CN214373266U - Cylindrical mirror becomes dish detection device - Google Patents
Cylindrical mirror becomes dish detection device Download PDFInfo
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- CN214373266U CN214373266U CN202120356930.6U CN202120356930U CN214373266U CN 214373266 U CN214373266 U CN 214373266U CN 202120356930 U CN202120356930 U CN 202120356930U CN 214373266 U CN214373266 U CN 214373266U
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- cylindrical mirror
- dovetail groove
- moving block
- detected
- fixed
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Abstract
The utility model discloses a cylindrical mirror forming disc detection device, which comprises a five-dimensional adjusting frame, a fixed table and a sliding block, wherein the fixed table is fixedly connected with the five-dimensional adjusting frame, and a dovetail groove is arranged on the fixed table; the sliding block is embedded into the dovetail groove and slides along the dovetail groove transversely; the front end of the moving block is fixedly connected with the glass gluing tool, the cylindrical mirror to be detected is fixed on the glass gluing tool, and the Zygo interferometer is positioned at the front end of the cylindrical mirror to be detected and used for measuring the R value and the surface type of the cylindrical mirror. The cylindrical mirror coiling detection device of the utility model increases the caliber area for measurement after moving by sliding the moving block in the dovetail groove, and realizes the function of detecting the surface type without a bottom plate by finely adjusting the angle and horizontally moving the cylindrical mirror to be detected through the five-dimensional adjusting frame; the device of the utility model is simple in structure, convenient dismantlement, solved the detection face type and the R value problem of full region on the dish, improved the work efficiency that cylindrical mirror processing detected.
Description
Technical Field
The utility model relates to a cylindrical mirror becomes dish detection device.
Background
In conventional production trials, a vertical interferometer is generally used for measuring the R value of the cylindrical mirror for finished products. The R value can only be measured in the central area, and the edge area cannot be measured due to the universality of the jig and the equipment. The finished product can not measure the surface type on the vertical interferometer, needs to be discharged, is cleaned and then is sent to the horizontal interferometer for single-chip R value measurement and surface type measurement, and the measurement mode can be used for more than 90% of types of cylindrical mirrors. However, as long as the product is in a disk, and is not detected in a single chip, two situations occur: 1. the on-disk measured R-value is the local central region; 2. the surface type cannot be checked on the disc.
SUMMERY OF THE UTILITY MODEL
Utility model purpose: the utility model discloses can't examine the face type and set up on measuring the R value and be local central zone's problem to what exist among the prior art, provide a cylindrical mirror becomes a set detection device, this detection device detects the angle and the horizontal position of cylindrical mirror through the adjustment, has realized that the R value and the face type that need not the lower wall and can detect into a set product to the work efficiency that cylindrical mirror processing detected has been improved.
The technical scheme is as follows: the cylindrical mirror forming detection device comprises a five-dimensional adjusting frame, a fixed table and a sliding block, wherein a dovetail groove is arranged on the fixed table, and the fixed table is fixedly connected with the five-dimensional adjusting frame; the sliding block is embedded into the dovetail groove and slides along the dovetail groove transversely; the front end of the moving block is fixedly connected with the glass gluing tool, the cylindrical mirror to be detected is fixed on the glass gluing tool, and the Zygo interferometer is positioned at the front end of the cylindrical mirror to be detected and used for measuring the R value and the surface type of the cylindrical mirror.
The cylindrical mirror to be detected is fixed on the glass gluing tool through asphalt, and the other end of the glass gluing tool is fixedly connected with the moving block through a bolt.
The fixed platform is provided with a fixed hole, an internal thread is arranged in the fixed hole, and after the moving block moves in place along the dovetail groove, the moving block is screwed into the fixed hole through a bolt to fix the position of the moving block in the dovetail groove.
Has the advantages that: the cylindrical mirror coiling detection device of the utility model increases the caliber area for measurement after moving by sliding the moving block in the dovetail groove, and realizes the function of detecting the surface type without a bottom plate by finely adjusting the angle and horizontally moving the cylindrical mirror to be detected through the five-dimensional adjusting frame; the device of the utility model is simple in structure, convenient dismantlement, solved the detection face type and the R value problem of full region on the dish, improved the work efficiency that cylindrical mirror processing detected.
Drawings
Fig. 1 is a schematic structural diagram of the cylindrical mirror forming disc detecting device of the present invention;
FIG. 2 is an assembly view of the moving block and the stationary stage;
FIG. 3 is a front view of the stationary table;
FIG. 4 is a side view of the stationary platen;
FIG. 5 is a front view of the moving block;
figure 6 is a side view of the moving mass.
Detailed Description
As shown in fig. 1 to 6, the cylindrical mirror forming detection device of the present invention includes a five-dimensional adjusting frame 1 and a fixing table 2 driven by the five-dimensional adjusting frame 1 to adjust a position, wherein a dovetail groove is formed on the fixing table 2; the utility model discloses cylindrical mirror becomes dish detection device still including embedding in the dovetail and along dovetail lateral sliding's movable block 3, the front end and the 4 fixed connection of glass viscose instrument of movable block 3 wait to detect cylindrical mirror 5 and fix on glass viscose instrument 4, still including being located wait to detect cylindrical mirror 5 front end, be used for measuring cylindrical mirror 5R value and surface type's zygo interferometer 6.
The cylindrical mirror 5 to be detected is fixed on the glass gluing tool 4 (front end) through asphalt, and the other end of the glass gluing tool 4 is fixedly connected with the moving block 3 through bolts.
The five-dimensional adjusting frame 1 has five degrees of freedom of three-dimensional translation and two-dimensional angular rotation, the fixed platform 2 is fixed on the five-dimensional adjusting frame 1, and the fixed platform 2 realizes the angle adjustment through the five-dimensional adjusting frame 1.
The fixed station 2 comprises a connecting piece 21 and a sliding platform 22, a dovetail groove is formed in the sliding platform 22, the moving block 3 is of a trapezoidal structure and is in sliding connection with the dovetail groove in a matched mode, an installation station 31 used for being connected with the glass gluing tool 4 is further arranged on the moving block 3, and the installation station 31 is fixedly connected with the glass gluing tool 4 through bolts.
The fixed table 2 is further provided with a fixed hole 23, and when the moving block 3 moves to a corresponding position or a required position along the dovetail groove, the bolt extends into the fixed hole 23 (the fixed hole 23 is provided with internal threads) to fix the moving block 3.
The utility model discloses cylindrical mirror becomes dish detection device's working process: after the cylindrical mirror 5 is machined, a lower disc (the lower disc means that the cylindrical mirror 5 is taken down from the glass gluing tool 4) is not needed, the fixed table 2 is fixedly connected with the five-dimensional adjusting frame 1 through bolts, the moving block 3 is embedded into a dovetail groove of the fixed table 2 from the side edge, the glass gluing tool 4 is fixed onto the mounting table 31 of the moving block 3 through bolts, and the R value and the surface type of the cylindrical mirror 5 are measured through the zygo interferometer 6.
During measurement, the angle is adjusted through the five-dimensional adjusting frame 1 to meet the test condition; then moving the moving block 3 along the dovetail groove to realize the measurement of different positions of the cylindrical mirror 5; after the moving block is moved in place, the moving block 3 is screwed into the fixing hole 23 through a bolt, so that the position of the moving block in the dovetail groove is fixed, and the position deviation is prevented.
The zygo interferometer 6 measures the cylindrical mirror 5, can directly measure the R value of the cylindrical mirror 5, and simultaneously observe the surface quality through interference fringes, if the measurement is unqualified, the glass gluing tool 4 can be directly taken down from the moving block 3, the cylindrical mirror 5 is subjected to secondary processing, and then the glass gluing tool 4 is installed on the moving block 3 through bolts again for measurement, so that the cylindrical mirror 5 is prevented from being directly taken down from the glass gluing tool 4 repeatedly.
Claims (3)
1. The utility model provides a cylindrical mirror becomes dish detection device which characterized in that: the five-dimensional adjusting mechanism comprises a five-dimensional adjusting frame, a fixed table and a sliding block, wherein the fixed table is fixedly connected with the five-dimensional adjusting frame and is provided with a dovetail groove; the sliding block is embedded into the dovetail groove and slides along the dovetail groove transversely; the front end of the moving block is fixedly connected with the glass gluing tool, the cylindrical mirror to be detected is fixed on the glass gluing tool, and the Zygo interferometer is positioned at the front end of the cylindrical mirror to be detected and used for measuring the R value and the surface type of the cylindrical mirror.
2. The cylindrical mirror formed disk inspection device of claim 1, wherein: the cylindrical mirror to be detected is fixed on the glass gluing tool through asphalt, and the other end of the glass gluing tool is fixedly connected with the moving block through a bolt.
3. The cylindrical mirror formed disk inspection device of claim 1, wherein: the fixed table is further provided with a fixed hole, internal threads are arranged in the fixed hole, and after the moving block moves in place along the dovetail groove, the moving block is screwed into the fixed hole through a bolt to fix the position of the moving block in the dovetail groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120356930.6U CN214373266U (en) | 2021-02-09 | 2021-02-09 | Cylindrical mirror becomes dish detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120356930.6U CN214373266U (en) | 2021-02-09 | 2021-02-09 | Cylindrical mirror becomes dish detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214373266U true CN214373266U (en) | 2021-10-08 |
Family
ID=77964521
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120356930.6U Active CN214373266U (en) | 2021-02-09 | 2021-02-09 | Cylindrical mirror becomes dish detection device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214373266U (en) |
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2021
- 2021-02-09 CN CN202120356930.6U patent/CN214373266U/en active Active
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