CN214538354U - Combined tool for transmitting standard pressure to pressure sensitive element - Google Patents

Combined tool for transmitting standard pressure to pressure sensitive element Download PDF

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Publication number
CN214538354U
CN214538354U CN202121177422.8U CN202121177422U CN214538354U CN 214538354 U CN214538354 U CN 214538354U CN 202121177422 U CN202121177422 U CN 202121177422U CN 214538354 U CN214538354 U CN 214538354U
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CN
China
Prior art keywords
pressure
sensitive element
sputtering film
pressure sensitive
sensing element
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN202121177422.8U
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Chinese (zh)
Inventor
孙启萌
邵放
刘丽娜
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Shandong Weihang Minxin Electronic Technology Co ltd
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Shandong Weihang Minxin Electronic Technology Co ltd
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Priority to CN202121177422.8U priority Critical patent/CN214538354U/en
Application granted granted Critical
Publication of CN214538354U publication Critical patent/CN214538354U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model is suitable for a pressure measurement technical field provides a combination frock for giving pressure sensing element transmission standard pressure, including the intercommunication base, still include pressure crossover sub, be provided with the internal connection hole in the intercommunication base, the inside wall threaded connection of pressure crossover sub and internal connection hole one end, the inside wall threaded connection of the internal connection hole other end has the seal to press the shell, be provided with in the seal to press the shell and support the biography pressure subassembly of pressure transmission to sputtering film pressure sensing element. Penetrate the inner chamber of pressure-bearing shell with sputtering film pressure sensing element together with biography pressure subassembly, inside standard pressure transmitted sputtering film pressure sensing element through the hole of pressure adapter, intercommunication base, biography pressure subassembly and pressure-bearing shell, under the guarantee of intercommunication base and pressure adapter and pressure-bearing shell threaded connection and biography pressure subassembly, can ensure pressure transmission's stability and accuracy.

Description

Combined tool for transmitting standard pressure to pressure sensitive element
Technical Field
The utility model belongs to the technical field of pressure measurement device, especially, relate to a combination frock for giving pressure sensitive element transmission standard pressure.
Background
The pressure sensor made of the sputtering film pressure sensitive element is a typical gauge pressure type pressure sensor. The sputtering film pressure sensitive element adopts a metal pressure bearing structure, the pressure measuring range of the sensitive element is large and usually between 2MPa and 200MPa, and the measuring range of the sputtering film pressure sensitive element is determined once the sputtering film pressure sensitive element is manufactured.
The general method for measuring the range index is to adopt an empirical formula to predict the pressure range of the manufactured sputtering film pressure sensitive element, the accuracy is low, and the measuring method with high accuracy is to weld the sputtering film pressure sensitive element on a test structure and obtain the accurate range index of the element through a pressing test. The two measurement methods can not detect the accurate value of the measuring range index of the sputtering film pressure sensitive element under the condition of ensuring that the sputtering film pressure sensitive element is not damaged, and have great influence on the subsequent application of the sputtering film pressure sensitive element. To avoid the above technical problems, it is necessary to provide a combined tool for transmitting standard pressure to a pressure sensitive element to overcome the above-mentioned drawbacks in the prior art.
SUMMERY OF THE UTILITY MODEL
An object of the embodiment of the utility model is to provide a combination frock for giving pressure sensing element transmission standard pressure aims at realizing under the condition that does not "destroy" sputter film pressure sensing element self structure, applys standard pressure value to this pressure sensing element.
The embodiment of the utility model provides a realize like this, a combination frock for giving pressure sensing element transmission standard pressure, including the intercommunication base, still include pressure crossover sub, be provided with the internal connection hole in the intercommunication base, the inside wall threaded connection of pressure crossover sub and internal connection hole one end, the inside wall threaded connection of the internal connection hole other end has the pressure sealing shell, be provided with in the pressure sealing shell and support the biography pressure subassembly that transmits with pressure to sputtering film pressure sensing element.
According to a further technical scheme, the pressure transmission assembly comprises a supporting pipe, the supporting pipe is arranged in a pressure sealing shell, one end of the supporting pipe is fixedly connected with a bearing platform on the inner side of an internal connecting hole, the inner cavity of the pressure sealing shell is a convex cavity, the sputtering film pressure sensitive element is connected in the inner cavity of the pressure sealing shell in a sliding mode, and elastic members used for transmitting impact force are arranged between the sputtering film pressure sensitive element and the supporting pipe and between the sputtering film pressure sensitive element and the inner side wall of the pressure sealing shell.
In a further technical scheme, the elastic component is a pressure sealing ring.
According to the further technical scheme, the inner connecting holes are right-angled, and two ports of each inner connecting hole are respectively formed in different end faces of the communicated base.
According to a further technical scheme, the communication base is rectangular.
Compared with the prior art, the beneficial effects of the utility model are as follows:
the embodiment of the utility model provides a pair of combination frock for giving pressure sensing element transmission standard pressure, moreover, the steam generator is simple in structure, easy to operate, under the guarantee of intercommunication base and pressure adapter and pressure-bearing shell threaded connection and biography pressure subassembly, can ensure pressure transmission's stability and accuracy, rethread measurement is at the sputtering film pressure sensing element's of standard pressure output value, just can obtain accurate this sputtering film pressure sensing element's range index and the full output value that corresponds through the proportion conversion, through this combination frock, can ensure under the condition of not destroying sputtering film pressure sensing element, accomplish the accurate survey to sputtering film pressure sensing element range index and corresponding full range output value, improve the measuring degree of accuracy of sputtering film pressure sensing element range index.
Drawings
Fig. 1 is a schematic structural diagram of a combined tool for transmitting standard pressure to a pressure sensitive element according to the present invention;
FIG. 2 is a schematic diagram of the structure of the sputtered film pressure sensitive element of FIG. 1;
FIG. 3 is a schematic view of the sealing housing of FIG. 1;
FIG. 4 is a schematic structural view of the support tube of FIG. 1;
FIG. 5 is a schematic structural view of the communication base of FIG. 1;
fig. 6 is a schematic structural diagram of the pressure adapter in fig. 1.
In the drawings: the device comprises a sputtering film pressure sensitive element 1, a sealing ring 2, a sealing shell 3, a supporting tube 4, a communicating base 5 and a pressure adapter 6.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
The following detailed description is provided for the specific embodiments of the present invention.
As shown in fig. 1 ~ 3, 5 ~ 6, do the utility model provides a pair of a combination frock for giving pressure sensing element transmission standard pressure, including intercommunication base 5, still include pressure crossover sub 6, be provided with the internal connection hole in the intercommunication base 5, the inside wall threaded connection of pressure crossover sub 6 and internal connection hole one end, the inside wall threaded connection of the internal connection hole other end has the pressure sealing shell 3, be provided with in the pressure sealing shell 3 and support the biography pressure subassembly that transmits with pressure to sputtering film pressure sensing element 1.
This a combination frock for giving pressure sensing element transmission standard pressure, standard pressure passes through pressure adapter 6, inside the intercommunication base 5, the hole of passing pressure subassembly and pressure-bearing shell 3 transmits sputtering film pressure sensing element 1, under the guarantee of intercommunication base 5 and pressure adapter 6 and pressure-bearing shell 3 threaded connection and pressure-transmitting subassembly, can ensure the stability and the accuracy of pressure transmission, and then through measuring the output value of sputtering film pressure sensing element 1 under standard pressure, just can obtain accurate this sputtering film pressure sensing element 1's range index and its full output value that corresponds through the proportion conversion.
In the embodiment of the present invention, as shown in fig. 1 and fig. 3 to 4, as a preferred embodiment of the present invention, the pressure transmission assembly includes a supporting tube 4, the supporting tube 4 is disposed in the pressure sealing housing 3, one end of the supporting tube 4 is fixedly connected to a bearing platform inside the internal connecting hole, the inner cavity of the pressure sealing housing 3 is a convex cavity, the sputtering film pressure sensitive element 1 is slidably connected in the inner cavity of the pressure sealing housing 3, and elastic members for transmitting impact force are disposed between the sputtering film pressure sensitive element 1 and the supporting tube 4 and between the sputtering film pressure sensitive element 1 and the inner side wall of the pressure sealing housing 3; the stability and accuracy of the pressure transmission can be ensured by the elastic member and the support tube 4.
In the embodiment of the present invention, as shown in fig. 1, as a preferred embodiment of the present invention, the elastic member is a pressing ring 2; the pressure sensitive element 1 of the sputtering film can be prevented from being damaged in the pressure transmission process through the pressure sealing ring 2, and meanwhile, the stability and the accuracy of pressure transmission are ensured.
In the embodiment of the present invention, as shown in fig. 1, as a preferred embodiment of the present invention, the internal connection hole is right-angled, and two ports of the internal connection hole are respectively disposed on different end surfaces of the communication base 5; when the communicating base 5 is placed on the placing table, two ports of the internal connecting hole are respectively formed in different end faces of the communicating base 5, so that the sputtering film pressure sensitive element 1 can be conveniently installed on the combined tool, and meanwhile, standard pressure can be conveniently input through the pressure adapter.
In the embodiment of the present invention, as shown in fig. 5, as a preferred embodiment of the present invention, the communication base 5 is a rectangle, which is convenient for stable placement of the combined tool.
The combined tool for transmitting the standard pressure to the pressure sensitive element penetrates the sputtering film pressure sensitive element 1 and a pressure transmitting assembly into an inner cavity of a pressure-bearing shell 3, the standard pressure is transmitted into the sputtering film pressure sensitive element 1 through a pressure adapter 6, a communicating base 5, a supporting tube 4, a sealing ring 2 and an inner hole of the pressure-bearing shell 3, the stability and the accuracy of pressure transmission can be ensured under the guarantee of the threaded connection and the pressure transmitting assembly of the communicating base 5, the pressure adapter 6 and the pressure-bearing shell 3, the accurate range index of the sputtering film pressure sensitive element 1 and the corresponding full output value can be obtained through proportional conversion by measuring the output value of the sputtering film pressure sensitive element 1 under the standard pressure, and the combined tool can ensure that the sputtering film pressure sensitive element 1 is not damaged, the accurate measurement of the range index of the pressure sensitive element and the corresponding full-range output value is completed, and the accuracy of the measurement of the range index of the sputtering film pressure sensitive element 1 is improved.
The above description is only exemplary of the present invention and should not be taken as limiting the scope of the present invention, as any modifications, equivalents, improvements and the like made within the spirit and principles of the present invention are intended to be included within the scope of the present invention.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims (5)

1. The utility model provides a combination frock for giving pressure sensing element transmission standard pressure, includes the intercommunication base, its characterized in that still includes pressure crossover sub, be provided with the internal connection hole in the intercommunication base, the inside wall threaded connection of pressure crossover sub and internal connection hole one end, the inside wall threaded connection of the internal connection hole other end has the pressure sealing shell, be provided with in the pressure sealing shell and support the biography pressure subassembly that transmits with pressure to sputtering film pressure sensing element.
2. The combined tool for transmitting standard pressure to the pressure sensitive element according to claim 1, wherein the pressure transmitting assembly comprises a supporting tube, the supporting tube is arranged in the pressure sealing shell, one end of the supporting tube is fixedly connected with a bearing platform on the inner side of the inner connecting hole, the inner cavity of the pressure sealing shell is a convex cavity, the sputtering film pressure sensitive element is slidably connected in the inner cavity of the pressure sealing shell, and elastic members for transmitting impact force are arranged between the sputtering film pressure sensitive element and the supporting tube and between the sputtering film pressure sensitive element and the inner side wall of the pressure sealing shell.
3. The combination tool for transmitting standard pressure to a pressure sensitive element according to claim 2, wherein the elastic member is a pressure sealing ring.
4. The combined tool for transmitting standard pressure to a pressure sensitive element according to claim 1, wherein the internal connecting hole is right-angled, and two ports of the internal connecting hole are respectively arranged on different end faces of the communicating base.
5. The combination tool for transmitting standard pressure to a pressure sensitive element according to claim 1, wherein the communication base is rectangular.
CN202121177422.8U 2021-05-28 2021-05-28 Combined tool for transmitting standard pressure to pressure sensitive element Expired - Fee Related CN214538354U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202121177422.8U CN214538354U (en) 2021-05-28 2021-05-28 Combined tool for transmitting standard pressure to pressure sensitive element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202121177422.8U CN214538354U (en) 2021-05-28 2021-05-28 Combined tool for transmitting standard pressure to pressure sensitive element

Publications (1)

Publication Number Publication Date
CN214538354U true CN214538354U (en) 2021-10-29

Family

ID=78284844

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202121177422.8U Expired - Fee Related CN214538354U (en) 2021-05-28 2021-05-28 Combined tool for transmitting standard pressure to pressure sensitive element

Country Status (1)

Country Link
CN (1) CN214538354U (en)

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Granted publication date: 20211029