CN214422278U - Adhesive waste liquid separation filter equipment - Google Patents
Adhesive waste liquid separation filter equipment Download PDFInfo
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- CN214422278U CN214422278U CN202023042020.5U CN202023042020U CN214422278U CN 214422278 U CN214422278 U CN 214422278U CN 202023042020 U CN202023042020 U CN 202023042020U CN 214422278 U CN214422278 U CN 214422278U
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- waste liquid
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- storage barrel
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Abstract
The embodiment of the application discloses adhesive waste liquid separation filter equipment, the device includes: a liquid storage barrel; a waste liquid immersion container detachably suspended inside the liquid storage barrel; the first liquid level sensor and the second liquid level sensor are positioned on the side wall of the liquid storage barrel; the first liquid level sensor is positioned above the second liquid level sensor; the top wall of the liquid storage barrel comprises a waste liquid inlet; the side wall of the bottom of the liquid storage barrel comprises a waste liquid outlet; the device also comprises a discharge pump which is positioned outside the liquid storage barrel and is connected with the waste liquid outlet; the first liquid level sensor is configured to control the discharge pump to be started after being triggered; the second level sensor is configured to control the drain pump to shut down after being triggered. The utility model provides a device can carry out effectual separation with the adhesive waste liquid that produces in the coating engineering and filter, blocks up the calandria when preventing the adhesive waste liquid discharge, solves because of the bad and engineering equipment pollution scheduling problem of product that the adhesive waste liquid produced against the current.
Description
Technical Field
The utility model relates to a semiconductor temporary bonding engineering field. And more particularly, to an adhesive waste liquid separating and filtering apparatus.
Background
The semiconductor temporary bonding engineering is mainly divided into a coating engineering, a bonding engineering and a heat treatment engineering, in order to bond two wafers, the engineering of coating an adhesive on the surfaces of the wafers before bonding is the coating engineering, in the working process, a nozzle of a coating machine sprays the adhesive on the surfaces of the wafers, in order to uniformly coat the adhesive on the whole wafers, the wafers with the adhesive need to be rotated at a high speed, so that the adhesive is uniformly coated on the surfaces of the wafers under the action of centrifugal force, meanwhile, in the process, the adhesive can splash on the side wall of an engineering cavity of the coating machine under the action of the centrifugal force, so that the coating machine needs to be cleaned after coating is finished, redundant adhesive and cleaning liquid are discharged through a discharge pipe as waste liquid, and the conventional discharge pipe is generally in a structure of horizontally flowing out after being bent at 90 degrees or a certain angle, the calandria with the structure can not completely remove the waste liquid with residual adhesive, and the viscous substances in the waste liquid are gradually accumulated in the calandria along with the use time to finally block the calandria, so that the problems of backflow and the like are caused.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide an adhesive waste liquid separation and filtration device to the realization carries out effectual separation and filtration with the adhesive waste liquid that produces in the coating engineering, blocks up the calandria when preventing the adhesive waste liquid discharge, solves because of the bad and engineering equipment pollution scheduling problem of product that the adhesive waste liquid produced against the current.
In order to achieve the above object, the utility model provides an adhesive waste liquid separation filter equipment, the device includes:
a liquid storage barrel;
a waste liquid immersion container detachably suspended inside the liquid storage barrel; and
the first liquid level sensor and the second liquid level sensor are positioned on the side wall of the liquid storage barrel; the first liquid level sensor is positioned above the second liquid level sensor;
the top wall of the liquid storage barrel comprises a waste liquid inlet;
the side wall of the bottom of the liquid storage barrel comprises a waste liquid outlet;
the device also comprises a discharge pump which is positioned outside the liquid storage barrel and connected with the waste liquid outlet;
the first liquid level sensor is configured to control the discharge pump to be started after being triggered;
the second level sensor is configured to control the drain pump to shut down after being triggered.
In addition, preferably, the waste liquid immersion container is arranged at a position corresponding to the waste liquid inlet, and the waste liquid immersion container is configured to receive waste liquid discharged into the liquid storage barrel from the waste liquid inlet.
Furthermore, it is preferable that the height of the second liquid level sensor is higher than the height of the waste liquid outlet.
In addition, preferably, the first liquid level sensor and the second liquid level sensor are respectively fixed on the outer side surface of the side wall of the liquid storage barrel in a combined manner, and the side wall of the liquid storage barrel corresponding to the first liquid level sensor and the second liquid level sensor is a transparent side wall.
In addition, preferably, the device comprises a mounting piece which is fixedly combined on the outer side surface of the side wall of the liquid storage barrel, and the mounting piece comprises a vertically arranged mounting groove;
the first liquid level sensor and the second liquid level sensor are respectively fixed on the mounting groove of the mounting piece through bolts.
Further, it is preferable that the waste liquid inlet is connected to a waste liquid conduit configured to introduce waste liquid.
In addition, preferably, the liquid storage barrel comprises a bracket for supporting a waste liquid immersion container;
the support comprises a supporting part and a supporting platform part;
the waste liquid immersion container is located on a top surface of the tray section.
In addition, preferably, a top surface of the tray part comprises a containing groove, and a bottom of the waste liquid immersion container is positioned in the containing groove.
Furthermore, it is preferable that the apparatus further comprises a control system; the first liquid level sensor and the second liquid level sensor are both connected with a control system, and the control system can control the opening and closing of the discharge pump.
The beneficial effect of this application is as follows:
to the technical problem that exists among the prior art, this application embodiment provides an adhesive waste liquid separation filter equipment, the device can be used to the interim bonding engineering's of semiconductor in the middle of the coating engineering, can separate the filtration to the adhesive waste liquid that produces among the coating engineering, improves among the prior art because of the calandria jam scheduling problem that the high viscous substance that contains in the waste liquid led to the fact, and then solves because of the calandria obviously low of production facility utilization that the jam caused, the product that the waste liquid leads to against the current is bad and production facility pollutes the scheduling problem. The utility model provides a device can be with the waste liquid discharge again after the high viscosity material separation in the adhesive waste liquid, has effectively solved the jam problem that the waste liquid caused to the calandria, can obviously improve production facility's utilization rate and yields, still can effectively avoid the pollution of engineering equipment. Furthermore, in the production process, in order to prevent the jam problem and need dispose the manpower often, maintain equipment in the short period, the manpower attrition rate is low, the utility model provides a device only needs regularly to immerse the container to the waste liquid and clear up, has greatly prolonged the maintenance cycle of equipment, can reduce the unnecessary manpower loss.
Drawings
The following describes embodiments of the present invention in further detail with reference to the accompanying drawings.
Fig. 1 shows a schematic structural view of an adhesive waste liquid separation and filtration apparatus according to an embodiment of the present invention.
Fig. 2 shows a schematic diagram of the adhesive waste liquid separation and filtration apparatus according to an embodiment of the present invention.
Fig. 3a-3d show schematic diagrams of the operation of the adhesive waste liquid separating and filtering device in one embodiment of the present invention.
Detailed Description
In order to explain the present invention more clearly, the present invention will be further described with reference to the preferred embodiments and the accompanying drawings. Similar parts in the figures are denoted by the same reference numerals. It is to be understood by persons skilled in the art that the following detailed description is illustrative and not restrictive, and is not to be taken as limiting the scope of the invention.
In the description of the present application, it should be noted that the terms "upper", "lower", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, which are only for convenience in describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and operate, and thus, should not be construed as limiting the present application. Unless expressly stated or limited otherwise, the terms "mounted," "connected," and "connected" are intended to be inclusive and mean, for example, that they may be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.
It is further noted that, in the description of the present application, relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
In order to solve the defects existing in the prior art, the embodiment of the present invention provides a separation and filtration device for adhesive waste liquid, which is shown in fig. 1 and 2, and comprises:
a liquid storage barrel 1;
a waste liquid immersion container 2 detachably suspended inside the liquid storage barrel 1; and
a first liquid level sensor 3 and a second liquid level sensor 4 which are positioned on the side wall of the liquid storage barrel 1; the first liquid level sensor 3 is positioned above the second liquid level sensor 4;
the top wall 10 of the liquid storage barrel 1 comprises a waste liquid inlet 11;
the side wall of the bottom of the liquid storage barrel 1 comprises a waste liquid outlet 12;
the device also comprises a discharge pump 5 which is positioned outside the liquid storage barrel 1 and is connected with the waste liquid outlet 12; in a specific example, the discharge pump 5 is connected to the waste outlet 12 through the waste discharge pipe 6, and the waste discharge pipe 6 can discharge the filtered waste through the discharge pump 5, and further, the discharge of the filtered waste can be controlled by controlling the opening and closing of the discharge pump 5.
The first level sensor 3 is configured to control the discharge pump 5 to be turned on after being triggered;
the second level sensor 4 is configured to control the discharge pump 5 to be turned off after being triggered.
In a specific example, the waste liquid immersion container 2 is disposed at a position corresponding to the waste liquid inlet 11, the waste liquid immersion container 2 is used for receiving the waste liquid discharged into the liquid storage barrel 1 from the waste liquid inlet 11, as shown in fig. 2, the waste liquid immersion container 2 is located at a position right below the waste liquid inlet 11, when the waste liquid is discharged into the liquid storage barrel 1 through the waste liquid inlet 11, the waste liquid will first enter the immersion container 2, due to different densities, a part of the waste liquid with higher viscosity in the waste liquid will be separated from a part of the waste liquid with lower viscosity and precipitated at the bottom of the waste liquid immersion container 2, a part of the waste liquid with lower viscosity will overflow from the waste liquid immersion container 2 into the liquid storage barrel 1 after being accumulated to a certain degree inside the waste liquid immersion container 2, the waste liquid overflowing from the waste liquid immersion container 2 into the liquid storage barrel 1 is the separated and filtered waste liquid, and the filtered waste liquid no longer contains viscous substances, therefore, the waste liquid can be directly discharged through the waste liquid discharge pipe 6 without causing problems such as clogging. Further, in order to ensure the efficient operation of the apparatus, it is necessary to periodically take out the waste liquid immersion container 2 to clean a portion of the high-viscosity waste liquid precipitated inside thereof.
In one particular example, the height of the second level sensor 4 should be higher than the height of the waste outlet 12. When the liquid level that spills over the waste liquid that gets into in the stock solution bucket 1 by waste liquid immersion container 2 reaches the position at first liquid level sensor 3 place, can trigger first liquid level sensor 3, discharge pump 5 is started the waste liquid in the stock solution bucket 1 that begins to discharge, and when the liquid level that the waste liquid lasts to the waste liquid in the stock solution bucket 1 reachd the position at second liquid level sensor 4 place, second liquid level sensor 4 was triggered, and discharge pump 5 is closed, stops the discharge action. It should be noted that before the second liquid level sensor 4 is triggered, the discharge pump 5 is kept in an on state, and continuously discharges the waste liquid until the liquid level of the waste liquid in the liquid storage barrel 1 reaches the position of the second liquid level sensor 4. In the present embodiment, the first liquid level sensor 3 and the second liquid level sensor 4 may be infrared sensors or other sensors with the same function.
In one embodiment, the first liquid level sensor 3 and the second liquid level sensor 4 are respectively fixed on the outer side surface of the side wall 13 of the liquid storage barrel 1, and both the first liquid level sensor 3 and the second liquid level sensor 4 are used for detecting the liquid level of the waste liquid in the liquid storage barrel 1, so as to control the discharge of the waste liquid by controlling the opening and closing of the discharge pump 5. In order to facilitate the detection of the liquid level of the waste liquid in the liquid storage barrel 1 by the first liquid level sensor 3 and the second liquid level sensor 4, the side wall 13 of the liquid storage barrel 1 corresponding to the first liquid level sensor 3 and the second liquid level sensor 4 is transparent.
In a specific example, the device further comprises a mounting member 7 fixed on the outer side surface of the side wall of the liquid storage barrel 1 in a combined manner, the mounting member 7 comprises a vertically arranged mounting groove 70, the first liquid level sensor 3 and the second liquid level sensor 4 are respectively fixed on the mounting groove 70 of the mounting member 7 through bolts, the first liquid level sensor 3 and the second liquid level sensor 4 can slide up and down along the mounting groove 70, the first liquid level sensor 3 is configured to be capable of adjusting corresponding positions according to the maximum height allowed by the liquid level of the waste liquid in the liquid storage barrel 1, and the second liquid level sensor 4 is configured to be capable of adjusting corresponding positions according to the minimum height allowed by the liquid level of the waste liquid in the liquid storage barrel 1.
In one embodiment, the waste liquid inlet 11 is connected to a waste liquid guide pipe 14, one end of the waste liquid guide pipe 14 is connected to the waste liquid inlet 11, the other end of the waste liquid guide pipe 14 is connected to a discharge pipe of the coating machine, and the waste liquid guide pipe 14 is used for guiding the adhesive waste liquid discharged from the coating machine into the liquid storage barrel 1.
In a specific example, the liquid storage barrel 1 internally comprises a support 8 for supporting the waste liquid immersion container, the support 8 comprises a support part 81 and a support part 82, the support part 81 is combined and fixed at the bottom of the liquid storage barrel 1, the support part 82 is used for placing the waste liquid immersion container 2, and the waste liquid immersion container 2 is placed on the top surface of the support part 82.
In one embodiment, to increase the stability of the waste liquid immersion container 2 on the rack 8, a receiving groove 83 is provided on the top surface of the pallet portion 82, and the bottom of the waste liquid immersion container 2 is placed in the receiving groove 83. The position of container 2 is soaked to the in-process waste liquid of can effectively preventing collecting the waste liquid takes place the skew under the impact of waste liquid, influences the production to the collection scheduling problem of waste liquid.
In a specific example, the device further comprises a baffle plate 9 extending from the inner surface of one side wall 14 of the liquid storage barrel 1 to the inside of the liquid storage barrel 1, and the baffle plate 9 can increase the limit of the waste liquid immersion container 2 in the vertical direction, and prevent the position of the waste liquid immersion container 2 from being shifted in the waste liquid collection process so as to influence the waste liquid collection effect. Further, separation blade 9 can carry out X, Y, Z three ascending restrictions of side to waste liquid immersion container 2 through mutually supporting with storage tank 83, prevents that the waste liquid from immersing container 2 and taking place the offset or drop at the in-process of collecting the waste liquid, leads to the waste liquid not getting into in the waste liquid immerses container 2 and directly gets into stock solution bucket 1 under the condition that carries out the sediment, influences the effect that the waste liquid was collected and the waste liquid separation.
In one embodiment, as shown in fig. 1, the waste liquid immersion container 2 further includes a handle 20, and the handle 20 can facilitate the taking and placing of the waste liquid immersion container 2, and facilitate the periodic cleaning of the portion of the waste liquid with higher viscosity deposited in the waste liquid immersion container 2.
In one specific example, the device further comprises a control system, and the first liquid level sensor and the second liquid level sensor are connected with the control system, and the control system can control the opening and closing of the discharge pump 5.
With reference to fig. 3a-3d, the device provided by the present invention comprises the following steps in the actual operation process:
in step one, as shown in fig. 3a, the waste liquid 100 is discharged from the waste liquid inlet 11 into the waste liquid immersion container 2 inside the liquid storage barrel 1 through the waste liquid conduit 14.
Step two, as shown in fig. 3b, the waste liquid is accumulated in the waste liquid immersion container 2, a part of the waste liquid 101 with high relative density is precipitated at the bottom of the waste liquid immersion container 2, and a part of the waste liquid 102 with low relative density is accumulated to a certain extent in the waste liquid immersion container 2 and overflows into the liquid storage barrel 1.
And step three, as shown in fig. 3c, the overflowed waste liquid 102 is the separated and filtered waste liquid, the waste liquid 102 is accumulated in the liquid storage barrel 1, when the liquid level reaches the position of the first liquid level sensor 3, the first liquid level sensor 3 is triggered, the control system controls the discharge pump 5 to be started, and the waste liquid 102 is discharged through the waste liquid discharge pipe 6.
Step four, as shown in fig. 3d, the filtered waste liquid in the liquid storage barrel 1 is continuously discharged until the liquid level of the waste liquid 102 in the liquid storage barrel 1 reaches the position of the second liquid level sensor 4, the second liquid level sensor 4 is triggered, the control system controls the discharge pump 5 to be closed, and the waste liquid 102 is not discharged any more.
Obviously, the above embodiments of the present invention are only examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention, and it is obvious for those skilled in the art to make other variations or changes based on the above descriptions, and all the embodiments cannot be exhausted here, and all the obvious variations or changes that belong to the technical solutions of the present invention are still in the protection scope of the present invention.
Claims (9)
1. An adhesive waste liquid separating and filtering apparatus, characterized in that the apparatus comprises:
a liquid storage barrel;
a waste liquid immersion container detachably suspended inside the liquid storage barrel; and
the first liquid level sensor and the second liquid level sensor are positioned on the side wall of the liquid storage barrel; the first liquid level sensor is positioned above the second liquid level sensor;
the top wall of the liquid storage barrel comprises a waste liquid inlet;
the side wall of the bottom of the liquid storage barrel comprises a waste liquid outlet;
the device also comprises a discharge pump which is positioned outside the liquid storage barrel and connected with the waste liquid outlet;
the first liquid level sensor is configured to control the discharge pump to be started after being triggered;
the second level sensor is configured to control the drain pump to shut down after being triggered.
2. The adhesive waste liquid separating and filtering device as claimed in claim 1, wherein the waste liquid immersion container is disposed at a position corresponding to the waste liquid inlet, and the waste liquid immersion container is configured to receive the waste liquid discharged from the waste liquid inlet into the liquid storage barrel.
3. The adhesive waste liquid separation filtration device of claim 1 wherein the height of the second liquid level sensor is higher than the height of the waste liquid outlet.
4. The apparatus as claimed in claim 1, wherein the first and second level sensors are fixed on the outer surface of the sidewall of the barrel, and the sidewall of the barrel corresponding to the first and second level sensors is a transparent sidewall.
5. The adhesive waste liquid separating and filtering device as claimed in claim 1, wherein the device comprises a mounting member fixed on the outer side surface of the side wall of the liquid storage barrel in a combining way, and the mounting member comprises a vertically arranged mounting groove;
the first liquid level sensor and the second liquid level sensor are respectively fixed on the mounting groove of the mounting piece through bolts.
6. The adhesive waste liquid separation and filtration device of claim 1, wherein a waste liquid conduit is connected to the waste liquid inlet, the waste liquid conduit configured to introduce waste liquid.
7. The adhesive waste liquid separating and filtering device as claimed in claim 1, wherein the liquid storage barrel includes a holder for holding a waste liquid immersion container;
the support comprises a supporting part and a supporting platform part;
the waste liquid immersion container is located on a top surface of the tray section.
8. The adhesive waste liquid separating and filtering device as claimed in claim 7, wherein said tray portion includes a receiving groove on a top surface thereof, and a bottom of said waste liquid immersion container is located in said receiving groove.
9. The adhesive waste liquid separation filtration device of claim 1, further comprising a control system; the first liquid level sensor and the second liquid level sensor are both connected with a control system, and the control system can control the opening and closing of the discharge pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023042020.5U CN214422278U (en) | 2020-12-16 | 2020-12-16 | Adhesive waste liquid separation filter equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023042020.5U CN214422278U (en) | 2020-12-16 | 2020-12-16 | Adhesive waste liquid separation filter equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214422278U true CN214422278U (en) | 2021-10-19 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202023042020.5U Active CN214422278U (en) | 2020-12-16 | 2020-12-16 | Adhesive waste liquid separation filter equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214422278U (en) |
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- 2020-12-16 CN CN202023042020.5U patent/CN214422278U/en active Active
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