CN214291376U

CN214291376U - High-remote-center ultraviolet scanning field lens

Info

Publication number: CN214291376U
Application number: CN202120020766.1U
Authority: CN
Inventors: 邹武兵; 李璟; 段家露; 吴飞龙
Original assignee: Shenzhen Inte Laser Technology Co ltd
Current assignee: Shenzhen Inte Laser Technology Co ltd
Priority date: 2021-01-05
Filing date: 2021-01-05
Publication date: 2021-09-28
Anticipated expiration: 2031-01-05

Abstract

The utility model discloses a high decentration ultraviolet scanning field lens, include that what set gradually along light beam direction of propagation is biconcave structure and focus and be negative first lens1, be meniscus structure and focus and be positive second lens2, be meniscus structure and focus and be positive third lens3, be meniscus structure and focus and be positive fourth lens4, be meniscus structure and focus and be positive fifth lens5 and be the protective glass SG of flat structure. The utility model discloses can make the entrance pupil of scanning field lens form images to infinity, image space barycenter telecentric degree in its scanning field is < 0.2, positional deviation, laser drilling that exist when helping solving general laser scanning field lens processing figure produce the processing coarse problem such as taper hole.

Description

High-remote-center ultraviolet scanning field lens

Technical Field

The utility model relates to a scanning field lens technical field, specifically speaking relate to a high telecentricity ultraviolet scanning field lens.

Background

With the rapid development of laser processing technology, the requirements on laser processing equipment are higher and higher, and ultraviolet laser is the preferred light source of laser processing equipment manufacturers, on one hand, the ultraviolet light source is used as a cold light source, is focused and applied to the surface of a workpiece, cannot generate heat damage, and the surface of the workpiece is not carbonized; on the other hand, the degree of fine focusing spot dotting is proportional to the laser wavelength, and a scanning field lens with the same specification can be used according to the resolution formula δ K1 λ/NA, and the line width δ of laser processing with laser wavelength λ of 355nm is narrower than the line width δ of laser processing with λ of 532nm and 1064 nm. Therefore, the wavelength λ of 355nm has a clear advantage for laser processing.

At present, the telecentricity of the existing ultraviolet telecentric scanning field lens is basically about 2-4 degrees, and because the propagation direction of the centroid ray of a focusing point of the ultraviolet telecentric scanning field lens is not vertical to a focal plane, when the ultraviolet telecentric scanning field lens is used for laser drilling, a drilled hole can generate a certain inclination, and the drilling inclinations of different scanning areas are not consistent. In addition, when the workpiece has thickness deviation, the laser processing system is calibrated under the workpiece with one thickness, and when the laser processes the workpiece with the other thickness, the focal plane of the scanning field lens is out of focus on the surface of the workpiece, so that the processing position of a certain part on the workpiece deviates from the actually required position, and the processing position precision is reduced.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a: aiming at the defects of the prior art, the high-remote-degree ultraviolet scanning field lens is provided, wherein the imaging of the entrance pupil reaches infinity, the image space centroid telecentricity in the scanning field lens is less than 0.2 degrees, and the problems of inaccurate processing, such as position deviation, taper hole generation by laser drilling and the like in the process of processing graphs of a common laser scanning field lens, can be solved.

In order to solve the technical problem, the utility model discloses a following technical scheme: the utility model provides a high decentration ultraviolet scanning field lens, includes that what set gradually along light beam propagation direction is that biconcave structure and focus are negative first lens1, is meniscus structure and focus and be positive second lens2, is meniscus structure and focus and be positive third lens3, is meniscus structure and focus and be positive fourth lens4, is meniscus structure and focus and be positive fifth lens5 and be the protective glass SG of slab structure.

Further, the optical lens system further includes an entrance pupil surface and an image surface, the entrance pupil surface is disposed at a front end of the first lens1 in the light beam propagation direction, the image surface is disposed at a rear end of the protective mirror SG in the light beam propagation direction, an air interval d0 between the entrance pupil surface and the first lens1 is 37mm, an air interval d2 between the first lens1 and the second lens2 is 6.4mm, an air interval d4 between the second lens2 and the third lens3 is 1mm, an air interval d6 between the third lens3 and the fourth lens4 is 1mm, an air interval d8 between the fourth lens4 and the fifth lens5 is 1mm, an air interval d10 between the fifth lens5 and the protective mirror SG is 5mm, and an air interval SG 12 between the protective mirror image surface and the protective mirror SG 12 is 5.148 mm.

Further, the front and rear sides of the first lens len 1 have radii of curvature of-29.72 mm in R1 and 1021.46mm in R2, respectively, and the center thickness d1 of the first lens len 1 is 4 mm.

Further, the curvature radii of the front and rear sides of the second lens2 are-117.06 mm and-63.3 mm, respectively, when R3 and R4 are concerned, and the center thickness d3 of the second lens2 is 13.54 mm.

Further, the curvature radii of the front and rear sides of the third lens len 3 are-204.53 mm and-78.9 mm, respectively, when R5 and R6 are concerned, and the center thickness d5 of the third lens len 3 is 15 mm.

Further, the curvature radii of the front and rear sides of the fourth lens4 are-1111.36 mm when R7 and-90.25 mm when R8 are, respectively, and the center thickness d7 of the fourth lens4 is 13.73 mm.

Further, the radius of curvature of each surface of the fifth lens len 5 is 319.17mm for R9 mm and-143.75 mm for R10 mm, and the center thickness d9 of the fifth lens len 5 is 15 mm.

Further, the protective glass SG has a center thickness d11 of 3 mm.

Further, the total focal length of the field lens is f, and the focal lengths of the first lens len 1, the second lens len 2, the third lens len 3, the fourth lens len 4 and the fifth lens len 5 are f1, f2, f3, f4 and f5, respectively, where the following relationships are satisfied with the total focal length f of the field lens: -0.65< f1/f < -0.5; +2< f2/f < + 3; +2< f3/f < + 3; +1.5< f4/f < + 2.5; +1.5< f5/f < + 2.5.

Further, the first lens length 1, the second lens length 2, the third lens length 3, the fourth lens length 4, and the protective lens SG are all made of fused silica glass and have a refractive index Nd of 1.46.

The beneficial effects of the utility model are embodied in:

the utility model discloses high telecentric degree ultraviolet scanning field lens includes arranges the first lens1 of 5 separations on same light path, second lens2, third lens3, fourth lens4, fifth lens5 and protective glass SG, these lenses constitute "burden-just" lens order, realize high distant rhythm of the heart and low distortion, arrange a protective glass SG behind the fifth lens5, be used for separating processing field and 5 lenses, avoid polluting the surface to the lens because of the dust that the course of working produced.

Drawings

FIG. 1 is a schematic diagram of the geometric optical structure of the high-telecentric ultraviolet scanning field lens of the present invention;

FIG. 2 is an astigmatic view of the high telecentric UV scanning field lens of the present invention;

FIG. 3 is a F-THETA distortion diagram of the high telecentric ultraviolet scanning field lens of the present invention;

FIG. 4 is a telecentric view of the high telecentric ultraviolet scanning field lens of the present invention;

fig. 5 is an RMS speckle pattern under the full field of view of the high-telecentric uv scanning field lens of the present invention.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. The embodiments and features of the embodiments in the present application may be combined with each other without conflict. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

It should be noted that, if directional indications (such as upper, lower, left, right, front and rear … …) are involved in the embodiment of the present invention, the directional indications are only used to explain the relative position relationship between the components, the motion situation, etc. in a specific posture (as shown in the drawings), and if the specific posture is changed, the directional indications are changed accordingly.

In addition, if there is a description relating to "first", "second", etc. in the embodiments of the present invention, the description of "first", "second", etc. is for descriptive purposes only and is not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In addition, the meaning of "and/or" appearing throughout includes three juxtapositions, exemplified by "A and/or B" including either A or B or both A and B. In addition, "a plurality" means two or more. In addition, the technical solutions in the embodiments may be combined with each other, but it must be based on the realization of those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should not be considered to exist, and is not within the protection scope of the present invention.

See fig. 1-5.

The utility model discloses high telecentric degree ultraviolet scanning field lens, include that what set gradually along light beam direction of propagation is biconcave structure and focus and is negative first lens1, be meniscus structure and focus and be positive second lens2, be meniscus structure and focus and be positive third lens3, be meniscus structure and focus and be positive fourth lens4, be meniscus structure and focus and be positive fifth lens5 and be the protective glass SG of slab structure.

In an embodiment, the optical lens further includes an entrance pupil surface and an image surface, the entrance pupil surface is disposed at a front end of the first lens1 along the light beam propagation direction, the image surface is disposed at a rear end of the protective mirror SG along the light beam propagation direction, an air interval d0 between the entrance pupil surface and the first lens1 is 37mm, an air interval d2 between the first lens1 and the second lens2 is 6.4mm, an air interval d4 between the second lens2 and the third lens3 is 1mm, an air interval d6 between the third lens3 and the fourth lens4 is 1mm, an air interval d8 between the fourth lens4 and the fifth lens5 is 1mm, an air interval d10 between the fifth lens5 and the protective mirror SG is 5mm, and an air interval SG 39148 mm between the fourth lens4 and the protective mirror image surface is 12 mm.

In one embodiment, the front and rear sides of the first lens1 have radii of curvature of R1-29.72 mm and R2-1021.46 mm, respectively, and the center thickness d1 of the first lens1 is 4 mm.

In one embodiment, the radii of curvature of the front and rear sides of the second lens length 2 are-117.06 mm for R3 and-63.3 mm for R4, respectively, and the central thickness d3 of the second lens length 2 is 13.54 mm.

In one embodiment, the radii of curvature of the front and rear sides of the third lens len 3 are-204.53 mm and-78.9 mm, respectively, and the center thickness d5 of the third lens len 3 is 15 mm.

In one embodiment, the radii of curvature of the front and rear sides of the fourth lens len 4 are-1111.36 mm for R7 and-90.25 mm for R8, respectively, and the central thickness d7 of the fourth lens len 4 is 13.73 mm.

In one embodiment, the radii of curvature of both surfaces of the fifth lens5 are, respectively, R9-319.17 mm and R10-143.75 mm, and the central thickness d9 of the fifth lens5 is 15 mm.

In one embodiment, the protective lens SG has a center thickness d11 of 3 mm.

In one embodiment, the total focal length of the field lens is f, and the focal lengths of the first lens len 1, the second lens len 2, the third lens len 3, the fourth lens len 4 and the fifth lens len 5 are f1, f2, f3, f4 and f5, respectively, wherein the following relationships are satisfied with the total focal length f of the field lens: -0.65< f1/f < -0.5; +2< f2/f < + 3; +2< f3/f < + 3; +1.5< f4/f < + 2.5; +1.5< f5/f < + 2.5.

In one embodiment, the first lens1, the second lens2, the third lens3, the fourth lens4 and the protection lens SG are all made of fused silica glass, and the refractive index Nd is 1.46.

In this embodiment, the optical configuration parameters of the field lens composed of the first lens1, the second lens2, the third lens3, the fourth lens4, the fifth lens5 and the protective lens SG obtain f 1/f-0.59, f 2/f-2.6, f 3/f-2.52, f 4/f-2.0, and f 5/f-2.04, and the positional relationship of the arrangement thereof obtains the total focal length f of the field lens-103 mm, the entrance pupil 9mm, and the scanning field 2 w-40.2 °, which achieves the advantageous effects that: the method is suitable for a high-power laser working environment, and has good aberration correction under the wavelength of 355 nm; as shown in fig. 2, astigmatism is less than 50um, so that the reduction of processing precision caused by hole punching out-of-round and the like is avoided; as shown in FIG. 3, the maximum F-THETA distortion is not more than 1.6%, and the deflection amplitude of the reflector calibration in the galvanometer is reduced; as shown in fig. 4, the image space telecentricity is less than 0.18 degrees, and the position precision of laser processing is improved; as shown in FIG. 5, the RMS speckle diameter is < 8um with a standard deviation of 0.245um over the entire field of view, and the field lens processes fine line widths with good uniformity over the entire field of view.

It should be understood that the examples and embodiments described herein are for illustrative purposes only and are not intended to limit the present invention, and that various modifications or changes in light thereof will be suggested to persons skilled in the art and are to be included within the spirit and purview of this application.

Claims

1. The utility model provides a high decentration ultraviolet scanning field lens which characterized in that, includes that what set gradually along light beam direction of propagation is that biconcave structure and focus are negative first lens1, be meniscus structure and focus be positive second lens2, be meniscus structure and focus be positive third lens3, be meniscus structure and focus be positive fourth lens4, be meniscus structure and focus be positive fifth lens5 and be the protection mirror SG of slab construction.

2. The high telecentricity UV scanning field lens of claim 1, further comprising an entrance pupil plane and an image plane, the entrance pupil surface is provided at the front end of the first lens1 in the light beam propagation direction, the image surface is provided at the rear end of the protective mirror SG in the light beam propagation direction, the air space d0 between the entrance pupil surface and the first lens1 is 37mm, the air space d2 between the first lens len 1 and the second lens len 2 is 6.4mm, the air space d4 between the second lens len 2 and the third lens len 3 is 1mm, the air space d6 between the third lens len 3 and the fourth lens len 4 is 1mm, the air space d8 between the fourth lens len 4 and the fifth lens len 5 is 1mm, the air interval d10 between the fifth lens5 and the protection lens SG is 5mm, an air gap d12 between the image plane and the protective mirror SG is 148.5 mm.

3. The high-telecentricity uv scanning field lens according to claim 1, characterized in that the curvature radius of the front and back sides of said first lens len 1 is R1-29.72 mm and R2-1021.46 mm, respectively, and the central thickness d1 of said first lens len 1 is 4 mm.

4. The high-telecentricity uv scanning field lens according to claim 1, characterized in that the curvature radius of the front and rear sides of said second lens len 2 is-117.06 mm and-63.3 mm respectively for R3 and R4, and the central thickness d3 of said second lens len 2 is 13.54 mm.

5. The high-telecentricity uv scanning field lens according to claim 1, characterized in that the curvature radius of the front and rear sides of said third lens len 3 is-204.53 mm and-78.9 mm respectively for R5 and R6, and the central thickness d5 of said third lens len 3 is 15 mm.

6. The high-telecentricity uv scanning field lens according to claim 1, characterized in that the curvature radius of the front and rear sides of said fourth lens len 4 is-1111.36 mm and-90.25 mm respectively for R7 and R8, and the central thickness d7 of said fourth lens len 4 is 13.73 mm.

7. The high-telecentricity uv scanning field lens according to claim 1, characterized in that the radius of curvature of both faces of said fifth lens len 5 is R9 ═ 319.17mm and R10 ═ 143.75mm respectively, and the central thickness d9 of said fifth lens len 5 is 15 mm.

8. The high telecentricity uv scanning field lens according to claim 1, characterized in that the central thickness d11 of the protective lens SG is 3 mm.

9. The high telecentricity ultraviolet scanning field lens of any of claims 1-8, characterized in that the total focal length of the scanning field lens is f, the focal lengths of said first lens1, said second lens2, said third lens3, said fourth lens4 and said fifth lens5 are f1, f2, f3, f4, f5, respectively, wherein the following relation is satisfied with the total focal length f of the scanning field lens: -0.65< f1/f < -0.5; +2< f2/f < + 3; +2< f3/f < + 3; +1.5< f4/f < + 2.5; +1.5< f5/f < + 2.5.

10. The high-telecentricity uv scanning field lens according to any of claims 1 to 8, characterized in that the materials of said first lens1, said second lens2, said third lens3, said fourth lens4 and said protective lens SG are all fused silica glass materials and the refractive index Nd is all 1.46.