CN214378346U - Water circulation system capable of sensing temperature - Google Patents

Abstract

The utility model discloses a but temperature-sensing's water circulating system, include: the heating tank is provided with a water injection pipe and a return pipe; the liquid collecting auxiliary tank is respectively connected with the liquid injection pipe and the return pipe, and the heating tank, the return pipe, the liquid collecting auxiliary tank and the water injection pipe form a heating circulation assembly; a chemical liquid container disposed in the heating tank; the temperature sensing assembly comprises a first temperature sensor arranged in the liquid medicine container and a second temperature sensor arranged in the heating groove; and the heater is arranged in the liquid collecting auxiliary tank. The utility model discloses can guarantee that the liquid medicine temperature is even, keep the stability of deposition rate, realize the effect of even gentle heating, can rationally set up heating temperature, carry out reasonable adjustment according to actual conditions, make full use of water resource, using water wisely.

Description

Water circulation system capable of sensing temperature

Technical Field

The utility model relates to a firing equipment technical field, in particular to but temperature-sensing's water circulating system.

Background

During the manufacturing process of the semiconductor package substrate, the liquid medicine temperature of the metal heating tank determines the metal thickness and quality of the substrate. The traditional mode of directly installing a heating pipe in a metal tank liquid medicine cylinder body to heat liquid medicine easily causes the phenomena of high temperature around the heating pipe and low temperature of other areas, so that the liquid medicine is heated unevenly, the deposition rate of products is influenced, and particularly, defective products and the yield are easily caused for products such as packaging substrates and the like.

SUMMERY OF THE UTILITY MODEL

The utility model discloses aim at solving one of the technical problem that exists among the prior art at least. Therefore, the utility model provides a but temperature-sensing's water circulating system can guarantee the even heating of liquid medicine, improves deposition rate's stability.

According to the utility model discloses a temperature-sensitive water circulation system of first aspect embodiment includes: the heating tank is provided with a water injection pipe and a return pipe; the auxiliary liquid collecting tank is respectively connected with the water injection pipe and the return pipe, and the heating tank, the return pipe, the auxiliary liquid collecting tank and the water injection pipe form a heating circulation assembly; a chemical liquid container disposed in the heating tank; the temperature sensing assembly comprises a first temperature sensor arranged in the liquid medicine container and a second temperature sensor arranged in the heating groove; and the heater is arranged in the liquid collecting auxiliary tank.

According to the utility model discloses but temperature-sensing's water circulating system has following beneficial effect at least: the temperature of the liquid medicine can be ensured to be uniform, and the stability of the deposition rate is kept; the effect of uniform and mild heating is realized, the heating temperature can be reasonably set, and the heating temperature can be reasonably adjusted according to actual conditions; the heating circulation assembly is arranged, water is used as a medium, water resources are fully utilized, and water is saved.

According to some embodiments of the utility model, still including the liquid level inductor, the liquid level inductor sets up on the liquid collecting auxiliary tank, still be connected with the fluid infusion pipe on the liquid collecting auxiliary tank.

According to some embodiments of the utility model, still including the master controller, the master controller respectively with first temperature sensing second temperature sensor with liquid level sensor electric connection.

According to some embodiments of the utility model, the temperature sensing subassembly is still including setting up third temperature sensor in the collection liquid auxiliary tank, third temperature sensor with master controller electric connection.

According to some embodiments of the utility model, still including alarm device, alarm device with master controller electric connection.

According to some embodiments of the utility model, be equipped with automatic valve on the fluid infusion pipe, the liquid level inductor with automatic valve electric connection.

According to some embodiments of the utility model, the heating tank with the liquid medicine container all adopts the stainless steel to make, the lateral wall thickness of heating tank is 5mm, the lateral wall thickness of liquid medicine container is 2 mm.

According to some embodiments of the utility model, the water injection pipe is equipped with three and sets up the heating tank bottom.

According to some embodiments of the utility model, the back flow setting is in the well upper portion of heating tank is connected the heating tank with collect liquid between the auxiliary tank.

According to some embodiments of the utility model, the heater includes six heating pipes, six heating pipe evenly distributed is in the liquid collecting auxiliary tank.

Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.

Drawings

The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:

fig. 1 is a schematic overall structure diagram of an embodiment of the present invention;

fig. 2 is a schematic structural view of the heating tank and the chemical solution container shown in fig. 1.

The attached drawings are marked as follows:

a heating tank 100;

a liquid collecting auxiliary tank 200;

a medical fluid container 300;

a first temperature sensor 410, a second temperature sensor 420, a third temperature sensor 430;

a water injection pipe 500;

a return pipe 600;

a fluid infusion tube 700;

a main controller 800, an alarm device 810, a liquid level sensor 820 and a heater 830.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present invention, and should not be construed as limiting the present invention.

In the description of the present invention, it should be understood that the orientation or positional relationship indicated with respect to the orientation description, such as up, down, front, rear, left, right, etc., is based on the orientation or positional relationship shown in the drawings, and is only for convenience of description and simplification of description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.

In the description of the present invention, a plurality of means are one or more, a plurality of means are two or more, and the terms greater than, less than, exceeding, etc. are understood as not including the present number, and the terms greater than, less than, within, etc. are understood as including the present number. If the first and second are described for the purpose of distinguishing technical features, they are not to be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of the technical features indicated.

In the description of the present invention, unless there is an explicit limitation, the words such as setting, installation, connection, etc. should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above words in combination with the specific contents of the technical solution.

Referring to fig. 1 and 2, a temperature-sensitive water circulation system according to an embodiment of the present invention will be described below.

As shown in fig. 1 and 2, a water circulation system capable of sensing temperature includes a heating tank 100, a sub-tank 200, a chemical container 300, a temperature sensing assembly and a heater 830, wherein the heating tank 100 is provided with a water injection pipe 500 and a return pipe 600, the water injection pipe 500 is used for adding a heating liquid into the heating tank 100, the liquid can be water or other heating media, the sub-tank 200 is connected to the water injection pipe 500 and the return pipe 600, the return pipe 600 returns the liquid in the heating tank 100 to the sub-tank 200 for reheating and maintaining the temperature of the circulating liquid, the heating tank 100, the return pipe 600, the sub-tank 200 and the water injection pipe 500 constitute a heating circulation assembly, and the heating liquid circulates in the heating circulation assembly. The chemical liquid container 300 is disposed in the heating tank 100, the liquid to be heated is placed in the chemical liquid container 300, and the heating liquid in the heating tank 100 transfers heat to the chemical liquid container 300, thereby uniformly heating the chemical liquid and achieving mild heating. The adopted liquid heating mode avoids uneven local heating temperature. The temperature sensing assembly includes a first temperature sensor 410 disposed in the chemical solution container 300 and a second temperature sensor 420 disposed in the heating tank 100, wherein the first temperature sensor 410 is used for detecting and determining the heating temperature of the chemical solution, and the second temperature sensor 420 is used for sensing and controlling the heating temperature in the heating tank 100. In this embodiment, the liquid temperature in the heating tank 100 is 88-95 ℃, the liquid temperature in the liquid medicine container 300 should be 75-80 ℃, and in addition, the liquid temperature and the liquid temperature can be reasonably adjusted according to actual needs to adapt to the processing of the liquid medicine. A heater 830 is provided in sub-sump 200 for heating the liquid in sub-sump 200 to provide a continuous supply of heated liquid to heating tank 100 through water injection pipe 500.

In some embodiments of the present invention, the water circulation system capable of sensing temperature further comprises a liquid level sensor 820, wherein the liquid level sensor 820 is disposed in the liquid collection sub-tank 200, and can detect the liquid level line in the liquid collection sub-tank 200. The auxiliary liquid collecting tank 200 is also connected with a liquid supplementing pipe 700, and the liquid supplementing pipe 700 is connected with an external liquid device to provide liquid for heating. Because the liquid can have the volatilization phenomenon in the heating process, the liquid level surface can descend constantly, and when the liquid level surface reaches the liquid level line, liquid supplementing pipe 700 provides the heating liquid for liquid collecting auxiliary tank 200, and the liquid is supplemented in time, so that the circulation quantity of the heating liquid in the water circulation is kept, and the uniform heating process is ensured.

Specifically, but temperature-sensing's water circulating system still includes master controller 800, master controller 800 respectively with first temperature sensing 410, second temperature sensor 420 and liquid level inductor 820 electric connection, through the temperature in first temperature sensing 410, the response of second temperature sensor 420 collection liquid auxiliary tank 200 and the liquid medicine container 300, manage and control the heating liquid and the liquid medicine temperature. The heater 830 includes a plurality of heating pipes, and the heating pipe of this embodiment is equipped with six and evenly distributed in collection liquid auxiliary tank 200, and heater 830 and master controller 800 electric connection, first temperature sensor 410 and second temperature sensor 420 send the signal to master controller 800, and master controller 800 heats in order to control the heating liquid temperature through controlling heater 830.

More specifically, the temperature sensing element comprises a third temperature sensor 430, the third temperature sensor 430 is disposed in the liquid collecting sub-tank 200 and electrically connected to the main controller 800, and the main controller 800 controls the circulation heating element through the temperature sensing element and the heater 830. The water circulation system further comprises an alarm device 810, the alarm device 810 is electrically connected with the main controller 800, the alarm device 810 can be a warning lamp and an alarm, and when the liquid level line is lower than a warning value or the temperature is lower than the warning value, the alarm device 810 gives an alarm to remind a worker.

In some embodiments of the present invention, an automatic valve is disposed on the fluid infusion pipe 700, the liquid level sensor 820 and the automatic valve are electrically connected, and further electrically connected to the main controller 800, when the liquid level sensor 820 detects that the liquid level line is low, the electric valve is controlled to open, so as to supplement the heating fluid for the heating cycle assembly. In addition, automatic valves, which may be solenoid valves or other electrically controlled valve components, may be similarly provided on the water injection pipe 500 and the return pipe 600 to control the flow of the liquid between the sub-sump 200 and the heating sump 100.

The utility model discloses an in some embodiments, heating tank 100 and liquid medicine container 300 all adopt stainless steel material to make, and the stainless steel has corrosion-resistant, the good characteristics of heat transfer efficiency, and the lateral wall thickness of heating tank 100 is 5mm, and the lateral wall thickness of liquid medicine container 300 is 2mm, can reach fine heat transfer effect, in addition, still can rationally select lateral wall thickness according to actual conditions.

In some embodiments of the present invention, the water injection pipes 500 are provided in three and are disposed at the bottom of the heating tank 100, and the sub-tank 200 can circulate the liquid between the heating tank 100 and the sub-tank 200 by the liquid level communication. The return pipe 600 is provided at the middle upper portion of the heating tank 100 and connected between the heating tank 100 and the sub-tank 200, and in the present embodiment, only one return pipe 600 is provided, and the return pipe 600 is provided at the middle lower portion of the heating tank 100, so that the liquid level in the heating tank 100 can be maintained, and when the liquid level in the heating tank 100 reaches the position of the return pipe 600, the liquid is returned to the sub-tank 200 through the return pipe 600. To achieve the liquid circulation of the heating circulation assembly, a water pump or other hydraulic pushing means may be provided on the water injection pipe 500 to push the liquid circulation.

The embodiments of the present invention have been described in detail with reference to the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made without departing from the spirit of the present invention within the knowledge of those skilled in the art.

Claims (10)

1. A temperature-sensible water circulation system, comprising:

the water injection device comprises a heating tank (100), wherein a water injection pipe (500) and a return pipe (600) are arranged on the heating tank (100);

the auxiliary liquid collecting tank (200), the auxiliary liquid collecting tank (200) is respectively connected with the water injection pipe (500) and the return pipe (600), and the heating tank (100), the return pipe (600), the auxiliary liquid collecting tank (200) and the water injection pipe (500) form a heating circulation assembly;

a chemical liquid container (300) disposed in the heating tank (100);

a temperature sensing unit including a first temperature sensor (410) disposed in the chemical solution container (300) and a second temperature sensor (420) disposed in the heating tank (100);

and a heater (830) disposed in the sub sump (200).

2. The water circulation system capable of sensing temperature according to claim 1, further comprising a liquid level sensor (820), wherein the liquid level sensor (820) is arranged on the sub-sump (200), and a liquid replenishing pipe (700) is further connected to the sub-sump (200).

3. The temperature-sensing water circulation system according to claim 2, further comprising a main controller (800), wherein the main controller (800) is electrically connected to the first temperature sensor (410), the second temperature sensor (420) and the liquid level sensor (820), respectively.

4. The temperature-sensing water circulation system according to claim 3, wherein the temperature sensing assembly further comprises a third temperature sensor (430) disposed in the liquid collecting sub-tank (200), the third temperature sensor (430) being electrically connected to the main controller (800).

5. The temperature-sensitive water circulation system according to claim 3, further comprising an alarm device (810), wherein the alarm device (810) is electrically connected to the main controller (800).

6. The temperature-sensitive water circulation system according to claim 2, wherein an automatic valve is disposed on the fluid-replenishing pipe (700), and the fluid level sensor (820) is electrically connected to the automatic valve.

7. The temperature-sensible water circulation system according to any one of claims 1 to 6, wherein said heating tank (100) and said medical fluid container (300) are made of stainless steel, a sidewall thickness of said heating tank (100) is 5mm, and a sidewall thickness of said medical fluid container (300) is 2 mm.

8. The temperature-sensible water circulation system according to any one of claims 1 to 6, wherein said water injection pipes (500) are provided in three and are disposed at the bottom of said heating tank (100).

9. Temperature-sensible water circulation system according to any one of claims 1 to 6, characterized in that said return pipe (600) is arranged in the upper middle portion of said heating tank (100), being connected between said heating tank (100) and said sub-sump (200).

10. Temperature-sensible water circulation system according to any one of claims 1 to 6, characterized in that said heater (830) comprises six heating pipes, which are evenly distributed within said liquid collecting sub-tank (200).

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