CN214571512U

CN214571512U - Multilayer quartz lamp

Info

Publication number: CN214571512U
Application number: CN202022943493.6U
Authority: CN
Inventors: 陈春明; 李文彦; 高朝亮; 刘铁生; 李学彪; 李新; 胡海雨
Original assignee: Tianjin Futong Xinmao Science & Technology Co ltd; Quick Gem Optoelectronic S & T Co ltd
Current assignee: Tianjin Futong Xinmao Science & Technology Co ltd; Quick Gem Optoelectronic S & T Co ltd
Priority date: 2020-12-07
Filing date: 2020-12-07
Publication date: 2021-11-02
Anticipated expiration: 2030-12-07

Abstract

The utility model relates to the technical field of optical fiber production, in particular to a multilayer quartz lamp, which comprises a feeding bin, an argon bin, an oxygen bin, a hydrogen bin and a nitrogen bin, wherein the feeding bin, the argon bin, the oxygen bin, the hydrogen bin and the nitrogen bin are arranged in a laminated manner from top to bottom, the lower end of the feeding bin is provided with a first exhaust pipe, the lower end of the argon bin is provided with a second exhaust pipe, the lower end of the oxygen bin is provided with a third exhaust pipe, the lower end of the hydrogen bin is provided with a fourth exhaust pipe, the lower end of the nitrogen bin is provided with a fifth exhaust pipe, the first exhaust pipe and the second exhaust pipe are parallel to each other, the end of the third exhaust pipe inclines along the direction close to the second exhaust pipe, the ends of the fourth exhaust pipe and the fifth exhaust pipe are both conical, the sprayed gas is uniformly mixed and has flame focus, thereby reducing the heat dissipation and improving the reaction efficiency of silicon tetrachloride, the production cost is reduced, and the resources are saved.

Description

Multilayer quartz lamp

Technical Field

The utility model relates to a semiconductor production and optic fibre production technical field especially relate to a quartz lamps and lanterns of multilayer.

Background

Synthetic quartz glass is one of the most excellent properties and qualities of the quartz glass types at present, and particularly, is an optical material excellent in ultraviolet light transmittance spectrum properties, and its purity is superior to that of quartz glass. In recent years, the production process and production technique of quartz glass have been greatly developed due to the superiority of its inherent properties, and have been widely used in the fields of photomasks in the semiconductor industry, laser lenses in the nuclear industry, aviation, and the like.

The production principle of the synthetic quartz glass is that silicon tetrachloride vapor is introduced into oxyhydrogen flame which is burnt at high temperature, hydrolysis is carried out to generate amorphous silica colloid, and the amorphous silica colloid is deposited on a rotating target material at high temperature to generate the synthetic quartz glass.

At present, when the synthetic quartz glass is manufactured, most lamps are split quartz lamps made of metal or quartz glass, the purity of the synthetic quartz glass can be influenced by the metal purity of the metal lamps, and the installation accuracy can be influenced by repeated disassembly of the split quartz lamps. Moreover, most of the existing lamps adopt straight-port injection, flame cannot form a focus, so that a great deal of flame heat is lost, a relatively high-temperature reaction zone is not arranged at an outlet, and silicon tetrachloride cannot completely react, so that the deposition rate and the material yield are influenced, resources are wasted, and the production cost is increased.

Therefore, a multi-layer quartz lamp is needed to solve the above problems.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a quartzy lamps and lanterns of multilayer guarantees that the flame that erupts has the focus, improves the degree of mixing of gas material and the concentration of flame, makes the deposit that silica can be better to the target on.

In order to realize the purpose, the following technical scheme is provided:

a multilayer quartz lamp comprises a feeding bin, an argon bin, an oxygen bin, a hydrogen bin and a nitrogen bin, wherein the feeding bin, the argon bin, the oxygen bin, the hydrogen bin and the nitrogen bin are arranged in a laminated manner from top to bottom, a first exhaust pipe is arranged at the lower end of the feeding bin, a second exhaust pipe is arranged at the lower end of the argon bin, a third exhaust pipe is arranged at the lower end of the oxygen bin, a fourth exhaust pipe is arranged at the lower end of the hydrogen bin, a fifth exhaust pipe is arranged at the lower end of the nitrogen bin, the first exhaust pipe is sleeved in the second exhaust pipe, the second exhaust pipe is sleeved in the fourth exhaust pipe, the fourth exhaust pipe is sleeved in the fifth exhaust pipe, the third exhaust pipe is arranged between the second exhaust pipe and the fourth exhaust pipe, and the first exhaust pipe and the second exhaust pipe are parallel to each other, the tail end of the third exhaust pipe inclines along the direction close to the second exhaust pipe, and the tail ends of the fourth exhaust pipe and the fifth exhaust pipe are both conical.

As an alternative to a multi-layer quartz lamp, the length of the first exhaust tube is less than the length of the second exhaust tube.

As an alternative to a multilayer quartz lamp, the length of the second exhaust tube is smaller than the length of the third exhaust tube.

As an alternative to a multilayer quartz lamp, the length of the third exhaust tube is smaller than the length of the fourth exhaust tube.

As an alternative to a multilayer quartz lamp, the length of the fourth exhaust tube is less than the length of the fifth exhaust tube.

As an alternative to a multi-layer quartz lamp, each exhaust tube is removably connected to a corresponding chamber.

As an alternative of a multilayer quartz lamp, a first air inlet pipe is arranged at the upper end of the feeding bin, a second air inlet pipe is arranged on the upper end side wall of the argon bin, a third air inlet pipe is arranged on the upper end side wall of the oxygen bin, a fourth air inlet pipe is arranged on the upper end side wall of the hydrogen bin, and a fifth air inlet pipe is arranged on the upper end side wall of the nitrogen bin.

As an alternative to the multilayer quartz lamp, the second, third and fourth gas inlet tubes are located on the same side.

As an alternative of the multilayer quartz lamp, two fifth air inlet pipes are symmetrically arranged on the side wall of the upper end of the nitrogen chamber.

As an alternative of the multilayer quartz lamp, the lower end of the oxygen chamber is provided with a plurality of third exhaust pipes at intervals along the circumferential direction, and/or

And the oxygen chamber is provided with a plurality of third exhaust pipes at intervals along the radial direction.

Compared with the prior art, the beneficial effects of the utility model are that: the first exhaust pipe and the second exhaust pipe are parallel to each other, the tail end of the third exhaust pipe inclines along the direction close to the second exhaust pipe, the tail ends of the fourth exhaust pipe and the fifth exhaust pipe are conical, so that the gas sprayed by the multilayer quartz lamp is uniformly mixed, a flame focus exists, heat dissipation is reduced, the reaction efficiency of silicon tetrachloride is improved, silicon dioxide can be better deposited on a target, the production cost is reduced, and resources are saved.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required to be used in the description of the embodiments of the present invention will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the contents of the embodiments of the present invention and the drawings without creative efforts.

Fig. 1 is a schematic cross-sectional view of a multilayer quartz lamp according to an embodiment of the present invention in a first direction;

fig. 2 is a schematic cross-sectional view of a multilayer quartz lamp according to an embodiment of the present invention;

fig. 3 is a partial enlarged view of a in fig. 2 according to the embodiment of the present invention;

fig. 4 is a top view of a multilayer quartz lamp provided in the embodiment of the present invention.

Reference numerals:

100. a multilayer quartz lamp;

1. a feed bin; 11. a first exhaust pipe; 12. a first intake pipe;

2. an argon gas bin; 21. a second exhaust pipe; 22. a second intake pipe;

3. an oxygen chamber; 31. a third exhaust pipe; 32. a third intake pipe;

4. a hydrogen gas bin; 41. a fourth exhaust pipe; 42. a fourth intake pipe;

5. a nitrogen gas bin; 51. a fifth exhaust pipe; 52. and a fifth intake pipe.

Detailed Description

In order to make those skilled in the art better understand the technical solution of the present invention, the technical solution of the present invention is further described below by referring to the drawings and the detailed description.

In the description of the present invention, it should be noted that the terms "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate the directions or positional relationships based on the directions or positional relationships shown in the drawings, or the directions or positional relationships that are usually placed when the product is used, and are only for convenience of description of the present invention, and do not indicate or imply that the device or element indicated must have a specific direction, be constructed and operated in a specific direction, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first", "second", and the like are used for descriptive purposes only or to distinguish between different structures or components and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection or a removable connection; can be mechanically or electrically connected; either directly or indirectly through an intermediary, or the exhaust may be internal to both elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

Details of the present embodiment are described below with reference to fig. 1 to 4. Wherein the direction of the arrows in fig. 1-3 represent the general exhaust direction. As shown in fig. 1-3, the present embodiment provides a multilayer quartz lamp, where the multilayer quartz lamp 100 includes a feeding chamber 1, an argon chamber 2, an oxygen chamber 3, a hydrogen chamber 4, and a nitrogen chamber 5, the feeding chamber 1, the argon chamber 2, the oxygen chamber 3, the hydrogen chamber 4, and the nitrogen chamber 5 are stacked from top to bottom, a first exhaust pipe 11 is disposed at a lower end of the feeding chamber 1, a second exhaust pipe 21 is disposed at a lower end of the argon chamber 2, a third exhaust pipe 31 is disposed at a lower end of the oxygen chamber 3, a fourth exhaust pipe 41 is disposed at a lower end of the hydrogen chamber 4, and a fifth exhaust pipe 51 is disposed at a lower end of the nitrogen chamber 5; specifically, as shown in fig. 1-2, the first exhaust pipe 11 is sleeved in the second exhaust pipe 21, the second exhaust pipe 21 is sleeved in the fourth exhaust pipe 41, the fourth exhaust pipe 41 is sleeved in the fifth exhaust pipe 51, and the third exhaust pipe 31 is arranged between the second exhaust pipe 21 and the fourth exhaust pipe 41, so that the internal gas is mixed more uniformly, the number of the third exhaust pipes 31 is increased, the amount of the exhausted oxygen is increased, the chemical reaction of silicon tetrachloride is more sufficient, and the deposition rate is increased; the upper portions of first exhaust pipe 11, second exhaust pipe 21, third exhaust pipe 31, fourth exhaust pipe 41, and fifth exhaust pipe 51 all extend in the exhaust direction, but first exhaust pipe 11 and second exhaust pipe 21 are both straight pipes, and first exhaust pipe 11 is parallel to second exhaust pipe 21, the end of third exhaust pipe 31 is inclined in a direction close to second exhaust pipe 21, and the ends of fourth exhaust pipe 41 and fifth exhaust pipe 51 are both tapered, that is, the hole diameters are gradually reduced in the exhaust direction. Silicon tetrachloride is introduced into the feed chamber 1 in this example. In other embodiments, other silicon-containing compounds may be introduced, and the material of the feed chamber 1 is not limited in this embodiment.

The multilayer quartz lamp 100 provided by the embodiment is parallel to each other between the first exhaust pipe 11 and the second exhaust pipe 21, the end of the third exhaust pipe 31 is inclined along the direction close to the second exhaust pipe 21, the ends of the fourth exhaust pipe 41 and the fifth exhaust pipe 51 are both tapered, so that the gas sprayed out of the multilayer quartz lamp 100 is uniformly mixed and has a flame focus, heat dissipation is reduced, the reaction efficiency of silicon tetrachloride is improved, silicon dioxide can be better deposited on a target, the production cost is reduced, and resources are saved.

Further, as shown in fig. 3, the length of first exhaust pipe 11 is smaller than the length of second exhaust pipe 21, the length of second exhaust pipe 21 is smaller than the length of third exhaust pipe 31, the length of third exhaust pipe 31 is smaller than the length of fourth exhaust pipe 41, and the length of fourth exhaust pipe 41 is smaller than the length of fifth exhaust pipe 51.

Further, first blast pipe 11 and feeding bin 1, second blast pipe 21 and argon gas bin 2, third blast pipe 31 and oxygen bin 3, fourth blast pipe 41 and hydrogen bin 4, fifth blast pipe 51 and nitrogen gas bin 5, promptly, each blast pipe can adopt the mode of dismantling the connection rather than the bin that corresponds to be connected, when exhaust passage appears blockking up, conveniently changes, avoids leading to the abandonment of whole set of lamps and lanterns.

Further, as shown in fig. 1-2, specifically, a first air inlet pipe 12 is disposed at the upper end of the feeding chamber 1, a second air inlet pipe 22 is disposed on the upper end side wall of the argon chamber 2, a third air inlet pipe 32 is disposed on the upper end side wall of the oxygen chamber 3, a fourth air inlet pipe 42 is disposed on the upper end side wall of the hydrogen chamber 4, and a fifth air inlet pipe 52 is disposed on the upper end side wall of the nitrogen chamber 5, so that air inlet is smoother. Further preferably, the air inlet ends of the second air inlet pipe 22, the third air inlet pipe 32, the fourth air inlet pipe 42 and the fifth air inlet pipe 52 are all bent upwards, so that the air inlet pipes do not interfere with each other, and the installation is convenient; in other embodiments, various air inlet pipes are connected with corresponding chambers in a detachable connection mode, and when an air inlet channel is blocked, the air inlet channel is convenient to replace, so that the abandonment of the whole set of lamps is avoided.

Further, as shown in FIG. 1, the second air inlet tube 22, the third air inlet tube 32 and the fourth air inlet tube 42 are located at the same side, which facilitates the manufacturing and reduces the occupied space of the multi-layered quartz lamp 100.

Further, as shown in fig. 2, the upper end side wall of the nitrogen bin 5 is symmetrically provided with two fifth air inlet pipes 52, so that the input amount of nitrogen is increased, the safety of silicon tetrachloride reaction is further improved, meanwhile, the silicon tetrachloride reaction is conveniently distinguished from other air inlet pipes, and the installation speed of the air storage pipes and the air inlet pipes is improved.

Further, as shown in fig. 4, a plurality of third exhaust pipes 31 are circumferentially arranged at intervals at the lower end of the oxygen chamber 3, and/or a plurality of third exhaust pipes 31 are radially arranged at intervals at the lower end of the oxygen chamber 3, so that the discharge amount of oxygen is further increased, the flow direction of oxygen is further changed, the gas reaction is more sufficient, silica can be better deposited on the target, the production cost is reduced, and resources are saved.

It should be noted that the foregoing is only a preferred embodiment of the present invention and the technical principles applied. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious modifications, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail with reference to the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the scope of the present invention.

Claims

1. The utility model provides a quartz lamp of multilayer, includes feeding bin (1), argon gas bin (2), oxygen bin (3), hydrogen bin (4) and nitrogen gas bin (5), its characterized in that, feeding bin (1), argon gas bin (2), oxygen bin (3), hydrogen bin (4) and nitrogen gas bin (5) are range upon range of form setting from top to bottom, the lower extreme of feeding bin (1) is equipped with first blast pipe (11), the lower extreme of argon gas bin (2) is equipped with second blast pipe (21), the lower extreme of oxygen bin (3) is equipped with third blast pipe (31), the lower extreme of hydrogen bin (4) is equipped with fourth blast pipe (41), the lower extreme of nitrogen gas bin (5) is equipped with fifth blast pipe (51), first blast pipe (11) cover is located in second blast pipe (21), second blast pipe (21) cover is located in fourth blast pipe (41), fourth blast pipe (41) cover is located in fifth blast pipe (51), third blast pipe (31) arrange in second blast pipe (21) with between fourth blast pipe (41), first blast pipe (11) with second blast pipe (21) are parallel to each other, the end of third blast pipe (31) is along being close to the direction slope of second blast pipe (21), fourth blast pipe (41) with the end of fifth blast pipe (51) all is the toper.

2. A multi-layered quartz lamp according to claim 1, characterized in that the length of the first exhaust tube (11) is smaller than the length of the second exhaust tube (21).

3. A multi-layered quartz lamp according to claim 2, characterized in that the length of the second exhaust tube (21) is smaller than the length of the third exhaust tube (31).

4. A multi-layered quartz lamp according to claim 3, characterized in that the length of the third exhaust tube (31) is smaller than the length of the fourth exhaust tube (41).

5. A multi-layered quartz lamp according to claim 4, characterized in that the length of the fourth exhaust tube (41) is smaller than the length of the fifth exhaust tube (51).

6. The multi-layered quartz lamp of claim 5, wherein each exhaust tube is removably connected to the corresponding chamber.

7. The multilayer quartz lamp according to claim 1, characterized in that a first gas inlet pipe (12) is arranged at the upper end of the feeding chamber (1), a second gas inlet pipe (22) is arranged on the upper end side wall of the argon chamber (2), a third gas inlet pipe (32) is arranged on the upper end side wall of the oxygen chamber (3), a fourth gas inlet pipe (42) is arranged on the upper end side wall of the hydrogen chamber (4), and a fifth gas inlet pipe (52) is arranged on the upper end side wall of the nitrogen chamber (5).

8. A multi-layered quartz lamp according to claim 7, characterized in that the second gas inlet tube (22), the third gas inlet tube (32) and the fourth gas inlet tube (42) are located on the same side.

9. A multi-layered quartz lamp according to claim 8, characterized in that the upper end side wall of the nitrogen gas bin (5) is symmetrically provided with two fifth gas inlet pipes (52).

10. A multi-layered quartz lamp according to any one of claims 1 to 9, characterized in that the lower end of the oxygen chamber (3) is provided with a plurality of said third exhaust pipes (31) at circumferential intervals, and/or

The oxygen chamber (3) is provided with a plurality of third exhaust pipes (31) at intervals along the radial direction.