CN214586377U - Water-gas pulse cleaning device - Google Patents
Water-gas pulse cleaning device Download PDFInfo
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- CN214586377U CN214586377U CN202120871595.3U CN202120871595U CN214586377U CN 214586377 U CN214586377 U CN 214586377U CN 202120871595 U CN202120871595 U CN 202120871595U CN 214586377 U CN214586377 U CN 214586377U
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Abstract
The utility model discloses a belt cleaning device of water vapor pulse, include: the water-gas pulse generator comprises a first joint, a second joint, a water-gas pulse generator and a storage tank; the water-gas pulse generator is used for generating water-gas pulses required for cleaning the surface of the pipe wall; the first joint is communicated with the head end of the pipeline to be cleaned and is used for sending water vapor pulses generated by the water vapor pulse generator to the pipeline to be cleaned; the second joint is communicated with the tail end of the pipeline to be cleaned and is used for discharging cleaning waste liquid formed by the water-gas pulse passing through the pipeline to be cleaned; the storage tank is communicated with the second joint and is used for storing the cleaning waste liquid. The utility model provides a water-air pulse cleaning device to effectively get rid of the stubborn spot of photoetching machine cooling water pipeline.
Description
Technical Field
The utility model relates to a lithography machine cooling system technical field especially relates to a water air pulse's belt cleaning device.
Background
After the cooling water system of the photoetching machine circulates for a long time, pollutants such as impurities, water scales and the like can be generated on the inner wall of the pipeline, and the pollutants generally have very low heat conductivity coefficients and can influence the performance of the cooling system. For example, contaminants on the inner wall of the cooling water pipe of the objective lens can cause the flow of cooling water to be low, and the thermal stability of the objective lens is affected. Therefore, a set of cleaning device is needed to effectively and periodically clean the cooling water pipeline of the photoetching machine.
In the current project, clean compressed air (CDA) is introduced from one end of the pipeline to purge contaminants on the wall of the cooling water pipeline. However, the method is time-consuming and long, has a common effect, can not effectively remove stubborn pollutants, an open container is needed at the outlet of the cooling water pipeline to collect the pollutants on the pipe wall after falling off, and the pollutants in the open container are blown away to cause the risk of secondary pollution under the blowing action of clean compressed air.
SUMMERY OF THE UTILITY MODEL
The embodiment of the utility model provides a water pulse's belt cleaning device to a reliable cleaning device who effectively gets rid of the stubborn spot of photoetching machine cooling water pipeline is provided.
The embodiment of the utility model provides a water and air pulse's belt cleaning device, include: the water-gas pulse generator comprises a first joint, a second joint, a water-gas pulse generator and a storage tank;
the water-gas pulse generator is used for generating water-gas pulses required for cleaning the surface of the pipe wall;
the first joint is communicated with the head end of the pipeline to be cleaned and is used for sending the water vapor pulse generated by the water vapor pulse generator to the pipeline to be cleaned;
the second joint is communicated with the tail end of the pipeline to be cleaned and is used for discharging cleaning waste liquid formed by the water vapor pulse passing through the pipeline to be cleaned;
the storage tank is communicated with the second joint and is used for storing the cleaning waste liquid.
In the utility model, the water-gas pulse generator generates water-gas pulse, which is the water-gas two-phase mixed flow, the water-gas two-phase mixed flow enters the pipeline to be cleaned through the first joint, pollutants in the pipeline to be cleaned are stirred, stripped and washed away by utilizing vibration, cutting and impact effects generated by the water-gas two-phase mixed flow, finally the pollutants are mixed by water-gas pulses to form cleaning waste liquid, the cleaning waste liquid is connected into the second joint through the tail end of the pipeline to be cleaned, the cleaning waste liquid is stored in the storage tank through the second joint, the cleaning device with the water-gas pulse in the embodiment has stronger cleaning capability, can clean stubborn stains, improves the cleaning efficiency of the pipeline, when the pipeline is a cooling water pipeline of the photoetching machine, the water-gas pulse cleaning device can ensure the stable performance of a cooling water system and the temperature of the cooling water, thereby ensuring the stable working state of the photoetching machine. In addition, the above-mentioned pollutant of waiting to clean the pipeline is followed the washing waste liquid and is discharged, is fixed by liquid, can not cause secondary pollution by blowing into in the air, improves the clean efficiency of pollutant.
Drawings
Fig. 1 is a schematic structural diagram of a water-gas pulse cleaning device according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of another water-gas pulse cleaning device according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a water pulse generator according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of a water pulse according to an embodiment of the present invention.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.
Can produce pollutants such as impurity, incrustation scale at the cooling water piping inner wall after the long-time circulation of photoetching machine cooling water system, the pollutant generally has very low coefficient of heat conductivity, leads to influencing the cooling system performance, and the mode effect that clean compressed air sweeps is relatively poor, for solving the relatively poor problem of above-mentioned cleaning performance, realizes that the cooling water piping inner wall pollutant is clean, ensures that cooling water system stable performance, normal simultaneously, the embodiment of the utility model provides a water vapor pulse's belt cleaning device, include: the water-gas pulse generator comprises a first joint, a second joint, a water-gas pulse generator and a storage tank;
the water-gas pulse generator is used for generating water-gas pulses required for cleaning the surface of the pipe wall;
the first joint is communicated with the head end of the pipeline to be cleaned and is used for sending water vapor pulses generated by the water vapor pulse generator to the pipeline to be cleaned;
the second joint is communicated with the tail end of the pipeline to be cleaned and is used for discharging cleaning waste liquid formed by the water-gas pulse passing through the pipeline to be cleaned;
the storage tank is communicated with the second joint and is used for storing the cleaning waste liquid.
It should be noted that the pipe to be cleaned in this embodiment may be any conveying pipe to be cleaned, for example, a tap water supply pipe, a natural gas pipe, a petroleum pipe, a cooling water pipe, and the like, and the specific type of the pipe to be cleaned is not particularly limited in this embodiment.
In the utility model, the water-gas pulse generator generates water-gas pulse, which is the water-gas two-phase mixed flow, the water-gas two-phase mixed flow enters the pipeline to be cleaned through the first joint, pollutants in the pipeline to be cleaned are stirred, stripped and washed away by utilizing vibration, cutting and impact effects generated by the water-gas two-phase mixed flow, finally the pollutants are mixed by water-gas pulses to form cleaning waste liquid, the cleaning waste liquid is connected into the second joint through the tail end of the pipeline to be cleaned, the cleaning waste liquid is stored in the storage tank through the second joint, the cleaning device with the water-gas pulse in the embodiment has stronger cleaning capability, can clean stubborn stains, improves the cleaning efficiency of the pipeline, when the pipeline is a cooling water pipeline of the photoetching machine, the water-gas pulse cleaning device can ensure the stable performance of a cooling water system and the temperature of the cooling water, thereby ensuring the stable working state of the photoetching machine. In addition, the above-mentioned pollutant of waiting to clean the pipeline is followed the washing waste liquid and is discharged, is fixed by liquid, can not cause secondary pollution by blowing into in the air, improves the clean efficiency of pollutant.
Above is the core thought of the utility model, will combine the attached drawing in the embodiment of the utility model below, to the technical scheme in the embodiment of the utility model clearly, describe completely. Based on the embodiments in the present invention, under the premise that creative work is not done by ordinary skilled in the art, all other embodiments obtained all belong to the protection scope of the present invention.
As shown in fig. 1, fig. 1 is a schematic structural diagram of a water-gas pulse cleaning device provided in an embodiment of the present invention, and the water-gas pulse cleaning device at least includes a first joint 12, a second joint 2, a water-gas pulse generator 11 and a storage tank 5. The water-gas pulse generator 11 can generate water-gas two-phase mixed flow, namely water-gas pulse, and the water-gas pulse can generate vibration, cutting, impact effect and the like to stir, strip and flush away pollutants on the inner wall of the pipeline. First joint 12 can communicate head end and aqueous vapor pulse generator 11 of treating clean pipeline, can send aqueous vapor pulse to treating clean pipeline, wash the pipeline inner wall, aqueous vapor pulse is along treating clean pipeline to the end of treating clean pipeline, aqueous vapor pulse mixed pollutant finally can form the washing waste liquid, the washing waste liquid can flow through to the second joint 2 via the tail end of treating clean pipeline, second joint 2 and storage tank 5 intercommunication, can save the washing waste liquid to storage tank 5 in, carry out the collection of washing waste liquid, for the drainage mode of opening discharge washing waste liquid, can avoid washing waste liquid directly to get rid of and cause the pollution to the environment. Optionally, the first joint 12 and the head end of the pipeline to be cleaned may be communicated through the first hose 13, and the first hose 13 may effectively ensure the sealing and fixing connection between the head end of the pipeline to be cleaned and the first joint 12, thereby avoiding the problem of leakage of water-gas pulses between the first joint 12 and the head end of the pipeline to be cleaned. In a similar way, the second connector 2 is communicated with the tail end of the pipeline to be cleaned through the second hose 1, and the sealing and fixing of the second connector 2 and the tail end of the pipeline to be cleaned are guaranteed.
Optionally, the pipeline to be cleaned in this embodiment is preferably a cooling water pipeline of the lithography machine, and the cleaning device of the water-air pulse in this embodiment is used for cleaning the cooling water pipeline of the lithography machine, so as to effectively avoid impurities mixed in the cooling water pipeline from affecting the cooling system, and ensure stable performance of the cooling water system.
Continuing to refer to fig. 1, optionally, can also be provided with storage tank apron 3 on the storage tank 5, can prevent that the washing waste liquid in the storage tank 5 from overflowing because of the impact power of aqueous vapor pulse, avoids causing environmental pollution, simultaneously, can also be provided with gas vent 4 on the storage tank apron 3, can effectively discharge the gas in the aqueous vapor pulse, prevents that storage tank 5 internal pressure is too big.
Fig. 2 is a schematic structural diagram of another water-gas pulse cleaning device provided in an embodiment of the present invention, optionally, the water-gas pulse cleaning device may further include: a filter 10; the filter 10 is communicated with the storage tank 5 and is used for filtering the cleaning waste liquid to form cleaning water; the filter 10 communicates with a water gas pulse generator 11 for outputting cleaning water to the water gas pulse generator 11 to generate water gas pulses.
As shown in fig. 2, the water-air pulse cleaning device of the present embodiment may further include a filter 10, which is capable of filtering impurities in the cleaning waste liquid to form cleaning water, for example, the filter 10 may include at least one filtering layer to purify the cleaning waste liquid, the filter 10 is communicated with the storage tank 5, and is capable of filtering the cleaning waste liquid in the storage tank 5 to form cleaning water, and the cleaning water is capable of being conveyed to the water-air pulse generator 11 by the filter 10, so that the water-air pulse generator 11 applies power to the cleaning water to form water-air pulses. The present embodiment can realize the water circulation process of "water vapor pulse-cleaning waste liquid-cleaning water-water vapor pulse" through the filter 10, and in the whole water circulation process, the filtration of the impurities in the circulating water is realized, the waste liquid is not discharged to the environment, the present embodiment can be applied to the use environment of the semiconductor industry clean workshop, and the water resource can be saved, so that the cleaning cost of the pipeline to be cleaned is saved on the basis of ensuring the cleaning effect of the pipeline to be cleaned.
Fig. 3 is a schematic structural diagram of a water pulse generator according to an embodiment of the present invention, and optionally, the water pulse generator 11 may include: diaphragm pump 20 and regulator valve 22; the diaphragm pump 20 comprises a first inlet 15 and a second inlet 17; a first inlet 15 for sucking cleaning water, and a second inlet 17 for sucking air; the diaphragm pump 20 is used for forming a water-air mixture of cleaning water and air; the regulating valve 22 communicates with the first outlet 9 of the membrane pump 20 for forming a water-air pulse from the water-air mixture.
In a specific embodiment of the present invention, the water-gas pulse generator 11 may include: diaphragm pump 20, governing valve 22, and other pipelines, valves, etc., diaphragm pump 20 inhales the cleaning water through first inlet 15, and inhales the air through second inlet 17, and diaphragm pump 20 can form the aqueous vapor mixture with cleaning water and air, and governing valve 22 communicates with first outlet 9 of diaphragm pump 20, can form aqueous vapor pulse with the aqueous vapor mixture through the switching on and off of governing valve 22. Of course, the present embodiment is not limited to this way of forming the water vapor pulse, and the water vapor pulse may be formed by other pressure devices, which is not limited in this embodiment.
With continued reference to fig. 3, the first inlet 15 may optionally be provided with a first control valve 16 for adjusting the proportion of cleaning water in the water-gas mixture; the second inlet 17 may be provided with a second control valve 18 for adjusting the proportion of air in the water-air mixture.
The amount of the cleaning water sucked into the first inlet 15 of the diaphragm pump 20 can be controlled by turning on and off the first control valve 16, the amount of the air sucked into the second inlet 17 can be controlled by turning on and off the second control valve 18, and the ratio of the cleaning water and the air in the water-air mixture can be changed by adjusting the on time of the first control valve 16 and the on time of the second control valve 18, so that the state of the finally formed water-air pulse can be adjusted. Alternatively, if the water-gas pulse cleaning device further comprises a filter 10 in this embodiment, the first inlet 15 may be in communication with the filter 10 for implementing a water circulation process.
Fig. 4 is a schematic structural diagram of a water-gas pulse provided by an embodiment of the present invention, and optionally, the volume of the cleaning water can be controlled to account for 30% or more of the total volume of the cleaning water and the air, so that the water-gas mixture can form a water-gas pulse of a bullet-shaped flow pattern. The proportion of cleaning water in the water-air mixture can not be too low, and if the proportion of cleaning water in the water-air mixture is too low, the phenomenon of water-air separation can be generated, namely, the water-air pulse can form the condition that one section is full of air and one section is full of water, so that the cleaning effect on the inner wall of the pipeline is reduced. In the embodiment, the volume ratio of the cleaning water to the air in the water-air mixture can be changed by adjusting the conduction time of the first control valve and the conduction time of the second control valve, so that the ratio of the cleaning water to the water-air mixture is greater than or equal to 30%, and water-air separation is effectively avoided.
With continued reference to fig. 3, the water-gas mixture is transferred to the pipe to be cleaned by a certain pressure and frequency, the regulating valve 22 forms a water-gas pulse by turning on and off with a certain frequency, and delivers the water-gas mixture with a certain pressure peak value, and optionally, the regulating valve 22 may also be used to regulate the pulse frequency of the water-gas pulse by regulating the switching frequency. The pulse frequency is adjusted according to the actual cleaning condition to achieve a good cleaning effect, and optionally, the cleaning device for the water-air pulse in the embodiment can realize pulse pressure adjustment of 0-12bar and the pulse frequency of 10 times/min-100 times/min.
With continued reference to FIG. 3, alternatively, the diaphragm pump 20 may be an electric diaphragm pump, the diaphragm pump 20 being connected to a power source via a cable 19; or, the diaphragm pump 20 is a pneumatic diaphragm pump 20, and the diaphragm pump 20 is connected to a power source through a compressed air pipe 191; the regulating valve 22 is an electromagnetic valve, and the regulating valve 22 is connected with a power source through a cable 21; alternatively, the control valve 22 is an air-operated valve, and the control valve 22 is connected to the power source through a compressed air pipe 211.
Optionally, a transparent tube segment 24 may be formed between the first connector 12 and the regulator valve 22 for observing the shape of the water vapor pulse; the pressure gauge 23 is arranged on the inner side of the pipe wall of the transparent pipe section 24, and the pressure gauge 23 is used for detecting the pulse pressure of the water-air pulse output by the water-air pulse generator 11.
As shown in the above embodiment, the water pulse is preferably a water pulse forming a spring-like flow pattern, and the embodiment forms a section of transparent pipe 24 between the first connector 12 and the regulating valve 22, so that the shape of the water pulse is observed during the cleaning process, and when the water pulse is not in a spring-like flow pattern or the water pulse generates a water-gas separation phenomenon, it is convenient to adjust the ratio of the cleaning water and the air in the water-gas mixture in the diaphragm pump 20 or adjust the switching frequency of the regulating valve 22 in time. Optionally, the pipe wall inner side of the transparent pipe section 24 can be further provided with a pressure gauge 23, the pressure gauge 23 is used for detecting the pulse pressure of the water-air pulse output by the water-air pulse generator 11, the pulse pressure regulation should improve the pressure peak value as much as possible on the basis of ensuring the safety of the detected pipeline, the pressure value of the pipeline is monitored by the pressure gauge 23 in the embodiment, and the damage to the cleaned pipeline caused by overhigh pulse pressure is avoided.
With continued reference to FIG. 2, the reservoir 5 may optionally include a first drain 51 for draining the cleaning waste liquid in the reservoir 5; the filter 10 may include a second discharge port 101 for discharging the cleaning water remaining in the filter 10; the first discharge port 51 and the second discharge port 101 communicate with each other, and discharge control is performed by the third control valve 6.
In this embodiment, the cleaning waste liquid and the cleaning water used repeatedly can be discharged for the update of the circulating water, in this embodiment, the storage tank 5 is provided with the first discharge port 51 to discharge the remaining cleaning waste liquid, the filter 10 is provided with the second discharge port 101 to discharge the remaining cleaning water, and the first discharge port 51 and the second discharge port 101 can be converged to the discharge port 7 for discharging liquid, and the discharge control is performed through the third control valve 6. For example, when the circulation water needs to be discharged, the third control valve 6 is controlled to be opened, the washing waste liquid in the storage tank 5 and the cleaning water in the filter 10 are simultaneously discharged, and when the circulation water needs to be circulated in a closed loop, the third control valve 6 is closed, the first discharge port 51 of the storage tank 5 is communicated with the second discharge port 101 of the filter 10, and the circulation of the water between the storage tank 5 and the filter 10 is realized.
With continued reference to fig. 2, optionally, the water gas pulse cleaning device may further comprise: a cabinet 14 and a plurality of rollers 8; the cabinet 14 is used for accommodating the first joint 12, the second joint 2, the water-gas pulse generator 11 and the storage tank 5; the rollers 8 are arranged at the bottom of the cabinet 14 and used for realizing the movement of the cabinet 14.
On the basis of the above embodiments, the water vapor pulse cleaning device provided in this embodiment may include a cabinet 14 and a plurality of rollers 8, the cabinet 14 may contain all components of the water vapor pulse cleaning device except the cabinet 14 and the rollers 8, for example, the cabinet 14 contains the first joint 12, the second joint 2, the water vapor pulse generator 11, the storage tank 5, and even the filter 10 of the water vapor pulse cleaning device, and the rollers 8 are disposed at the bottom of the cabinet 14 for moving the cabinet 14.
It should be noted that the foregoing is only a preferred embodiment of the present invention and the technical principles applied. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail with reference to the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the scope of the present invention.
Claims (10)
1. A water pulse cleaning device, comprising: the water-gas pulse generator comprises a first joint, a second joint, a water-gas pulse generator and a storage tank;
the water-gas pulse generator is used for generating water-gas pulses required for cleaning the surface of the pipe wall;
the first joint is communicated with the head end of the pipeline to be cleaned and is used for sending the water vapor pulse generated by the water vapor pulse generator to the pipeline to be cleaned;
the second joint is communicated with the tail end of the pipeline to be cleaned and is used for discharging cleaning waste liquid formed by the water vapor pulse passing through the pipeline to be cleaned;
the storage tank is communicated with the second joint and is used for storing the cleaning waste liquid.
2. The water gas pulse cleaning device according to claim 1, further comprising: a filter;
the filter is communicated with the storage tank and is used for filtering the cleaning waste liquid to form cleaning water;
the filter is communicated with the water-gas pulse generator and is used for outputting the cleaning water to the water-gas pulse generator so as to generate the water-gas pulse.
3. The water gas pulse cleaning device according to claim 1, wherein said water gas pulse generator comprises: diaphragm pumps and regulating valves;
the diaphragm pump includes a first inlet and a second inlet; the first inlet is used for sucking cleaning water, and the second inlet is used for sucking air; the diaphragm pump is used for forming the cleaning water and air into a water-air mixture;
the regulating valve is communicated with a first outlet of the diaphragm pump and used for forming the water-gas mixture into water-gas pulses.
4. The water gas pulse washing device according to claim 3, wherein said first inlet is provided with a first control valve for adjusting the proportion of cleaning water in said water gas mixture;
the second inlet is provided with a second control valve for adjusting the proportion of air in the water-air mixture.
5. The water pulse cleaning device according to claim 4, wherein the volume of said cleaning water is greater than or equal to 30% of the total volume of said cleaning water and air.
6. The water gas pulse cleaning device according to claim 3, wherein said regulating valve is further adapted to regulate the pulse frequency of said water gas pulse by regulating a switching frequency.
7. The water gas pulse cleaning device according to claim 3,
the diaphragm pump is an electric diaphragm pump and is connected with a power source through a cable; or the diaphragm pump is a pneumatic diaphragm pump and is connected with a power source through a compressed air pipe;
the regulating valve is an electromagnetic valve and is connected with a power source through a cable; or the regulating valve is a pneumatic valve and is connected with a power source through a compressed air pipe.
8. The water gas pulse cleaning device according to claim 3, wherein a transparent pipe section is formed between said first joint and said regulating valve for observing the shape of said water gas pulse;
and a pressure gauge is arranged on the inner side of the pipe wall of the transparent pipe section and used for detecting the pulse pressure of the water-gas pulse output by the water-gas pulse generator.
9. The water-gas pulse cleaning device according to claim 2, wherein said tank comprises a first drain for draining a cleaning waste liquid in said tank; the filter comprises a second discharge port for discharging the residual cleaning water in the filter;
the first discharge port is communicated with the second discharge port, and discharge control is performed by a third control valve.
10. The water gas pulse cleaning device according to claim 1, further comprising: the cabinet body and a plurality of rollers;
the cabinet body is used for accommodating the first joint, the second joint, the water-gas pulse generator and the storage tank; the gyro wheel sets up in cabinet body bottom for realize the removal of the cabinet body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120871595.3U CN214586377U (en) | 2021-04-26 | 2021-04-26 | Water-gas pulse cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120871595.3U CN214586377U (en) | 2021-04-26 | 2021-04-26 | Water-gas pulse cleaning device |
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| Publication Number | Publication Date |
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| CN214586377U true CN214586377U (en) | 2021-11-02 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202120871595.3U Active CN214586377U (en) | 2021-04-26 | 2021-04-26 | Water-gas pulse cleaning device |
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| CN (1) | CN214586377U (en) |
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2021
- 2021-04-26 CN CN202120871595.3U patent/CN214586377U/en active Active
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