides between increased slide plate and the guide bar to increase the frictional force between slide plate and the guide bar, prevented that the slide plate from sliding to the bottom of guide bar.
The utility model discloses further set up to: the furnace body is characterized in that a lower base is fixedly connected to the top wall of the furnace body and comprises a lower flange plate and a lower connecting sleeve, the lower flange plate is fixedly connected to the top wall of the furnace body, and the bottom end of the corrugated sleeve is fixedly connected with the lower flange plate through the lower connecting sleeve.
Through adopting above-mentioned technical scheme, corrugated sleeve's outer pipe wall fixed connection is in connecting the sleeve pipe under, and the setting of connecting sleeve pipe has increased corrugated sleeve fixed connection under the stability of ring flange down, and the setting of base has improved the steadiness that corrugated sleeve pipe fixed on the furnace body roof down.
The utility model discloses further set up to: the corrugated sleeve is characterized by further comprising an upper base, the upper base comprises an upper flange plate and an upper connecting sleeve, and the top end of the corrugated sleeve is fixedly connected with the upper flange plate through the upper connecting sleeve.
Through adopting above-mentioned technical scheme, corrugated sleeve's outer pipe wall is fixed in last adapter sleeve, goes up adapter sleeve's setting and has increased corrugated sleeve fixed connection and last ring flange's stability, goes up being provided with of base and does benefit to and install corrugated sleeve on the device more firmly.
In summary, the present application includes at least one of the following beneficial technical effects:
1. the corrugated sleeve is sleeved at the part of the single crystal lifting rod exposed in the air, and the single crystal lifting rod is beneficial to preventing dust in the air from being adsorbed on the single crystal lifting rod in the up-and-down moving process, so that the quality of a product is improved;
2. the clamping ring is attached to the outer pipe wall of the corrugated sleeve, so that the corrugated sleeve cannot bend in the process of being compressed, the corrugated sleeve is prevented from touching the single crystal lifting rod, and the single crystal lifting rod can work more stably and smoothly;
3. the outer pipe wall of the corrugated sleeve is fixed in the lower connecting sleeve, the stability of the corrugated sleeve fixedly connected with the lower flange is improved due to the arrangement of the lower connecting sleeve, and the stability of the corrugated sleeve fixed on the top wall of the furnace body is improved due to the arrangement of the lower base.
Drawings
FIG. 1 is a schematic view showing the overall structure of a conventional single crystal pulling furnace.
FIG. 2 is a schematic view of the entire structure of a single crystal pulling furnace according to example 1.
Fig. 3 is a schematic structural view for embodying the protective cover in embodiment 1.
Fig. 4 is a schematic structural view for embodying the protective cover in embodiment 2.
Fig. 5 is a schematic structural view for embodying the protective cover in embodiment 3.
Description of reference numerals: 1. a support frame; 11. a guide bar; 2. a bellows sleeve; 3. a clamping member; 31. a clamping ring; 32. a sliding plate; 33. a slip ring; 4. a furnace body; 41. a connecting frame; 411. an upper connecting plate; 412. a lower connecting plate; 5. a rotating electric machine; 51. mounting a plate; 6. a single crystal lifting rod; 7. a lifting motor; 71. a lead screw; 8. a lower base; 81. a lower flange plate; 82. a lower connecting sleeve; 83. a base plate; 9. an upper base; 91. an upper flange plate; 92. and an upper connecting sleeve.
Detailed Description
The present application is described in further detail below with reference to figures 1-5.
Referring to fig. 1, a single crystal pulling furnace comprises a furnace body 4, a connecting frame 41, a rotating motor 5, a mounting plate 51, a single crystal pulling rod 6, a lifting motor 7 and a screw rod 71, wherein the connecting frame 41 is vertically and fixedly connected to the top wall of the furnace body 4, an upper connecting plate 411 and a lower connecting plate 412 are horizontally extended from the side wall of the connecting frame 41, the screw rod 71 is rotatably connected between the upper connecting plate 411 and the lower connecting plate 412, the lifting motor 7 is vertically and fixedly connected to the upper surface of the upper connecting plate 411, a motor shaft of the lifting motor 7 is coaxially and fixedly connected to the screw rod 71, the mounting plate 51 is horizontally arranged, the end wall of the mounting plate 51 is tightly pressed against the side wall of the connecting frame 41, the screw rod 71 penetrates through the mounting plate 51 and is in threaded connection with the mounting plate 51, the rotating motor 5 is vertically and fixedly connected to the upper surface of the mounting plate 51, and one end of the single crystal pulling rod 6 is coaxially and fixedly connected to the motor shaft of the rotating motor 5, the other end of the single crystal pulling rod 6 extends into the furnace body 4. The rotating motor 5 and the lifting motor 7 are started, the rotating motor 5 drives the single crystal lifting rod 6 to rotate, the lifting motor 7 drives the single crystal lifting rod 6 to move up and down, but the part of the single crystal lifting rod 6, which is positioned outside the furnace body 4, is exposed in the air, and some dust in the air is adsorbed on the single crystal lifting rod, so that the quality of the manufactured product is reduced.
Based on this, this application discloses a protective cover of crystal pulling furnace.
Example 1
Referring to fig. 1 and 2, the protective cover of the crystal pulling furnace comprises a support frame 1, a corrugated sleeve 2 and at least one clamping member 3, wherein the support frame 1 is vertically arranged on a furnace body 4, the corrugated sleeve 2 is clamped in the clamping member 3, and the corrugated sleeve 2 is in sliding connection with the support frame 1 through the clamping member 3; the corrugated sleeve 2 is sleeved on the part of the single crystal lifting rod 6 exposed in the air, so that dust in the air is prevented from being adsorbed on the single crystal lifting rod 6, and the quality of a product is improved.
Referring to fig. 3, a lower base 8 is arranged on the top wall of the furnace body 4, the lower base 8 includes a lower flange 81 and a lower connecting sleeve 82, the lower flange 81 is fixedly connected to the top wall of the furnace body 4, one end of the lower connecting sleeve 82 is fixedly connected to the inner annular wall of the lower flange 81, the other end of the lower connecting sleeve 82 is fixedly connected to the outer tubular wall of the corrugated sleeve 2, two bottom plates 83 extend outwards from the side wall of the lower connecting sleeve 82, the two bottom plates 83 are symmetrically arranged on the outer wall of the lower connecting sleeve 82, the support frame 1 includes two guide rods 11, the two guide rods 11 are vertically arranged, the bottom ends of the two guide rods 11 are respectively welded on the upper surfaces of the two bottom plates 83, and the top ends of the two guide rods 11 are respectively located at two sides of the rotating motor 5; the outer pipe wall of the corrugated sleeve 2 is fixedly connected in the lower connecting sleeve 82, the lower connecting sleeve 82 is arranged to increase the stability of the corrugated sleeve 2 fixedly connected on the lower flange plate 81, the lower base 8 is arranged to improve the stability of the corrugated sleeve 2 fixed on the top wall of the furnace body 4, and the bottom plate 83 is arranged to increase the stability of the guide rod 11 fixed on the furnace body 4.
Referring to fig. 1 and 3, the clamping member 3 comprises a clamping ring 31 and two sliding plates 32 located at both sides of the clamping ring 31, the clamping ring 31 is sleeved on the outer pipe wall of the corrugated sleeve 2, one side of the sliding plate 32 is fixedly connected with the outer pipe wall of the clamping ring 31, the other side of the sliding plate 32 is provided with a sliding ring 33, the sliding ring 33 is embedded in the sliding plate 32, both ends of the sliding ring 33 extend out of the sliding plate 32, and the guide rod 11 passes through the inner ring of the sliding ring 33 and is slidably connected with the sliding plate 32; under the drive of the lifting motor 7, the single crystal lifting rod 6 moves up and down, the corrugated sleeve 2 is compressed along the axial direction, the outer diameter of the corrugated sleeve 2 is increased, the clamping ring 31 is clamped on the outer pipe wall of the corrugated sleeve 2, and the clamping piece 3 slides on the guide rod 11 along with the corrugated sleeve 2; the arrangement of the clamping ring 31 enables the corrugated sleeve 2 not to bend in the compression process, and the corrugated sleeve 2 is prevented from touching the single crystal lifting rod 6, so that the single crystal lifting rod 6 can work more stably and smoothly.
Referring to fig. 3, the protective cover of the crystal pulling furnace further includes an upper base 9, the upper base 9 includes an upper flange 91 and an upper connection sleeve 92, the upper flange 91 is fixedly connected to the housing of the rotating electrical machine 5, one end of the upper connection sleeve 92 is fixedly connected to the inner annular wall of the upper flange 91, the other end of the upper connection sleeve 92 is fixedly connected to the top end of the corrugated sleeve 2, and the outer wall of the upper connection sleeve 92 is fixedly connected to one end of the sliding plate 32.
The implementation principle of the protective cover of the crystal pulling furnace is as follows: when the crystal in the furnace body 4 needs to be pulled, the lifting motor 7 and the rotating motor 5 are started, the single crystal pulling rod 6 rotates and moves downwards to extend into the furnace body 4, the crystal in the furnace body 4 is stirred and adsorbed, and the corrugated sleeve 2 is compressed along the axial direction; the single crystal lifting rod 6 moves upwards, part of the single crystal lifting rod extends out of the furnace body 4, the corrugated sleeve 2 is stretched along the axial direction, and the corrugated sleeve 2 is sleeved on the single crystal lifting rod 6, so that dust in the air is prevented from being adsorbed on the single crystal lifting rod 6, and the quality of a product is improved.
Example 2
Referring to fig. 4, the present embodiment is different from embodiment 1 in that the number of the bottom plates 83 extending outward from the side walls of the lower connecting sleeve 82 is one, and the corresponding number of the guide rods 11 is set to one; the provision of a guide bar 11 with less pressure against the base plate 83 also facilitates the sliding movement of the slide plate 32 on the guide bar 11.
Example 3
Referring to fig. 5, the present embodiment is different from embodiment 1 in that the number of the guide rods 11 is four, four guide rods 11 are located around the bellows sleeve 2, four guide rods 11 are vertically arranged, bottom ends of the four guide rods 11 are welded to a top wall of the bottom plate 83, top ends of the four guide rods 11 extend, and the bellows sleeve 2 is located between the four guide rods 11; the four guide rods 11 are paired pairwise and are respectively positioned on two sides of the corrugated sleeve 2, and the sliding plate 32 is connected to the guide rods 11 in a sliding mode, so that the stability of the sliding process of the corrugated sleeve 2 is improved.
The above embodiments are preferred embodiments of the present application, and the protection scope of the present application is not limited by the above embodiments, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.
Claims (8)
1. A protective cover of a crystal pulling furnace is characterized in that: the furnace comprises a support frame (1), a corrugated sleeve (2) and at least one clamping piece (3), wherein the support frame (1) is arranged on a furnace body (4), the corrugated sleeve (2) is clamped in the clamping piece (3), and the corrugated sleeve (2) is connected with the support frame (1) in a sliding mode through the clamping piece (3).
2. The protective cover for a crystal pulling furnace according to claim 1, wherein: the supporting frame (1) comprises at least one guide rod (11), the guide rod (11) is vertically arranged, the bottom end of the guide rod (11) is fixedly connected to the top wall of the furnace body (4), and the corrugated sleeve (2) is connected to the guide rod (11) through the clamping piece (3) in a sliding mode.
3. The protective cover for a crystal pulling furnace according to claim 2, wherein: the supporting frame (1) comprises two guide rods (11), the two guide rods (11) are respectively located on two sides of the corrugated sleeve (2), the two guide rods (11) are vertically arranged, and the bottom ends of the two guide rods (11) are fixedly connected to the top wall of the furnace body (4).
4. The protective cover for a crystal pulling furnace according to claim 2, wherein: the supporting frame (1) comprises four guide rods (11), the four guide rods (11) are respectively located on the periphery of the corrugated sleeve (2), and the four guide rods (11) are vertically arranged and the bottom ends of the four guide rods (11) are fixedly connected to the top wall of the furnace body (4).
5. The protective cover of a crystal pulling furnace as set forth in any one of claims 2 to 4, wherein: the clamping member (3) comprises a clamping ring (31) and at least one sliding plate (32), the clamping ring (31) is sleeved on the outer pipe wall of the corrugated sleeve (2), one end of the sliding plate (32) is fixedly connected with the outer ring wall of the clamping ring (31), and the other end of the sliding plate (32) is connected with the guide rod (11) in a sliding mode.
6. The protective cover for a crystal pulling furnace according to claim 5, wherein: and a sliding ring (33) is embedded in the sliding plate (32), two ends of the sliding ring (33) extend out of the sliding plate (32), and the guide rod (11) is connected in an inner ring of the sliding ring (33) in a sliding manner.
7. The protective cover for a crystal pulling furnace according to claim 1, wherein: fixedly connected with lower base (8) on the roof of furnace body (4), lower base (8) are including lower flange dish (81) and connecting sleeve (82) down, lower flange dish (81) fixed connection is on the roof of furnace body (4), the bottom of corrugated sleeve (2) is through connecting sleeve (82) and lower flange dish (81) fixed connection down.
8. The protective cover for a crystal pulling furnace according to claim 1, wherein: the corrugated pipe is characterized by further comprising an upper base (9), wherein the upper base (9) comprises an upper flange plate (91) and an upper connecting sleeve (92), and the top end of the corrugated sleeve (2) is fixedly connected with the upper flange plate (91) through the upper connecting sleeve (92).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120893582.6U CN214694456U (en) | 2021-04-27 | 2021-04-27 | Protective cover of crystal pulling furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120893582.6U CN214694456U (en) | 2021-04-27 | 2021-04-27 | Protective cover of crystal pulling furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214694456U true CN214694456U (en) | 2021-11-12 |
Family
ID=78534392
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120893582.6U Active CN214694456U (en) | 2021-04-27 | 2021-04-27 | Protective cover of crystal pulling furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214694456U (en) |
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2021
- 2021-04-27 CN CN202120893582.6U patent/CN214694456U/en active Active
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