CN214409262U

CN214409262U - Probe card low-temperature detection system

Info

Publication number: CN214409262U
Application number: CN202120470765.7U
Authority: CN
Inventors: 郝亚慧
Original assignee: Jinglong Technology Suzhou Co ltd
Current assignee: Jinglong Technology Suzhou Co ltd
Priority date: 2021-03-04
Filing date: 2021-03-04
Publication date: 2021-10-15
Anticipated expiration: 2031-03-04
Also published as: TWM615867U

Abstract

The application discloses a probe card low-temperature detection system, which comprises a jig and a probe card, wherein the jig is a container with an upward opening, a bearing seat is arranged in the middle of the jig, a groove body and a cavity are separated from the upper part and the lower part of the jig by taking the bearing seat as a boundary, a water outlet pipe is connected with the jig and communicated with the groove body, an air inlet pipe is connected with the jig and communicated with the cavity, and when the probe card is locked on the bearing seat, the probe card forms the bottom surface of the groove body and seals the cavity; therefore, when liquid is injected into the groove body, the air inlet pipe supplies air into the cavity, and whether the probe card has unsealed pores or not can be judged through whether bubbles appear in the liquid or not.

Description

Probe card low-temperature detection system

Technical Field

The present application relates to a probe card low temperature detection system, and more particularly, to a device for detecting whether a gap exists after a probe card is sealed.

Background

The probe card is an important tool in the IC testing process, and the probe of the probe card is in contact with the wafer or the specific bonding pad of the die to measure the electrical property of the circuit, thereby determining the quality of the die. Depending on the operating environment of the die, some of the dies need to be tested at high and low temperatures, and the probe card used for the dies also needs to be able to operate normally at high and low temperatures. When the probe card is used for low-temperature testing, low-temperature hole sealing treatment needs to be carried out on holes of a printed circuit board, a reinforcing plate and screws. The inspection operation after treatment mainly comprises visual inspection, for example, aligning the holes with lamplight, and observing with naked eyes whether light leaks; or observing whether the joints, the joints of the reinforcing plate and the screws are filled with resin or not, but in the inspection method, if the gaps, the joints, the gaps between the reinforcing plate and the screws are too small, the inspection is difficult or impossible, so that the inspected probe card still has the possibility of partial air leakage when in use.

SUMMERY OF THE UTILITY MODEL

The present application provides a probe card low temperature detection system, which is mainly to lock a probe card in a fixture, and contact the upper and lower sides of the probe card with gas through liquid, and determine whether the probe card has a pore or not by the presence of bubbles in the liquid through the characteristics of gas pressure difference and gas-liquid phase incompatibility, so that the detection operation is more accurate and reliable, and the problems in the prior art are solved.

In order to achieve the above object, an embodiment of the present application provides the following technical solutions:

in one embodiment, a probe card low-temperature detection system is provided, which comprises a jig and a probe card, wherein the jig is a container with an upward opening, a bearing seat is arranged in the middle of the jig, a groove body and a cavity are separated from the upper part and the lower part of the jig by taking the bearing seat as a boundary, a water outlet pipe is connected with the jig and communicated with the groove body, an air inlet pipe is connected with the jig and communicated with the cavity, and when the probe card is fixed on the bearing seat, the probe card forms the bottom surface of the groove body and seals the cavity; therefore, when liquid is injected into the groove body, the air inlet pipe supplies air to the chamber, and whether the probe card has a pore or not can be judged through whether bubbles appear in the liquid or not.

In a preferred embodiment, the base is an annular base, and the slot is in communication with the chamber before the probe card is not secured to the base.

As a preferred embodiment, the apparatus further comprises a pressure gauge connected to the fixture and in communication with the chamber, wherein the pressure gauge is used to know the gas pressure in the chamber.

As one of the preferred embodiments, the outlet pipe is provided with a switch.

In a preferred embodiment, the gas inlet pipe is connected to an external gas supply device, and the gas is supplied into the chamber through the gas inlet pipe by the gas supply device.

As one preferred embodiment, the slot is used to contain a liquid, and the liquid covers the probe card.

In a preferred embodiment, the liquid level is higher than the height of the probe card.

Compared with the prior art, the probe card low-temperature detection system has the following specific effects:

1. the probe card low-temperature detection system can really detect whether the probe card has a pore or not: under the assistance of the jig, the probe card is locked on the bearing seat, then liquid is injected into the groove body, gas is input into the cavity, if the probe card has pores, the gas with higher pressure in the cavity overflows from the pores, and bubbles appear in the liquid, so that whether the probe card has the pores can be confirmed.

2. According to the probe card low-temperature detection system, the position of the hole on the probe card can be identified by utilizing the position of the bubble in the liquid, so that the subsequent filling or sealing repairing operation is facilitated.

3. The probe card low-temperature detection system is simple in structure, convenient to operate and high in detection accuracy.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments described in the present application, and other drawings can be obtained by those skilled in the art without creative efforts.

FIG. 1 is a schematic cross-sectional view of a probe card low temperature detection system of the present application;

FIG. 2 is a top view of a fixture of the probe card low temperature detection system of the present application;

FIG. 3 is a cross-sectional view of a practical operation test of the probe card low temperature detection system of the present application.

The reference numbers illustrate: 1-a jig; 11-a bearing seat; 111-screw holes; 13-a trough body; 14-a chamber; 15-air inlet pipe; 16-a water outlet pipe; 161-a switch; 17-pressure gauge; 2-probe card; 21-a probe; 22-a circuit adapter; 23-a circuit board; 3-a liquid; 4-air bubbles.

Detailed Description

The present application will be described in detail below with reference to embodiments shown in the drawings. The embodiments are not limited to the embodiments, and structural, methodological, or functional changes made by those skilled in the art according to the embodiments are included in the scope of the present disclosure.

Fig. 1 and 2 are a cross-sectional view and a top view of a probe card low temperature detection system according to the present invention. The probe card low-temperature detection system comprises a jig 1 and a probe card 2, wherein the jig 1 is a container with an upward opening, a bearing seat 11 is arranged in the middle, the inside of the jig 1 is bounded by the bearing seat 11, a groove body 13 and a cavity 14 are separated from the upper part and the lower part, a water outlet pipe 16 is connected with the jig 1 and communicated with the groove body 13, an air inlet pipe 15 is connected with the jig 1 and communicated with the cavity 14, and when the probe card 2 is fixedly locked on the bearing seat 11, the probe card 2 forms the bottom surface of the groove body 13 and seals the cavity 14.

Next, the following describes each component of the present application in detail:

the fixture 1 of the present application is a container with an upward opening, the bearing 11 is located inside the fixture 1, in this embodiment, the bearing 11 is an annular seat, and the center is an open area, so that the groove 13 and the cavity 14 are communicated with each other before the probe card 2 is not fixed to the bearing 11. The holder 11 has a plurality of threaded holes 111 for fixing the probe card 2 on the holder 11 by using screws, but not limited thereto, a clamping mechanism may be installed on the holder 11 for fixing the probe card 2. The fixture 1 is internally and vertically further separated into a groove body 13 and a cavity 14 by taking the bearing seat 11 as a boundary, and after the probe card 2 is fixed on the bearing seat 11, the probe card 2 forms the bottom surface of the groove body 13 and the top surface of the cavity 14, and at the moment, the groove body 13 and the cavity 14 form a space which is not communicated with each other. The tank 13 is a space with an upward opening to facilitate direct pouring of liquid. The chamber 14 is a completely sealed space. The outer wall of the jig 1 is respectively connected with an air inlet pipe 15 and a water outlet pipe 16. The air inlet pipe 15 is located in the lower layer area of the jig 1 and is communicated with the cavity 14, the other end of the air inlet pipe 15 is further connected with an external air supply device (not shown in the figure) to inject air in due time, the air supply pressure can be directly controlled by the air supply device to avoid over-high or over-low, but not limited to this, for example, in this embodiment, a pressure gauge 17 is additionally arranged on the outer wall of the jig 1, the pressure gauge 17 is communicated with the cavity 14, and with the aid of the pressure gauge 17, an operator can immediately know the pressure value after air supply in the cavity 14. The water outlet pipe 16 is positioned on the upper layer of the jig 1 and communicated with the groove body 13, and the water outlet pipe 16 is provided with a switch 161. After the test operation is completed, the switch 161 is opened to allow the liquid to flow out, thereby facilitating the removal of the probe card 2.

The probe card 2 is an electrical contact interface used in the die testing process, and its type can correspond to different chips, and is not limited to a single specific structure. The probe card 2 generally includes a plurality of probes 21, a circuit adapter 22 and a circuit board 23, wherein the circuit adapter 22 is responsible for fixing the probes 21 and electrically connecting with the circuit on the circuit board 23. When the probe card 2 is to be used for low temperature testing, it is necessary to perform hole sealing treatment on the holes of the printed circuit board 23, the joints of the members, and the joint positions. When the probe card 2 is fixed on the holder 11, the probes 21 are located in the slot 13.

FIG. 3 is a cross-sectional view of a test operation of the probe card low temperature detection system of the present invention. The probe card 2 is locked on the bearing seat 11, so that the jig 1 is divided into two groove bodies 13 and a cavity 14 which are not communicated with each other. The liquid 3 is poured into the groove body 13, the liquid 3 covers the probe card 2, the liquid level height of the liquid 3 on the bearing seat 11 is larger than the height of the probe card 2 on the bearing seat 11, when the pore of the probe card 2 is detected subsequently, the pore can be ensured to be covered by the liquid, the detection precision is further improved, the liquid 3 can be water, the air inlet pipe 15 provides air into the cavity 14, the pressure value in the cavity 14 can be confirmed by the pressure gauge 17 in the process, and overhigh or overlow is avoided. If the probe card 2 has pores, the gas with higher pressure in the chamber 14 will leak from the pores, and the bubbles 4 will appear in the liquid 3, so that not only can the existence of the pores be checked, but also the positions of the bubbles 4 can be observed to be approximately locked with the leaking positions, thereby facilitating the subsequent sealing filling or repairing.

In summary, the probe card low temperature detection system of the present application is to fix the probe card 2 in the fixture 1, and the upper and lower sides of the probe card 2 are contacted with the gas by the liquid, so that not only can the existence of the void be accurately detected, but also the position of the void on the probe card 2 can be identified, which is convenient for the subsequent filling or repairing.

It will be evident to those skilled in the art that the present application is not limited to the details of the foregoing illustrative embodiments, and that the present application may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the application being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims

1. A probe card low-temperature detection system is characterized by comprising a jig and a probe card, wherein the jig is a container with an upward opening, a bearing seat is arranged in the middle of the jig, a groove body and a cavity are respectively partitioned from the upper part and the lower part in the jig by taking the bearing seat as a boundary, a water outlet pipe is connected with the jig and communicated with the groove body, an air inlet pipe is connected with the jig and communicated with the cavity, and when the probe card is locked on the bearing seat, the probe card forms the bottom surface of the groove body and seals the cavity.

2. The system of claim 1, wherein the holder is an annular holder, and the channel is in communication with the chamber before the probe card is not secured to the holder.

3. The system of claim 1, further comprising a pressure gauge connected to the fixture and in communication with the chamber, wherein the pressure gauge is configured to sense a gas pressure in the chamber.

4. The system of claim 1, wherein the outlet tube is provided with a switch.

5. The system of claim 1, wherein the gas inlet tube is connected to an external gas supply device, and the gas supply device supplies gas into the chamber through the gas inlet tube.

6. The system of claim 1, wherein the channel is configured to receive a liquid, and the liquid covers the probe card.

7. The system of claim 6, wherein a level of the liquid is higher than a level of the probe card.