CN214300459U - Crystal pulling furnace exhaust pipeline and crystal pulling furnace - Google Patents
Crystal pulling furnace exhaust pipeline and crystal pulling furnace Download PDFInfo
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- CN214300459U CN214300459U CN202120343231.8U CN202120343231U CN214300459U CN 214300459 U CN214300459 U CN 214300459U CN 202120343231 U CN202120343231 U CN 202120343231U CN 214300459 U CN214300459 U CN 214300459U
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- 239000013078 crystal Substances 0.000 title claims abstract description 94
- 239000011248 coating agent Substances 0.000 claims abstract description 26
- 238000000576 coating method Methods 0.000 claims abstract description 26
- 235000017166 Bambusa arundinacea Nutrition 0.000 claims abstract description 16
- 235000017491 Bambusa tulda Nutrition 0.000 claims abstract description 16
- 241001330002 Bambuseae Species 0.000 claims abstract description 16
- 235000015334 Phyllostachys viridis Nutrition 0.000 claims abstract description 16
- 239000011425 bamboo Substances 0.000 claims abstract description 16
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 36
- 230000001681 protective effect Effects 0.000 claims description 36
- 229910002804 graphite Inorganic materials 0.000 claims description 33
- 239000010439 graphite Substances 0.000 claims description 33
- 238000007711 solidification Methods 0.000 claims description 14
- 230000008023 solidification Effects 0.000 claims description 14
- 239000010453 quartz Substances 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 239000011810 insulating material Substances 0.000 claims description 2
- 230000001698 pyrogenic effect Effects 0.000 claims description 2
- 238000002360 preparation method Methods 0.000 description 5
- 238000005260 corrosion Methods 0.000 description 4
- 230000007797 corrosion Effects 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 3
- 239000007770 graphite material Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000000155 melt Substances 0.000 description 3
- 239000004215 Carbon black (E152) Substances 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000004321 preservation Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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- 239000011148 porous material Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 239000002296 pyrolytic carbon Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses a crystal pulling furnace exhaust duct and crystal pulling furnace, crystal pulling furnace exhaust duct including install on crystal pulling furnace stove bottom gas outlet protect a section of thick bamboo (1), with blast pipe (2) and the suit of crystal pulling furnace stove bottom gas outlet intercommunication are in sheath (3) on blast pipe (2), the inner wall that protects a section of thick bamboo (1) is provided with the coating, makes it has smooth surface to protect a section of thick bamboo (1) inner wall, blast pipe (2) are located crystal pulling furnace stove bottom below, the upper end of blast pipe (2) is located in sheath (3). The crystal pulling furnace comprises the exhaust pipeline of the crystal pulling furnace. The utility model provides a crystal pulling furnace exhaust duct and crystal pulling furnace can solve the exhaust duct and avoid causing the crystal bar dislocation by the problem of oxide jam.
Description
Technical Field
The utility model relates to a production single crystal bar technical field especially relates to a crystal pulling furnace exhaust duct and including this exhaust duct's crystal pulling furnace.
Background
When growing a single crystal ingot, polycrystalline silicon is loaded into a quartz crucible of a crystal pulling furnace, then the polycrystalline silicon is melted, the temperature of the melt is stable, and the ingot is grown in a manner that seed crystals are in contact with the melt. The crystal pulling furnace in which the monocrystalline ingot is grown produces oxides during the melting of the polycrystalline silicon. The oxides produced in the crystal pulling furnace are of the Particle (Particle) type and induce Ingot dislocations (Ingot dislocations) as the Ingot (Ingot) grows. Therefore, a conventional crystal pulling furnace is provided with an exhaust duct, and generated oxides are flowed into the exhaust duct from a furnace chamber (chamber) and are discharged through the exhaust duct.
However, during the crystal pulling process, dislocation of the ingot is often induced during the growth of the ingot due to the oxide clogging the exhaust pipe.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a crystal pulling furnace exhaust duct can solve the exhaust duct and avoid causing the crystal bar dislocation by the problem of oxide jam.
In order to achieve the above object, the utility model provides a crystal pulling furnace exhaust duct, including install on crystal pulling furnace stove bottom gas outlet protect a section of thick bamboo, with blast pipe and the suit of crystal pulling furnace stove bottom gas outlet intercommunication are in sheath on the blast pipe, the inner wall that protects a section of thick bamboo is provided with the coating, makes it has smooth surface to protect a section of thick bamboo inner wall, the blast pipe is located crystal pulling furnace stove bottom below, the upper end of blast pipe is located in the sheath.
Preferably, the protective cylinder is a graphite protective cylinder, and the coating arranged on the inner wall of the protective cylinder is a pyrogenic coating.
Preferably, the thickness of the coating is 0.1mm to 1 mm.
Preferably, the upper end of the protective cylinder is fixedly connected with an annular flange, and the annular flange presses on a graphite solidification felt laid on the furnace bottom of the crystal pulling furnace.
Preferably, the sheath is made of a heat insulating material.
Preferably, the sheath is made of graphite felt.
Preferably, the upper end of the sheath is fixedly connected with an annular table, and the upper surface of the annular table is in contact with the lower surface of the crystal pulling furnace bottom.
Compared with the prior art, the utility model has the difference that the exhaust pipeline of the crystal pulling furnace provided by the utility model can avoid the thermal corrosion to the inner wall of the solidified felt when the gas with high-temperature oxide passes through the graphite solidified felt laid on the furnace bottom by installing the protective cylinder on the gas outlet of the furnace bottom of the crystal pulling furnace; meanwhile, the inner wall of the protective cylinder is provided with the coating, so that the inner wall of the protective cylinder has a smooth surface, and the phenomenon that oxides with wettability are adhered to the inner wall of the protective cylinder to block the protective cylinder is avoided; the jacket is sleeved at the upper end of the exhaust pipe communicated with the air outlet, so that the degree of heat exchange between the upper end of the exhaust pipe and the external environment can be reduced, the high-temperature oxide is prevented from being rapidly cooled at the upper end of the exhaust pipe, and the exhaust pipe is prevented from being blocked by a large amount of rapidly cooled oxide. Therefore, the utility model provides a crystal pulling furnace exhaust duct can solve the exhaust duct and avoid causing the crystal bar dislocation by the problem of oxide jam.
The utility model also aims at providing a crystal pulling furnace can avoid the exhaust duct of installation on it to block up the problem that causes the crystal bar dislocation by the oxide.
In order to achieve the above purpose, the technical solution of the present invention is realized as follows:
the utility model provides a crystal pulling furnace, includes the furnace body, sets up the support frame of furnace body bottom, install quartz crucible on the support frame and crystal pulling furnace exhaust duct, crystal pulling furnace exhaust duct is including protecting a section of thick bamboo, blast pipe and sheath, the stove bottom upper berth of furnace body is equipped with graphite solidification felt the gas outlet has been seted up on the stove bottom of furnace body, protect a section of thick bamboo to pass graphite solidification felt and install on the gas outlet, the inner wall that protects a section of thick bamboo is provided with the coating, makes it has smooth surface to protect a section of thick bamboo inner wall, the blast pipe is located the crystal pulling furnace stove bottom below and communicate with the gas outlet, the sheath suit is on the blast pipe, the upper end of blast pipe is located in the sheath.
Preferably, the graphite curing felt laid on the furnace bottom of the furnace body is three layers.
Preferably, a plurality of air outlets are formed in the bottom of the furnace body, and each air outlet is provided with the crystal pulling furnace exhaust pipeline.
The crystal pulling furnace and the exhaust pipeline of the crystal pulling furnace have the same technical advantages of the prior art, and are not described in detail herein.
Drawings
FIG. 1 is a schematic structural view of an exhaust duct of a crystal pulling furnace according to an embodiment of the present invention;
FIG. 2 is a schematic view of a crystal pulling furnace according to one embodiment of the present invention;
FIG. 3 is a schematic structural view of the installation of the casing on the graphite solidification felt;
in the drawings, the components represented by the respective reference numerals are listed below:
1-protecting the cylinder; 2-an exhaust pipe; 3-a sheath; 4-an annular flange; 5-a ring-shaped table; 6-furnace body; 7-a support frame; 8-quartz crucible; 9-curing the felt.
Detailed Description
The principles and features of the present invention are described below in conjunction with the following drawings, the examples given are only intended to illustrate the present invention and are not intended to limit the scope of the present invention.
Referring to fig. 1 as appropriate, the present invention provides an exhaust duct of a crystal pulling furnace according to a basic embodiment, which comprises a protective casing 1 installed on a gas outlet of a furnace bottom of the crystal pulling furnace, an exhaust pipe 2 communicated with the gas outlet of the furnace bottom of the crystal pulling furnace, and a sheath 3 sleeved on the exhaust pipe 2. Wherein the gas outlet at the bottom of the crystal pulling furnace is used for discharging gas containing oxides generated in the crystal pulling furnace. The protective casing 1 is mounted on the gas outlet, so that the gas containing the oxide in the crystal pulling furnace can be discharged through the through hole of the protective casing 1. The inner wall of the casing 1 is provided with a coating which can make the inner wall of the casing 1 have a smooth surface. The length of the casing 1 can be flexibly determined according to actual conditions.
Wherein the exhaust pipe 2 is arranged below the crystal pulling furnace and is communicated with a gas outlet of the furnace bottom, so that the gas containing the oxide flowing through the protective cylinder 1 arranged on the gas outlet is conveyed into the exhaust pipe 2 and is exhausted out of the crystal pulling furnace through the exhaust pipe 2. The exhaust pipe 2 is communicated with the gas outlet of the furnace bottom in a mode that the exhaust pipe 2 is directly arranged on the lower surface of the furnace bottom of the crystal pulling furnace, and the upper end of the exhaust pipe 2 is butted with the lower end of the protective cylinder 1; or can be directly connected with the lower end of the casing 1 arranged on the air outlet of the furnace bottom. The upper end of the exhaust pipe 2 is positioned in the sheath 3, and the sheath 3 can be fixed on the exhaust pipe 2 or on the lower surface of the bottom of the crystal pulling furnace. The exhaust pipe 2 is positioned outside the crystal pulling furnace, and in order to prevent water vapor in the oxide-containing gas flowing through the exhaust pipe 2 from condensing into water drops to corrode the exhaust pipe 2, the exhaust pipe 2 is generally made of stainless steel pipes.
In use, the exhaust duct of the crystal pulling furnace according to the basic embodiment described above melts the polycrystalline silicon solution in the crystal pulling furnace into a molten state in the quartz crucible 8, and the generated gas containing oxides flows downward in the furnace body 6 of the crystal pulling furnace, enters the protective cylinder 1 mounted on the gas outlet of the furnace bottom, and is exhausted through the exhaust duct 2 below. In order to protect the bottom of the crystal pulling furnace body 6, a graphite solidification felt 9 is laid on the bottom of the furnace body 6, and graphite has the characteristic of high temperature resistance, can protect the bottom of the furnace body 6 and plays a role in heat preservation. The protective cylinder 1 is arranged on the gas outlet at the bottom of the furnace body 6, so that the gas with high-temperature oxide can be prevented from generating thermal corrosion on the inner wall of the solidified felt 9 when passing through the graphite solidified felt 9; meanwhile, the inner wall of the protective cylinder 1 is provided with the coating, so that the inner wall of the protective cylinder 1 has a smooth surface, and the phenomenon that the protective cylinder 1 is blocked due to the fact that oxides with wettability are adhered to the inner wall of the protective cylinder 1 is avoided. The jacket 3 is fitted over the upper end of the exhaust pipe 2, so that heat exchange between the upper end of the exhaust pipe 2 and the external environment can be reduced, and rapid cooling of high-temperature oxides at the upper end of the exhaust pipe 2 can be avoided, thereby preventing the exhaust pipe 2 from being clogged with a large amount of rapidly-cooled oxides.
The utility model discloses in, a protect 1 can adopt the preparation of various high temperature resistant materials, preferably, a protect 1 for the graphite protects a section of thick bamboo, and in order to guarantee to protect 1 surperficial smooth of a section of thick bamboo simultaneously, the coating that sets up on protecting 1 inner wall of a section of thick bamboo is fire method coating (Pyrocabon coating). The pyrometallurgical coating, namely the pyrolytic carbon coating, is a dense carbon film formed by putting the graphite casing 1 into equipment, heating under the condition of vacuum or protective atmosphere, introducing liquid hydrocarbon, and decomposing volatile gas of the liquid hydrocarbon to deposit carbon particles on the surface of the graphite casing 1 and in open pores, wherein the carbon particles are overlapped gradually. The coating has strong oxidation resistance, can control cost expenditure, is firmly combined with a matrix, ensures that the inner surface of the graphite pile casing 1 is smooth, can increase the gas flow rate of the inner surface of the pile casing 1, and reduces the adhesiveness of oxides. Preferably, the thickness of the coating on the inner wall of the casing 1 is 0.1mm-1 mm.
As shown in fig. 1, in the present invention, preferably, an annular flange 4 is fixedly connected to the upper end of the casing 1, and the annular flange 4 presses on a graphite solidification mat 9 laid on the furnace bottom of the crystal pulling furnace. The annular flange 4 is of a circular structure with the upper surface and the lower surface being flat, the annular flange 4 and the casing 1 can be of an integral structure and formed in a casting mode and the like, and the annular flange 4 and the casing 1 can also be of a split structure and are fixedly connected together in a mechanical fixing mode. It is further preferred that the casing 1 and the annular flange 4 are both made of graphite material, and that the inner wall of the casing 1 and the upper surface of the annular flange 4 are both provided with a coating. In the embodiment, the annular flange 4 is arranged at the upper end of the casing 1, and the lower surface of the annular flange 4 is pressed on the graphite curing felt 9, so that the graphite curing felt 9 can be protected, and the thermal corrosion of the curing felt 9 can be avoided. And the upper surface of the annular flange 4 is provided with a coating, so that the adhesion of oxides can be reduced.
The utility model discloses in, through set up sheath 3 in the upper end of blast pipe 2, can avoid the oxide to cool off rapidly in the upper end of blast pipe 2, sheath 3 can adopt any material preparation that has the heat preservation and can bear the high temperature, preferably, sheath 3 adopts the thermal insulation material preparation, more preferably, sheath 3 adopts the graphite felt preparation.
In addition to the above embodiment, it is further preferable that, as shown in fig. 1, an annular table 5 is fixedly connected to an upper end of the sheath 3, and an upper surface of the annular table 5 is in contact with a lower surface of the pulling furnace bottom. By providing the annular table 5 on the jacket 3 and contacting the upper surface of the annular table 5 with the lower surface of the crystal pulling furnace body 6, the situation that the top end of the exhaust pipe 2 is locally quenched due to a large gap possibly existing between the top end of the jacket 3 and the lower surface of the crystal pulling furnace body 6 can be avoided. The utility model discloses in, annular platform 5 and sheath 3 structure as an organic whole all make through graphite felt.
The same technical concept as that of the exhaust duct of the crystal pulling furnace provided by the above embodiment is also provided by the utility model, as shown in fig. 2, the crystal pulling furnace comprises a furnace body 6, a support frame 7 arranged at the bottom of the furnace body 6, a quartz crucible 8 arranged on the support frame 7 and the exhaust duct of the crystal pulling furnace.
The exhaust pipeline of the crystal pulling furnace comprises a protective cylinder 1, an exhaust pipe 2 and a sheath 3. Graphite solidification felt 9 is laid on the bottom of the furnace body 6, and preferably, as shown in fig. 3, the graphite solidification felt 9 laid on the bottom of the furnace body 6 has three layers. And an air outlet is formed in the bottom of the furnace body 6 and penetrates through the furnace bottom and the graphite solidification felt 9. The protective cylinder 1 penetrates through the graphite curing felt 9 and is installed on the air outlet, a coating is arranged on the inner wall of the protective cylinder 1, so that the inner wall of the protective cylinder 1 has a smooth surface, the protective cylinder 1 is preferably a graphite protective cylinder, and the coating arranged on the inner wall of the protective cylinder 1 is a fire coating. Further preferably, the upper end of the protective cylinder 1 is fixedly connected with an annular flange 4, and the annular flange 4 presses on a graphite solidification felt 9 laid on the furnace bottom of the crystal pulling furnace.
The exhaust pipe 2 is located below the bottom of the crystal pulling furnace and communicated with the gas outlet, the exhaust pipe 2 is made of stainless steel, the jacket 3 is sleeved on the exhaust pipe 2, and the upper end of the exhaust pipe 2 is located in the jacket 3. The jacket 3 is preferably made of graphite felt, an annular table 5 is fixedly connected to the upper end of the jacket 3, and the upper surface of the annular table 5 is in contact with the lower surface of the bottom of the crystal pulling furnace.
In addition to the above embodiment, as shown in fig. 2, preferably, a plurality of gas outlets are opened on the furnace bottom of the furnace body 6, and the pulling furnace exhaust duct is installed on each gas outlet. Specifically, as shown in fig. 3 (only a shell is schematically shown on one outlet in fig. 3), 3 outlets are opened on the bottom of the furnace body 6, and as shown in fig. 2, the exhaust pipes 2 installed at the lower ends of the outlets may be connected to the same pipe by means of a tee joint or the like.
The utility model provides a crystal pulling furnace is for protecting 6 bottoms of furnace body and keep warm, and the solidification felt that sets up at the stove bottom of crystal pulling furnace body 6 is the three-layer, and its material is high temperature resistant graphite material. The curing felt 9 is provided with an air outlet (through hole) corresponding to the exhaust pipe 2, the air outlet is provided with the protective cylinder 1 which is connected with the exhaust pipe 2 so as to discharge the oxide in the furnace chamber, and the oxide with high temperature can be prevented from causing thermal corrosion when passing through the curing felt 9, so that the service life of the curing felt 9 is prolonged, and the production cost is reduced. Simultaneously, set up the sheath 3 of the hot felt preparation of graphite material at blast pipe 2, can form the buffer zone in blast pipe 2 upper end, also form the transition zone that lets the temperature decline step by step, prevent that the row's mouth that the abrupt temperature drop leads to from blockking up.
In the description of the present invention, it should be understood that the terms "inside" and "outside" are used for indicating the orientation or the positional relationship based on the orientation or the positional relationship shown in the drawings, and are only for convenience of description and simplification of the description, but not for indicating or implying that the indicated device must have a specific orientation, be constructed and operated in a specific orientation, and should not be construed as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.
In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "disposed," "connected," and the like are to be construed broadly and can include, for example, fixed connections, removable connections, or integral parts or intervening parts. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.
Although embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations may be made to the above embodiments by those of ordinary skill in the art without departing from the scope of the present invention.
Claims (10)
1. The utility model provides a crystal pulling furnace exhaust duct, its characterized in that, including install on the stove bottom gas outlet of crystal pulling furnace protect a section of thick bamboo (1), with blast pipe (2) and the suit that the stove bottom gas outlet of crystal pulling communicates are in sheath (3) on blast pipe (2), the inner wall that protects a section of thick bamboo (1) is provided with the coating, makes it has smooth surface to protect a section of thick bamboo (1) inner wall, blast pipe (2) are located the stove bottom below of crystal pulling furnace, the upper end of blast pipe (2) is located in sheath (3).
2. A crystal puller exhaust pipe as set forth in claim 1 wherein the jacket (1) is a graphite jacket and the coating provided on the inner wall of the jacket (1) is a pyrogenic coating.
3. A crystal puller exhaust tube as set forth in claim 2 wherein the coating is 0.1mm to 1mm thick.
4. A crystal pulling furnace exhaust duct according to claim 1, characterized in that an annular flange (4) is fixedly connected to the upper end of the protective casing (1), the annular flange (4) pressing against a graphite solidification mat (9) laid on the furnace bottom of the crystal pulling furnace.
5. A crystal puller exhaust duct as claimed in claim 1, characterised in that the jacket (3) is made of a heat insulating material.
6. A crystal puller exhaust duct as set forth in claim 5 wherein the jacket (3) is made of graphite felt.
7. A crystal puller exhaust duct as claimed in claim 1 wherein the upper end of the jacket (3) is fixedly connected to an annular table (5), the upper surface of the annular table (5) being in contact with the lower surface of the crystal puller furnace floor.
8. A crystal pulling furnace is characterized by comprising a furnace body (6), a support frame (7) arranged at the bottom of the furnace body (6), a quartz crucible (8) arranged on the support frame (7) and an exhaust pipeline of the crystal pulling furnace, the crystal pulling furnace exhaust pipeline comprises a protective cylinder (1), an exhaust pipe (2) and a protective sleeve (3), a graphite solidification felt (9) is laid on the bottom of the furnace body (6), an air outlet is arranged on the bottom of the furnace body (6), the protective cylinder (1) penetrates through the graphite curing felt (9) and is arranged on the air outlet, the inner wall of the protective cylinder (1) is provided with a coating, so that the inner wall of the protective cylinder (1) has a smooth surface, the exhaust pipe (2) is positioned below the bottom of the crystal pulling furnace and is communicated with the air outlet, the jacket (3) is sleeved on the exhaust pipe (2), and the upper end of the exhaust pipe (2) is located in the jacket (3).
9. A crystal pulling furnace as claimed in claim 8, characterized in that the graphite solidification mat (9) laid on the bottom of the furnace body (6) is three-layered.
10. A crystal pulling furnace as claimed in claim 8, wherein the furnace body (6) has a plurality of outlets in the bottom thereof, each outlet being provided with an exhaust duct of the crystal pulling furnace.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120343231.8U CN214300459U (en) | 2021-02-04 | 2021-02-04 | Crystal pulling furnace exhaust pipeline and crystal pulling furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120343231.8U CN214300459U (en) | 2021-02-04 | 2021-02-04 | Crystal pulling furnace exhaust pipeline and crystal pulling furnace |
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| Publication Number | Publication Date |
|---|---|
| CN214300459U true CN214300459U (en) | 2021-09-28 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202120343231.8U Active CN214300459U (en) | 2021-02-04 | 2021-02-04 | Crystal pulling furnace exhaust pipeline and crystal pulling furnace |
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| CN (1) | CN214300459U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115254812A (en) * | 2022-06-30 | 2022-11-01 | 晶科能源股份有限公司 | Cleaning device for removing oxides in exhaust pipeline and single crystal furnace |
-
2021
- 2021-02-04 CN CN202120343231.8U patent/CN214300459U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115254812A (en) * | 2022-06-30 | 2022-11-01 | 晶科能源股份有限公司 | Cleaning device for removing oxides in exhaust pipeline and single crystal furnace |
| CN115254812B (en) * | 2022-06-30 | 2023-06-20 | 晶科能源股份有限公司 | Cleaning device for removing oxide in exhaust pipeline and single crystal furnace |
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| TR01 | Transfer of patent right |
Effective date of registration: 20220629 Address after: 710000 room 1-3-029, No. 1888, Xifeng South Road, high tech Zone, Xi'an, Shaanxi Province Patentee after: Xi'an yisiwei Material Technology Co.,Ltd. Patentee after: XI'AN ESWIN SILICON WAFER TECHNOLOGY Co.,Ltd. Address before: No. 1888, Xifeng South Road, high tech Zone, Xi'an, Shaanxi 710032 Patentee before: XI'AN ESWIN SILICON WAFER TECHNOLOGY Co.,Ltd. Patentee before: Xi'an yisiwei Material Technology Co.,Ltd. |
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| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: Room 1-3-029, No. 1888, Xifeng South Road, high tech Zone, Xi'an, Shaanxi 710065 Patentee after: Xi'an Yisiwei Material Technology Co.,Ltd. Patentee after: XI'AN ESWIN SILICON WAFER TECHNOLOGY Co.,Ltd. Address before: 710000 room 1-3-029, No. 1888, Xifeng South Road, high tech Zone, Xi'an, Shaanxi Province Patentee before: Xi'an yisiwei Material Technology Co.,Ltd. Patentee before: XI'AN ESWIN SILICON WAFER TECHNOLOGY Co.,Ltd. |