CN214300321U - Evaporation crucible heat preservation cover and evaporation crucible - Google Patents
Evaporation crucible heat preservation cover and evaporation crucible Download PDFInfo
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- CN214300321U CN214300321U CN202120005525.XU CN202120005525U CN214300321U CN 214300321 U CN214300321 U CN 214300321U CN 202120005525 U CN202120005525 U CN 202120005525U CN 214300321 U CN214300321 U CN 214300321U
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Abstract
The utility model provides an evaporation crucible keeps warm and covers and evaporation crucible, evaporation crucible keeps warm and covers including the apron, the apron includes first surface and second surface, first surface sets up with the second surface relatively the edge of first surface is equipped with fixed protruding formation fixed recess the edge on second surface is equipped with accepts protruding formation and accepts the recess seted up on the apron and is greater than or equal to 1 perforating hole. In the in-service use process, firstly, the crucible body and the crucible cover are fixedly connected, and then the crucible cover is embedded into the fixing groove of the evaporation crucible heat-insulating cover to complete the fixed connection of the crucible cover and the evaporation crucible heat-insulating cover, so that the upper surface of the crucible cover is covered with the evaporation crucible heat-insulating cover with a bearing groove, the coating material can be prevented from leaking in the evaporation process and flowing into a machine table along the crucible cover and the crucible body, the pollution of the machine table is caused, the heat-insulating effect can be achieved, and the uniform and stable temperature in the crucible can be effectively guaranteed.
Description
Technical Field
The utility model belongs to the technical field of the coating by vaporization technology, concretely relates to coating by vaporization crucible keeps warm and covers and coating by vaporization crucible.
Background
Vacuum evaporation, or vapor deposition for short, refers to a process method in which a coating material (or called a coating material) is evaporated and gasified in a certain heating and evaporation manner under vacuum conditions, and particles fly to the surface of a substrate to condense and form a film. The vapor deposition is a vapor deposition technology which is used earlier and has wider application, and has the advantages of simple film forming method, high film purity and compactness, unique film structure and performance and the like. At present, the coating material for evaporation is generally a metal material with a high melting point, so that a container for heating and storing a liquid coating material in the evaporation process needs to have good heat resistance, so that an evaporation crucible is generally selected for evaporation.
As shown in fig. 1, a conventional evaporation crucible includes a crucible body 1 and a crucible cover 2, a penetration type evaporation hole 21 is provided at an upper portion of the crucible cover 2, and the crucible body 1 is used for containing a coating material 3. In the actual evaporation process, the crucible body 1 and the crucible cover 2 are screwed, the coating material 3 is heated to form steam, the steam escapes from the crucible body 1 through the evaporation hole 21, and further rises to the substrate 4 to be condensed into a film. However, as shown in fig. 2, during the evaporation process, a small amount of vapor of the coating material 3 escapes to fall on the upper surface of the crucible cover 2, and the temperature of the crucible cover 2 is low, so that droplets of the coating material 3 can be generated on the upper surface of the crucible cover 2, and along with the gradual convergence of the droplets, the droplets can flow to the edge of the crucible cover 2 and flow down along the side wall of the crucible body 1 to fall on the machine, thereby causing the leakage of the coating material and the pollution of the machine, in addition, the crucible cover 2 is generally made of 4N5 pure titanium, and the heat preservation performance is general, and the heat is easy to lose, thereby causing the non-uniform temperature inside the crucible, and finally affecting the coating performance.
Although the prior art discloses some solutions for preventing leakage of the coating material, it only addresses the problem of leakage in the gap between the crucible body and the crucible cover. For example, CN207845756U discloses an evaporation crucible and evaporation coating device, including the crucible body and with the crucible cover that the cooperation of crucible body set up, the outside extension of crucible body top edge circumference is equipped with the extension, still includes a plurality of bolts, every the bolt passes in proper order the crucible cover with the extension of crucible body, bolt bottom spiro union has the cushion, the cushion with the cooperation is ended on the extension top, the extension is equipped with first only the helicoid, be equipped with on the cushion with first only helicoid complex second only the helicoid. The evaporation crucible is fixed to the crucible cover and the crucible body of the evaporation crucible through the bolts and the cushion blocks, the crucible cover and the crucible body can be fastened before use and in the use process, and the leakage problem is avoided.
CN207749178U discloses an OLED evaporation crucible, including crucible main part and the apron of lock with it, be equipped with the seal structure of gas tightness on crucible main part and apron, seal structure is including establishing the apron recess on the apron and setting up in crucible main part and with the corresponding main part arch of apron recess, through the interlock mode of improving crucible apron and crucible main part, improves the gas tightness of crucible, organic material vapour leakage problem in the crucible during the solution evaporation.
CN207552432U discloses an evaporation crucible, connects crucible body and lid through the spiro union piece to the bellying of crucible body and lid is inserted and is established in the recess, makes the seal between crucible body and the lid better, can effectively prevent evaporation material leakage, has effectively reduced the cost, and makes the evaporation effect better.
CN207109082U discloses an evaporation source and evaporation device, through the convex structure and the concave structure that set up respectively on crucible body and crucible upper cover, the convex structure and the concave structure carry out concave-convex cooperation to realize the inseparable fixed of crucible upper cover and crucible body, thereby effectively prevent the relative slip from appearing between crucible upper cover and the crucible body, and then avoid the boil-off gas to appear leaking.
CN207418852U discloses an evaporation crucible, wherein a metal piece capable of generating thermal expansion is arranged between a crucible body and a crucible cover, and the metal piece extrudes the crucible body and the crucible cover through the self expansion when being heated, so that a gap between the crucible body and the crucible cover is eliminated, the crucible body and the crucible cover are better sealed, the problem of leakage is avoided, and downtime is prevented; in addition, the locking force of bolt also need not be very big when the crucible is locking bolt, more convenient in the equipment, can also reduce the crucible lid simultaneously and because of the wearing and tearing that the extrusion brought of screwing, and the bolt can promote the compensation, guarantee sealedly to locking force through the inflation of metalwork during the coating by vaporization, its practicality is better.
To sum up, need to develop an evaporation coating crucible heat preservation lid and evaporation coating crucible at present, not only can prevent that coating material from leaking and flowing to the board along crucible lid and crucible body in the evaporation coating process inside, arouse the pollution of board, can also play the heat preservation effect, effectively guarantee the inside even stability of temperature of crucible.
SUMMERY OF THE UTILITY MODEL
The utility model provides a not enough to prior art exists, the utility model provides an evaporation crucible keeps warm and covers and evaporation crucible, evaporation crucible keeps warm and covers including the apron, and the first surface and the second surface of apron set up fixed recess respectively and accept the recess, in the in-service use process, earlier with crucible body and crucible cover fixed connection, accomplish fixed connection between them in the fixed recess of covering the embedding evaporation crucible of crucible lid again for the upper surface of crucible cover covers the evaporation crucible that has the accepting recess and keeps warm and covers, not only can prevent that coating material from leaking and flow inside the board along crucible cover and crucible body among the evaporation process, arouse the pollution of board, can also play the heat preservation effect, effectively guarantee that the inside temperature of crucible is even stable.
To achieve the purpose, the utility model adopts the following technical proposal:
an object of the utility model is to provide an evaporation crucible keeps warm and covers, evaporation crucible keeps warm and covers including the apron, the apron includes first surface and second surface, first surface sets up with the second surface relatively the edge of first surface is equipped with fixed protruding formation fixed recess the edge on second surface is equipped with accepts protruding formation and accepts the recess seted up on the apron and is greater than or equal to 1 perforating hole.
The design that evaporation coating crucible kept warm and covers through fixed recess and accept the recess, in the in-service use process, earlier with crucible body and crucible cover fixed connection, accomplish fixed connection between them in the fixed recess of cover embedding evaporation coating crucible keeps warm again, make the upper surface of crucible cover have the evaporation coating crucible who accepts the recess keep warm and cover, not only can prevent that evaporation coating in-process coating film material from leaking and flow to the board along crucible cover and crucible body inside, arouse the pollution of board, can also play the heat preservation effect, effectively guarantee that the inside temperature of crucible is even stable.
As the utility model discloses preferred technical scheme, the coating by vaporization crucible keeps warm and covers for nickel coating by vaporization crucible keeps warm and covers.
The material of coating by vaporization crucible heat preservation lid is selected for metallic nickel, can utilize the low and slow characteristics of radiating rate of metallic nickel coefficient of heat conductivity, helps coating by vaporization crucible heat preservation lid performance heat preservation effect, and then effectively guarantees that the inside temperature of crucible is even stable.
As the preferred technical scheme of the utility model, the perforating hole is the taper hole, and follows first surface extremely the direction on second surface the sectional area of perforating hole reduces gradually.
The taper hole design of the through hole can ensure that the aperture of the coating material escaping outwards is reduced, and further the condensed liquid drop at the through hole can be dropped into the crucible body again.
In a preferred embodiment of the present invention, the diameter of the through-hole on the first surface is 12 to 20mm, for example, 12mm, 13mm, 14mm, 15mm, 16mm, 17mm, 18mm, 19mm or 20mm, and the diameter of the through-hole on the second surface is 6 to 10mm, for example, 6mm, 7mm, 8mm, 9mm or 10mm, but the through-hole is not limited to the above-mentioned values, and other values not listed in the above-mentioned range of values are also applicable.
As a preferred embodiment of the present invention, the distance between the outer side surface of the fixing protrusion and the outer side surface of the cover plate is 5-10mm, for example, 5mm, 6mm, 7mm, 8mm, 9mm, or 10mm, but not limited to the listed values, and other values not listed in the numerical range are also applicable, and the outer side surface of the receiving protrusion coincides with the outer side surface of the cover plate.
The axial cross-section of coating by vaporization crucible heat preservation lid is simple H type not, but designs into the great pattern of the basal area of accepting the more fixed recess of basal area of recess, can increase the ability of accepting the recess as far as possible under the condition that does not influence the use, has prevented effectively that coating material from leaking among the coating by vaporization process and flowing to the board along crucible lid and crucible body inside, arouses the pollution of board.
In a preferred embodiment of the present invention, the height of the fixing protrusion is 10-15mm, such as 10mm, 11mm, 12mm, 13mm, 14mm or 15mm, and the height of the receiving protrusion is 3-6mm, such as 3mm, 3.5mm, 4mm, 4.5mm, 5mm, 5.5mm or 6mm, but the invention is not limited to the above-mentioned values, and other values not listed in the above-mentioned range of values are also applicable.
In a preferred embodiment of the present invention, the thickness of the cover plate is 3 to 5mm, for example, 3mm, 3.5mm, 4mm, 4.5mm, or 5mm, but the present invention is not limited to the above-mentioned values, and other values not shown in the above-mentioned range of values are also applicable.
As the preferred technical scheme of the utility model, the profile of evaporation crucible heat preservation lid is circular or rectangle.
It is worth explaining that, the profile of the evaporation crucible heat-preservation cover of the utility model is consistent with that of the crucible cover.
A second object of the utility model is to provide an evaporation crucible, including one of crucible body, crucible lid and purpose evaporation crucible heat preservation lid.
As the utility model discloses preferred technical scheme, the crucible body is provided with the opening, crucible cover butt in the open-ended edge is accomplished the crucible body with the fixed connection of crucible cover, the crucible cover is opened and is equipped with the evaporation hole, evaporation crucible keeps warm and covers and passes through the stationary hump will the embedding of crucible cover fixed connection is accomplished to the fixed recess, the evaporation hole with the figure of perforating hole is the same and one-to-one, makes correspondingly the evaporation hole with the coincidence of the central axis of perforating hole.
It is worth to be noted that the fixed connection between the crucible body and the crucible cover includes any one of a threaded connection, a snap connection or a bolt connection, wherein the threaded connection is limited to the crucible body and the crucible cover which are cylindrical, and those skilled in the art can make a reasonable selection according to actual situations.
Compared with the prior art, the beneficial effects of the utility model are that:
evaporation crucible heat preservation lid is including the apron, and the first surface and the second surface of apron set up fixed recess respectively and accept the recess, in the in-service use process, earlier with crucible body and crucible lid fixed connection, accomplish fixed connection between them in the fixed recess of crucible lid embedding evaporation crucible heat preservation lid again, make the upper surface of crucible lid cover have the evaporation crucible heat preservation lid of accepting the recess, not only can prevent that coating film material from leaking and flowing the board along crucible lid and crucible body in the evaporation process inside, arouse the pollution of board, can also play the heat preservation effect, effectively guarantee that the inside temperature of crucible is even stable.
Drawings
FIG. 1 is a schematic diagram of a prior art evaporation process;
FIG. 2 is a schematic view showing the crucible cover and the crucible body of FIG. 1 having a coating material leaked and flowing into the inside of the machine;
FIG. 3 is an exploded view of the evaporation crucible of the present invention;
FIG. 4 is an axial cross-sectional view of an evaporation crucible according to the present invention;
FIG. 5 is an axial sectional view of the thermal cover of the evaporation crucible of the present invention;
wherein, 1-crucible body; 11-crucible side assembly; 12-a crucible bottom surface assembly; 2-crucible cover; 21-vapor plating holes; 3-coating material; 4-a substrate; 5-evaporating a crucible heat preservation cover; 51-a cover plate; 52-fixed protrusions; 53-receiving protrusions; 54-through hole.
Detailed Description
In order to make the technical solution, objects and advantages of the present invention clearer, the present invention is described in further detail below with reference to specific embodiments and accompanying drawings. It is to be understood that the description of the embodiments herein is for purposes of illustration and explanation only and is not intended to limit the invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. For the electrical and communication fields, either a wired connection or a wireless connection is possible. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
As shown in fig. 3 and 4, the evaporation crucible of the present invention comprises a crucible body 1, a crucible cover 2 and an evaporation crucible heat-insulating cover 5, wherein the crucible body 1 comprises a crucible side assembly 11 and a crucible bottom assembly 12, and the crucible body 1, the crucible cover 2 and the evaporation crucible heat-insulating cover 5 are all fixedly connected by a snap-in connection; as shown in fig. 5, the evaporation crucible heat-insulating cover 5 comprises a cover plate 51, the cover plate 51 comprises a first surface and a second surface, the first surface and the second surface are arranged oppositely, a fixing protrusion 52 is arranged at the edge of the first surface to form a fixing groove, a receiving protrusion 53 is arranged at the edge of the second surface to form a receiving groove, and more than or equal to 1 through hole 54 is arranged on the cover plate;
in the actual use process, the crucible body 1 is provided with an opening, the crucible cover 2 is abutted against the edge of the opening to fixedly connect the crucible body 1 with the crucible cover 2, the crucible cover 2 is provided with an evaporation hole 21, the evaporation crucible heat-insulating cover 5 is embedded into the crucible cover 2 through the fixing protrusion 52 to fixedly connect the crucible cover 2 with the fixing groove, the evaporation hole 21 and the through hole 54 are identical in number and are in one-to-one correspondence, so that the evaporation hole 21 and the through hole 54 are correspondingly superposed on each other along the central axis.
Example 1
The embodiment provides an evaporation crucible heat-insulating cover and an evaporation crucible, wherein the evaporation crucible heat-insulating cover 5 comprises a cover plate 51, the cover plate 51 comprises a first surface and a second surface, the first surface and the second surface are oppositely arranged, a fixing bulge 52 is arranged at the edge of the first surface to form a fixing groove, a bearing bulge 53 is arranged at the edge of the second surface to form a bearing groove, and the cover plate is provided with 1 through hole 54; the evaporation crucible heat-insulating cover 5 is a nickel evaporation crucible heat-insulating cover; the through hole 54 is a taper hole, and the cross-sectional area of the through hole 54 gradually decreases in the direction from the first surface to the second surface, the diameter of the through hole 54 on the first surface is 15.7mm, and the diameter on the second surface is 7.5 mm; the distance between the outer side surface of the fixing protrusion 52 and the outer side surface of the cover plate 51 is 6.5mm, and the outer side surface of the receiving protrusion 53 is overlapped with the outer side surface of the cover plate 51; the height of the fixing bulge 52 is 11mm, and the height of the receiving bulge is 6.5 mm; the thickness of the cover plate 51 is 4 mm; the profile of the evaporation crucible heat-insulating cover 5 is circular;
the evaporation crucible heat-insulating cover 5, a crucible body 1 and a crucible cover 2 form an evaporation crucible, wherein the crucible body 1 comprises a crucible side surface assembly 11 and a crucible bottom surface assembly 12, the crucible body 1, the crucible cover 2 and the evaporation crucible heat-insulating cover 5 are fixedly connected through a buckle type connection, the crucible body 1 is provided with an opening, the crucible cover 2 is abutted against the edge of the opening to complete the fixed connection of the crucible body 1 and the crucible cover 2, the crucible cover 2 is provided with 1 evaporation hole 21, the evaporation crucible heat-insulating cover 5 is embedded into the crucible cover 2 through the fixing protrusion 52 to complete the fixed connection of the fixing groove, and the evaporation hole 21 corresponds to the through hole 54, so that the evaporation hole 21 corresponds to the central axis of the through hole 54.
In the actual use process, because the upper surface of the crucible cover 2 is covered with the evaporation crucible heat-insulating cover 5 with a bearing groove, the coating material can be prevented from leaking in the evaporation process and flowing into the machine along the crucible cover and the crucible body to cause pollution of the machine, the heat-insulating effect can be achieved, and the uniform and stable temperature in the crucible can be effectively ensured.
Example 2
The embodiment provides an evaporation crucible heat-insulating cover and an evaporation crucible, wherein the evaporation crucible heat-insulating cover 5 comprises a cover plate 51, the cover plate 51 comprises a first surface and a second surface, the first surface and the second surface are oppositely arranged, a fixing bulge 52 is arranged at the edge of the first surface to form a fixing groove, a bearing bulge 53 is arranged at the edge of the second surface to form a bearing groove, and the cover plate is provided with 1 through hole 54; the evaporation crucible heat-insulating cover 5 is a nickel evaporation crucible heat-insulating cover; the through hole 54 is a taper hole, and the cross-sectional area of the through hole 54 gradually decreases in the direction from the first surface to the second surface, the diameter of the through hole 54 on the first surface is 12mm, and the diameter on the second surface is 6 mm; the distance between the outer side surface of the fixing protrusion 52 and the outer side surface of the cover plate 51 is 5mm, and the outer side surface of the receiving protrusion 53 is overlapped with the outer side surface of the cover plate 51; the height of the fixing bulge 52 is 10mm, and the height of the receiving bulge is 3 mm; the thickness of the cover plate 51 is 3 mm; the profile of the evaporation crucible heat-insulating cover 5 is circular;
the evaporation crucible heat-insulating cover 5, a crucible body 1 and a crucible cover 2 form an evaporation crucible, wherein the crucible body 1 comprises a crucible side surface assembly 11 and a crucible bottom surface assembly 12, the crucible body 1, the crucible cover 2 and the evaporation crucible heat-insulating cover 5 are fixedly connected through a buckle type connection, the crucible body 1 is provided with an opening, the crucible cover 2 is abutted against the edge of the opening to complete the fixed connection of the crucible body 1 and the crucible cover 2, the crucible cover 2 is provided with 1 evaporation hole 21, the evaporation crucible heat-insulating cover 5 is embedded into the crucible cover 2 through the fixing protrusion 52 to complete the fixed connection of the fixing groove, and the evaporation hole 21 corresponds to the through hole 54, so that the evaporation hole 21 corresponds to the central axis of the through hole 54.
In the actual use process, because the upper surface of the crucible cover 2 is covered with the evaporation crucible heat-insulating cover 5 with a bearing groove, the coating material can be prevented from leaking in the evaporation process and flowing into the machine along the crucible cover and the crucible body to cause pollution of the machine, the heat-insulating effect can be achieved, and the uniform and stable temperature in the crucible can be effectively ensured.
Example 3
The embodiment provides an evaporation crucible heat-insulating cover and an evaporation crucible, wherein the evaporation crucible heat-insulating cover 5 comprises a cover plate 51, the cover plate 51 comprises a first surface and a second surface, the first surface and the second surface are oppositely arranged, a fixing bulge 52 is arranged at the edge of the first surface to form a fixing groove, a bearing bulge 53 is arranged at the edge of the second surface to form a bearing groove, and the cover plate is provided with 1 through hole 54; the evaporation crucible heat-insulating cover 5 is a nickel evaporation crucible heat-insulating cover; the through hole 54 is a taper hole, and the cross-sectional area of the through hole 54 gradually decreases in the direction from the first surface to the second surface, the diameter of the through hole 54 on the first surface is 20mm, and the diameter on the second surface is 10 mm; the distance between the outer side surface of the fixing protrusion 52 and the outer side surface of the cover plate 51 is 10mm, and the outer side surface of the receiving protrusion 53 is overlapped with the outer side surface of the cover plate 51; the height of the fixing bulge 52 is 15mm, and the height of the receiving bulge is 6 mm; the thickness of the cover plate 51 is 5 mm; the profile of the evaporation crucible heat-insulating cover 5 is circular;
the evaporation crucible heat-insulating cover 5, a crucible body 1 and a crucible cover 2 form an evaporation crucible, wherein the crucible body 1 comprises a crucible side surface assembly 11 and a crucible bottom surface assembly 12, the crucible body 1, the crucible cover 2 and the evaporation crucible heat-insulating cover 5 are fixedly connected through a buckle type connection, the crucible body 1 is provided with an opening, the crucible cover 2 is abutted against the edge of the opening to complete the fixed connection of the crucible body 1 and the crucible cover 2, the crucible cover 2 is provided with 1 evaporation hole 21, the evaporation crucible heat-insulating cover 5 is embedded into the crucible cover 2 through the fixing protrusion 52 to complete the fixed connection of the fixing groove, and the evaporation hole 21 corresponds to the through hole 54, so that the evaporation hole 21 corresponds to the central axis of the through hole 54.
In the actual use process, because the upper surface of the crucible cover 2 is covered with the evaporation crucible heat-insulating cover 5 with a bearing groove, the coating material can be prevented from leaking in the evaporation process and flowing into the machine along the crucible cover and the crucible body to cause pollution of the machine, the heat-insulating effect can be achieved, and the uniform and stable temperature in the crucible can be effectively ensured.
Comparative example 1
This comparative example provides an evaporation crucible, and the conditions were exactly the same as those in example 1 except that the evaporation crucible heat-retaining cover 5 was omitted.
In the actual use process, the upper surface of the crucible cover 2 can generate droplets of the coating material, and the droplets gradually converge and flow to the edge of the crucible cover 2 and flow down along the side wall of the crucible body 1 to drip on the machine table, so that the leakage of the coating material is caused and the pollution of the machine table is caused.
To sum up, the evaporation crucible heat preservation lid is including the apron, and the first surface and the second surface of apron set up fixed recess respectively and accept the recess, in the in-service use process, earlier with crucible body and crucible lid fixed connection, accomplish fixed connection between them in the fixed recess of embedding evaporation crucible heat preservation lid with the crucible lid again for the upper surface of crucible lid covers the evaporation crucible heat preservation lid that has the accepting recess, not only can prevent that coating film material from leaking and flowing inside the board along crucible lid and crucible body among the evaporation process, arouse the pollution of board, can also play the heat preservation effect, effectively guarantee that the inside temperature of crucible is even stable.
The applicant states that the above description is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and those skilled in the art should understand that any changes or substitutions easily conceivable by those skilled in the art within the technical scope of the present invention are within the protection scope and the disclosure scope of the present invention.
Claims (10)
1. The evaporation crucible heat-insulating cover is characterized by comprising a cover plate, wherein the cover plate comprises a first surface and a second surface, the first surface and the second surface are arranged oppositely, a fixing bulge is arranged at the edge of the first surface to form a fixing groove, a supporting bulge is arranged at the edge of the second surface to form a supporting groove, and more than or equal to 1 through hole is formed in the cover plate.
2. An evaporation crucible heat-insulating cover according to claim 1, wherein the evaporation crucible heat-insulating cover is a nickel evaporation crucible heat-insulating cover.
3. An evaporation crucible heat-insulating cover according to claim 1, wherein the through hole is a tapered hole, and a sectional area of the through hole is gradually reduced in a direction from the first surface to the second surface.
4. A thermal insulating cover for a vaporization crucible as defined in claim 3, wherein said through hole has a diameter of 12 to 20mm on said first surface and a diameter of 6 to 10mm on said second surface.
5. An evaporation crucible heat-insulating cover according to claim 1, wherein the distance between the outer side surface of the fixing protrusion and the outer side surface of the cover plate is 5-10mm, and the outer side surface of the receiving protrusion coincides with the outer side surface of the cover plate.
6. A thermal insulating cover for a vaporization crucible as defined in claim 1, wherein the height of said fixing projection is 10-15mm, and the height of said receiving projection is 3-6 mm.
7. A thermal insulating cover for a vaporization crucible according to claim 1, wherein the thickness of the cover plate is 3-5 mm.
8. The evaporation crucible insulating cover according to claim 1, wherein the evaporation crucible insulating cover has a circular or rectangular outline.
9. An evaporation crucible, comprising a crucible body, a crucible cover and the insulation cover of the evaporation crucible of any one of claims 1 to 8.
10. An evaporation crucible as recited in claim 9, wherein said crucible body is provided with an opening, said crucible cover is abutted against the edge of said opening to fixedly connect said crucible body and said crucible cover, said crucible cover is provided with an evaporation hole, said evaporation crucible heat-insulating cover inserts said crucible cover into said fixing groove through said fixing protrusion to fixedly connect said crucible cover, said evaporation hole is identical in number and in one-to-one correspondence with said through hole, so that said corresponding evaporation hole coincides with the central axis of said through hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120005525.XU CN214300321U (en) | 2021-01-04 | 2021-01-04 | Evaporation crucible heat preservation cover and evaporation crucible |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120005525.XU CN214300321U (en) | 2021-01-04 | 2021-01-04 | Evaporation crucible heat preservation cover and evaporation crucible |
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| Publication Number | Publication Date |
|---|---|
| CN214300321U true CN214300321U (en) | 2021-09-28 |
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| CN202120005525.XU Active CN214300321U (en) | 2021-01-04 | 2021-01-04 | Evaporation crucible heat preservation cover and evaporation crucible |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116121711A (en) * | 2023-03-30 | 2023-05-16 | 京东方科技集团股份有限公司 | Auxiliary evaporation device and evaporation crucible |
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2021
- 2021-01-04 CN CN202120005525.XU patent/CN214300321U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116121711A (en) * | 2023-03-30 | 2023-05-16 | 京东方科技集团股份有限公司 | Auxiliary evaporation device and evaporation crucible |
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