CN214322913U - Multi-machine continuous polishing device - Google Patents
Multi-machine continuous polishing device Download PDFInfo
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- CN214322913U CN214322913U CN202023307377.1U CN202023307377U CN214322913U CN 214322913 U CN214322913 U CN 214322913U CN 202023307377 U CN202023307377 U CN 202023307377U CN 214322913 U CN214322913 U CN 214322913U
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- 238000005498 polishing Methods 0.000 title claims abstract description 139
- 239000000919 ceramic Substances 0.000 claims abstract description 47
- 230000007246 mechanism Effects 0.000 claims abstract description 12
- 238000001514 detection method Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 230000003749 cleanliness Effects 0.000 abstract description 3
- 230000007115 recruitment Effects 0.000 abstract description 2
- 230000002349 favourable effect Effects 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 10
- 229910052710 silicon Inorganic materials 0.000 description 10
- 239000010703 silicon Substances 0.000 description 10
- 238000000034 method Methods 0.000 description 8
- 230000009471 action Effects 0.000 description 4
- 239000003795 chemical substances by application Substances 0.000 description 2
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- 239000000463 material Substances 0.000 description 2
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- 230000003746 surface roughness Effects 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008033 biological extinction Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 239000010985 leather Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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- 238000003672 processing method Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000007514 turning Methods 0.000 description 1
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Abstract
The utility model discloses a multimachine is throwing device even, including removing skip, manipulator and ceramic dish, the middle part of moving the skip is provided with feed mechanism, one side of feed mechanism is provided with ceramic dish, remove skip upper surface one side fixed connection entry flange box one end, the other end fixed connection rough polishing machine of entry flange box, rough polishing machine's setting is at the upper surface of drive case, be provided with the manipulator between rough polishing machine and the drive case, one side of rough polishing machine connects the thin machine of throwing of disk box fixed connection through the middle part, one side of thin machine of throwing is through the middle part and connects the fine machine of throwing of disk box fixed connection, the fine machine of throwing of disk box fixed connection is received through the middle part to one side of thin machine of throwing. The utility model discloses an it is automatic, reduced intensity of labour, production efficiency also obtains improving, and is compacter on the production beat, and the system is automatic, has reduced recruitment quantity, reduces personnel to the interference factor in clean workshop, and the cleanliness factor level in keeping the workshop that can be better is favorable to improving the product quality.
Description
Technical Field
The utility model belongs to the technical field of the polishing, concretely relates to multimachine is throwing device even.
Background
Polishing means a processing method for obtaining a bright and flat surface by reducing the surface roughness of a work by the action of a mechanical, chemical or electrochemical means, which is a method for obtaining a bright and flat surface by modifying the surface of a work by a polishing tool and abrasive particles or other polishing media, and which cannot improve the dimensional accuracy or geometric accuracy of the work but aims to obtain a smooth surface or a mirror surface gloss, and sometimes eliminates gloss (dulling), and generally uses a polishing wheel as a polishing tool, which is generally formed by stacking a plurality of layers of canvas, felt or leather, and is clamped at both sides by metal disks, and a rim thereof is coated with a polishing agent formed by uniformly mixing a fine abrasive and grease, and when polishing, the polishing wheel rotating at a high speed (the peripheral speed is more than 20 m/sec) is pressed against the work to cause the abrasive to roll and cut a minute amount on the surface of the work, thereby obtaining a bright processed surface, the surface roughness can reach Ra0.63-0.01 microns generally, when a non-greasy extinction polishing agent is adopted, the bright surface can be extinguished to improve the appearance, and when the bearing steel balls are produced in large batches, a roller polishing method is often adopted.
The existing polishing technology has the following problems: at present, a plurality of devices suitable for polishing single surfaces of hard and brittle materials such as silicon wafers, gallium arsenide wafers, sapphire wafers and the like are available in the market. However, currently, the single-machine type silicon wafer polishing machine mainly works in a single-machine mode, when a silicon wafer is subjected to single-surface polishing, the single-machine type silicon wafer polishing machine generally comprises a plurality of procedures of rough polishing, fine polishing and fine polishing, polishing consumables adopted in different procedures are different, such as a polishing pad, polishing solution and the like, so different polishing procedures are usually completed on different devices, the rough polishing time and the fine polishing time are longer relative to the fine polishing time, when a single machine is operated, the single machine is transported from rough polishing to fine polishing and then to fine polishing by manpower, a workpiece processed by the rough polishing machine needs to be transported to a transport trolley, the transport trolley needs to be pushed to the fine polishing machine, the workpiece is placed on the fine polishing machine, if a disc on the fine polishing machine is not processed, waiting is needed, the period of time is longer, the same is true from fine polishing to fine polishing, the polishing solution remained on the silicon wafer can further corrode the surface of the wafer, the processing time of the next step is prolonged, and the processing efficiency is lowered, even the quality of the product is reduced, the single-side polishing workpiece is generally stuck or adsorbed on a ceramic disc, the ceramic disc is heavy, and the labor intensity of manual carrying is high.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a multimachine is thrown device even to solve the single face burnishing machine unit mode of operation who provides among the above-mentioned background art, improve equipment's automation level improves machining efficiency and product quality, reduces intensity of labour and the problem of recruitment quantity.
In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a multimachine is throwing device even, is including removing skip, manipulator and ceramic dish, the middle part of removing the skip is provided with feed mechanism, one side of feed mechanism is provided with the ceramic dish, remove skip upper surface one side fixed connection entry catch basin box one end, the other end fixed connection rough polishing machine of entry catch basin box, the setting of rough polishing machine is at the upper surface of drive case, be provided with the manipulator between rough polishing machine and the drive case, the lower fixed surface of drive case installs the gyro wheel, one side of rough polishing machine is through the middle part catch basin box fixed connection fine polishing machine, one side of fine polishing machine is through export catch basin box fixed connection tablet taking.
Preferably, the connection part of the inlet interface box and the mobile skip is arranged on the upper side of the ceramic disc.
Preferably, the rough polishing machine downside is provided with two the manipulator, two the manipulator sets up perpendicularly, and sets up respectively in the downside of entry flange box and middle part flange box, the downside of carefully throwing machine and smart machine of throwing all sets up one the manipulator, and be located the downside of middle part flange box and export flange box respectively.
Preferably, the fine polishing machine and the fine polishing machine are both arranged on the upper surface of the driving box.
Preferably, the rough polishing machine, the fine polishing machine and the fine polishing machine are all provided with four ceramic discs which are uniformly distributed.
Preferably, a ceramic disc is arranged between the sheet taking port and the outlet tray receiving box.
Preferably, the middle parts of the rough polishing machine, the fine polishing machine and the fine polishing machine are respectively provided with a central guide wheel, and the edges of the central guide wheel and the ceramic disc are respectively provided with a detection switch.
Compared with the prior art, the utility model provides a multimachine is throwing device even possesses following beneficial effect: the utility model is provided with a rough polishing machine, a fine polishing machine and a fine polishing machine, and is connected into a same device through the transmission of the receiving disc and the mechanical arm, the operation does not need manual transportation, the labor intensity of manual transportation is reduced, the processing time can be effectively reduced, the processing efficiency is improved, the time for transportation and waiting is shorter, thereby the surface corrosion of the wafer caused by the polishing solution remained on the surface of the silicon wafer is reduced, the time for the next processing is effectively reduced, the decrease of the product quality is reduced, the processing efficiency is high, the mechanical arm is adopted to automatically grasp the ceramic disc, the operation is more convenient and rapid, the mechanical arm has the functions of integral arm lifting, integral swinging, arm stretching and turning, the grasping requirements of the mechanical arm in different heights and positions and different placing modes are met, the receiving disc box can effectively prevent the ceramic disc from accidentally falling and breaking in the carrying process, the automatic silicon wafer cleaning machine has the advantages that automation is realized, labor intensity is reduced, production efficiency is improved, the machine is more compact in production rhythm, waiting time of an unwashed silicon wafer is reduced, the silicon wafer is prevented from being corroded by residual polishing liquid for a long time, product quality is greatly improved, system automation is realized, the number of workers is reduced, interference factors of personnel to a clean workshop are reduced, cleanliness level of the workshop can be well maintained, and improvement of product quality is facilitated.
Drawings
The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention, and together with the description, do not constitute a limitation of the invention, in which:
fig. 1 is a schematic structural view of a multi-machine continuous polishing device provided by the present invention;
fig. 2 is a schematic structural view of the rough polishing machine provided by the utility model;
in the figure: 1. moving the skip car; 2. a feeding mechanism; 3. an entrance interface box; 4. a manipulator; 5. a rough polishing machine; 6. the middle part is connected with a disc box; 7. finely polishing the machine; 8. a fine polishing machine; 9. an outlet interface box; 10. taking a tablet opening; 11. a ceramic pan; 12. a drive box; 13. a roller; 14. a center guide wheel; 15. and (6) detecting a switch.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-2, the present invention provides a multi-machine continuous polishing device, comprising: a multi-machine continuous polishing device comprises a movable skip car 1, a mechanical arm 4 and a ceramic disc 11, wherein the device needs to realize automatic processing and the mechanical arm 4 grabs the ceramic disc 11 on the device, the ceramic disc 11 needs to have a fixed position, a polishing head of the device automatically falls down without being biased, the mechanical arm 4 does not also be biased, and the device needs to be provided with an automatic positioning system of the ceramic disc 11; the ceramic disc 11 is placed on a large disc of the device, a central guide wheel 14 capable of lifting and rotating is arranged at the upper part of the large disc, a swingable outer guide wheel is arranged on the periphery of the large disc and is matched with the central guide wheel 14 to realize automatic positioning of the ceramic disc 11, a detection switch 15 is arranged on the outer guide wheel and is used for judging whether the ceramic disc 11 exists at the position and uploading signals, a feeding mechanism 2 is arranged in the middle of a movable skip car 1, a ceramic disc 11 is arranged on one side of the feeding mechanism 2, one side of the upper surface of the movable skip car 1 is fixedly connected with one end of an inlet receiving box 3, the other end of the inlet receiving box 3 is fixedly connected with a rough polishing machine 5, the rough polishing machine 5 is arranged on the upper surface of a driving box 12, a mechanical hand 4 is arranged between the rough polishing machine 5 and the driving box 12, the mechanical hand 4 is used for grabbing the ceramic disc 11, the mechanical hand 4 grabs the ceramic disc 11 by adopting a vacuum adsorption method, the ceramic disc 11 is heavier, no commercialized vacuum chuck is available in the market, the mechanical arm 4 has an arm overall lifting function, an overall swinging function, an arm stretching and overturning function and meets the grabbing requirements of the mechanical arm 4 on different heights, different positions and different placing modes, a roller 13 is fixedly installed on the lower surface of a driving box 12, one side of a rough polishing machine 5 is fixedly connected with a fine polishing machine 7 through a middle disk receiving box 6, one side of the fine polishing machine 7 is fixedly connected with a fine polishing machine 8 through the middle disk receiving box 6, one side of the fine polishing machine 8 is fixedly connected with a disk taking port 10 through an outlet disk receiving box 9, the mechanical arm 4 can smoothly place ceramic disks 11 on the device or take the ceramic disks 11 from the device, real-time communication is required between the ceramic disks and the fine polishing machine 8, signals are given to the mechanical arm 4 by the device, whether disk placing or taking conditions are met, and disk placing or taking actions by the mechanical arm 4 are met; the robot 4 also has a signal to the device whether the ceramic discs 11 have been gripped or placed, and the device can only determine whether to perform the next action to match the further action of the robot 4 until all the ceramic discs 11 have been taken or placed. The manipulator 4 at the feed end of the system is communicated with the feeding machine and the first device, the manipulator 4 between the devices is communicated with the devices at the left side and the right side, and the manipulator 4 at the discharge end is communicated with the last device and the film taking port 10.
Because the rough polishing time is longest, the fine polishing time is longer, the fine polishing time is relatively shortest, and in order to make the production rhythm of the whole production line more efficient, the system is generally provided with four or five devices, the rough polishing is divided into two times or the fine polishing is also divided into two times which are respectively carried out on different devices, the working power of the rough polishing machine 5 is smaller than that of the fine polishing machine 7 and smaller than that of the fine polishing machine 8, namely the rough polishing machine 5, the fine polishing machine 7 and the fine polishing machine 8 indicate different rotating speeds of the ceramic disc 11, the joint of the inlet receiving box 3 and the mobile skip 1 is arranged on the upper side of the ceramic disc 11, the lower side of the rough polishing machine 5 is provided with two manipulators 4, the two manipulators 4 are vertically arranged and are respectively arranged on the lower sides of the inlet receiving box 3 and the middle receiving box 6, the lower sides of the fine polishing machine 7 and the fine polishing machine 8 are respectively provided with one manipulator 4 and are respectively arranged on the lower sides of the middle receiving box 6 and the outlet receiving box 9, the fine polishing machine 7 and the fine polishing machine 8 are respectively arranged on the upper surface of the drive box 12, four ceramic discs 11 are uniformly distributed on the surfaces of the rough polishing machine 5, the fine polishing machine 7 and the fine polishing machine 8, the ceramic discs 11 are arranged between the sheet taking port 10 and the outlet receiving box 9, the central guide wheels 14 are arranged in the middle of the rough polishing machine 5, the fine polishing machine 7 and the fine polishing machine 8, and the detection switches 15 are arranged at the edges of the ceramic discs 11, so that the system is automatic, the number of workers is reduced, interference factors of personnel on a clean workshop are reduced, the cleanliness level of the workshop can be well kept, and the improvement of the product quality is facilitated.
The utility model discloses a theory of operation and use flow: after the utility model is installed, the ceramic disc 11 stuck with silicon wafers is loaded on the movable skip car 1, the movable skip car 1 is close to the feeding mechanism 2 and is positioned, the feeding mechanism 2 moves the ceramic disc 11 on the movable skip car 1 to the material taking position, the mechanical arm 4 carries the ceramic disc 11 to the rough polishing machine 5, after the rough polishing machine 5 is processed, the mechanical arm 4 picks and places the ceramic disc 11 on the rough polishing machine 5 to the fine polishing machine 7, after the fine polishing machine 7 is processed, the mechanical arm 4 picks and places the ceramic disc 11 on the fine polishing machine 8, finally, the mechanical arm 4 picks and places the ceramic disc 11 processed by the fine polishing machine 8 to the piece taking port 10, an inlet receiving box 3 is arranged in front of the feeding mechanism 2 and the rough polishing machine 5, a middle receiving box 6 is arranged between the rough polishing machine 5 and the fine polishing machine 7 and the fine polishing machine 8, an outlet receiving box 9 is arranged between the fine polishing machine 8 and the piece taking port 10, each tray box is used for preventing the ceramic tray 11 from accidentally falling off and being broken in the carrying process.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (7)
1. The utility model provides a multimachine is thrown device even, includes removal skip (1), manipulator (4) and ceramic dish (11), its characterized in that: a feeding mechanism (2) is arranged in the middle of the movable skip car (1), a ceramic disc (11) is arranged on one side of the feeding mechanism (2), one side of the upper surface of the movable skip car (1) is fixedly connected with one end of the inlet connecting box (3), the other end of the inlet receiving box (3) is fixedly connected with a rough polishing machine (5), the rough polishing machine (5) is arranged on the upper surface of the drive box (12), a manipulator (4) is arranged between the rough polishing machine (5) and the driving box (12), the lower surface of the drive box (12) is fixedly provided with a roller (13), one side of the rough polishing machine (5) is fixedly connected with the fine polishing machine (7) through a middle disk receiving box (6), one side of the fine polishing machine (7) is fixedly connected with a fine polishing machine (8) through a middle disc receiving box (6), one side of the fine polishing machine (8) is fixedly connected with a sheet taking port (10) through an outlet receiving box (9).
2. A multi-machine continuous polishing device as claimed in claim 1, wherein: the connection part of the inlet connecting box (3) and the mobile skip (1) is arranged on the upper side of the ceramic disc (11).
3. A multi-machine continuous polishing device as claimed in claim 1, wherein: the utility model discloses a fine polishing machine, including rough throwing machine (5), manipulator (4) are provided with two manipulator (4), two manipulator (4) set up perpendicularly, and set up respectively and connect the downside of disk box (3) and middle part to connect the disk box (6) in the entry, the downside of machine (7) is thrown with the essence is thrown all and is set up one manipulator (4), and is located the downside that middle part connects disk box (6) and export to connect disk box (9) respectively.
4. A multi-machine continuous polishing device as claimed in claim 1, wherein: the fine polishing machine (7) and the fine polishing machine (8) are both arranged on the upper surface of the driving box (12).
5. A multi-machine continuous polishing device as claimed in claim 1, wherein: the four ceramic discs (11) are arranged on the surfaces of the rough polishing machine (5), the fine polishing machine (7) and the fine polishing machine (8) and are uniformly distributed.
6. A multi-machine continuous polishing device as claimed in claim 1, wherein: a ceramic disc (11) is arranged between the tablet taking port (10) and the outlet disk receiving box (9).
7. A multi-machine continuous polishing device as claimed in claim 1, wherein: the middle parts of the rough polishing machine (5), the fine polishing machine (7) and the fine polishing machine (8) are respectively provided with a center guide wheel (14), and the edges of the rough polishing machine, the fine polishing machine and the ceramic disc (11) are respectively provided with a detection switch (15).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023307377.1U CN214322913U (en) | 2020-12-30 | 2020-12-30 | Multi-machine continuous polishing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023307377.1U CN214322913U (en) | 2020-12-30 | 2020-12-30 | Multi-machine continuous polishing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214322913U true CN214322913U (en) | 2021-10-01 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202023307377.1U Active CN214322913U (en) | 2020-12-30 | 2020-12-30 | Multi-machine continuous polishing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214322913U (en) |
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2020
- 2020-12-30 CN CN202023307377.1U patent/CN214322913U/en active Active
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 215134 East workshop, 1st floor, No.22, aigehao Road, Weitang Town, Xiangcheng District, Suzhou City, Jiangsu Province Patentee after: Suzhou Bohongyuan Equipment Co.,Ltd. Country or region after: China Address before: 215134 East workshop, 1st floor, No.22, aigehao Road, Weitang Town, Xiangcheng District, Suzhou City, Jiangsu Province Patentee before: SUZHOU BOHONGYUAN MACHINERY MANUFACTURING Co.,Ltd. Country or region before: China |
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| CP03 | Change of name, title or address |