CN214655220U

CN214655220U - Base plate fixing device and sputter coating machine

Info

Publication number: CN214655220U
Application number: CN202023014855.XU
Authority: CN
Inventors: 林志东; 尤建发; 李雷; 叶俊锋; 杨濬哲; 许珂鸣
Original assignee: Xiamen Sanan Integrated Circuit Co Ltd
Current assignee: Quanzhou San'an Integrated Circuit Co ltd
Priority date: 2020-12-14
Filing date: 2020-12-14
Publication date: 2021-11-09
Anticipated expiration: 2030-12-14

Abstract

A substrate fixing device and a sputtering film coating machine comprise a fixing seat, wherein the fixing seat is provided with an assembling hole penetrating through a first surface and a second surface, the side of the first surface of the assembling hole is provided with a radially extending limiting part, and the inner wall of the assembling hole is also provided with a clamping groove; still include the snap ring, this snap ring outside at least part inlays in the draw-in groove, inside at least part evagination in draw-in groove and spacing portion constitute the holding tank with fixed base plate between, this snap ring still is equipped with the operation portion in order to be operated and make the snap ring warp. The utility model discloses simple structure, small, the installation operation of being convenient for can also avoid reducing the fragment rate to the base plate extrusion.

Description

Base plate fixing device and sputter coating machine

Technical Field

The utility model relates to a semiconductor equipment field, especially a base plate fixing device and sputter coating machine.

Background

In the semiconductor industry, magnetron sputtering is one of the important technologies in the manufacturing process of display panels. Magnetron sputtering is one kind of physical vapor deposition, and includes setting magnetron sputtering target inside vacuum chamber, applying DC voltage between the anode and the cathode to form electrostatic field E of certain strength, filling argon gas into the vacuum chamber to ionize and produce high energy argon ion and secondary electron E₁Ar ions bombard the target under the action of an electrostatic field E to generate plasma, and the plasma is uniformly deposited on the substrate under the action of an electromagnetic field to form a required film layer. The film layer formed by the magnetron sputtering technology is compact and uniform, and has strong binding force with the substrate. Magnetron sputtering is a common film forming process in the fabrication process of OLEDs, for example for forming metal films or organic films.

The existing sputter coating machine comprises a horizontal sputter coating machine and a vertical sputter coating machine. For a horizontal sputtering film plating machine, a substrate is placed in the film plating machine in a flat mode, a platform mechanism for placing the substrate is simple, but the particle dust fall is serious, and the large-size substrate is difficult to produce.

For the vertical magnetron sputtering coating machine, the production structure has high design flexibility, and the production of substrates with different sizes is easy to realize. Generally, there are two substrate fixing methods, one is to fix the substrate by more than two oppositely arranged clamping portions so that the substrate is parallel to the target, and the clamping portions are designed by limiting whether the substrate has an abundant invalid area, and for a thinner substrate, the clamping portions are pressed to break, and meanwhile, the substrate is difficult to feed and unload, and the risk of breaking the substrate is existed. The other type is that the substrate is loaded through the annular groove, the annular jig adopted by the structure is high in installation difficulty, and when the substrate is loaded and unloaded, the operation is carried out from the front side of the substrate, the dust falling is serious, the operation is complex, and the risk of chip falling exists.

SUMMERY OF THE UTILITY MODEL

The utility model discloses a main aim at overcome among the prior art because base plate fixed knot constructs comparatively complicacy, accounts for the space, and the easy dust fall during installation, and there is the risk of falling the piece, provides a base plate fixing device and sputter coating machine.

The utility model adopts the following technical scheme:

the utility model provides a substrate fixing device, includes the fixing base, and it sets up the pilot hole that link up first surface and second surface, its characterized in that: a radially extending limiting part is arranged on the side of the first surface of the assembling hole, and a clamping groove is also formed in the inner wall of the assembling hole; still include the snap ring, this snap ring outside at least part inlays in the draw-in groove, inside at least part evagination in draw-in groove and spacing portion constitute the holding tank with fixed base plate between, this snap ring still is equipped with the operation portion in order to be operated and make the snap ring warp.

Preferably, the elastic clamping ring is provided with a notch, and the operating part is located at the notch.

Preferably, the operating part comprises two operating ends, one operating end is located at one end of the notch, and the other operating end is located at the other end of the notch.

Preferably, the operating portion includes a first extension extending from the inside of the snap ring to the outside of the second surface of the fixing seat, and a second extension extending from one end of the first extension in a radial direction, and the second extension is spaced from the second surface of the fixing seat.

Preferably, the inner diameter of the accommodating groove is equal to or larger than the outer diameter of the substrate.

Preferably, the operating portion is further provided with a bending section, and the tail end of the bending section is close to the second surface of the fixed seat.

Preferably, the elastic snap ring is provided with at least one convex part, the inner wall of the clamping groove is correspondingly provided with at least one concave part, and the convex part is clamped into the corresponding concave part; the convex portion is located on the side opposite to the operation portion.

Preferably, the inner diameter of the side of the second surface of the assembly hole is greater than or equal to the inner diameter of the accommodating groove.

Preferably, the inner diameter of the elastic clamping ring is smaller than the inner diameter of the accommodating groove, and the outer diameter of the elastic clamping ring is larger than the inner diameter of the side where the second surface of the assembling hole is located.

A sputtering coating machine comprises a coating machine main body and is characterized by further comprising the substrate fixing device.

From the above description of the present invention, compared with the prior art, the present invention has the following advantages:

1. the utility model discloses in, be provided with the snap ring, this snap ring outside is local at least and inlays in the draw-in groove, the inside local evagination at least of snap ring in draw-in groove and spacing portion between constitute holding tank with fixed baseplate, adopt this kind of fixed mode, simple structure, small can also avoid the extrusion to the base plate, reduce the fragmentation rate, the snap ring still is equipped with the operation portion so that the installation operation.

2. The utility model discloses in, be equipped with the breach at snap ring, remove through controlling the operation portion and make snap ring warp, the external diameter diminishes to in the draw-in groove of conveniently packing into, easy operation realizes installing fast. The number, shape and position of the operation parts can be set according to needs, and the operation parts are flexible and various.

3. The utility model discloses in, the operation portion sets up first extension section and second extension end, and the second extension section exposes in the second surface of fixing base, conveniently carries out the installation operation of snap ring at the fixing base second surface non-coating film face of base plate promptly, reduces the granule dust fall of base plate coating film face, and when the snap ring warp, can avoid operation portion place to touch the base plate.

4. The utility model discloses in, the internal diameter of the internal diameter more than or equal to holding tank of the second surface place side of pilot hole, then can follow the second surface and directly pack into or take out the base plate, it is very convenient to go up the unloading.

5. The utility model discloses in, set up the convex part on the snap ring, correspond in the draw-in groove and set up the concave part, during the snap ring installation, go into the concave part through the convex part card and realize counterpointing, can realize installing fast.

6. The utility model discloses in, the snap ring outside is all embedded in the draw-in groove promptly, and inside is all evaginations in the draw-in groove, can realize better fixed baseplate.

7. The utility model discloses in, still be provided with the portion of bending on the operating portion, when can avoiding elastic snap ring to warp the dress, the part of keeping away from the operating portion in the elastic snap ring too stretches into basically towards and leads to touching the base plate.

Drawings

FIG. 1 is a view showing the structure of the present invention (embodiment one);

FIG. 2 is an exploded view of FIG. 1;

FIG. 3 is a cross-sectional view of FIG. 1;

FIG. 4 is a cross-sectional view of the present invention (with the base plate removed);

fig. 5 is an exploded view of the present invention (embodiment two);

FIG. 6 is a view showing a structure of a snap ring (embodiment III);

FIG. 7 is a view showing the structure of the present invention (third embodiment);

fig. 8 is a structural diagram of the present invention (the second extension is linear).

Wherein:

10. fixing base, 11, pilot hole, 12, spacing portion, 13, draw-in groove, 14, window, 15, holding tank, 16, concave part, 20, snap ring, 21, operating portion, 21a, operation end, 22, breach, 23, first extension, 24, second extension, 25, convex part, 26, the section of bending, 30, base plate.

Detailed Description

The present invention will be further described with reference to the following detailed description.

The terms "first", "second", and the like in the present invention are used for convenience of description only to distinguish different constituent elements having the same name, and do not indicate a sequential or primary-secondary relationship.

In the description of the present invention, if the directions or positional relationships indicated by "up", "down", "left", "right", "front", and "rear" are based on the directions or positional relationships shown in the drawings, the description is only for convenience of description of the present invention, and it is not intended to indicate or imply that the device indicated must have a specific direction, be constructed and operated in a specific direction, and therefore, the present invention is not to be construed as being limited in scope.

Example one

Referring to fig. 1 to 4, a substrate fixing device includes a fixing base 10, which is provided with an assembly hole 11 penetrating through a first surface and a second surface, a radially extending limiting portion 12 is provided at a side of the first surface of the assembly hole 11, and a clamping groove 13 is further provided on an inner wall of the assembly hole 11; the elastic clamping ring 20 is at least partially embedded in the clamping groove 13, the elastic clamping ring 20 at least partially protrudes out of the clamping groove 13 and forms an accommodating groove 15 with the limiting part 12 to fix the substrate 30, and the elastic clamping ring 20 is further provided with an operating part 21 to be operated to deform the elastic clamping ring.

In the present invention, the substrate 30 may be a wafer or other plate-like or sheet-like structure to be coated, and may have various sizes such as 4 inches, 6 inches, 8 inches or 12 inches. The hole surrounded by the limiting portion 12 can be used as a window 14, so that the corresponding area of the substrate 30 is exposed, and the diameter of the window 14 can be smaller than the outer diameter of the substrate 30, for example: the size of the window 14 surrounded by the limiting portion 12 is 20% of the substrate size-the trimming size, and the trimming size refers to an invalid area of the substrate identified in the process engineering, and the area is not patterned with devices or the device pattern is formed without considering the yield. The limiting portion 12 and the elastic snap ring 20 are respectively formed inside two opposite sidewalls of the receiving groove 15 for limiting the substrate 30, and the widths of the two sidewalls may be the same or different. The inner wall between the two opposite side walls of the receiving groove 15 is used for supporting the substrate 30 and preventing the substrate 30 from being pressed.

Further, the elastic snap ring 20 is provided with elasticity by providing a notch 22, a bending portion or a fracture portion to be overlapped, and the elastic snap ring 20 is deformed by operating the operation portion 21 so as to be conveniently installed in the card slot 13. The operating portion 21 may be a hole formed in the snap ring 20 or a structure extending along the second surface of the fixing base 10.

In this embodiment, the elastic snap ring 20 is provided with a notch 22, and the operation portion 21 is located at the notch 22. Specifically, the operation portion 21 may include two operation ends 21a, one operation end 21a is located at one end of the notch 22, and the other operation end 21a is located at the other end of the notch 22. When the two operation ends 21a are close to each other by applying an external force, the elastic snap ring 20 deforms, the overall outer diameter becomes small, the elastic snap ring can be smoothly clamped into the clamping groove 13, and after the elastic snap ring 20 is loosened, the elastic snap ring is restored. A connecting structure can be further arranged between the two operating ends 21a, so that an integrated structure is formed, and the elastic snap ring 20 can be manipulated to deform, so that the structure of the operation 21 is not unique.

Further, each of the operation ends 21a includes a first extension 23 and a second extension 24 integrally formed, the first extension 23 extends from the inside of the snap ring 20 to the outside of the second surface of the fixing seat 10, the second extension 24 extends from one end of the first extension 23 in a radial direction, and the second extension 24 is spaced apart from the second surface of the fixing seat 10. The second extending section 24 is exposed on the second surface of the fixing base 10, so as to facilitate the operation of the operation portion 21.

In addition, referring to fig. 1 and 8, the shape of the second extending section 24 may be set according to actual situations, and may be a straight line or a zigzag, and preferably, may be set to be a zigzag, where a portion of the second extending section is closer to the second surface of the fixing base 10, so as to prevent the first extending section 23 of the snap ring 20 from touching the substrate 30 when the snap ring 20 is manipulated to deform, and the other portion has a larger distance from the second surface of the fixing base 10.

Wherein, the outer diameter of accommodation groove 15 internal diameter more than or equal to base plate 30, base plate 30 is fixed when being located accommodation groove 15 promptly, and base plate 30 can have certain allowance with accommodation groove 15 inner wall, for example: the inner diameter of the accommodation groove 15 is 101.5% of the diameter of the substrate.

Further, the inner diameter of the second surface of the assembly hole 11 is larger than or equal to the inner diameter of the accommodating groove 15, so that the substrate 30 can be directly loaded into or taken out from the second surface of the assembly hole 11 during installation or disassembly, and loading and unloading are convenient.

In this embodiment, the outside of the elastic snap ring 20 is partially or completely embedded in the slot 13, and the inside of the elastic snap ring 20 is partially or completely protruded out of the slot 13, wherein the local part may be a plurality of areas distributed at intervals, and the number and the position may be set as required without limitation. Preferably, the snap ring 20 is entirely embedded in the outer portion and entirely protruded in the inner portion, that is, the inner diameter of the snap ring 20 is smaller than that of the receiving groove 15, and the outer diameter of the snap ring 20 is larger than that of the second surface side of the fitting hole 11.

Wherein, elasticity snap ring 20 can adopt materials such as spring steel, and the draw-in groove internal diameter equals holding tank internal diameter + snap ring width 20%.

The invention also provides a sputtering coating machine, which comprises a coating machine main body and the substrate fixing device, wherein the fixing seat 10 and the target are arranged in parallel at intervals. Preferably, the main body of the film plating machine can adopt a vertical magnetron sputtering film plating machine.

When feeding, the substrate 30 is firstly loaded from the side of the second surface of the fixing seat 10 of the assembly hole 11, so that the side wall of the substrate abuts against the inner wall of the assembly hole 11 close to the limiting part 12, namely the inner wall of the accommodating groove 15; then, the operating portion 21 is operated manually or through equipment to enable the elastic clamping ring 20 to deform, the elastic clamping ring 20 is also installed into the clamping groove 13 from the side of the second surface of the fixing seat of the assembling hole 11, after the elastic clamping ring is loosened, the elastic clamping ring 20 is restored, and the inner portion and the limiting portion 12 respectively limit two opposite surfaces of the substrate 30 to achieve fixing.

During the unloading, manual or through equipment control operation portion 21 make snap ring 20 warp, take out snap ring 20 from draw-in groove 13 from the second surface place side of the fixing base 10 of pilot hole 11, then can take off base plate 30.

Example two

Referring to fig. 5, a substrate fixing device and a sputter coating machine have the same main structure as the first embodiment, except that: the elastic snap ring 20 is provided with at least one convex part 25, the inner wall of the clamping groove 13 is correspondingly provided with at least one concave part 16, and the convex part 25 is clamped in the corresponding concave part 16.

In this embodiment, the convex portion 25 and the concave portion 16 are provided to realize the alignment of the snap ring 20 during installation, thereby facilitating and speeding up the installation. The convex portion 25 extends along the outer portion of the elastic snap ring 20, and the shape thereof may be a triangle, an arc, a trapezoid, or the like, the number thereof may be one or two or more, and the position thereof may be close to the operation portion 21 or far from the operation portion 21, and the like, but is not limited thereto, and preferably, the convex portion 25 is located on the side opposite to the operation portion 21.

When feeding, firstly, the substrate 30 is loaded from the side of the second surface of the fixing seat 10 of the assembly hole 11, so that the side wall of the substrate abuts against the inner wall of the assembly hole 11 close to the limiting part 12; then, the operating portion 21 is operated manually or through equipment to deform the elastic clamping ring 20, the convex portion 25 is aligned with the concave portion 16 in the clamping groove 13 and clamped, other portions of the elastic clamping ring 20 are installed in the clamping groove 13, after the elastic clamping ring 20 is loosened, the elastic clamping ring 20 is restored, and the inner wall and the limiting portion 12 respectively limit two opposite surfaces of the substrate 30 to achieve fixing.

EXAMPLE III

A substrate fixing device and a sputter coating machine have the same main structure as that of the first embodiment, and are different from the first embodiment in that: the operating portion 21 is further provided with a bent segment 26, and the end of the bent segment 26 is close to the second surface of the fixing base 10. The bending section 26 may be a broken line shape, an arc shape or other curved lines, referring to fig. 6 and 7, the bending section 26 is a broken line shape, one end of which is connected to one end of the second extending section 24, and the other end of which is bent to be close to the second surface of the fixing base 10.

In this embodiment, the bending section 26, the first extending section 23, and the second extending section 24 are integrally formed, and during loading, the operating portion 21 is controlled to deform the snap ring 20, a portion of the snap ring 20 away from the operating portion 21 extends toward the substrate 30, and the bending section 26 is arranged to prevent the portion from extending too far to touch the substrate 30.

The above-mentioned be the utility model discloses a concrete implementation way, nevertheless the utility model discloses a design concept is not limited to this, and the ordinary use of this design is right the utility model discloses carry out immaterial change, all should belong to the act of infringement the protection scope of the utility model.

Claims

1. The utility model provides a substrate fixing device, includes the fixing base, and it sets up the pilot hole that link up first surface and second surface, its characterized in that: a radially extending limiting part is arranged on the side of the first surface of the assembling hole, and a clamping groove is also formed in the inner wall of the assembling hole; still include the snap ring, this snap ring outside at least part inlays in the draw-in groove, inside at least part evagination in draw-in groove and spacing portion constitute the holding tank with fixed base plate between, this snap ring still is equipped with the operation portion in order to be operated and make the snap ring warp.

2. A substrate holding apparatus as claimed in claim 1, wherein: the elastic clamping ring is provided with a notch, and the operating part is located at the notch.

3. A substrate holding apparatus as claimed in claim 2, wherein: the operation part comprises two operation ends, one operation end is positioned at one end of the gap, and the other operation end is positioned at the other end of the gap.

4. A substrate holding apparatus as claimed in claim 1, wherein: the operating part comprises a first extension section and a second extension section, the first extension section extends from the interior of the elastic clamping ring to the outside of the second surface of the fixed seat, the second extension section extends from one end of the first extension section outwards in the radial direction, and a distance is reserved between the second extension section and the second surface of the fixed seat.

5. A substrate holding apparatus as claimed in claim 4, wherein: the inner diameter of the accommodating groove is larger than or equal to the outer diameter of the substrate.

6. A substrate holding apparatus as claimed in claim 1 or 4, wherein: the operating part is also provided with a bending section, and the tail end of the bending section is close to the second surface of the fixed seat.

7. A substrate holding apparatus as claimed in claim 1, wherein: the elastic clamping ring is provided with at least one convex part, the inner wall of the clamping groove is correspondingly provided with at least one concave part, and the convex part is clamped into the corresponding concave part; the convex portion is located on the side opposite to the operation portion.

8. A substrate holding apparatus as claimed in claim 1, wherein: the inner diameter of the second surface side of the assembly hole is larger than or equal to the inner diameter of the accommodating groove.

9. A substrate holding apparatus as claimed in claim 1, wherein: the inner diameter of the elastic clamping ring is smaller than that of the accommodating groove, and the outer diameter of the elastic clamping ring is larger than that of the side, where the second surface of the assembling hole is located, of the assembling hole.

10. A sputter coater comprising a coater body and further comprising a substrate holding apparatus as claimed in any one of claims 1 to 9.