CN214411124U

CN214411124U - Desktop type wafer detects window structure of machine

Info

Publication number: CN214411124U
Application number: CN202120393935.6U
Authority: CN
Inventors: 林锵
Original assignee: Shenzhen Desige Intelligent Technology Co ltd
Current assignee: Shenzhen Desige Intelligent Technology Co ltd
Priority date: 2021-02-23
Filing date: 2021-02-23
Publication date: 2021-10-15
Anticipated expiration: 2031-02-23

Abstract

The utility model provides a window structure of a desktop type wafer detection machine, which comprises a wafer detection machine body, wherein one side of the wafer detection machine body is provided with an opening, a door frame is arranged at the opening, rodless cylinders are arranged at two sides of the opening, a connecting piece A and a connecting piece B which are matched and connected with the rodless cylinders at two sides are respectively arranged at two sides of the door frame, and the door frame can be slidably opened and closed on the wafer detection machine body through the connection of the rodless cylinders and the door frame; the utility model discloses a no pole cylinder drives the door frame and slides from top to bottom, realizes opening and being closed to wafer detection machine body, and degree of automation is high to no pole cylinder can save installation space, and gliding mode has also reduced occupation space from top to bottom, and the practicality is strong.

Description

Desktop type wafer detects window structure of machine

Technical Field

The utility model relates to a wafer detects technical field, especially relates to a desktop type wafer detects window structure of machine.

Background

In the prior art, the test cabinet for the high-precision parts such as wafers is not provided with a protective door, so that the safety is low, or the arranged door frame structure is pushed open or turned open manually, so that the operation is inconvenient and potential safety hazards exist.

Therefore, it is desirable to design a window structure of a desktop wafer inspection machine to solve the above problems.

SUMMERY OF THE UTILITY MODEL

The utility model provides a desktop type wafer detects window structure of machine for among the solution prior art, the mode of opening the door needs manually operation, operates inconveniently, and has the problem of potential safety hazard.

In order to solve the above problem, the utility model provides a following technical scheme: desktop type wafer detects window structure of machine, including the wafer detection machine body, one side of wafer detection machine body is equipped with the opening, is equipped with the door frame at the opening part open-ended both sides are equipped with rodless cylinder the both sides of door frame are equipped with respectively with both sides rodless cylinder cooperation connecting piece A and connecting piece B be connected, through being connected of rodless cylinder with the door frame, consequently, the door frame slidable opens and shuts in the wafer detection machine body.

Furthermore, a blocking component is arranged on one side of the opening and used for limiting the position of the door frame.

Furthermore, the blocking component is an air cylinder, the output end of the air cylinder is provided with a limiting rod, and the connecting piece A is provided with a first limiting hole and a second limiting hole which are matched with the limiting rod and used for limiting the door frame in the closed state and the open state respectively.

Furthermore, slide rails are arranged on two sides of the opening, a slide block is arranged on each slide rail, the slide block is connected with the doorframe, and the slide block slides along with the doorframe.

Furthermore, safety gratings are arranged on two sides of the opening.

Furthermore, the door frame is also provided with a transparent baffle.

Compared with the prior art, the utility model discloses following beneficial effect has at least:

the utility model discloses a no pole cylinder drives the door frame and slides from top to bottom, realizes opening and being closed to wafer detection machine body, and degree of automation is high to no pole cylinder can save installation space, and gliding mode has also reduced occupation space from top to bottom, and the practicality is strong.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.

Fig. 1 is a schematic structural view of a wafer inspection machine in an embodiment of the present invention in a closed state;

fig. 2 is a schematic structural view of the wafer inspection machine in an open state according to an embodiment of the present invention;

fig. 3 is an exploded view of a portion of the structure in an embodiment of the invention;

fig. 4 is a partial structural schematic diagram in an embodiment of the present invention;

FIG. 5 is an enlarged view at A in FIG. 4;

fig. 6 is a schematic structural view of a door frame in an embodiment of the present invention;

the wafer detection machine comprises a wafer detection machine body 1, an opening 101, a door frame 2, a door frame 3 and a baffle plate. 4. Connecting piece A, 41, first spacing hole, 42, the spacing hole of second, 5, connecting piece B, 6, slide rail installed part A, 7, installed part, 8, rodless cylinder, 9, cylinder, 91, gag lever post, 10, safe grating, 11, slide rail installed part B, 12, slider, 13, slide rail.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by a person of ordinary skill in the art without creative efforts belong to the protection scope of the present invention. It is to be understood that the drawings are designed solely for the purposes of illustration and description and not as a definition of the limits of the invention. The connection relationships shown in the drawings are for clarity of description only and do not limit the manner of connection.

It will be understood that when an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. It should also be noted that, unless expressly stated or limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly and can include, for example, fixed connections, removable connections, or integral connections; either mechanically or electrically, and may be internal to both elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.

It should be further noted that in the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, but does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

Referring to fig. 1 to 6, the wafer inspecting apparatus includes a wafer inspecting apparatus body 1, an opening 101 is formed at one side of the wafer inspecting apparatus body 1, a door frame 2 is disposed at the opening 101, rodless cylinders 8 are disposed at two sides of the opening 101, and the rodless cylinders 8 are mounted at the left and right sides of the opening 101 through mounting members 7.

The two sides of the door frame 2 are respectively provided with a connecting piece A4 and a connecting piece B5 which are matched and connected with the output ends of the rodless cylinders 8 at the two sides, and the door frame 2 can be slidably opened and closed on the wafer detection machine body 1 through the connection of the rodless cylinders 8 and the door frame 2.

A blocking member is disposed at one side of the opening 101, and the blocking member is used for limiting the position of the door frame. In this embodiment, the blocking component is a cylinder 9, the output end of the cylinder 9 is provided with a limiting rod 91, and the connecting piece a4 is provided with a first limiting hole 41 and a second limiting hole 42 which are matched with the limiting rod 91 and are respectively used for limiting the door frame in the closed state and the open state.

Slide rails 13 are further arranged on two sides of the opening 101, a slide block 12 is arranged on each slide rail 13, the slide blocks 12 are connected with two sides of the doorframe 2, and the slide blocks 12 slide along with the doorframe 2. The slide rails 13 are mounted to both sides of the opening by the slide rail mounts a6 and B11.

Safety gratings 10 are arranged on both sides of the opening 101. The security grating 10 is mounted on the side wall of the opening 101, is compact and beautiful, and improves the security of the apparatus.

In this embodiment, the door frame 2 is further provided with a transparent baffle 3. The testing condition inside the wafer detection machine body 1 can be observed conveniently in real time.

The utility model discloses a theory of operation: the opening or closing of the wafer detection machine body 1 is realized along with the sliding of the rodless cylinder 8 by the door frame 2, the sliding block 12 on the sliding rail 13 arranged at the opening 101 also moves along with the door frame 2, the sliding block is used for limiting the moving direction and position of the door frame 2, the sliding consistency and stability of the door frame 2 are ensured, and a blocking component is further arranged, the sliding block comprises a cylinder 9 and a limiting rod 91 and is used for limiting the position of the door frame 2, the door frame 2 is ensured not to be randomly opened in the closing state and can be prevented from sliding down in the opening state, and the safety is improved.

Throughout the description and claims of this application, the words "comprise/comprises" and the words "have/includes" and variations of these are used to specify the presence of stated features, values, steps or components but do not preclude the presence or addition of one or more other features, values, steps, components or groups thereof.

Some features of the invention, which are, for clarity, described in the context of separate embodiments, may also be provided in combination in a single embodiment. Conversely, certain features of the invention, which are, for brevity, described in the context of a single embodiment, may also be provided separately or in any suitable combination in different embodiments.

The above description is only exemplary of the present invention and should not be taken as limiting the scope of the present invention, as any modifications, equivalents, improvements and the like made within the spirit and principles of the present invention should be included in the present invention.

Claims

1. The utility model provides a desktop type wafer inspection machine's window structure, includes the wafer inspection machine body, its characterized in that, one side of wafer inspection machine body is equipped with the opening, is equipped with the door frame at the opening part open-ended both sides are equipped with no pole cylinder the both sides of door frame are equipped with respectively with both sides no pole cylinder cooperation connecting piece A and connecting piece B be connected, through being connected of no pole cylinder with the door frame, consequently, the door frame slidable opens and shuts in the wafer inspection machine body.

2. The window structure of desktop wafer inspection machine of claim 1, wherein a blocking member is disposed at one side of the opening, and the blocking member is used to limit the position of the door frame.

3. The window structure of a desktop wafer inspection machine as claimed in claim 2, wherein the blocking member is a cylinder, the output end of the cylinder is provided with a limiting rod, and the connecting member a is provided with a first limiting hole and a second limiting hole adapted to the limiting rod for limiting the door frame in the closed state and the open state, respectively.

4. The window structure of desktop wafer inspection machine as claimed in claim 1, wherein slide rails are further disposed on two sides of the opening, slide blocks are disposed on the slide rails, the slide blocks are connected to the door frame, and the slide blocks slide along with the door frame.

5. The window structure of the desktop wafer inspection machine of claim 1, wherein safety gratings are disposed on both sides of the opening.

6. The window structure of the desktop wafer inspection machine as claimed in any one of claims 1 to 5, wherein the door frame further comprises a transparent baffle.