CN214438751U - Air distribution device - Google Patents
Air distribution device Download PDFInfo
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- CN214438751U CN214438751U CN202023205569.1U CN202023205569U CN214438751U CN 214438751 U CN214438751 U CN 214438751U CN 202023205569 U CN202023205569 U CN 202023205569U CN 214438751 U CN214438751 U CN 214438751U
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Abstract
The present disclosure provides a gas distribution apparatus including a gas distribution cabinet and a control system. The gas distribution cabinet is internally provided with a first gas bottle, a second gas bottle, a gas mixing tank, a first control valve and a first mass flowmeter which are connected in series, a first gas conveying pipeline which is provided with a first pressure transmitter and is communicated with the first gas bottle and the gas mixing tank, a second control valve and a second mass flowmeter which are connected in series, a second gas conveying pipeline which is provided with a second pressure transmitter and is communicated with the second gas bottle and the gas mixing tank, the first pressure transmitter, the second pressure transmitter, a purging gas bottle, a first purging gas pipeline which is connected in series with a first purging gas valve and is communicated with the purging gas bottle and the first gas conveying pipeline, and a second purging gas pipeline which is connected in series with a second purging gas valve and is communicated with the purging gas bottle and the second gas conveying pipeline. The first pressure transmitter, the second pressure transmitter, the first control valve, the second control valve, the first purge valve, the second purge valve, the first mass flowmeter and the second mass flowmeter are respectively connected with the control system.
Description
Technical Field
The present disclosure relates to the field of gas distribution equipment, and in particular, to a gas distribution device.
Background
Special gases (called special gases for short) are widely used in semiconductor industry and chemical industry, and because of their dangerousness, including toxicity, corrosion, flammability and other properties, the safety of the use process must be emphasized in the occasion of using special gases.
Most of the existing special gas distribution devices control the working process of the gas distribution devices by manual valves, and the equipment operation is maintained by manual timing inspection, so that the efficiency and the safety of the gas distribution process are low.
SUMMERY OF THE UTILITY MODEL
In view of the defects in the prior art, the present disclosure is directed to provide a gas distribution apparatus, which can realize automation of a gas distribution process and improve efficiency and safety of the gas distribution process.
In order to achieve the above object, the present disclosure provides a gas distribution apparatus including a gas distribution cabinet and a control system. The gas distribution cabinet is internally provided with a first gas bottle, a second gas bottle, a gas mixing tank, a first gas conveying pipeline, a second gas conveying pipeline, a first pressure transmitter, a second pressure transmitter, a purging gas bottle, a first purging gas pipeline and a second purging gas pipeline. The first gas bottle is used for containing a first gas, and the second gas bottle is used for containing a second gas; one end of the first gas conveying pipeline is communicated with the first gas bottle, the other end of the first gas conveying pipeline is communicated with the gas mixing tank, the gas mixing tank is used for being connected with gas equipment, a first control valve and a first mass flowmeter are connected to the first gas conveying pipeline in series, and the first pressure transmitter is installed on the first gas conveying pipeline; one end of the second gas conveying pipeline is communicated with the second gas bottle, the other end of the second gas conveying pipeline is communicated with the gas mixing tank, a second control valve and a second mass flowmeter are connected to the second gas conveying pipeline in series, and the second pressure transmitter is installed on the second gas conveying pipeline; one end of the first purging gas pipeline is communicated with the purging gas cylinder, the other end of the first purging gas pipeline is communicated with the first gas conveying pipeline, and a first purging gas valve is connected to the first purging gas pipeline in series; one end of the second purging gas pipeline is communicated with the purging gas cylinder, the other end of the second purging gas pipeline is communicated with the second gas conveying pipeline, and a second purging gas valve is connected to the second purging gas pipeline in series; the first pressure transmitter, the second pressure transmitter, the first control valve, the second control valve, the first purge air valve, the second purge air valve, the first mass flowmeter and the second mass flowmeter are respectively connected with the control system.
In one embodiment, the control system comprises a controller, and the first pressure transmitter, the second pressure transmitter, the first control valve, the second control valve, the first purge valve, the second purge valve, the first mass flowmeter and the second mass flowmeter are respectively connected with the controller.
In an embodiment, the control system further comprises a human-computer interaction interface, and the human-computer interaction interface is connected with the controller.
In an embodiment, a first electronic scale and a second electronic scale are further disposed in the gas distribution cabinet, the first gas bottle is disposed on the first electronic scale, the second gas bottle is disposed on the second electronic scale, and the first electronic scale and the second electronic scale are respectively connected to the control system.
In one embodiment, the air distribution cabinet is provided with an air inlet and an air outlet, and the air inlet and the air outlet are used for air circulation and replacement in the air distribution cabinet.
In one embodiment, the air inlet is provided with a heater for heating air entering the air distribution cabinet.
In one embodiment, the controller is a programmable controller.
In one embodiment, the control system further comprises an alarm device, and the alarm device is connected with the controller.
In one embodiment, the first gas bottle and the second gas bottle are located at the same height within the gas distribution cabinet.
In one embodiment, the first gas is a specialty gas and the second gas is a specialty gas.
The beneficial effects of this disclosure are as follows:
in the gas distribution device according to the disclosure, a purge gas bottle purges a first gas conveying pipeline through a first purge gas pipeline, the purge gas bottle purges a second gas conveying pipeline through a second purge gas pipeline, the first gas bottle provides a first gas through the first gas conveying pipeline, the second gas bottle provides a second gas through the second gas conveying pipeline, then the first gas and the second gas are fully mixed by a gas mixing tank and are conveyed to a gas using device, a control system remotely controls a first pressure transmitter, a first control valve, a first mass flow meter on the first gas conveying pipeline, a second pressure transmitter, a second control valve and a second mass flow meter on the second gas conveying pipeline so as to realize remote operation and automation of gas supply in a gas supply process, and remotely controls a first purge gas valve on the first purge gas pipeline and a second purge gas valve on the second purge gas conveying pipeline through the control system, the remote operation and the purging automation in the purging process are realized, so that the automation in the gas distribution process can be realized, and the efficiency and the safety in the gas distribution process are improved.
Drawings
FIG. 1 is a schematic diagram of an embodiment of a gas distribution apparatus according to the present disclosure.
Wherein the reference numerals are as follows:
100 gas distribution cabinet 5B second pressure transmitter
100a air inlet 6 purging air bottle
1A first gas bottle 71 first purge valve
1B second gas bottle 8 second purge gas line
2 second purge valve of gas-mixing tank 81
3 first gas delivery pipeline 9 gas equipment
31 first control valve S1 first electronic scale
32 first mass flowmeter S2 second electronic scale
4 second gas delivery line 200 control system
41 second control valve 200A controller
42 second Mass flowmeter 200B Man-machine interface
5A first pressure transmitter 200C alarm device
H heater
Detailed Description
The accompanying drawings illustrate embodiments of the present disclosure and it is to be understood that the disclosed embodiments are merely examples of the disclosure, which can be embodied in various forms, and therefore, specific details disclosed herein are not to be interpreted as limiting, but merely as a basis for the claims and as a representative basis for teaching one skilled in the art to variously employ the present disclosure.
To make the objects, technical solutions and advantages of the embodiments of the present disclosure more clear, the technical solutions of the embodiments of the present disclosure will be described clearly and completely with reference to the drawings in the embodiments of the present disclosure, and it is obvious that the described embodiments are some, but not all embodiments of the present disclosure.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this disclosure belongs; the terminology used in the description of the application herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the disclosure; the terms "including" and "having," and any variations thereof, in the description and claims of this disclosure and the description of the above figures are intended to cover non-exclusive inclusions. In the description of the present disclosure, unless otherwise explicitly specified or limited, the terms "first", "second", and the like in the description and claims of the present disclosure or in the above-described drawings are used for distinguishing between different objects, and are not intended to describe a particular order or primary-secondary relationship, nor are they to be construed as indicating or implying relative importance. The terms "connected" and "coupled" are used broadly and include, for example, "connected" and "coupled" as well as both fixed and removable or integral or electrical or communicative connections; "connected" may be directly connected or indirectly connected through an intermediate. The specific meaning of the above terms in the present disclosure can be understood by those of ordinary skill in the art as appropriate.
Reference herein to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the disclosure. The appearances of the phrase in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. It is explicitly and implicitly understood by one skilled in the art that the embodiments described herein can be combined with other embodiments.
The term "and/or" herein is merely an association describing an associated object, meaning that three relationships may exist, e.g., a and/or B, may mean: a exists alone, A and B exist simultaneously, and B exists alone. In addition, the character "/" herein generally indicates that the former and latter related objects are in an "or" relationship.
The presence of "a plurality" in this disclosure means more than two (including two).
The following describes in detail a gas distribution apparatus according to the present disclosure with reference to the accompanying drawings.
Referring to fig. 1, the gas distribution apparatus according to the present disclosure includes a gas distribution cabinet 100 and a control system 200. A first gas bottle 1A, a second gas bottle 1B, a gas mixing tank 2, a first gas conveying pipeline 3, a second gas conveying pipeline 4, a first pressure transmitter 5A, a second pressure transmitter 5B, a purging gas bottle 6, a first purging gas pipeline 7 and a second purging gas pipeline 8 are arranged in the gas distribution cabinet 100. The first gas bottle 1A is used for containing a first gas, and the second gas bottle 1B is used for containing a second gas. One end and the first gas bottle 1A intercommunication of first gas conveying pipeline 3, the other end and the gas mixing jar 2 intercommunication of first gas conveying pipeline 3, gas mixing jar 2 are used for being connected with gas consumer 9, have concatenated first control valve 31 and first mass flowmeter 32 on the first gas conveying pipeline 3, and first pressure transmitter 5A installs on first gas conveying pipeline 3. One end of a second gas conveying pipeline 4 is communicated with a second gas bottle 1B, the other end of the second gas conveying pipeline 4 is communicated with a gas mixing tank 2, a second control valve 41 and a second mass flow meter 42 are connected to the second gas conveying pipeline 4 in series, and a second pressure transmitter 5B is installed on the second gas conveying pipeline 4. One end of the first purge gas pipeline 7 is communicated with the purge gas cylinder 6, the other end of the first purge gas pipeline 7 is communicated with the first gas conveying pipeline 3, and a first purge gas valve 71 is connected in series on the first purge gas pipeline 7. One end of the second purging gas pipeline 8 is communicated with the purging gas cylinder 6, the other end of the second purging gas pipeline 8 is communicated with the second gas conveying pipeline 4, and the second purging gas pipeline 8 is connected with a second purging gas valve 81 in series. The first pressure transmitter 5A, the second pressure transmitter 5B, the first control valve 31, the second control valve 41, the first purge valve 71, the second purge valve 81, the first mass flow meter 32, and the second mass flow meter 42 are connected to the control system 200, respectively.
In the gas distribution device according to the present disclosure, the purge gas bottle 6 purges the first gas conveying pipeline 3 through the first purge gas pipeline 7, the purge gas bottle 6 purges the second gas conveying pipeline 4 through the second purge gas pipeline 8, the first gas bottle 1A provides the first gas through the first gas conveying pipeline 3, the second gas bottle 1B provides the second gas through the second gas conveying pipeline 4, then the first gas and the second gas are fully mixed by the gas mixing tank 2 and then are conveyed to the gas using equipment 9, the first pressure transmitter 5A, the first control valve 31 and the first mass flow meter 32 on the first gas conveying pipeline 3 and the second pressure transmitter 5B, the second control valve 41 and the second mass flow meter 42 on the second gas conveying pipeline 4 are remotely controlled by the control system 200 to realize the remote operation and gas supply automation of the gas supply process, and the first purge air valve 71 on the first purge air pipeline 7 and the second purge air valve 81 on the second purge air pipeline 8 are remotely controlled by the control system 200 to realize the remote operation and the purge automation of the purge process, so that the automation of the gas distribution process can be realized, and the efficiency and the safety of the gas distribution process are improved.
Specifically, referring to fig. 1, in some embodiments, the control system 200 may include a controller 200A, and the first pressure transmitter 5A, the second pressure transmitter 5B, the first control valve 31, the second control valve 41, the first purge valve 71, the second purge valve 81, the first mass flow meter 32, and the second mass flow meter 42 are respectively connected to the controller 200A to automatically control the first pressure transmitter 5A, the second pressure transmitter 5B, the first control valve 31, the second control valve 41, the first purge valve 71, the second purge valve 81, the first mass flow meter 32, and the second mass flow meter 42 through the controller 200A. The controller 200A controls the first purge valve 71 to automatically purge the first gas conveying pipeline 3, controls the second purge valve 81 to automatically purge the second gas conveying pipeline 4, controls the first control valve 31 and the first mass flow meter 32 to automatically supply gas on the first gas conveying pipeline 3, and controls the second control valve 41 and the second mass flow meter 42 to automatically supply gas on the second gas conveying pipeline 4. The controller 200A may be a programmable controller. The first pressure transmitter 5A, the second pressure transmitter 5B, the first control valve 31, the second control valve 41, the first purge valve 71, the second purge valve 81, the first mass flow meter 32, and the second mass flow meter 42 may be electrically connected or communicatively connected to the controller 200A, respectively.
Referring to the example shown in fig. 1, the control system 200 may further include a human-machine interaction interface 200B, and the human-machine interaction interface 200B is connected to the controller 200A. The human-computer interface 200B may be electrically or communicatively connected to the controller 200A.
Referring to fig. 1, in some embodiments, the control system 200 may further include an alarm device 200C, the alarm device 200C being coupled to the controller 200A. The alarm device 200C may be electrically or communicatively coupled to the controller 200A.
Referring to fig. 1, in some embodiments, a first electronic scale S1 and a second electronic scale S2 may be further disposed in the gas distribution cabinet 100, the first gas bottle 1A is disposed on the first electronic scale S1, the second gas bottle 1B is disposed on the second electronic scale S2, and the first electronic scale S1 and the second electronic scale S2 are respectively connected to the control system 200. Wherein the first electronic scale S1 and the second electronic scale S2 may be electrically or communicatively connected to the control system 200, respectively. The first electronic scale S1 may monitor the weight of the first gas bottle 1A, the second electronic scale S2 may monitor the weight of the second gas bottle 1B, and the weight data of the first gas bottle 1A and the weight data of the second electronic scale S2 are transmitted to the control system 200, respectively. Specifically, the weight data of the first gas bottle 1A and the weight data of the second gas bottle 1B can be respectively transmitted to the controller 200A and displayed by the human-computer interface 200B, so that data visualization is realized, and the efficiency of the gas distribution process is further improved. The controller 200A may also record usage data of the first gas bottle 1A and the second gas bottle 1B in real time, where the usage data includes a real-time weight of the first gas bottle 1A and a real-time weight of the second gas bottle 1B, and when the real-time weight of the first gas bottle 1A and/or the second gas bottle 1B is lower than a preset weight value, the controller 200A may control the alarm device 200C to alarm, so as to further improve safety of the gas distribution process.
Referring to fig. 1, a first pressure transmitter 5A is used to monitor the pressure of the first gas delivery line 3, a second pressure transmitter 5B is used to monitor the pressure of the second gas delivery line 4, and the pressure data of the first gas delivery line 3 and the pressure data of the second gas delivery line 4 are transmitted to the control system 200. Specifically, in some embodiments, the pressure data of the first gas delivery line 3 and the pressure data of the second gas delivery line 4 may be respectively transmitted to the controller 200A and displayed by the human-machine interface 200B, so as to realize data visualization. The controller 200A can also record the pressure data of the first gas transmission pipeline 3 and the pressure data of the second gas transmission pipeline 4 in real time, and when the pressure data of the first gas transmission pipeline 3 and/or the pressure data of the second gas transmission pipeline 4 exceed a set pressure range, the controller 200A can control the alarm device 200C to send an alarm prompt so as to further improve the safety of the gas distribution process.
Referring to fig. 1, in some embodiments, the controller 200A of the control system 200 remotely controls the on/off states of the first control valve 31 and the second control valve 41, so that the gas supply state of the first gas and the gas supply state of the second gas can be remotely controlled to realize automation of the gas supply process, and the gas supply state of the first gas and the gas supply state of the second gas can be displayed in real time by the human-computer interface 200B to realize visualization of the gas supply process, thereby further improving efficiency of the gas distribution process. The switch states of the first purge air valve 71 and the second purge air valve 81 are remotely controlled through a controller 200A of the control system 200, so that the purge state of the first gas conveying pipeline 3 and the purge state of the second gas conveying pipeline 4 can be remotely controlled, automation of a purge process is realized, the purge state of the first gas conveying pipeline 3 and the purge state of the second gas conveying pipeline 4 can be displayed in real time through a human-computer interaction interface 200B, visualization of the purge process is realized, and the efficiency of a gas distribution process is further improved. The controller 200A of the control system 200 may also monitor the set flow rate and the feedback flow rate of the first mass flow meter 32 and the set flow rate and the feedback flow rate of the second mass flow meter 42, and if the deviation between the set flow rate and the feedback flow rate of the first mass flow meter 32 and/or the deviation between the set flow rate and the feedback flow rate of the second mass flow meter 42 exceeds a preset deviation value, the controller 200A may control the alarm device 200C to issue an alarm instruction, so as to further improve the safety of the air distribution process.
Referring to fig. 1, in some embodiments, an air inlet 100a and an air outlet 100b may be disposed on the air distribution cabinet 100, and the air inlet 100a and the air outlet 100b are used for air circulation and replacement in the air distribution cabinet 100, so as to prevent air from being leaked and remaining in the air distribution cabinet 100.
Referring to the example shown in fig. 1, the air inlet 100a may be provided with a heater H for heating air entering the gas distribution cabinet 100 to supplement heat absorbed by evaporation of the first and second gases for the purpose of stabilizing the supply of air. The heater H may be connected to the controller 200A, for example, by an electrical connection or a communication connection, so that the heater H is automatically controlled by the controller 200A to perform heating.
Referring to the example shown in fig. 1, the first gas bottle 1A and the second gas bottle 1B may be located at the same height in the gas distribution cabinet 100, so that the first gas bottle 1A and the second gas bottle 1B are located at the same position, and interference of other factors such as position to the gas supply process is avoided.
The first gas may be a specialty gas. The special gas can be germane, silane and other gases. The second gas may also be a specialty gas. In other embodiments, the second gas may also be other gases besides the specialty gas, such as ammonia, hydrogen, and the like.
The purge gas cylinder 6 may contain an inert gas such as nitrogen, argon, or the like for purging the first gas delivery line 3 and the second gas delivery line 4.
The above detailed description describes exemplary embodiments, but is not intended to limit the combinations explicitly disclosed herein. Thus, unless otherwise specified, various features disclosed herein can be combined together to form a number of additional combinations that are not shown for the sake of brevity.
The above description is only a preferred embodiment of the present disclosure and is not intended to limit the present disclosure, and various modifications and changes may be made to the present disclosure by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present disclosure should be included in the protection scope of the present disclosure.
Claims (10)
1. A gas distribution arrangement, characterized in that the gas distribution arrangement comprises a gas distribution cabinet (100) and a control system (200);
a first gas bottle (1A), a second gas bottle (1B), a gas mixing tank (2), a first gas conveying pipeline (3), a second gas conveying pipeline (4), a first pressure transmitter (5A), a second pressure transmitter (5B), a purging gas bottle (6), a first purging gas pipeline (7) and a second purging gas pipeline (8) are arranged in the gas distribution cabinet (100);
the first gas bottle (1A) is used for containing a first gas, and the second gas bottle (1B) is used for containing a second gas;
one end of the first gas conveying pipeline (3) is communicated with the first gas bottle (1A), the other end of the first gas conveying pipeline (3) is communicated with the gas mixing tank (2), the gas mixing tank (2) is used for being connected with gas equipment (9), a first control valve (31) and a first mass flowmeter (32) are connected to the first gas conveying pipeline (3) in series, and the first pressure transmitter (5A) is installed on the first gas conveying pipeline (3);
one end of the second gas conveying pipeline (4) is communicated with the second gas bottle (1B), the other end of the second gas conveying pipeline (4) is communicated with the gas mixing tank (2), a second control valve (41) and a second mass flow meter (42) are connected to the second gas conveying pipeline (4) in series, and the second pressure transmitter (5B) is installed on the second gas conveying pipeline (4);
one end of the first purging gas pipeline (7) is communicated with the purging gas bottle (6), the other end of the first purging gas pipeline (7) is communicated with the first gas conveying pipeline (3), and a first purging gas valve (71) is connected to the first purging gas pipeline (7) in series;
one end of the second purging gas pipeline (8) is communicated with the purging gas cylinder (6), the other end of the second purging gas pipeline (8) is communicated with the second gas conveying pipeline (4), and a second purging gas valve (81) is connected to the second purging gas pipeline (8) in series;
the first pressure transmitter (5A), the second pressure transmitter (5B), the first control valve (31), the second control valve (41), the first purge valve (71), the second purge valve (81), the first mass flow meter (32) and the second mass flow meter (42) are respectively connected with the control system (200).
2. The gas distribution arrangement according to claim 1, characterized in that the control system (200) comprises a controller (200A), and the first pressure transmitter (5A), the second pressure transmitter (5B), the first control valve (31), the second control valve (41), the first purge valve (71), the second purge valve (81), the first mass flow meter (32) and the second mass flow meter (42) are connected to the controller (200A), respectively.
3. The gas distribution arrangement according to claim 2, characterized in that the control system (200) further comprises a human-machine interface (200B), the human-machine interface (200B) being connected to the controller (200A).
4. Gas distribution apparatus according to claim 1, wherein a first electronic scale (S1) and a second electronic scale (S2) are further provided in the gas distribution cabinet (100), the first gas bottle (1A) is provided on the first electronic scale (S1), the second gas bottle (1B) is provided on the second electronic scale (S2), and the first electronic scale (S1) and the second electronic scale (S2) are respectively connected to the control system (200).
5. Air distribution arrangement according to claim 1, wherein an air inlet (100a) and an air outlet (100b) are provided on the air distribution cabinet (100), the air inlet (100a) and the air outlet (100b) being used for air circulation and replacement inside the air distribution cabinet (100).
6. Air distribution arrangement according to claim 5, characterized in that the air inlet (100a) is provided with a heater (H) for heating the air entering the air distribution cabinet (100).
7. The gas distribution arrangement according to claim 2, characterized in that the controller (200A) is a programmable controller.
8. Air distribution arrangement according to claim 2, characterized in that the control system (200) further comprises an alarm device (200C), which alarm device (200C) is connected to the controller (200A).
9. Gas distribution arrangement according to claim 1, characterized in that the first gas bottle (1A) and the second gas bottle (1B) are located at the same height inside the gas distribution cabinet (100).
10. The gas distribution device of claim 1, wherein the first gas is a specialty gas and the second gas is a specialty gas.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023205569.1U CN214438751U (en) | 2020-12-25 | 2020-12-25 | Air distribution device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023205569.1U CN214438751U (en) | 2020-12-25 | 2020-12-25 | Air distribution device |
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| Publication Number | Publication Date |
|---|---|
| CN214438751U true CN214438751U (en) | 2021-10-22 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202023205569.1U Active CN214438751U (en) | 2020-12-25 | 2020-12-25 | Air distribution device |
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| Country | Link |
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| CN (1) | CN214438751U (en) |
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2020
- 2020-12-25 CN CN202023205569.1U patent/CN214438751U/en active Active
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Effective date of registration: 20211220 Address after: 511517 workshop a, No.16, Chuangxing Third Road, high tech Zone, Qingyuan City, Guangdong Province Patentee after: Guangdong lead Microelectronics Technology Co.,Ltd. Address before: 511517 Qingyuan 27-9 high tech Industrial Park, Guangdong Patentee before: FIRST RARE MATERIALS Co.,Ltd. |