CN214320977U - Cleaning device for polishing sheet processing - Google Patents
Cleaning device for polishing sheet processing Download PDFInfo
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- CN214320977U CN214320977U CN202022684460.4U CN202022684460U CN214320977U CN 214320977 U CN214320977 U CN 214320977U CN 202022684460 U CN202022684460 U CN 202022684460U CN 214320977 U CN214320977 U CN 214320977U
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- fixedly connected
- cleaning box
- cleaning device
- cleaning
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Abstract
本实用新型提供一种抛光片加工用清洗装置，涉及半导体领域。该抛光片加工用清洗装置，包括清洗箱，所述清洗箱的左侧固定连接有进水连接头，所述进水连接头的右侧固定连接有导管，所述导管远离进水连接头的一端贯穿清洗箱并延伸至清洗箱的内部，所述导管的下表面固定连接有喷头，所述清洗箱的左右两侧内壁之间搭接有过滤网。该抛光片加工用清洗装置，通过电机、转盘、镂空件、连接件、固定轴、转环、扇形齿板、移动杆、齿块和刷板的相互配合，达到在进行冲洗过程中，利用刷板左右刷洗，增加清洁效果，解决了目前抛光片加工用清洗装置多数是采用冲洗，而冲洗后，硅抛光片表面还是非常容易存在污染物的问题。
The utility model provides a cleaning device for polishing sheet processing, which relates to the field of semiconductors. The cleaning device for polishing sheet processing includes a cleaning box, a water inlet connector is fixedly connected to the left side of the cleaning box, and a conduit is fixedly connected to the right side of the water inlet connector, and the conduit is far away from the water inlet connector. One end penetrates through the cleaning box and extends to the inside of the cleaning box, the lower surface of the conduit is fixedly connected with a spray head, and a filter screen is overlapped between the left and right inner walls of the cleaning box. The cleaning device for polishing sheet processing, through the mutual cooperation of the motor, the turntable, the hollow piece, the connecting piece, the fixed shaft, the swivel ring, the sector tooth plate, the moving rod, the tooth block and the brush plate, achieves the use of brushes during the rinsing process. The plate is scrubbed left and right to increase the cleaning effect, which solves the problem that most of the cleaning devices used for polishing wafer processing currently use rinsing, and after rinsing, the surface of the silicon polishing wafer is still very prone to contamination.
Description
Technical Field
The utility model relates to the field of semiconductor technology, specifically a belt cleaning device is used in polishing piece processing.
Background
The conductor is a material having electrical conductivity between the conductor and the insulator at normal temperature. Semiconductor refers to a material with controllable conductivity ranging from an insulator to a conductor. From the perspective of scientific and technical and economic development, the daily work and life of people are influenced by semiconductors, silicon polishing sheets in the semiconductors need to be cleaned in the processing process, the using effect of pollutants in the silicon polishing sheets can be reduced, most of the cleaning devices for processing the existing polishing sheets adopt washing, and the pollutants are very easily on the surfaces of the silicon polishing sheets after the washing.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a belt cleaning device is used in polishing piece processing has solved present belt cleaning device is used in polishing piece processing and has adopted to wash mostly, and washes the back, and the problem that has the pollutant on silicon polishing piece surface still very easily.
Technical scheme
In order to achieve the above purpose, the utility model discloses a following technical scheme realizes: a cleaning device for polishing sheet processing comprises a cleaning box, wherein a water inlet connector is fixedly connected to the left side of the cleaning box, a guide pipe is fixedly connected to the right side of the water inlet connector, one end, far away from the water inlet connector, of the guide pipe penetrates through the cleaning box and extends to the inside of the cleaning box, a nozzle is fixedly connected to the lower surface of the guide pipe, a filter screen is lapped between the inner walls of the left side and the right side of the cleaning box, a convex block is fixedly connected to the upper surface of the filter screen, through holes communicated with the inside of the cleaning box are formed in the left side and the right side of the cleaning box, a moving rod is movably connected between the two through holes, a brush plate is fixedly connected to the lower surface of the moving rod, a tooth block is fixedly connected to the upper surface of the moving rod, a support is fixedly connected to the top of the cleaning box, a motor is fixedly connected to one end, far away from the cleaning box, and a rotary disc is fixedly connected to the output end of the motor, the front fixedly connected with connecting piece of carousel, the surperficial swing joint of connecting piece has fretwork piece, the bottom fixedly connected with swivel of fretwork piece, the inside swing joint of swivel has the fixed axle, the right side fixedly connected with locating lever of fixed axle, the lower fixed surface of swivel is connected with fan-shaped pinion rack, fan-shaped pinion rack and tooth piece intermeshing.
Furthermore, the left end and the right end of the moving rod are fixedly connected with limiting plates.
Furthermore, a groove is formed in the inner bottom wall of the through hole, a wheel rod is fixedly connected to the inner bottom wall of the groove, a central shaft is fixedly connected to the top end of the wheel rod, and a rolling wheel is sleeved on the surface of the central shaft.
Furthermore, a rolling groove is formed in the lower surface of the moving rod, and the surface of the rolling wheel is in rolling connection with the inside of the rolling groove.
Further, the lower fixed surface of filter screen is connected with the fixed block, the lower fixed surface of fixed block is connected with the bolt.
Furthermore, the inner wall of the cleaning box is fixedly connected with a supporting ring, and one end, far away from the fixing block, of the bolt is connected with the inside of the supporting ring in an inserting mode.
The utility model provides a belt cleaning device is used in polishing piece processing. The method has the following beneficial effects:
1. this belt cleaning device is used in polishing piece processing through mutually supporting of motor, carousel, fretwork piece, connecting piece, fixed axle, change, fan-shaped pinion rack, carriage release lever, tooth piece and brush board, reaches and is rinsing the in-process, utilizes about the brush board to scrub, increases clean effect, has solved present belt cleaning device for polishing piece processing and has adopted to wash, and washes the back, and the silicon polishing piece surface still has the problem of pollutant very easily.
2. This belt cleaning device is used in polishing piece processing through the cooperation of wheel pole, axis and roll wheel, reaches the frictional force that reduces the carriage release lever and remove the in-process, also makes more steady that the carriage release lever removed, through the setting of lug, reaches and carries on spacingly with the silicon polishing piece, and the skew appears in the silicon polishing piece when avoiding scrubbing, through the cooperation of fixed block, backing ring and bolt, reaches and is convenient for change the filter screen.
Drawings
FIG. 1 is a schematic structural view of the present invention;
fig. 2 is an enlarged view of a portion a of fig. 1 according to the present invention.
Wherein, 1 washs case, 2 water inlet connector, 3 pipes, 4 shower nozzles, 5 brush boards, 6 filter screens, 7 supports, 8 motors, 9 fretwork pieces, 10 connecting pieces, 11 fixed axles, 12 locating levers, 13 carousel, 14 swivels, 15 sector toothed plates, 16 movable rods, 17 rolling grooves, 18 limiting plates, 19 tooth piece, 20 fixed block, 21 lug, 22 backing ring, 23 bolt, 24 through-holes, 25 flutings, 26 round poles, 27 center pins, 28 rolling wheel.
Detailed Description
As shown in FIG. 1-2, the embodiment of the present invention provides a cleaning device for polishing pad processing, which comprises a cleaning box 1, a water inlet connector 2 fixedly connected to the left side of the cleaning box 1, a conduit 3 fixedly connected to the right side of the water inlet connector 2, one end of the conduit 3 far away from the water inlet connector 2 penetrating through the cleaning box 1 and extending to the inside of the cleaning box 1, a nozzle 4 fixedly connected to the lower surface of the conduit 3, a filter screen 6 lapped between the inner walls of the left and right sides of the cleaning box 1, a fixed block 20 fixedly connected to the lower surface of the filter screen 6, a bolt 23 fixedly connected to the lower surface of the fixed block 20, a supporting ring 22 fixedly connected to the inner wall of the cleaning box 1, one end of the bolt 23 far away from the fixed block 20 inserted into the supporting ring 22, a bump 21 fixedly connected to the upper surface of the filter screen 6, through holes 24 communicated with the inside of the cleaning box 1 are provided on the left and right sides of the cleaning box 1, movably connected with carriage release lever 16 between two through-holes 24, the equal fixedly connected with limiting plate 18 in both ends about carriage release lever 16, fluting 25 has been seted up to the inner bottom wall of through-hole 24, the inner bottom wall fixedly connected with wheel pole 26 of fluting 25, the top fixedly connected with center pin 27 of wheel pole 26, the surface of center pin 27 has cup jointed rolling wheel 28, rolling groove 17 has been seted up to the lower surface of carriage release lever 16, the inside roll connection of rolling wheel 28's surface and rolling groove 17.
Lower fixed surface of carriage release lever 16 is connected with brush board 5, the last fixed surface of carriage release lever 16 is connected with tooth piece 19, wash case 1's top fixedly connected with support 7, support 7 is kept away from the one end fixedly connected with motor 8 who washs case 1, motor 8's output fixedly connected with carousel 13, the positive fixedly connected with connecting piece 10 of carousel 13, the surperficial swing joint of connecting piece 10 has fretwork 9, the bottom fixedly connected with swivel 14 of fretwork 9, the inside swing joint of swivel 14 has fixed axle 11, the right side fixedly connected with locating lever 12 of fixed axle 11, the lower fixed surface of swivel 14 is connected with fan-shaped pinion rack 15, fan-shaped pinion rack 15 and tooth piece 19 intermeshing.
The working principle is as follows: to treat abluent silicon polished section and place the surface at filter screen 6, wash the during operation at shower nozzle 4, starter motor 8, motor 8 can drive connecting piece 10 and rotate, and connecting piece 10 rotates and to make fretwork 9 and sector gear plate 15 horizontal hunting, and sector gear plate 15 swings the in-process and can stir the pick 19 and drive the carriage release lever 16 and remove, and the carriage release lever 16 is removed and is moved and can drive brush 5 and scrub silicon polished section surface.
Claims (6)
1. The utility model provides a belt cleaning device is used in polishing piece processing, includes washing case (1), its characterized in that: the cleaning box is characterized in that a water inlet connector (2) is fixedly connected to the left side of the cleaning box (1), a guide pipe (3) is fixedly connected to the right side of the water inlet connector (2), one end, far away from the water inlet connector (2), of the guide pipe (3) penetrates through the cleaning box (1) and extends into the cleaning box (1), a sprayer (4) is fixedly connected to the lower surface of the guide pipe (3), a filter screen (6) is lapped between the inner walls of the left side and the right side of the cleaning box (1), a convex block (21) is fixedly connected to the upper surface of the filter screen (6), through holes (24) communicated with the interior of the cleaning box (1) are formed in the left side and the right side of the cleaning box (1), a moving rod (16) is movably connected between the two through holes (24), a brush plate (5) is fixedly connected to the lower surface of the moving rod (16), and tooth blocks (19) are fixedly connected to the upper surface of the moving rod (16), wash top fixedly connected with support (7) of case (1), one end fixedly connected with motor (8) of wasing case (1) are kept away from in support (7), output fixedly connected with carousel (13) of motor (8), positive fixedly connected with connecting piece (10) of carousel (13), the surperficial swing joint of connecting piece (10) has fretwork piece (9), the bottom fixedly connected with swivel (14) of fretwork piece (9), the inside swing joint of swivel (14) has fixed axle (11), the right side fixedly connected with locating lever (12) of fixed axle (11), the lower fixed surface of swivel (14) is connected with fan-shaped toothed plate (15), fan-shaped toothed plate (15) and tooth piece (19) intermeshing.
2. The cleaning device for polishing pad processing according to claim 1, wherein: limiting plates (18) are fixedly connected to the left end and the right end of the moving rod (16).
3. The cleaning device for polishing pad processing according to claim 1, wherein: the inner bottom wall of the through hole (24) is provided with a groove (25), the inner bottom wall of the groove (25) is fixedly connected with a wheel rod (26), the top end of the wheel rod (26) is fixedly connected with a central shaft (27), and the surface of the central shaft (27) is sleeved with a rolling wheel (28).
4. The cleaning device for polishing pad processing according to claim 3, wherein: the lower surface of the moving rod (16) is provided with a rolling groove (17), and the surface of the rolling wheel (28) is in rolling connection with the inside of the rolling groove (17).
5. The cleaning device for polishing pad processing according to claim 1, wherein: the lower fixed surface of filter screen (6) is connected with fixed block (20), the lower fixed surface of fixed block (20) is connected with bolt (23).
6. The cleaning device for polishing pad processing according to claim 5, wherein: the inner wall of the cleaning box (1) is fixedly connected with a supporting ring (22), and one end, far away from the fixing block (20), of the bolt (23) is inserted into the supporting ring (22).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022684460.4U CN214320977U (en) | 2020-11-19 | 2020-11-19 | Cleaning device for polishing sheet processing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022684460.4U CN214320977U (en) | 2020-11-19 | 2020-11-19 | Cleaning device for polishing sheet processing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214320977U true CN214320977U (en) | 2021-10-01 |
Family
ID=77895740
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022684460.4U Expired - Fee Related CN214320977U (en) | 2020-11-19 | 2020-11-19 | Cleaning device for polishing sheet processing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214320977U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115106828A (en) * | 2022-07-18 | 2022-09-27 | 中国计量大学 | A kind of intelligent heavy-cut CNC lathe and using method |
-
2020
- 2020-11-19 CN CN202022684460.4U patent/CN214320977U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115106828A (en) * | 2022-07-18 | 2022-09-27 | 中国计量大学 | A kind of intelligent heavy-cut CNC lathe and using method |
| CN115106828B (en) * | 2022-07-18 | 2023-08-22 | 中国计量大学 | Intelligent re-cutting numerical control lathe and use method thereof |
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| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20211001 |