CN215599444U - Etching device for processing optical components - Google Patents
Etching device for processing optical components Download PDFInfo
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- CN215599444U CN215599444U CN202121897174.4U CN202121897174U CN215599444U CN 215599444 U CN215599444 U CN 215599444U CN 202121897174 U CN202121897174 U CN 202121897174U CN 215599444 U CN215599444 U CN 215599444U
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Abstract
The utility model belongs to the field of optical components, and particularly relates to an etching device for processing optical components. The utility model adopts the cleaning mechanism and the lifting mechanism, utilizes the first electric push rod to stretch and push the bearing frame to enable the spray head and the cleaning roller to move downwards, adjusts the distance between the surfaces of the optical components, simultaneously starts the rotating motor to drive the rotating pipe and the spray head to rotate, cleans the surfaces of the optical components at different angles, then is matched with the cleaning roller and the fan to carry out a drying process on the surfaces of the optical components, and is matched with the lifting mechanism to move up and down to carry out an automatic etching process, thereby reducing the contact of workers, having simple structure and improving the etching efficiency.
Description
Technical Field
The utility model belongs to the field of optical components, and particularly relates to an etching device for processing optical components.
Background
Etching is a semiconductor manufacturing process, and is a process of selectively removing unwanted material from the surface of a silicon wafer by chemical or physical means, with the primary objective being to correctly replicate a mask pattern on a pasted silicon wafer. In the existing optical component machining process in the current market, optical components can be cleaned from one angle on the cleaning surface, the surface distance of the optical components with different specifications needs to be adjusted by workers, the surface is not uniform in cleaning easily, the etching quality is affected, and the working efficiency is low.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide an etching device for processing an optical component.
The technical scheme adopted by the utility model is as follows:
the utility model provides an etching device for optical components processing, includes conveying mechanism, be convenient for evenly carry out different angle to optical components surface and wash and dry clean mechanism, elevating system, the conveying mechanism top is provided with clean mechanism, clean mechanism one side is provided with elevating system, conveying mechanism includes carriage, delivery axis, conveyer belt, drive gear, conveying motor, carriage top inboard is provided with the delivery axis, the delivery axis outside is provided with the conveyer belt, delivery axis front side is provided with drive gear, the drive gear below is provided with drive gear, the drive gear front side is provided with conveying motor, clean mechanism includes clean room, first electric putter, bears frame, rotating tube, rotating electrical machines, shower nozzle, cleaning roller, fan, Hose, water pump, water tank, the clean room inside is provided with first electric putter, the flexible end of first electric putter is provided with bear the frame, it is provided with to bear the inboard the swivelling joint pipe, the swivelling joint pipe rear side is provided with the rotating electrical machines, swivelling joint pipe one side is provided with the shower nozzle, the swivelling joint pipe opposite side is provided with the cleaning roller, the clean outdoor side is provided with the fan, the swivelling joint pipe top is provided with the hose, hose one side is provided with the water pump, the water pump outside is provided with the water tank.
Preferably: the lifting mechanism comprises a lifting frame, a worm, a lifting motor, a movable frame and an etching machine body, wherein the worm is arranged on the inner side of the lifting frame, the lifting motor is arranged above the worm, the front side of the lifting frame is provided with the movable frame, and the etching machine body is arranged below the movable frame.
According to the arrangement, the lifting motor drives the worm to enable the movable frame and the etching machine body to move up and down on the lifting frame.
Preferably: the lifting mechanism comprises a lifting frame, a moving frame, an etching machine body and a second electric push rod, wherein the second electric push rod is arranged on the inner side of the lifting frame, the moving frame is arranged on the front side of the lifting frame, and the etching machine body is arranged below the moving frame.
So set up, the flexible promotion of second electric putter the removal frame with the etching machine body is in the lift removal that goes up and down.
Preferably: the conveying frame is connected with the conveying shaft through a bearing, the conveying shaft is connected with the transmission gear through welding, the transmission gear is in meshing transmission with the driving gear, and the driving gear is in key connection with the conveying motor.
So set up, bearing connection has guaranteed carry the axle nimble rotation.
Preferably: clean room with first electric putter passes through bolted connection, first electric putter with bear frame and pass through welded connection, bear frame with the rotatory pipe passes through the bearing and connects, the rotatory pipe with the rotating electrical machines key-type connection, the rotatory pipe with the shower nozzle passes through threaded connection, bear frame with the cleaning roller passes through the bearing and connects, clean room with the fan passes through bolted connection, the rotatory pipe with the hose passes through welded connection, the hose with the water pump passes through bolted connection, the water pump with the water tank passes through bolted connection.
So set up, the bearing connection has guaranteed the swivelling joint pipe with the scrub roller is nimble rotatory, makes things convenient for the dismouting to change first electric putter the shower nozzle the water pump is maintained.
Preferably: the lifting frame is connected with the worm through a bearing, the worm is connected with the lifting motor key, the lifting frame is connected with the moving frame in a sliding mode, and the moving frame is connected with the etching machine body through a bolt.
So set up, the bearing connection has guaranteed the worm is nimble rotatory.
Preferably: the lifting frame is connected with the second electric push rod through a bolt, the lifting frame is connected with the moving frame in a sliding mode, and the moving frame is connected with the etching machine body through a bolt.
So set up, make things convenient for the dismouting to change second electric putter the etching machine body maintains.
The utility model has the beneficial effects that: adopted clean mechanism and elevating system, utilize first electric putter to stretch out and draw back and pushing to bear the frame and make shower nozzle and cleaning roller downstream, adjust the interval between the optical components surface, start rotating electrical machines simultaneously and drive swivelling joint and shower nozzle rotary motion, carry out the washing of different angles to the optical components surface, deuterogamy cleaning roller and fan mutually support and carry out the stoving process with the optical components surface, it reciprocates and carries out automatic sculpture process to cooperate elevating system, reduce the staff contact, moreover, the steam generator is simple in structure, and the efficiency of etching is improved.
Drawings
The accompanying drawings, which are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate embodiments of the utility model and together with the description serve to explain the principles of the utility model and not to limit the utility model. In the drawings:
fig. 1 is a schematic front view of an etching apparatus for optical component processing according to an embodiment 1 of the present invention;
fig. 2 is a schematic perspective view of an etching apparatus for processing an optical component according to an embodiment 1 of the present invention;
FIG. 3 is a schematic diagram of a conveying mechanism of an etching apparatus for processing optical components according to the present invention;
FIG. 4 is a schematic diagram of a cleaning mechanism of an etching apparatus for processing an optical component according to the present invention;
fig. 5 is a schematic view of a lifting mechanism of an etching apparatus for processing an optical component according to embodiment 1 of the present invention;
fig. 6 is a schematic view of an elevating mechanism in embodiment 2 of an etching apparatus for processing an optical component according to the present invention.
The reference numerals are explained below:
1. a conveying mechanism; 2. a cleaning mechanism; 3. a lifting mechanism; 11. a carriage; 12. a delivery shaft; 13. a conveyor belt; 14. a transmission gear; 15. a drive gear; 16. a conveying motor; 201. a clean room; 202. a first electric push rod; 203. a carrier; 204. rotating the tube; 205. a rotating electric machine; 206. a spray head; 207. a cleaning roller; 208. a fan; 209. a flexible water pipe; 210. a water pump; 211. a water tank; 31. a lifting frame; 32. a worm; 33. a lifting motor; 34. a movable frame; 35. an etching machine body; 301. a second electric push rod.
Detailed Description
The utility model is further illustrated by the following examples in conjunction with the accompanying drawings.
Example 1
As shown in fig. 1, 2, 3, 4, and 5, an etching apparatus for processing an optical component includes a conveying mechanism 1, a cleaning mechanism 2 for cleaning and drying the surface of the optical component at different angles, and an elevating mechanism 3, wherein the cleaning mechanism 2 is disposed above the conveying mechanism 1, the elevating mechanism 3 is disposed on one side of the cleaning mechanism 2, the conveying mechanism 1 includes a conveying frame 11, a conveying shaft 12, a conveying belt 13, a transmission gear 14, a driving gear 15, and a conveying motor 16, the conveying shaft 12 is disposed on the inner side above the conveying frame 11, the conveying belt 13 is disposed on the outer side of the conveying shaft 12, the transmission gear 14 is disposed on the front side of the conveying shaft 12, the driving gear 15 is disposed below the transmission gear 14, the conveying motor 16 is disposed on the front side of the driving gear 15, the cleaning mechanism 2 includes a cleaning chamber 201, a first electric push rod 202, 203, a bearing frame 204, a rotating pipe 204, and a cleaning mechanism 2, A rotating motor 205, a spray nozzle 206, a cleaning roller 207, a fan 208, a water hose 209, a water pump 210, the water tank 211, the inside of the clean room 201 is provided with a first electric push rod 202, the telescopic end of the first electric push rod 202 is provided with a bearing frame 203, the inside of the bearing frame 203 is provided with a rotating pipe 204, the rear side of the rotating pipe 204 is provided with a rotating motor 205, one side of the rotating pipe 204 is provided with a spray head 206, the other side of the rotating pipe 204 is provided with a cleaning roller 207, the outside of the clean room 201 is provided with a fan 208, the upper side of the rotating pipe 204 is provided with a water hose 209, one side of the water hose 209 is provided with a water pump 210, the outer side of the water pump 210 is provided with the water tank 211, the lifting mechanism 3 comprises a lifting frame 31, a worm 32, a lifting motor 33, a movable frame 34 and an etching machine body 35, the inner side of the lifting frame 31 is provided with the worm 32, the upper side of the worm 32 is provided with the lifting motor 33, the front side of the lifting frame 31 is provided with the movable frame 34, and the etching machine body 35 is arranged below the movable frame 34.
Preferably: the conveying frame 11 is connected with the conveying shaft 12 through a bearing, the conveying shaft 12 is connected with the transmission gear 14 through welding, the transmission gear 14 is in meshing transmission with the driving gear 15, and the driving gear 15 is in key connection with the conveying motor 16; the cleaning chamber 201 is connected with a first electric push rod 202 through a bolt, the first electric push rod 202 is connected with a bearing frame 203 through welding, the bearing frame 203 is connected with a rotating pipe 204 through a bearing, the rotating pipe 204 is connected with a rotating motor 205 in a key mode, the rotating pipe 204 is connected with a spray head 206 through a thread, the bearing frame 203 is connected with a cleaning roller 207 through a bearing, the cleaning chamber 201 is connected with a fan 208 through a bolt, the rotating pipe 204 is connected with a soft water pipe 209 through a welding mode, the soft water pipe 209 is connected with a water pump 210 through a bolt, and the water pump 210 is connected with a water tank 211 through a bolt; the lifting frame 31 is connected with the worm 32 through a bearing, the worm 32 is connected with the lifting motor 33 in a key mode, the lifting frame 31 is connected with the moving frame 34 in a sliding mode, and the moving frame 34 is connected with the etching machine body 35 through a bolt.
Example 2
As shown in fig. 3, 4, and 6, the present embodiment is different from embodiment 1 in that: the lifting mechanism 3 comprises a lifting frame 31, a moving frame 34, an etching machine body 35 and a second electric push rod 301, the second electric push rod 301 is arranged on the inner side of the lifting frame 31, the moving frame 34 is arranged on the front side of the lifting frame 31, and the etching machine body 35 is arranged below the moving frame 34; the lifting frame 31 is connected with the second electric push rod 301 through a bolt, the lifting frame 31 is connected with the movable frame 34 in a sliding mode, and the movable frame 34 is connected with the etching machine body 35 through a bolt.
The working principle is as follows: when the device is used, an optical component is placed on the conveying shaft 12, the conveying motor 16 is started to drive the driving gear 15 and the transmission gear 14 to rotate, the transmission gear 14 drives the conveying shaft 12 and the conveying belt 13 to rotate, the optical component is conveyed into the cleaning chamber 201, the first electric push rod 202 is used for telescopically pushing the bearing frame 203, the spray head 206 and the cleaning roller 207 to move downwards, the distance between the surfaces of the optical component is adjusted, the surfaces of the optical component are cleaned at different angles, the cleaning roller 207 and the fan 208 are matched with each other to dry the surfaces of the optical component, after cleaning, the optical component is moved to the lower part of the etching machine body 35, the lifting motor 33 is started to drive the worm 32, the worm 32 drives the moving frame 34 to move upwards and downwards on the lifting frame 31, or the second electric push rod 301 is used for telescopically pushing the moving frame 34 to move upwards and downwards on the lifting frame 31, and carrying out uniform etching process, thereby improving the etching efficiency.
While the preferred embodiments of the present invention have been described in detail with reference to the accompanying drawings, the present invention is not limited to the above embodiments, and various changes can be made within the knowledge of those skilled in the art without departing from the spirit of the present invention.
Claims (7)
1. An etching device for processing an optical component is characterized in that: the device comprises a conveying mechanism (1), a cleaning mechanism (2) and a lifting mechanism (3), wherein the cleaning mechanism (2) is convenient for uniformly cleaning and drying the surface of an optical element at different angles, the cleaning mechanism (2) is arranged above the conveying mechanism (1), and the lifting mechanism (3) is arranged on one side of the cleaning mechanism (2);
the conveying mechanism (1) comprises a conveying frame (11), a conveying shaft (12), a conveying belt (13), a transmission gear (14), a driving gear (15) and a conveying motor (16), wherein the conveying shaft (12) is arranged on the inner side above the conveying frame (11), the conveying belt (13) is arranged on the outer side of the conveying shaft (12), the transmission gear (14) is arranged on the front side of the conveying shaft (12), the driving gear (15) is arranged below the transmission gear (14), and the conveying motor (16) is arranged on the front side of the driving gear (15);
the cleaning mechanism (2) comprises a cleaning chamber (201), a first electric push rod (202), a bearing frame (203), a rotating pipe (204), a rotating motor (205), a spray head (206), a cleaning roller (207), a fan (208), a water softening pipe (209), a water pump (210) and a water tank (211), wherein the inner side of the cleaning chamber (201) is provided with the first electric push rod (202), the telescopic end of the first electric push rod (202) is provided with the bearing frame (203), the inner side of the bearing frame (203) is provided with the rotating pipe (204), the rear side of the rotating pipe (204) is provided with the rotating motor (205), one side of the rotating pipe (204) is provided with the spray head (206), the other side of the rotating pipe (204) is provided with the cleaning roller (207), the outer side of the cleaning chamber (201) is provided with the fan (208), the water softening pipe (209) is arranged above the rotating pipe (204), the water pump (210) is arranged on one side of the water hose (209), and the water tank (211) is arranged on the outer side of the water pump (210).
2. An etching apparatus for optical component processing according to claim 1, wherein: elevating system (3) are including crane (31), worm (32), elevator motor (33), remove frame (34), etching machine body (35), crane (31) inboard is provided with worm (32), worm (32) top is provided with elevator motor (33), crane (31) front side is provided with remove frame (34), it is provided with to remove frame (34) below etching machine body (35).
3. An etching apparatus for optical component processing according to claim 1, wherein: elevating system (3) are including crane (31), removal frame (34), etching machine body (35), second electric putter (301), crane (31) inboard is provided with second electric putter (301), crane (31) front side is provided with remove frame (34), it is provided with to remove frame (34) below etching machine body (35).
4. An etching apparatus for optical component processing according to claim 1, wherein: the conveying frame (11) is connected with the conveying shaft (12) through a bearing, the conveying shaft (12) is connected with the transmission gear (14) through welding, the transmission gear (14) is in meshing transmission with the driving gear (15), and the driving gear (15) is in key connection with the conveying motor (16).
5. An etching apparatus for optical component processing according to claim 1, wherein: clean room (201) with first electric putter (202) pass through bolted connection, first electric putter (202) with bear frame (203) and pass through welded connection, bear frame (203) with rotatory pipe (204) pass through the bearing and connect, rotatory pipe (204) with rotating electrical machines (205) key-type connection, rotatory pipe (204) with shower nozzle (206) pass through threaded connection, bear frame (203) with cleaning roller (207) pass through the bearing and connect, clean room (201) with fan (208) pass through bolted connection, rotatory pipe (204) with soft water pipe (209) pass through welded connection, soft water pipe (209) with water pump (210) pass through bolted connection, water pump (210) with water tank (211) pass through bolted connection.
6. An etching apparatus for optical component processing according to claim 2, wherein: the lifting frame (31) is connected with the worm (32) through a bearing, the worm (32) is connected with the lifting motor (33) in a key mode, the lifting frame (31) is connected with the moving frame (34) in a sliding mode, and the moving frame (34) is connected with the etching machine body (35) through bolts.
7. An etching apparatus for optical component processing according to claim 3, wherein: the lifting frame (31) is connected with the second electric push rod (301) through bolts, the lifting frame (31) is connected with the moving frame (34) in a sliding mode, and the moving frame (34) is connected with the etching machine body (35) through bolts.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121897174.4U CN215599444U (en) | 2021-08-13 | 2021-08-13 | Etching device for processing optical components |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121897174.4U CN215599444U (en) | 2021-08-13 | 2021-08-13 | Etching device for processing optical components |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215599444U true CN215599444U (en) | 2022-01-21 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121897174.4U Active CN215599444U (en) | 2021-08-13 | 2021-08-13 | Etching device for processing optical components |
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| Country | Link |
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| CN (1) | CN215599444U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118486616A (en) * | 2024-07-11 | 2024-08-13 | 江苏浦丹光电技术有限公司 | Etching device for processing optical modulator chip |
-
2021
- 2021-08-13 CN CN202121897174.4U patent/CN215599444U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118486616A (en) * | 2024-07-11 | 2024-08-13 | 江苏浦丹光电技术有限公司 | Etching device for processing optical modulator chip |
| CN118486616B (en) * | 2024-07-11 | 2024-09-27 | 江苏浦丹光电技术有限公司 | An etching device for processing optical modulator chip |
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