CN209816259U - Evaporation crucible - Google Patents
Evaporation crucible Download PDFInfo
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- CN209816259U CN209816259U CN201822124190.4U CN201822124190U CN209816259U CN 209816259 U CN209816259 U CN 209816259U CN 201822124190 U CN201822124190 U CN 201822124190U CN 209816259 U CN209816259 U CN 209816259U
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- crucible
- top plate
- heating
- evaporation
- vapor outlet
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Abstract
The application relates to an evaporation crucible, which comprises a crucible body and a heating part, wherein the crucible body is provided with an accommodating cavity, the top of the crucible body is provided with at least one steam outlet, and the steam outlet is communicated with the accommodating cavity; the heating part is arranged at the top of the crucible body and is used for vaporizing the material contained in the containing cavity. The evaporation crucible provided by the application can be used for accurately controlling the amount of each component in the coating film so as to ensure that the coating film meets the process requirements.
Description
Technical Field
The application relates to the field of evaporation, especially relates to an evaporation crucible.
Background
Vacuum evaporation is a common coating technology, and specifically comprises the following steps: heating the metal material in a vacuum environment, vaporizing the metal material and depositing the vaporized metal material on the surface of the substrate material to obtain the film material. The device that is used for holding metal material at the coating by vaporization in-process is the coating by vaporization crucible, and present coating by vaporization crucible adopts modes such as built-in heating resistor to heat the material usually, but this kind of coating by vaporization crucible produces local gushing phenomenon easily, causes the not easily controlled problem of the volume of each composition in the coating, and this is unfavorable for guaranteeing the technological requirement of coating film.
SUMMERY OF THE UTILITY MODEL
In order to solve the above technical problem or at least partially solve the above technical problem, the present application provides an evaporation crucible.
The application provides an evaporation crucible, it includes:
the crucible comprises a crucible body, a heating device and a heating device, wherein the crucible body is provided with an accommodating cavity, the top of the crucible body is provided with at least one steam outlet, and the steam outlet is communicated with the accommodating cavity;
the heating part is arranged at the top of the crucible body and is used for vaporizing the material contained in the containing cavity.
Optionally, the crucible body includes a lower cavity and a top plate, the top plate has the vapor outlet, the top plate covers the lower cavity to form the accommodating cavity, and the heating portion is mounted on the top plate.
Optionally, a heating part mounting groove is formed in one side, away from the lower cavity, of the top plate, and the heating part is mounted in the heating part mounting groove.
Optionally, a sealing groove is formed in one side, facing the lower cavity, of the top plate, and the top plate is connected with the lower cavity in a sealing mode through the sealing groove.
Optionally, the top plate includes a top plate body and a vapor outlet portion connected to each other, the heating portion is disposed to cover the top plate body entirely, and a portion of the heating portion surrounds an outer side of the vapor outlet portion.
Alternatively, the vapor outlet portion may be provided higher than the heating portion in a height direction of the evaporation crucible.
Optionally, the vapour outlet is a circular flared structure.
Optionally, the coating by vaporization crucible that this application provided still includes shell and heat preservation, the crucible body is placed in the shell, just down the bottom of cavity with between the shell, down the lateral part of cavity with between the shell, and on the outside of roof, at least one is provided with the heat preservation.
Optionally, the crucible body is made of a material at least comprising graphite.
Optionally, a temperature detection part is arranged in the accommodating cavity.
Compared with the prior art, the technical scheme provided by the embodiment of the application has the following advantages:
in the coating by vaporization crucible that this application embodiment provided, heating portion sets up in the top that holds the chamber to in the in-process that carries out vacuum evaporation, can make the material that holds the intracavity begin to evaporate gradually from its top, this can not cause the coating by vaporization in-process to appear local gushing phenomenon hardly, thereby can be through the operating condition of control heating portion, the volume of each composition in the control coating film comparatively accurately, so that the coating film that forms can satisfy the technological requirement.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the invention and together with the description, serve to explain the principles of the invention.
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without inventive exercise.
FIG. 1 is a schematic view of an evaporation crucible according to an embodiment of the present disclosure;
FIG. 2 is a top view of a top plate in an evaporation crucible provided in an embodiment of the present application;
FIG. 3 is a bottom view of a top plate in an evaporation crucible provided in an embodiment of the present application;
FIG. 4 is a side view of a top plate in an evaporation crucible provided in an embodiment of the present application;
FIG. 5 is a partially enlarged view of a top plate in an evaporation crucible provided in an embodiment of the present application;
fig. 6 is a schematic structural view of a heating portion in an evaporation crucible according to an embodiment of the present application.
Reference numerals:
1-a lower cavity;
11-a containment chamber;
2-a top plate;
21-a top plate body;
211-sealing the groove;
212-mounting holes;
22-a vapor outlet portion;
221-vapor outlet;
3-heating part;
31-positive and negative electrodes;
4-a housing;
5-insulating layer;
51-graphite pad;
52-graphite felt;
6-mounting piece.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some embodiments of the present application, but not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
FIG. 1 shows an evaporation crucible according to an embodiment of the present invention, in which a coating film formed by using the crucible can substantially meet the process requirements of most evaporation parts. The evaporation crucible comprises a crucible body and a heating part 3, wherein the crucible body is provided with an accommodating cavity 11 and a steam outlet 221, the shape of the steam outlet 221 can be correspondingly arranged according to the shape of the accommodating cavity 11, the number of the steam outlets can be one or more, the steam outlet 221 is communicated with the accommodating cavity 11, and the steam outlet 221 is arranged at the top of the crucible body so that generated metal steam can escape from the accommodating cavity 11 and can be deposited on the surface of a base material; the heating part 3 is used for generating heat to heat the material contained in the containing cavity 11 and make the material vaporized and escape from the steam outlet 221, and the heating part 3 is arranged at the top of the crucible body to prevent the local gushing phenomenon of the metal source material caused by uneven heating in the evaporation process. When the evaporation crucible provided by the application is used for evaporation, materials to be heated and vaporized can be filled in the accommodating cavity 11 of the crucible body, then the heating part 3 is controlled to work to generate heat, the materials in the accommodating cavity 11 are vaporized under the action of the heating part 3, then the materials escape from the vapor outlet 221 at the top of the crucible body and are deposited on the base material, and when the deposited metal vapor reaches a certain degree, the evaporation work of the metal material is completed.
Specifically, the crucible body can be made of a metal material with a higher melting point; of course, the crucible body can also be made of ceramic materials; in order to prevent the generated metal vapor from being mixed with other metal impurities in the evaporation process, preferably, the crucible body can be made of a graphite material, the graphite material has excellent heat-conducting property, and the melting point of the graphite is relatively high, so that the evaporation crucible is hardly vaporized in the evaporation heating process, and the generated metal vapor is basically not mixed with impurities so as to further improve the quality of the coating film; the shape and size of the crucible body, and the size of the accommodating chamber 11 can be determined according to actual requirements, and are not limited herein. The heating part 3 can adopt any one of heating modes such as resistance heating, electron beam heating, radio frequency induction heating, arc heating and laser heating, and preferably, the heating part 3 can adopt a resistance heating mode to heat the material in the accommodating cavity 11, the cost of the heating mode is relatively low, and the heat generation is relatively uniform, so that the rate and the amount of the material vaporized at each position in the accommodating cavity 11 are basically the same; the heating part 3 can be arranged on the top of the crucible body through a connecting piece; alternatively, the top of the crucible body may be provided with a structure for installing the heating part 3, for which it is possible to flexibly change according to actual conditions. In order to further equalize the rate at which the material is vaporized everywhere within the accommodating chamber 11 during the evaporation, it is preferable that the general shape of the heating portion 3 be similar to the cross-sectional shape of the accommodating chamber 11 of the crucible body.
Therefore, in the evaporation crucible provided by the embodiment of the application, the heating part 3 is arranged above the accommodating cavity 11, so that in the process of vacuum evaporation, materials in the accommodating cavity 11 can be gradually evaporated from the uppermost part of the material, and the phenomenon of local gushing in the evaporation process can be hardly caused, so that the amount of each component in a coating film can be accurately controlled by controlling the working state of the heating part 3, and the formed coating film can meet the process requirement.
Further, as shown in fig. 1 to 4, the crucible body may include a lower cavity 1 and a top plate 2, the top plate 2 and the lower cavity 1 are connected with each other, an accommodating cavity 11 is formed therebetween, the vapor outlet 221 is disposed on the top plate 2, correspondingly, a heating plate may also be mounted on the top plate 2, and the accommodating cavity 11 is filled with a material to be heated in the evaporation process through the lower cavity 1 and the top plate 2 which are separately disposed; preferably, the heating part 3 may be installed on the side of the top plate 2 away from the lower chamber 1, so as to prevent the heating part 3 from shortening its life and reducing its heating effect due to partial metal vapor deposited on the surface of the heating part 3 during the evaporation process; meanwhile, the separately provided top plate 2 may also provide a mounting base for the heating part 3. Specifically, the lower cavity 1 and the top plate 2 can be made of the same material, which is beneficial to reducing the processing difficulty of the lower cavity and the top plate and improving the production efficiency; alternatively, both of them can be made of graphite material, the lower cavity 1 can be square, and the like, and accordingly, the shape of the top cover is matched with that of the lower cavity 1.
In order to improve the utilization rate of the heat generated by the heating portion 3, preferably, a heating portion installation groove may be provided on a side of the top plate 2 away from the lower cavity 1, and as shown in fig. 6, the shape of the heating portion installation groove may be substantially the same as that of the heating portion 3, so that the top plate 2 may provide a certain protection effect for the heating portion 3 and a certain heat preservation effect for the heating portion 3, thereby improving the heat utilization rate of the heating portion 3. The top plate 2 may be provided with positive and negative electrodes 31 for mounting the heater 3, and may have a groove-like structure; this makes heating portion 3 can install in roof 2 as a whole to the upper surface that makes roof 2 is planar structure basically, thereby is convenient for through increase other structures at the upper surface of roof 2, further promotes the heat preservation effect to roof 2 and heating portion 3, thereby promotes the production efficiency of coating by vaporization work. Specifically, the top plate 2 may be formed of a graphite material by lamination or the like, and a heating part installation groove having a shape similar to that of the heating part 3 may be directly formed during the processing of the top plate 2; alternatively, after the top plate 2 is formed, a heating portion mounting groove having a predetermined shape may be formed on one surface of the top plate 2 by another method such as drilling.
Optionally, as shown in fig. 3, a sealing groove 211 may be provided on one side of the top plate 2 facing the lower chamber 1, and a shape and a size of the sealing groove 211 may correspond to an upper structure and a size of the lower chamber 1, in an assembly process of the evaporation crucible provided by the present application, the top plate 2 may cover the lower chamber 1 through the sealing groove 211, so as to form an accommodating chamber 11 with relatively good sealing performance with the lower chamber 1, so as to further improve the heat insulation performance of the entire evaporation crucible, and further precisely control the amount of each component in the coating film in the evaporation process; meanwhile, the good sealing performance can also prevent the metal vapor from escaping from the gap between the top plate 2 and the lower cavity 1, so that on one hand, the usage amount of metal source materials can be saved, on the other hand, the environment pollution caused by the diffusion of the metal vapor can be prevented, and the adverse effect on the health of workers can be generated.
Further, as shown in fig. 2 to 4, the top plate 2 may include a top plate body 21 and a vapor outlet portion 22, the vapor outlet portion 22 is connected to the top plate body 21, and a heating portion installation groove for installing the heating portion 3 and a sealing groove 211 for connecting with the lower chamber body 1 may be respectively formed at opposite sides of the top plate body 21 in a thickness direction thereof, and a vapor outlet 221 is formed inside the vapor outlet portion 22; in order to enable the material placed at each position in the accommodating cavity 11 to be vaporized approximately synchronously, preferably, the heating portion 3 can be almost covered over the whole top plate body 21 by changing the overall shape and layout of the heating portion 3, it should be noted that the covering refers to a partial structure where most of the area of the top plate body 21 is almost provided with the heating portion 3, so that most of the area in the accommodating cavity 11 below the top plate body 21 can be subjected to the heat radiation effect of the heating portion 3, and further, the material at each position in the accommodating cavity 11 can be vaporized at almost equal rate, so as to prevent the problem that the material in the area cannot be vaporized due to the fact that the area in the accommodating cavity 11 is heated less. Preferably, a part of the heating part 3 may be wound around the outside of the vapor outlet part 22, which may prevent the metal vapor from adhering to the inner wall of the vapor outlet 221 due to a temperature decrease during the process of flowing from the accommodating chamber 11 to the vapor outlet 221 during the evaporation process to block the vapor outlet 221; further, the vapor outlet portion 22 may be made slightly higher than the heating portion 3 in the height direction of the evaporation crucible (i.e., the thickness direction of the top plate body 21), which may stabilize the temperature at the tip of the vapor outlet 221.
In order to make it easier for the metal vapor escaping from the vapor outlet 221 to diffuse toward the periphery of the vapor outlet 221, the vapor outlet 221 may be preferably provided in a circular flared structure. Specifically, the vapor outlet 221 having a flared structure may be formed by providing the inner side surface of the vapor outlet 22 as an inclined surface, so that the metal vapor is more easily diffused to the periphery of the vapor outlet 22 by the guiding action of the inner side surface of the vapor outlet 22, thereby preventing a large amount of metal vapor from being accumulated and deposited on the portion of the base material directly above the vapor outlet 221, and reducing the quality of the coating film. Specifically, the distance between the vapor outlet port 22 and the base material may be determined in accordance with actual conditions, and likewise, the size of the vapor outlet port 22 above the ceiling plate body 21 may also be determined in accordance with actual conditions; the vapor outlet 22 may have a circular configuration, and a line obtained by cutting a plane passing through the axis of the vapor outlet 22 on the inner side surface may be a straight line or a curved line; as shown in fig. 5, when a line of the vapor outlet portion 22 taken by a plane passing through the axis is a straight line, the inner side surface of the vapor outlet portion 22 is similar in shape to the side surface of the circular truncated cone, and the inclination angle of the inner side surface of the vapor outlet portion 22 of this structure can be determined by combining the inner diameter of the vapor outlet portion 22 and the maximum height and the minimum height of the vapor outlet portion 22.
In order to further promote the heat preservation performance of whole coating by vaporization crucible, thereby make the volume of each composition in the coating film of ability more accurately control in the coating by vaporization process, preferably, as shown in fig. 1, the coating by vaporization crucible that this application provided can also be provided with shell 4, the crucible body can be placed in shell 4, thereby make shell 4 can provide certain protection and heat preservation effect for the crucible body, in order to further promote roof 2, the connection reliability between lower cavity 1, as shown in fig. 1, still be provided with installed part 6 in the coating by vaporization crucible that this application provided, installed part 6 specifically can be screw rod and clamp, connect roof 2 through installed part 6, the stability of lower cavity 1 and shell 4 is higher.
In order to further improve the heat insulation performance of the whole evaporation crucible, at least one of the bottom and the side of the crucible body and the outer side of the top plate 2 may be provided with a heat insulation layer 5, and preferably, as shown in fig. 1, the heat insulation layers 5 may be provided at all of the three positions, so as to improve the heat insulation performance of the whole evaporation crucible to the maximum extent. Specifically, the shell 4 may be a graphite box, the insulating layer 5 may be a graphite pad 51 and a graphite felt 52, preferably, both the bottom and the side of the lower cavity 1 may be padded with the graphite felt 52, the graphite felt 52 may provide a better insulating effect for the lower cavity 1, meanwhile, the graphite felt 52 may be made of graphite fibers, the thickness of which is 5-8mm, and the interior of which has many fine pores, during the evaporation process, as the temperature of the evaporated material and the temperature of the lower cavity 1 rise, the two will certainly expand to a certain extent, and with the graphite felt 52 having compressibility, a certain extrusion space may be provided for the expansion of the material and the lower cavity 1, thereby preventing the shell 4 from deforming due to extrusion. Correspondingly, the outer side of the top plate 2 can also be provided with the heat preservation layer 5, the heat preservation layer 5 is arranged in the heat preservation layer 5 on the outer side of the top plate 2, the graphite pad 51 can be arranged closest to the top plate 2, the thickness of the graphite pad 51 is usually 2-3mm, the structure is relatively compact, and the surface adhesion capacity of the graphite pad 51 is relatively strong, so that the metal steam dissipated to the graphite pad 51 can be stably adhered to the surface of the graphite pad 51, and the metal source material cannot be polluted due to falling back into the accommodating cavity 11; in order to prevent the constituent fibers of the graphite felt 52, which is relatively soft, from separating from the graphite felt 52 during the evaporation process and contaminating the metal source material in the accommodating chamber 11, even blocking the vapor outlet 221, it is preferable that the graphite pads 51 are laid on the outermost side of the top plate 2, and the graphite felt 52 is disposed between the two sets of graphite pads 51 on the outer side of the top plate 2.
In order to enable the working personnel to know the real-time temperature conditions of the metal source material and the metal vapor in the accommodating cavity 11 so as to further precisely control the state of the evaporation operation, preferably, at least one temperature detection part may be arranged in the accommodating cavity 11, the temperature detection part may specifically be a thermocouple, as shown in fig. 4, and a mounting hole 212 for the temperature detection part to extend into may be formed on the lower cavity 1.
It is noted that, in this document, relational terms such as "first" and "second," and the like, may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
The foregoing are merely exemplary embodiments of the present invention, which enable those skilled in the art to understand or practice the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (10)
1. An evaporation crucible, comprising:
the crucible comprises a crucible body, a heating device and a heating device, wherein the crucible body is provided with an accommodating cavity, the top of the crucible body is provided with at least one steam outlet, and the steam outlet is communicated with the accommodating cavity;
the heating part is arranged at the top of the crucible body and is used for vaporizing the material contained in the containing cavity.
2. An evaporation crucible according to claim 1, wherein the crucible body comprises a lower chamber and a top plate, the top plate has the vapor outlet, the top plate covers the lower chamber to form the accommodating chamber, and the heating part is attached to the top plate.
3. An evaporation crucible according to claim 2, wherein a side of the top plate facing away from the lower chamber has a heating section mounting groove, and the heating section is mounted in the heating section mounting groove.
4. An evaporation crucible according to claim 2, wherein the top plate is provided with a sealing groove on one side facing the lower cavity, and the top plate is connected with the lower cavity in a sealing manner through the sealing groove.
5. The evaporation crucible according to claim 2, wherein the top plate includes a top plate body and a vapor outlet portion, the heating portion is provided so as to entirely cover the top plate body, and a part of the heating portion surrounds an outer side of the vapor outlet portion.
6. A deposition crucible according to claim 5, wherein the vapor outlet portion is provided higher than the heating portion in a height direction of the deposition crucible.
7. A vaporization crucible according to claim 1, wherein the vapor outlet is of circular flared configuration.
8. The evaporation crucible according to claim 2, further comprising a housing and an insulating layer, wherein the crucible body is placed in the housing, and the insulating layer is provided at least on the outer side of the top plate, between the bottom of the lower chamber and the housing, between the side of the lower chamber and the housing, and between the bottom of the lower chamber and the housing.
9. A deposition crucible according to claim 1, wherein the material of the crucible body comprises at least graphite.
10. A vaporization crucible according to claim 1, wherein at least one temperature detection portion is provided in the accommodating chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822124190.4U CN209816259U (en) | 2018-12-17 | 2018-12-17 | Evaporation crucible |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822124190.4U CN209816259U (en) | 2018-12-17 | 2018-12-17 | Evaporation crucible |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209816259U true CN209816259U (en) | 2019-12-20 |
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ID=68869385
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822124190.4U Active CN209816259U (en) | 2018-12-17 | 2018-12-17 | Evaporation crucible |
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| Country | Link |
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| CN (1) | CN209816259U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116121711A (en) * | 2023-03-30 | 2023-05-16 | 京东方科技集团股份有限公司 | Auxiliary evaporation device and evaporation crucible |
-
2018
- 2018-12-17 CN CN201822124190.4U patent/CN209816259U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116121711A (en) * | 2023-03-30 | 2023-05-16 | 京东方科技集团股份有限公司 | Auxiliary evaporation device and evaporation crucible |
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Effective date of registration: 20201228 Address after: No.31 Yanqi street, Yanqi Economic Development Zone, Huairou District, Beijing Patentee after: Beijing Huihong Technology Co., Ltd Address before: Room 309-53, 3 / F, entrepreneurship service center, 163 Gaoxin 2nd Road, Heyuan hi tech Industrial Development Zone, Guangdong 517000 Patentee before: HUAXIA YINENG (GUANGDONG) NEW ENERGY TECHNOLOGY Co.,Ltd. |
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Effective date of registration: 20211103 Address after: No.31 Yanqi street, Yanqi Economic Development Zone, Huairou District, Beijing Patentee after: Dongjun new energy Co.,Ltd. Address before: No.31 Yanqi street, Yanqi Economic Development Zone, Huairou District, Beijing Patentee before: Beijing Huihong Technology Co., Ltd |
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