CN214456848U - Device for preparing chlorine trifluoride - Google Patents
Device for preparing chlorine trifluoride Download PDFInfo
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- CN214456848U CN214456848U CN202023255750.3U CN202023255750U CN214456848U CN 214456848 U CN214456848 U CN 214456848U CN 202023255750 U CN202023255750 U CN 202023255750U CN 214456848 U CN214456848 U CN 214456848U
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Abstract
The utility model belongs to the technical field of inorganic fluorine chemical industry, concretely relates to preparation chlorine trifluoride's device, include: the system comprises a reactor, a condenser, a collector, a rectifying tower, a tower top condenser and a product container; the reactor is connected with a condenser, the condenser is connected with a collector, the collector is connected with a rectifying tower, the rectifying tower is connected with a tower top condenser, and the tower top condenser is respectively connected with the rectifying tower and a product container. The utility model discloses the device equipment structure is simple, production process safety and stability, easily operation control have realized serialization production.
Description
Technical Field
The utility model belongs to the technical field of inorganic fluorine chemical industry, concretely relates to preparation chlorine trifluoride's device.
Background
Chlorine trifluoride is colorless corrosive gas or light yellow liquid with density of 1.825g/cm3Melting point-76.34, boiling point 11.75 ℃. Easily dissolved in anhydrous hydrogen fluoride, carbon tetrachloride and the like. Chlorine trifluoride is a strong oxidant, has high chemical reaction activity and flammable characteristic, can perform explosive reaction with water and organic compounds, and belongs to dangerous chemicals.
In recent years, with the rapid development of semiconductor, liquid crystal, solar and LED industries, chlorine trifluoride has been widely used in the CVD (chemical vapor deposition) cleaning process, and the demand is on the rise, and chlorine trifluoride has become one of the key special gases in the IC industry. High-purity chlorine trifluoride is used as an electron gas, has a chemical activity which is inclined toward fluorine gas, but is milder than fluorine gas, is more environmentally friendly than fluorocarbon electron gas, has a GWP (global warming potential) of zero, and is considered as an LPCVD (low pressure chemical vapor deposition) cleaning gas. In the semiconductor industry, LPCVD processes are used to form polysilicon films and SiN films, and high purity chlorine trifluoride is mainly used as a CVD cleaning gas, which has significant advantages in cleaning quality, efficiency, and reduction of greenhouse effect.
The chlorine trifluoride has active chemical property, strong oxidability and high chemical reaction activity, and has strict requirements on process equipment and equipment materials for production, so that the large-scale production and application of the chlorine trifluoride are limited.
Therefore, it is required to develop an apparatus for preparing chlorine trifluoride, which is capable of mass production of chlorine trifluoride and ensures the safety and stability of production.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a device for preparing chlorine trifluoride to a great deal of defect that the device for preparing chlorine trifluoride exists among the prior art, the device equipment simple structure, production process safety and stability, easily operation control have realized serialization production.
Realize the utility model discloses the technical scheme of purpose: an apparatus for producing chlorine trifluoride, said apparatus comprising: the system comprises a reactor, a condenser, a collector, a rectifying tower, a tower top condenser and a product container; the reactor is connected with a condenser, the condenser is connected with a collector, the collector is connected with a rectifying tower, the rectifying tower is connected with a tower top condenser, and the tower top condenser is respectively connected with the rectifying tower and a product container.
Further, the apparatus further comprises: vacuum pump and tail gas clean-up system, the vacuum pump sets up in tail gas clean-up system's entrance point, and condenser, collector, rectifying column and top of the tower condenser pass through the vacuum pump with tail gas clean-up system respectively and link to each other.
Further, the lower part of the reactor is provided with an air inlet pipeline, and the top end of the reactor is provided with a gas phase outlet; the top end of the condenser is respectively provided with a mixed gas inlet and a gas phase outlet, and the bottom end of the condenser is provided with a liquid phase outlet; the top end of the collector is provided with a liquid phase inlet and a gas phase outlet respectively, and the bottom end of the collector is provided with a liquid phase outlet; a tower kettle of the rectifying tower is provided with a feed inlet, and the top of the rectifying tower is provided with a gas phase outlet and a reflux port respectively; the top of the tower top condenser is provided with a gas phase inlet and a gas phase outlet respectively, and the bottom of the tower top condenser is provided with a liquid phase outlet; the top end of the product container is provided with a gas phase inlet; the gas phase outlet of the reactor is connected with the mixed gas inlet of the condenser; a gas phase outlet of the condenser is connected with a tail gas purification system through a vacuum pump, and a liquid phase outlet of the condenser is connected with a liquid phase inlet of the collector; the gas phase outlet of the collector is connected with a tail gas purification system through a vacuum pump, and the liquid phase outlet of the collector is connected with the feed inlet of the rectifying tower; the gas phase outlet of the rectifying tower is respectively connected with the gas phase inlet of the tower top condenser and the tail gas purification system; the liquid phase outlet of the tower top condenser is respectively connected with the reflux port of the rectifying tower and the gas phase inlet of the product container, and the gas phase outlet of the tower top condenser is connected with the tail gas purification system through a vacuum pump.
Further, the gas inlet conduit comprises a fluorine gas conduit and a chlorine gas conduit.
Further, the reactor comprises a gas mixing area and a reaction area, wherein the gas mixing area is arranged at the lower part of the reactor, the reaction area is arranged at the upper part of the reactor, and the gas mixing area is communicated with the reaction area; the height of the gas mixing zone is 200-600 mm, the reaction zone is composed of 10-40 groups of baffles, and the distance between the baffles is 25-60 mm; the material of the reactor is stainless steel, copper, nickel, Monel or Inconel.
Furthermore, the condenser is formed by connecting six stages of condenser pipes in series, the condenser pipes are double-layer sleeves, and the outer pipes are wound by coiled pipes; introducing mixed gas into the gap between the inner sleeve and the outer sleeve, and introducing a freezing medium into the serpentine pipe; the material of the condenser pipe is carbon steel, stainless steel, copper or Monel, and the material of the coiled pipe is red copper.
Furthermore, the collector is a jacket type container, and a freezing medium is introduced into a jacket; the collector is made of stainless steel, copper or Monel.
Furthermore, the rectifying tower is a packed tower, the number of theoretical plates is 40-60, the packing is theta ring packing, and the rectifying tower and the packing are made of stainless steel, copper, nickel, Monel or Inconel.
Further, the tower top condenser is a shell-and-tube condenser and comprises a shell pass and a tube pass, wherein a coolant is introduced into the shell pass, and chlorine trifluoride gas is introduced into the tube pass; the material of the overhead condenser is stainless steel, copper or Monel.
Further, the product container is made of stainless steel or Monel.
Compared with the prior art, the beneficial effects of the utility model are that:
1. the reactor, the condenser, the collector, the rectifying tower and the tower top condenser in the device for preparing chlorine trifluoride have simple and reasonable structures, simple process flow and safe and stable production process, and realize continuous production;
2. the utility model discloses a device for preparing chlorine trifluoride is through setting up the reactor to be become by the gas mixing district and the reaction zone constitution that link up from top to bottom for fluorine gas and chlorine just get into the reaction zone and react after the gas mixing district intensive mixing, guarantee that fluorine gas and chlorine contact are abundant, prolonged the contact time inside the reactor, effectively strengthen the reactivity, realized that no catalyst ordinary pressure one-step preparation chlorine trifluoride has the characteristics that reaction temperature and pressure are suitable, reduced the degree of difficulty that synthetic reaction prepared chlorine trifluoride, greatly simplified chlorine trifluoride preparation technology;
3. the device for preparing chlorine trifluoride of the utility model is suitable for directly preparing chlorine trifluoride by taking fluorine gas and chlorine gas as raw materials, is resistant to corrosion of fluorine gas, chlorine trifluoride and the like, and has long service life;
4. the utility model discloses a device of preparation chlorine trifluoride easily operates and overhauls the maintenance, is fit for scale industrial production.
Drawings
FIG. 1 is a schematic view of an apparatus for producing chlorine trifluoride according to the present invention;
in the figure: 1-a fluorine gas conduit; 2-a chlorine pipeline; 3-a reactor; 4-a condenser; 5-a collector; 6-a rectifying tower; 7-vacuum pump, 8-overhead condenser; 9-a product container; 10-tail gas purification system.
Detailed Description
The present invention will be described in further detail with reference to specific examples. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the invention.
Example 1
As shown in fig. 1, the present invention provides an apparatus for preparing chlorine trifluoride, comprising: the system comprises a reactor 3, a condenser 4, a collector 5, a rectifying tower 6, a vacuum pump 7, a tower top condenser 8, a product container 9 and a tail gas purification system 10; reactor 3 links to each other with condenser 4, and condenser 4 links to each other with collector 5, and collector 5 links to each other with rectifying column 6, and rectifying column 6 links to each other with overhead condenser 8, and overhead condenser 8 links to each other with rectifying column 6 and product container 9 respectively, and vacuum pump 7 sets up in the entrance point of tail gas clean-up system 10, and condenser 4, collector 5, rectifying column 6 and overhead condenser 8 pass through vacuum pump 7 with tail gas clean-up system 10 respectively and link to each other.
The lower part of the reactor 3 is provided with an air inlet pipeline which comprises a fluorine pipeline 1 and a chlorine pipeline 2; the top end of the reactor 3 is provided with a gas phase outlet; the top end of the condenser 4 is respectively provided with a mixed gas inlet and a gas phase outlet, and the bottom end of the condenser 4 is provided with a liquid phase outlet; the top end of the collector 5 is respectively provided with a liquid phase inlet and a gas phase outlet, and the bottom end of the collector 5 is provided with a liquid phase outlet; a tower kettle of the rectifying tower 6 is provided with a feed inlet, and the tower top of the rectifying tower 6 is respectively provided with a gas phase outlet and a reflux port; the top of the tower top condenser 8 is respectively provided with a gas phase inlet and a gas phase outlet, and the bottom of the tower top condenser 8 is provided with a liquid phase outlet; the top end of the product container 9 is provided with a gas phase inlet.
The gas phase outlet of the reactor 3 is connected with the mixed gas inlet of the condenser 4 through a connecting pipeline; a gas phase outlet of the condenser 4 is connected with a tail gas purification system 10 through a connecting pipeline by a vacuum pump 7, and a liquid phase outlet of the condenser 4 is connected with a liquid phase inlet of the collector 5 through a connecting pipeline; a gas phase outlet of the collector 5 is connected with a tail gas purification system 10 through a connecting pipeline by a vacuum pump 7, and a liquid phase outlet of the collector 5 is connected with a feed inlet of the rectifying tower 6 through a connecting pipeline; a gas-phase outlet of the rectifying tower 6 is respectively connected with a gas-phase inlet of the tower top condenser 8 and the tail gas purification system 10 through connecting pipelines; the liquid phase outlet of the tower top condenser 8 is respectively connected with the reflux port of the rectifying tower 6 and the gas phase inlet of the product container 9 through connecting pipelines, and the gas phase outlet of the tower top condenser 8 is connected with the tail gas purification system 10 through a connecting pipeline through a vacuum pump.
The reactor 3 is a vertical Monel reactor, cylindrical in shape and has the dimensions: (200X 2500) mm, consisting of a gas mixing zone and a reaction zone. The gas mixing area is arranged at the lower part of the reactor 3, the reaction area is arranged at the upper part of the reactor 3, and the gas mixing area and the reaction area are communicated with each other. Fluorine gas pipeline 1 and chlorine gas pipeline 2 are symmetrically arranged on two sides of the gas mixing zone. The height of the gas mixing area is 200mm, the upper part of the gas mixing area is a reaction area, 40 groups of baffles are arranged in the reaction area, and the distance between the baffles is 25 mm. The fluorine gas and the chlorine gas are fully mixed in the gas mixing zone, and then react in the reaction zone to generate chlorine trifluoride mixed gas, and the chlorine trifluoride mixed gas enters the condenser 4 through a gas phase outlet at the top of the reactor 3.
The condenser 4 is composed of six-stage condenser pipes, and the condenser pipes are double-layer sleeves with inner layers and outer layers and are made of stainless steel. The outer tube size is: (φ 89X 2200) mm, the inner and outer tube dimensions are: (φ 65X 2000) mm. Chlorine trifluoride gas mixture is introduced into the gap between the inner sleeve and the outer sleeve, and the outer sleeve is wound by 80 coils. The diameter of the coiled pipe is phi 12mm, the coiled pipe is made of red copper, and a freezing medium with the temperature of minus 30 ℃ is introduced into the coiled pipe.
The collector 5 is a jacket type cylindrical container made of stainless steel, the size is (the outer diameter of the jacket is phi 230 multiplied by 1500) mm, the size of the clearance of the jacket is 20mm, a freezing medium with the temperature of minus 85 ℃ is introduced into the jacket, and the material obtained by condensation is contained in the collector 5 for cold insulation and temporary storage.
The rectifying tower 6 is a packed tower, and the theoretical plate number is 60 stages. Size of rectifying section: (phi 57 multiplied by 21000) mm, the tower kettle and the tower body are made of stainless steel, the packing is theta ring packing (phi 4 multiplied by 4) mm, and the packing is made of stainless steel.
The tower top condenser 8 adopts a vertical tube type condenser which is made of stainless steel, the external dimension is (phi 360 multiplied by 550) mm, and the tubes are distributed in a triangle shape. The condenser comprises a shell side and a tube side, chlorine trifluoride gas is introduced into the tube side, and a freezing medium with the temperature of minus 30 ℃ is introduced into the shell side.
The product container 9 is a cylindrical container made of stainless steel. The outside dimension was (φ 300X 400) mm, and the volume was 20L.
Example 2
As shown in fig. 1, the present invention provides an apparatus for preparing chlorine trifluoride, comprising: the system comprises a reactor 3, a condenser 4, a collector 5, a rectifying tower 6, a vacuum pump 7, a tower top condenser 8, a product container 9 and a tail gas purification system 10; reactor 3 links to each other with condenser 4, and condenser 4 links to each other with collector 5, and collector 5 links to each other with rectifying column 6, and rectifying column 6 links to each other with overhead condenser 8, and overhead condenser 8 links to each other with rectifying column 6 and product container 9 respectively, and vacuum pump 7 sets up in the entrance point of tail gas clean-up system 10, and condenser 4, collector 5, rectifying column 6 and overhead condenser 8 pass through vacuum pump 7 with tail gas clean-up system 10 respectively and link to each other.
The lower part of the reactor 3 is provided with an air inlet pipeline which comprises a fluorine pipeline 1 and a chlorine pipeline 2; the top end of the reactor 3 is provided with a gas phase outlet; the top end of the condenser 4 is respectively provided with a mixed gas inlet and a gas phase outlet, and the bottom end of the condenser 4 is provided with a liquid phase outlet; the top end of the collector 5 is respectively provided with a liquid phase inlet and a gas phase outlet, and the bottom end of the collector 5 is provided with a liquid phase outlet; a tower kettle of the rectifying tower 6 is provided with a feed inlet, and the tower top of the rectifying tower 6 is respectively provided with a gas phase outlet and a reflux port; the top of the tower top condenser 8 is respectively provided with a gas phase inlet and a gas phase outlet, and the bottom of the tower top condenser 8 is provided with a liquid phase outlet; the top end of the product container 9 is provided with a gas phase inlet.
The gas phase outlet of the reactor 3 is connected with the mixed gas inlet of the condenser 4 through a connecting pipeline; a gas phase outlet of the condenser 4 is connected with a tail gas purification system 10 through a connecting pipeline by a vacuum pump 7, and a liquid phase outlet of the condenser 4 is connected with a liquid phase inlet of the collector 5 through a connecting pipeline; a gas phase outlet of the collector 5 is connected with a tail gas purification system 10 through a connecting pipeline by a vacuum pump 7, and a liquid phase outlet of the collector 5 is connected with a feed inlet of the rectifying tower 6 through a connecting pipeline; a gas-phase outlet of the rectifying tower 6 is respectively connected with a gas-phase inlet of the tower top condenser 8 and the tail gas purification system 10 through connecting pipelines; the liquid phase outlet of the tower top condenser 8 is respectively connected with the reflux port of the rectifying tower 6 and the gas phase inlet of the product container 9 through connecting pipelines, and the gas phase outlet of the tower top condenser 8 is connected with the tail gas purification system 10 through a connecting pipeline through a vacuum pump.
The reactor 3 is a vertical nickel reactor, is cylindrical and has the following dimensions: (phi 300X 3000) mm, consisting of a gas mixing zone and a reaction zone. The gas mixing area is arranged at the lower part of the reactor 3, the reaction area is arranged at the upper part of the reactor 3, and the gas mixing area and the reaction area are communicated with each other. Fluorine gas pipeline 1 and chlorine gas pipeline 2 are symmetrically arranged on two sides of the gas mixing zone. The height of the gas mixing area is 600mm, the upper part of the gas mixing area is a reaction area, 10 groups of baffles are arranged in the reaction area, and the distance between the baffles is 60 mm. The fluorine gas and the chlorine gas are fully mixed in the gas mixing zone, and then react in the reaction zone to generate chlorine trifluoride mixed gas, and the chlorine trifluoride mixed gas enters the condenser 4 through a gas phase outlet at the top of the reactor 3.
The condenser 4 is composed of six-stage condenser pipes, and the condenser pipes are double-layer sleeves with inner layers and outer layers and are made of stainless steel. The outer tube size is: (φ 102X 2200) mm, the inner and outer tube dimensions are: (φ 60X 2000) mm. Chlorine trifluoride mixed gas is introduced into the gap between the inner sleeve and the outer sleeve, and the outer sleeve is wound by 60 coils. The diameter of the coiled pipe is phi 16mm, the coiled pipe is made of red copper, and a freezing medium with the temperature of minus 30 ℃ is introduced into the coiled pipe.
The rectifying tower 6 is a packed tower, and the number of theoretical plates is 40. Size of rectifying section: (phi 57 multiplied by 15000) mm, the tower kettle and the tower body are made of stainless steel, the packing is theta ring packing (phi 5 multiplied by 5) mm, and the packing is nickel.
The tower top condenser 8 adopts a vertical tube type condenser which is made of Monel, the external dimension is (phi 360 multiplied by 550) mm, and the tubes are distributed in a triangle shape. The condenser comprises a shell side and a tube side, chlorine trifluoride gas is introduced into the tube side, and a freezing medium with the temperature of minus 30 ℃ is introduced into the shell side.
The product container 9 is a cylindrical container made of stainless steel. The outside dimension was (phi 220X 1400) mm, and the volume was 40L.
The utility model discloses a process flow of preparation chlorine trifluoride's device does:
respectively introducing fluorine gas and chlorine gas into a fluorine gas pipeline 1 and a chlorine gas pipeline 2, introducing the fluorine gas and the chlorine gas into a gas mixing zone of a reactor 3, mixing, introducing the mixture into a reaction zone of the reactor 2, and reacting under the conditions of a certain temperature and pressure to generate chlorine trifluoride mixed gas; the mixed gas enters a condenser 4, the chlorine trifluoride gas is condensed into liquid, the liquid enters a collector 5 for freezing and temporary storage, and the uncondensed mixed gas enters a tail gas purification system 10 through a vacuum pump; the mixed gas in the collector 5 enters a tail gas purification system 10 through a vacuum pump, and the chlorine trifluoride liquid crude product in the collector 5 is guided into a rectifying tower 6 for rectification and purification; after rectification and purification by a rectifying tower 6, chlorine trifluoride gas at the tower top enters a tower top condenser 8 for condensation, and mixed gas (low-boiling-point non-condensable gas) at the tower top enters a tail gas purification system 10 through a vacuum pump; maintaining the temperature of the tower kettle and the tower top of the rectifying tower to be stable, establishing rectification balance, refluxing the condensed product at the tower top into the rectifying tower 6, keeping the reflux ratio, ensuring that the purity of the gas phase at the tower top is more than 99 percent, condensing the condensed product obtained by a condenser 8 at the tower top to be chlorine trifluoride, and filling and storing the chlorine trifluoride product in a product container 9.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of improvements and decorations can be made without departing from the principle of the present invention, and these improvements and decorations should also be regarded as the protection scope of the present invention.
Claims (10)
1. An apparatus for producing chlorine trifluoride, comprising: the device comprises a reactor (3), a condenser (4), a collector (5), a rectifying tower (6), a tower top condenser (8) and a product container (9); the reactor (3) is connected with the condenser (4), the condenser (4) is connected with the collector (5), the collector (5) is connected with the rectifying tower (6), the rectifying tower (6) is connected with the tower top condenser (8), and the tower top condenser (8) is respectively connected with the rectifying tower (6) and the product container (9).
2. An apparatus for producing chlorine trifluoride according to claim 1, further comprising: vacuum pump (7) and tail gas clean-up system (10), vacuum pump (7) set up in the entrance point of tail gas clean-up system (10), and condenser (4), collector (5), rectifying column (6) and top of the tower condenser (8) link to each other through vacuum pump (7) with tail gas clean-up system (10) respectively.
3. A device for preparing chlorine trifluoride according to claim 2, characterized in that the lower part of the reactor (3) is provided with a gas inlet pipe, and the top end of the reactor (3) is provided with a gas phase outlet; the top end of the condenser (4) is respectively provided with a mixed gas inlet and a gas phase outlet, and the bottom end of the condenser (4) is provided with a liquid phase outlet; the top end of the collector (5) is respectively provided with a liquid phase inlet and a gas phase outlet, and the bottom end of the collector (5) is provided with a liquid phase outlet; a tower kettle of the rectifying tower (6) is provided with a feed inlet, and the top of the rectifying tower (6) is respectively provided with a gas phase outlet and a reflux port; the top of the tower top condenser (8) is respectively provided with a gas phase inlet and a gas phase outlet, and the bottom of the tower top condenser (8) is provided with a liquid phase outlet; the top end of the product container (9) is provided with a gas phase inlet; the gas phase outlet of the reactor (3) is connected with the mixed gas inlet of the condenser (4); a gas phase outlet of the condenser (4) is connected with a tail gas purification system (10) through a vacuum pump, and a liquid phase outlet of the condenser (4) is connected with a liquid phase inlet of the collector (5); a gas phase outlet of the collector (5) is connected with a tail gas purification system (10) through a vacuum pump, and a liquid phase outlet of the collector (5) is connected with a feed inlet of the rectifying tower (6); a gas-phase outlet of the rectifying tower (6) is respectively connected with a gas-phase inlet of the tower top condenser (8) and a tail gas purification system (10); the liquid phase outlet of the tower top condenser (8) is respectively connected with the reflux port of the rectifying tower (6) and the gas phase inlet of the product container (9), and the gas phase outlet of the tower top condenser (8) is connected with the tail gas purification system (10) through a vacuum pump.
4. An apparatus for the preparation of chlorine trifluoride according to claim 3, characterized in that the gas inlet lines comprise a fluorine gas line (1) and a chlorine gas line (2).
5. The apparatus for preparing chlorine trifluoride according to claim 4, wherein the reactor (3) comprises a gas mixing zone and a reaction zone, the gas mixing zone is arranged at the lower part of the reactor (3), the reaction zone is arranged at the upper part of the reactor (3), and the gas mixing zone and the reaction zone are communicated with each other; the height of the gas mixing zone is 200-600 mm, the reaction zone is composed of 10-40 groups of baffles, and the distance between the baffles is 25-60 mm; the material of the reactor (3) is stainless steel, copper, nickel, Monel or Inconel.
6. The apparatus for preparing chlorine trifluoride according to claim 4, wherein the condenser (4) is composed of six stages of condenser tubes connected in series, the condenser tubes are double-layer inner and outer tubes, and the outer tube is wound with a coil; introducing mixed gas into the gap between the inner sleeve and the outer sleeve, and introducing a freezing medium into the serpentine pipe; the material of the condenser pipe is carbon steel, stainless steel, copper or Monel, and the material of the coiled pipe is red copper.
7. The apparatus for preparing chlorine trifluoride according to claim 4, wherein the collector (5) is a jacketed vessel into which a freezing medium is introduced; the collector (5) is made of stainless steel, copper or Monel.
8. The apparatus for preparing chlorine trifluoride according to claim 4, wherein the rectifying column (6) is a packed column with a theoretical plate number of 40-60 stages, the packing is theta-ring packing, and the rectifying column (6) and the packing are made of stainless steel, copper, nickel, Monel or Inconel.
9. An apparatus for producing chlorine trifluoride according to claim 4, wherein said overhead condenser (8) is a shell-and-tube condenser comprising a shell side and a tube side, a coolant is introduced into the shell side, and chlorine trifluoride gas is introduced into the tube side; the material of the overhead condenser (8) is stainless steel, copper or Monel.
10. A device for the preparation of chlorine trifluoride according to claim 4, characterized in that the product container (9) is made of stainless steel or Monel.
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| CN202023255750.3U CN214456848U (en) | 2020-12-29 | 2020-12-29 | Device for preparing chlorine trifluoride |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114314513A (en) * | 2021-12-31 | 2022-04-12 | 四川红华实业有限公司 | Method for chlorofluorination of low-valence fluoride |
| WO2024000824A1 (en) * | 2022-06-30 | 2024-01-04 | 福建德尔科技股份有限公司 | Air inlet pipe anti-deflation sleeving device of condenser for production of electronic grade chlorine trifluoride |
-
2020
- 2020-12-29 CN CN202023255750.3U patent/CN214456848U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114314513A (en) * | 2021-12-31 | 2022-04-12 | 四川红华实业有限公司 | Method for chlorofluorination of low-valence fluoride |
| WO2024000824A1 (en) * | 2022-06-30 | 2024-01-04 | 福建德尔科技股份有限公司 | Air inlet pipe anti-deflation sleeving device of condenser for production of electronic grade chlorine trifluoride |
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