CN214687343U

CN214687343U - Wafer scribing machine with stable voltage

Info

Publication number: CN214687343U
Application number: CN202120533955.9U
Authority: CN
Inventors: 刘伟; 付强; 吴健东
Original assignee: Changzhou Senmeite Microelectronics Co ltd
Current assignee: Changzhou Senmeite Microelectronics Co ltd
Priority date: 2021-03-15
Filing date: 2021-03-15
Publication date: 2021-11-12
Anticipated expiration: 2031-03-15

Abstract

The utility model discloses a wafer scribing machine with stable voltage, which comprises a base plate, a movable support block, a movable groove, a movable slider, a lower support plate, a rotary support block, an upper support plate, a rotary rod, an outer cross rod, a motor I and an expansion support rod, a first screw rod is fixedly arranged at the rotating end of the motor, an internal thread groove matched with the first screw rod is arranged in the expansion supporting rod, the front side and the rear side of one end of the extension supporting rod, which is positioned outside the outer transverse rod, are provided with installation supporting plates, a scribing cutter is arranged between the installation supporting plates, the circle centers of the front end and the rear end of the cutting knife are fixedly provided with electric control rotating rods, the other end of the electric control rotating rod connected with the cutting knife is rotatably connected with the mounting support plate, the other side that the base plate upper end is located to set up the removal and props up the piece is equipped with the round crystal and places the platform, the position in the middle of the outside front end upper side of removal props up the piece is equipped with current power supply conversion chip. Compared with the prior art, the utility model the advantage lie in: the structure is simpler and the power supply is stable and the operation is simple.

Description

Wafer scribing machine with stable voltage

Technical Field

The utility model relates to a chip material processing technology field specifically indicates a wafer scribing machine of stable voltage.

Background

The wafer refers to a silicon wafer used for manufacturing a silicon semiconductor integrated circuit, various circuit element structures can be manufactured on the silicon wafer to form an IC product with a specific electrical function, the wafer needs to be cut when being used at present, and the existing wafer cutting machine mostly adopts a three-axis control cutter to move, so that the structure is complex, and the power supply is unstable and the maintenance is inconvenient.

SUMMERY OF THE UTILITY MODEL

The to-be-solved technical problem of the utility model is to overcome above-mentioned defect, provide a stable voltage's wafer scribing machine of comparatively simple and power supply stable operation of structure.

In order to solve the technical problem, the utility model provides a technical scheme does: a wafer scribing machine with stable voltage comprises a substrate, wherein a movable support block is arranged at the edge of one side of the upper end of the substrate, a moving groove with an upward opening is formed in the movable support block, a movable slider is inserted in the moving groove, the upper end of the movable slider extends to the upper side of the outer portion of the moving groove and is fixedly provided with a lower support plate, rotary support plates are fixedly arranged on the front side and the rear side of the front end of the lower support plate, rotary support blocks are arranged between the rotary support plates, an upper support plate is arranged at the upper end of the rotary support block, rotary rods are fixedly arranged at the front end and the rear end of the rotary support block, the rotary rods are connected with the other ends of the rotary support blocks and are rotatably inserted in the rotary support plates, an outer transverse rod with an opening far away from one side of the movable support block is arranged at the upper end of the upper support plate, a first motor is arranged at one end far away from the opening in the outer transverse rod, an extension support rod is inserted in the outer transverse rod, and a first screw rod is fixedly arranged at the rotary end of the first motor, the utility model discloses a cutting machine, including extension branch, cutting knife, automatically controlled dwang, base plate upper end is located the opposite side that sets up removal piece and is equipped with the round crystal and places the platform, the inside internal thread groove that is equipped with cooperation screw rod one and uses of extension branch, the side all is equipped with the installation extension board around extension branch is located the outside one end of outer horizontal pole, position between the installation extension board is equipped with the cutter of drawing, the equal fixed automatically controlled dwang that is equipped with of cutting knife front and back end centre of a circle department, the other end that the cutter was drawn in automatically controlled dwang connection rotates with the installation extension board to be connected, the opposite side that the base plate upper end is located to set up removal piece is equipped with the round crystal and places the platform, the position in the middle of the outside front end upper side of removal piece is equipped with current power supply conversion chip.

Compared with the prior art, the utility model the advantage lie in: compared with the prior art, the utility model discloses abandoned traditional X, Y, the mode is controlled to the three-axis cutter of Z, has kept the removal axle of two directions, will reciprocate simultaneously through the rotating-structure replacement that rotates a piece, has solved too complicated structure combination, maintains when conveniently going wrong, adjusts the power supply through the current power supply conversion chip that sets up, guarantees the stable stability of guaranteeing the device operation of electric current of output.

As an improvement, a limiting slide hole is formed in the top surface of the outer cross rod, and a limiting slide block matched with the limiting slide hole for use is arranged on one side, close to the motor I, of the upper end of the outer portion of the extension supporting rod.

As an improvement, a positioning device is arranged on one side, away from the motor I, of the lower end of the outer portion of the outer cross rod, a scale plate matched with the positioning device is arranged at the position, located right below the positioning device, of the upper end of the base plate, and a level meter is arranged at the position, located on one side of the positioning device, of the lower end of the outer portion of the outer cross rod.

As the improvement, the front end of the rotating support plate is provided with a steering engine, the rotating end at the rear end of the steering engine is fixedly connected with a rotating rod, and a supporting plate is fixedly arranged at the position, located at the lower end of the steering engine, of the front end of the rotating support plate.

And as an improvement, a second screw rod is arranged in the moving groove, a second motor is fixedly arranged at the front end in the moving groove, the front end of the second screw rod is fixedly connected with the rotating end of the second motor, and the rear end of the second screw rod is rotatably inserted into the rear wall of the moving groove.

As an improvement, the position that the base plate upper end is located the round brilliant platform of placing the front and back all is equipped with the mounting panel of L shape, mounting panel top surface downside is equipped with fixed pressing plate, the fixed pressing plate lower extreme is equipped with the protection cushion, the fixed pressing plate upper end is rotated the grafting and is equipped with control screw, control screw passes through threaded structure with the mounting panel top surface and connects and extend to its upside, the control screw upper end is equipped with the rotor plate.

Drawings

Fig. 1 is a schematic structural diagram of a wafer dicing saw with stable voltage according to the present invention.

Fig. 2 is a left side view of the wafer scriber of the present invention with stable voltage.

Fig. 3 is a left side cross-sectional view of a voltage stabilized wafer scribe moving support of the present invention.

As shown in the figure: 1. the device comprises a base plate, 2, a movable support block, 3, a movable groove, 4, a movable sliding block, 5, a lower support plate, 6, a rotary support plate, 7, a rotary support block, 8, an upper support plate, 9, a rotary rod, 10, an outer cross rod, 11, a motor I, 12, an extension support rod, 13, a screw rod I, 14, an inner thread groove, 15, an installation support plate, 16, a scribing cutter, 17, an electric control rotary rod, 18 and a round crystal placing table, 19, a limiting slide hole, 20, a limiting sliding block, 21, a positioning device, 22, a scale plate, 23, a level gauge, 24, a current power supply conversion chip, 25, a steering engine, 26, a support plate, 27, a screw rod II, 28, a motor II, 29, a support plate, 30, a fixed pressing plate, 31, a protective cushion, 32, a control screw rod, 33 and a rotary plate.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings.

With reference to fig. 1, a wafer scribing machine with stable voltage comprises a substrate 1, a movable support block 2 is arranged at the edge of one side of the upper end of the substrate 1, a moving groove 3 with an upward opening is arranged in the movable support block 2, a movable slider 4 is inserted in the moving groove 3, the upper end of the movable slider 4 extends to the upper side of the outer part of the moving groove 3 and is fixedly provided with a lower support plate 5, rotating support plates 6 are fixedly arranged at the front and rear sides of the front end of the lower support plate 5, a rotating support block 7 is arranged between the rotating support plates 6, an upper support plate 8 is arranged at the upper end of the rotating support block 7, rotating rods 9 are fixedly arranged at the front and rear ends of the rotating support block 7, the rotating rods 9 are connected with the other ends of the rotating support blocks 7 and are rotatably inserted in the rotating support plates 6, an outer cross rod 10 with an opening far away from one side of the movable support block 2 is arranged at the upper end of the upper support plate 8, and a motor 11 is arranged at one end far away from the opening in the outer cross rod 10, the inside grafting of outer horizontal pole 10 is equipped with extension branch 12, a 11 fixed screw rods 13 that are equipped with of motor end department, the inside internal thread groove 14 that is equipped with a 13 uses of cooperation screw rod of extension branch 12, extension branch 12 is located the outside one end front and back sides of outer horizontal pole 10 and all is equipped with installation extension board 15, position between the installation extension board 15 is equipped with and draws cutter 16, draw cutter 16 front and back end centre of a circle department and all fix and be equipped with automatically controlled dwang 17, automatically controlled dwang 17 is connected the other end of drawing cutter 16 and is rotated with installation extension board 15 and be connected, the opposite side that the upper end of base plate 1 is located to set up removal piece 2 is equipped with the round crystal and places platform 18, the position in the middle of the outside front end upper side of removal piece 2 is equipped with current power supply conversion chip 24.

The top surface of the outer cross rod 10 is provided with a limiting sliding hole 19, and one side, close to the motor I11, of the upper end of the outer portion of the extension supporting rod 12 is provided with a limiting sliding block 20 matched with the limiting sliding hole 19 for use.

A positioning device 21 is arranged on one side, away from the first motor 11, of the lower end of the outer portion of the outer cross rod 10, a scale plate 22 matched with the upper end of the base plate 1 and located right below the positioning device 21 is arranged at the upper end of the base plate 1, and a level gauge 23 is arranged at the position, located on one side of the positioning device 21, of the lower end of the outer portion of the outer cross rod 10.

The front end of the rotating support plate 6 is provided with a steering gear 25, the rotating end at the rear end of the steering gear 25 is fixedly connected with the rotating rod 9, and a supporting plate 26 is fixedly arranged at the position, located at the lower end of the steering gear 25, of the front end of the rotating support plate 6.

A second screw 27 is arranged inside the moving groove 3, a second motor 28 is fixedly arranged at the front end inside the moving groove 3, the front end of the second screw 27 is fixedly connected with the rotating end of the second motor 28, and the rear end of the second screw 27 is rotatably inserted into the rear wall of the moving groove 3.

The upper end of the substrate 1 is located at the front and rear positions of the wafer placing table 18 and is provided with L-shaped support plates 29, the lower side of the top surface of each support plate 19 is provided with a fixed pressing plate 30, the lower end of each fixed pressing plate 30 is provided with a protective soft cushion 31, the upper end of each fixed pressing plate 30 is rotatably inserted with a control screw rod 32, the control screw rods 32 are connected with the top surface of each support plate 29 through thread structures and extend to the upper side of the support plate, and the upper ends of the control screw rods 32 are provided with rotating plates 33.

The utility model discloses when concrete implementation, place the brilliant platform 18 of placing of circle with the brilliant, control rotor plate 33 rotates, utilize fixed pressing plate 30 to fix the brilliant edge of circle, then confirm the cutting position through positioner 21 cooperation scale board 22, will draw cutter 16 to adjust to the position of waiting to cut through the rotation of control motor two 28, then start cutting cutter 16 and steering wheel 25, let cutting cutter 16 rotate downwards and contact the brilliant cutting of circle, motor 11 rotates at the uniform velocity when the cutting process keeps steering wheel 25 at the uniform velocity pivoted and expands branch 12, let cutting cutter 16 accomplish complete cutting on the brilliant circle. The utility model discloses a current power supply conversion chip 24 is a low dropout regulator that possesses quick transient response, can provide stable 1.5A's output current, guarantees the stability of device work. The current power supply conversion chip 24 CONTROLs the multi-channel data selector MUX to sample eight channels of input data from V1 to V8 through a MODE signal of the internal LOGIC CONTROL module, transmits the selected sampling signal to the digital-to-analog converter ADC, converts the sampled analog signal into a digital signal, processes the converted digital signal by the LOGIC CONTROL module CONTROL LOGIC, and transmits the processed digital signal to the I2C module to convert the digital signal into a signal conforming to the I2C serial interface standard for output. In addition, the REFERENCE module provides a REFERENCE voltage for the ADC module, the PULSE WIDTH DETECTOR module performs PULSE WIDTH processing on the input signal, and the UNDERVOLTAGE DETECTOR module performs under-voltage protection on the logic control module.

The present invention and the embodiments thereof have been described above, but the description is not limited thereto, and the embodiment shown in the drawings is only one of the embodiments of the present invention, and the actual structure is not limited thereto. In summary, those skilled in the art should understand that they should not be limited to the embodiments described above, and that they can design the similar structure and embodiments without departing from the spirit of the invention.

Claims

1. The utility model provides a wafer scribing machine of stable voltage, includes base plate (1), base plate (1) upper end one side edge is equipped with removes a piece (2), remove and prop up piece (2) inside and be equipped with ascending shifting chute of opening (3), the inside grafting of shifting chute (3) is equipped with movable slider (4), its characterized in that: the upper end of the movable sliding block (4) extends to the upper side outside the movable groove (3) and is fixedly provided with a lower support plate (5), the front side and the rear side of the front end of the lower support plate (5) are respectively and fixedly provided with a rotating support plate (6), a rotating support block (7) is arranged between the rotating support plates (6), the upper end of the rotating support block (7) is provided with an upper support plate (8), the front end and the rear end of the rotating support block (7) are respectively and fixedly provided with a rotating rod (9), the rotating rod (9) is connected with the other end of the rotating support block (7) and is rotatably inserted into the rotating support plate (6), the upper end of the upper support plate (8) is provided with an outer cross rod (10) with an opening far away from one side of the movable support block (2), one end, far away from the opening, in the outer cross rod (10) is provided with a motor I (11), an extension support rod (12) is inserted into the outer cross rod (10), and a screw rod I (13) is fixedly arranged at the rotating end of the motor I (11), the utility model discloses a round crystal storage device, including extension branch (12), the inside internal thread groove (14) that is equipped with cooperation screw rod (13) and uses, extension branch (12) are located outer horizontal pole (10) outside one end front and back side and all are equipped with installation extension board (15), position between installation extension board (15) is equipped with cutter (16), cutter (16) front and back end centre of a circle department is all fixed and is equipped with automatically controlled dwang (17) are drawn, the other end that cutter (16) were drawn in the connection of automatically controlled dwang (17) is rotated with installation extension board (15) and is connected, the opposite side that base plate (1) upper end is located to set up removal piece (2) is equipped with the round crystal and places platform (18), the position in the middle of removal piece (2) outside front end upside is equipped with current power supply conversion chip (24).

2. The voltage stabilized wafer dicing saw of claim 1, wherein: the top surface of the outer cross rod (10) is provided with a limiting slide hole (19), and one side, close to the motor I (11), of the outer upper end of the extension supporting rod (12) is provided with a limiting slide block (20) matched with the limiting slide hole (19) for use.

3. The voltage stabilized wafer dicing saw of claim 1, wherein: one side of the outer lower end of the outer cross rod (10) far away from the motor I (11) is provided with a positioning device (21), a scale plate (22) matched with the positioning device for use is arranged at the position of the upper end of the base plate (1) right below the positioning device (21), and a level gauge (23) is arranged at the position of the outer lower end of the outer cross rod (10) on one side of the positioning device (21).

4. The voltage stabilized wafer dicing saw of claim 1, wherein: the front end of the rotating support plate (6) is provided with a steering engine (25), the rotating end at the rear end of the steering engine (25) is fixedly connected with a rotating rod (9), and the front end of the rotating support plate (6) is fixedly provided with a support plate (26) at the lower end of the steering engine (25).

5. The voltage stabilized wafer dicing saw of claim 1, wherein: the movable groove is characterized in that a second screw rod (27) is arranged inside the movable groove (3), a second motor (28) is fixedly arranged at the front end inside the movable groove (3), the front end of the second screw rod (27) is fixedly connected with the rotating end of the second motor (28), and the rear end of the second screw rod (27) is rotatably inserted into the rear wall of the movable groove (3).

6. The voltage stabilized wafer dicing saw of claim 1, wherein: the position that base plate (1) upper end is located the round crystal and places platform (18) front and back all is equipped with mounting panel (29) of L shape, mounting panel (29) top surface downside is equipped with stationary platen (30), stationary platen (30) lower extreme is equipped with protection cushion (31), stationary platen (30) upper end is rotated and is pegged graft and is equipped with control screw (32), control screw (32) pass through the helicitic texture with mounting panel (29) top surface and connect and extend to its upside, control screw (32) upper end is equipped with rotor plate (33).