CN214600802U

CN214600802U - Solvent-free cleaning equipment for semiconductor parts

Info

Publication number: CN214600802U
Application number: CN202023084542.1U
Authority: CN
Inventors: 何淑英
Original assignee: Guangzhou Honghao Optoelectronic Semiconductor Co ltd
Current assignee: Guangzhou Honghao Optoelectronic Semiconductor Co ltd
Priority date: 2020-12-17
Filing date: 2020-12-17
Publication date: 2021-11-05
Anticipated expiration: 2030-12-17

Abstract

The utility model relates to a solvent-free cleaning technical field, in particular to a solvent-free cleaning device for semiconductor parts, which comprises a box body, wherein the box body comprises a first mechanical bin, a cleaning bin and a second mechanical bin, the cleaning bin is arranged at the middle part of the box body, the first mechanical bin is arranged below the cleaning bin, the second mechanical bin is arranged above the cleaning bin, the first mechanical bin comprises a hot air blower and a motor, a rotating shaft is arranged on the motor, the second mechanical bin comprises a dry ice controller, the dry ice controller is arranged at the middle part of the second mechanical bin, the cleaning bin comprises a storage tray, the storage tray is arranged at the middle part of the cleaning bin, a first dry ice port and a second hot air port are arranged above the storage tray, a second dry ice port and a first hot air port are arranged below the storage tray, and the motor is used for driving the dry ice port and the first hot air port, the storage tray can be rotated, cooled by a dry ice controller, and heated by a hot air blower.

Description

Solvent-free cleaning equipment for semiconductor parts

Technical Field

The utility model relates to a solventless quality washs technical field, specifically is a solventless quality cleaning equipment for semiconductor spare part.

Background

As is well known, conventional cleaning is an organic chemical solvent or reagent that dissolves organic residues for post-treatment; or auxiliary high pressure water sand blasting cleaning and the like. But the former causes environmental pollution and the latter damages the surface coating of the component itself. At present, special cleaning methods such as high-pressure water washing, dry ice cleaning and the like exist, but at present, the methods are rarely adopted for semiconductor parts, and tests show that organic pollutants on the surface of a semiconductor can fall off after high-temperature and low-temperature alternate action, so that solvent-free green cleaning is realized.

For example, the patent name of ' CN208928670U ' discloses a solvent-free cleaning device for semiconductor parts, and the patent discloses ' the utility model discloses a solvent-free cleaning device for semiconductor parts, which comprises a cleaning box, a dry ice preparation conveyor and a high-pressure air source, wherein the bottom of the cleaning box is provided with a base, a cleaning cavity is formed in the cleaning box, the lower part of the cleaning cavity is provided with a hot air guide plate, and one side below the hot air guide plate is provided with a hot air inlet; a transverse support is arranged above the hot air guide plate and in the middle of the cleaning cavity, a carrying unit is arranged at the upper end of the transverse support and comprises a carrying column and a motor which are connected to the transverse support, a carrying disc is arranged on the carrying column, semiconductor parts are placed on the carrying disc, and the carrying column and the carrying disc rotate; the inner cavity is provided with a vertical support, the vertical support is provided with a plurality of cleaning spray guns, a dry ice branch pipe and a high-pressure air pipe which are arranged at the tail ends of the cleaning spray guns are respectively connected with a dry ice preparation conveyor and a high-pressure air source, and an air draft unit is arranged above the cleaning cavity. The utility model discloses a dry ice washs and dries by the fire with hot-blast, and cold and hot in turn and erode have very high cleaning efficiency ".

When the existing solvent-free cleaning equipment is used, the loading and unloading are inconvenient, the consumed time in the cleaning process is too long, and the cold and heat distribution in a cleaning bin is uneven, so that the cleaning quality is poor.

SUMMERY OF THE UTILITY MODEL

Technical problem to be solved

Not enough to prior art, the utility model provides a convenient operation, the solvent-free cleaning equipment that is used for semiconductor spare part that cleaning efficiency is high.

(II) technical scheme

In order to achieve the above object, the utility model provides a following technical scheme: a solvent-free cleaning device for semiconductor parts comprises a box body, wherein the box body comprises a first mechanical bin, a cleaning bin and a second mechanical bin, the cleaning bin is arranged in the middle of the box body, the first mechanical bin is arranged below the cleaning bin, the second mechanical bin is arranged above the cleaning bin, the first mechanical bin comprises a hot air blower and a motor, the motor is located in the middle of the first mechanical bin, a rotating shaft is arranged on the motor and is arranged at the front end of the motor, a clamping groove is arranged on the rotating shaft and is arranged at one end of the rotating shaft, the hot air blower is arranged on one side of the motor, the second mechanical bin comprises a dry ice controller, the dry ice controller is located in the middle of the second mechanical bin, the cleaning bin comprises a storage tray, and the storage tray is arranged in the middle of the cleaning bin, the improved ice storage tray is characterized in that a first dry ice port and a second hot air port are arranged above the storage tray, a second dry ice port and a first hot air port are arranged below the storage tray, dry ice pipes are arranged between the first dry ice port and the dry ice controller and between the second dry ice port and the dry ice controller and connected with the dry ice controllers, hot air pipes are arranged between the first hot air port and the hot air ports and connected with the hot air fans, a clamping block, a vibrator and a handle are arranged on the storage tray, the vibrator is arranged on the outer wall of the storage tray, the handle is arranged on one side of the storage tray, and the clamping block is arranged at the lower end of the storage tray and located inside the clamping groove.

In order to improve the practicality of this structure, the utility model discloses an improvement has, the handle is equipped with four to install respectively in the side of depositing the dish, be equipped with the antiskid cover on the handle.

In order to improve the cleaning efficiency of this structure, the utility model discloses an improve and have, be equipped with the through-hole on the storage dish, the through-hole is equipped with a plurality ofly, be equipped with the filter screen on the through-hole, be equipped with cold sensor and heat sensor on the storage dish, and all be equipped with wireless transmitter on cold sensor and the heat sensor, just the cold sensor passes through wireless signal connection dry ice controller, heat sensor passes through wireless signal and connects the air heater respectively.

In order to facilitate the unloading, the utility model discloses an improvement has, be equipped with the revolving door on the washing storehouse, be equipped with the pivot between revolving door and the washing storehouse and be connected.

(III) advantageous effects

Compared with the prior art, the utility model provides a solvent-free cleaning equipment for semiconductor spare part possesses following beneficial effect:

the solvent-free cleaning equipment for the semiconductor parts is characterized in that the motor is positioned in the middle of the first mechanical bin, a rotating shaft is arranged on the motor, the rotating shaft is arranged at the front end of the motor, a clamping groove is formed in the rotating shaft, the clamping groove is arranged at one end of the rotating shaft, a clamping block is arranged on the storage disc, the clamping block is arranged at the lower end of the storage disc and is positioned in the clamping groove, the storage disc can rotate during cleaning through the mutual matching of the clamping block and the clamping groove, so that the materials are cleaned more uniformly, a first dry ice port and a second hot air port are arranged above the storage disc, a second dry ice port and a first hot air port are arranged below the storage disc, the heating and cooling speeds are improved through the first dry ice port, the second dry ice port, the first hot air port and the second hot air port, so that the cleaning speed is accelerated, the production efficiency of products is further improved, the cold sensor and the heat sensor are arranged on the storage tray, and the temperature of the storage tray can be effectively controlled by arranging the cold sensor and the heat sensor, so that the cleaning quality is improved.

Drawings

FIG. 1 is a schematic view of the present invention;

fig. 2 is a front view of the present invention;

FIG. 3 is a schematic view of a portion of the enlarged structure of FIG. 1;

fig. 4 is a top view of the tray of fig. 1 according to the present invention.

In the figure: 1. a box body; 2. a first mechanical bin; 3. cleaning the bin; 4. a second mechanical bin; 5. a dry ice controller; 6. a through hole; 7. a first dry ice port; 8. a second hot air port; 9. storing a disc; 10. a vibrator; 11. a first hot air port; 12. a hot air blower; 13. a motor; 14. a rotating shaft; 15. a clamping block; 16. a card slot; 17. a revolving door; 18. a rotating shaft; 19. a second dry ice port; 20. a handle;

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-4, the solvent-free cleaning apparatus for semiconductor components of the present invention includes a box body 1, the box body 1 includes a first mechanical chamber 2, a cleaning chamber 3 and a second mechanical chamber 4, the cleaning chamber 3 is installed in the middle of the box body 1, the first mechanical chamber 2 is installed below the cleaning chamber 3, the second mechanical chamber 4 is installed above the cleaning chamber 3, the first mechanical chamber 2 includes a hot air blower 12 and a motor 13, the motor 13 is located in the middle of the first mechanical chamber 2, the motor 13 is provided with a rotating shaft 14, the rotating shaft 14 is installed at the front end of the motor 13, the rotating shaft 14 is provided with a clamping groove 16, the clamping groove 16 is installed at one end of the rotating shaft 14, the hot air blower 12 is installed at one side of the motor 13, the second mechanical chamber 4 includes a dry ice controller 5, the dry ice controller 5 is located in the middle of the second mechanical chamber 4, the cleaning bin 3 comprises a storage tray 9, the storage tray 9 is installed in the middle of the cleaning bin 3, a first dry ice port 7 and a second hot air port 8 are arranged above the storage tray 9, a second dry ice port 19 and a first hot air port 11 are arranged below the storage tray 9, dry ice pipes are arranged between the first dry ice port 7 and the dry ice controller 5 and between the second dry ice port 19 and the dry ice controller 5 for connection, hot air pipes are arranged between the first hot air port 11 and the hot air port 8 and between the hot air heater 12 for connection, a clamping block 15, a vibrator 10 and a handle 20 are arranged on the storage tray 9, the vibrator 10 is installed on the outer wall of the storage tray 9, the handle 20 is installed on one side of the storage tray 9, and the clamping block 15 is installed at the lower end of the storage tray 9 and is located inside the clamping groove 16.

When the solvent-free cleaning equipment for semiconductor parts of the utility model is used, firstly, semiconductor materials are placed on the storage tray 9, the storage tray 9 is independent here and can be placed on a conveyor belt in advance, the transportation is carried out through the conveyor belt, namely, the storage tray 9 on the conveyor belt is placed on the rotating shaft 14 through the handle 20, the clamping block 15 on the storage tray 9 is matched with the clamping groove 16 on the rotating shaft 14, so that the storage tray 9 is fixed on the rotating shaft 14, the cleaning is started after the storage tray is placed, in the cleaning process, the motor 13 is started, the motor 13 drives the rotating shaft 14 to rotate, the rotating shaft 14 further drives the storage tray 9 to rotate, the vibrator 10 can vibrate the storage tray 9 when the storage tray 9 rotates in the cleaning bin 3, thereby the materials are cooled and heated more uniformly, and the cleaning quality is improved, in the refrigeration process, dry ice controller 5 can transport the dry ice to first dry ice mouth 7 and second dry ice mouth 19 through the dry ice pipe, spout in first dry ice mouth 7 department and second dry ice mouth 19 department respectively, after the dry ice blowout, atomize in the twinkling of an eye, and absorb a large amount of heat energy, thereby reach the effect of cooling, hot-blast transportation that passes through the hot-blast main that will heat up of air heater 12, spout in first hot-blast mouth 11 and second hot-blast mouth 8 department, here, through upper end and the lower extreme of depositing dish 9 cooling and heating simultaneously, the time of cooling and heating has been shortened, and the homogeneity of cooling and heating has been guaranteed, thereby cleaning efficiency has been improved, further production efficiency has been improved.

In order to improve the practicality of this structure, the utility model discloses an improvement has, handle 20 is equipped with four to install respectively in the side of depositing dish 9, be equipped with the antiskid cover on handle 20, the antiskid cover can improve the antiskid nature on handle 20.

In order to improve the cleaning efficiency of this structure, the utility model discloses an improvement has, be equipped with through-hole 6 on the storage dish 9, through-hole 6 is equipped with a plurality ofly, be equipped with the filter screen on the through-hole 6, be equipped with cold sensor and heat sensor on the storage dish 9, and all be equipped with wireless transmitter on cold sensor and the heat sensor, just cold sensor passes through wireless signal connection dry ice controller 5, heat sensor passes through wireless signal and connects air heater 12 respectively, and when the temperature in the washing storehouse 3 reached low temperature, cold sensor gave dry ice controller 5 with the signal, and dry ice controller 5 will close, and when the temperature in the washing storehouse reached high temperature, heat sensor gave hot-air blower 12 with the signal, and air heater 12 will stop the operation.

In order to facilitate the unloading, the utility model discloses an improve and have, be equipped with revolving door 17 on the washing storehouse 3, revolving door 17 and washing are equipped with the pivot 18 between the storehouse 3 and are connected, when the washing finishes, open revolving door 17, through handle 20 will deposit the dish 9 take out can.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The solvent-free cleaning equipment for the semiconductor parts is characterized by comprising a box body (1), wherein the box body (1) comprises a first mechanical bin (2), a cleaning bin (3) and a second mechanical bin (4), the cleaning bin (3) is installed in the middle of the box body (1), the first mechanical bin (2) is installed below the cleaning bin (3), the second mechanical bin (4) is installed above the cleaning bin (3), the first mechanical bin (2) comprises a hot air fan (12) and a motor (13), the motor (13) is located in the middle of the first mechanical bin (2), a rotating shaft (14) is arranged on the motor (13), the rotating shaft (14) is installed at the front end of the motor (13), a clamping groove (16) is formed in the rotating shaft (14), and the clamping groove (16) is installed at one end of the rotating shaft (14), the hot air blower (12) is installed on one side of the motor (13), the second mechanical bin (4) comprises a dry ice controller (5), the dry ice controller (5) is located in the middle of the second mechanical bin (4), the cleaning bin (3) comprises a storage tray (9), the storage tray (9) is installed in the middle of the cleaning bin (3), a first dry ice port (7) and a second hot air port (8) are arranged above the storage tray (9), a second dry ice port (19) and a first hot air port (11) are arranged below the storage tray (9), dry ice pipes are arranged between the first dry ice port (7) and the second dry ice port (19) and the dry ice controller (5) for connection, hot air pipes are arranged between the first hot air port (11) and the second hot air port (8) and the hot air blower (12) for connection, and a clamping block (15) is arranged on the storage tray (9), The vibrator (10) is installed on the outer wall of the storage tray (9), the handle (20) is installed on one side of the storage tray (9), and the clamping block (15) is installed at the lower end of the storage tray (9) and located inside the clamping groove (16).

2. The solventless cleaning apparatus for semiconductor parts according to claim 1, wherein the four pull handles (20) are provided and are respectively installed at the side surfaces of the storage tray (9).

3. The solvent-free cleaning apparatus for semiconductor parts according to claim 1, wherein the handle (20) is provided with an anti-slip cover.

4. The apparatus for cleaning semiconductor components according to claim 1, wherein the tray (9) is provided with a plurality of through holes (6), and the through holes (6) are provided in plurality.

5. The solvent-free cleaning equipment for the semiconductor parts as claimed in claim 4, wherein the through hole (6) is provided with a filter screen.

6. The apparatus for cleaning semiconductor components without solvent according to claim 1, wherein the tray (9) is provided with a cold sensor and a heat sensor, and the cold sensor and the heat sensor are provided with wireless transmitters, and the cold sensor is connected with the dry ice controller (5) by wireless signals, and the heat sensors are respectively connected with the hot air blower (12) by wireless signals.

7. The solvent-free cleaning equipment for the semiconductor parts and components as claimed in claim 1, wherein a rotating door (17) is arranged on the cleaning bin (3), and a rotating shaft (18) is arranged between the rotating door (17) and the cleaning bin (3) for connection.