CN214280413U - Water-cooling diaphragm mechanism for high-power optical fiber laser system - Google Patents
Water-cooling diaphragm mechanism for high-power optical fiber laser system Download PDFInfo
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- CN214280413U CN214280413U CN202023053855.0U CN202023053855U CN214280413U CN 214280413 U CN214280413 U CN 214280413U CN 202023053855 U CN202023053855 U CN 202023053855U CN 214280413 U CN214280413 U CN 214280413U
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Abstract
The utility model discloses a water-cooling diaphragm mechanism for high power fiber laser system, it includes the diaphragm body, wraps up diaphragm body periphery and rather than the peripheral surface around the diaphragm seat that is formed with an annular cooling chamber, with the annular cooling chamber intercommunication and external cooling device's coolant coupling assembling, diaphragm body middle part is formed with the vertical beam passageway that link up, annular cooling chamber encircles beam passageway sets up. The utility model discloses laser processing equipment's machining efficiency and processingquality have been improved greatly to and the stability of work.
Description
[ technical field ] A method for producing a semiconductor device
The utility model belongs to the technical field of the laser head, especially, relate to a water-cooling diaphragm mechanism for high power optic fibre laser system.
[ background of the invention ]
The diaphragm in the existing laser optical system is generally a conical structure with a large upper part and a small lower part. The diaphragm can eliminate the influence of partial stray light, but the conical surface does not shrink upwards, so that the stray light radiated by the fiber crystal head can be directly reflected to the end face of the fiber, the temperature of the QBH joint of the fiber is increased, the temperature of the optical cavity is unbalanced, and the laser alarm is stopped, the fiber is damaged, or the focusing energy and the position of the beam of the laser processing equipment are unstable.
Laser light emitted by the fiber laser is in a Gaussian distribution state, most of laser energy is concentrated in a relatively small divergence angle by the fiber laser, the energy comprises available light used by the fiber laser cutting machine, energy which is actually used for cutting is generated, besides the available energy, the energy also comprises a part of very weak laser energy, and the part of laser energy is low in energy density and poor in directivity and can generate negative effects on cutting.
Among the prior art, chinese utility model patent that publication number is CN 206349624U discloses a laser device, and this laser device includes that hollow connects and sets up in connecting and set up an back taper diaphragm, and the back taper diaphragm still includes the water-cooling piece and inserts and locates the light source that connects including the first toper portion that is located the back taper structure of top and the second taper portion that is located the positive awl structure of below. The umbrella-shaped laser emitted by the light source is shaped by arranging the inverted cone diaphragm, so that redundant light rays are reflected inside the inverted cone diaphragm and cannot radiate to the inner wall of the joint hollow cavity, and the heat is taken away by the water cooling block. Although the inverted cone diaphragm of the laser device can reflect redundant light rays inside the inverted cone to block stray light, the upward conical surface is not converged, the stray light emitted by the optical fiber can be directly reflected to the optical fiber, the temperature of the optical fiber is easily increased, the temperature of an optical cavity is unbalanced, and then the optical fiber is triggered to alarm and shut down or the optical fiber is damaged. And because the laser power is different, the beam quality also has difference, the higher the power is, the relatively worse the beam quality is, the more the energy of stray light is, the diaphragm of the low-power laser head is not suitable for being used on the high-power laser head, which may also cause the diaphragm to be heated seriously and even cause irreparable damage to the laser head.
Therefore, it is necessary to provide a new water-cooled diaphragm mechanism for high-power fiber laser system to solve the above problems.
[ Utility model ] content
The utility model discloses a main aim at provides a water-cooling diaphragm mechanism for high power optic fibre laser system has improved the machining efficiency and the processingquality of laser beam machining equipment greatly to and the stability of work.
The utility model discloses a following technical scheme realizes above-mentioned purpose: the utility model provides a water-cooling diaphragm mechanism for high power fiber laser system, its includes the diaphragm body, wraps up diaphragm body periphery and rather than the peripheral surface around the diaphragm seat that is formed with an annular cooling chamber, with the just external cooling device's of annular cooling chamber intercommunication coolant coupling assembling, diaphragm body middle part is formed with the vertical beam passageway that link up, annular cooling chamber encircles beam passageway sets up.
Further, the diaphragm body includes first ring flange, is located first barrel portion on the first ring flange, the peripheral surface of first barrel portion is provided with the recess of surrounding ring shape, the cooperation the hole arm surface of diaphragm seat forms annular cooling chamber.
Further, the diaphragm seat comprises a second flange plate and a second cylinder body part, wherein the second flange plate is attached to the upper surface of the first flange plate, and the second cylinder body part is positioned on the second flange plate and wrapped outside the first cylinder body part; and the upper end of the second barrel part is provided with a limiting compression ring for compressing the upper end face of the first barrel part.
Furthermore, a pair of sealing rings for sealing the upper part and the lower part of the annular cooling cavity is arranged between the diaphragm body and the diaphragm seat.
Further, the light beam channel sequentially comprises a first conical section, an arc transition section and a second conical section from top to bottom, wherein the first conical section is conical with a large top and a small bottom, and the second conical section is conical with a small top and a large bottom.
Furthermore, the surface of the inner wall of the light beam channel is plated with a light absorption material layer.
Furthermore, the aperture size of the central diaphragm neck of the diaphragm body is NA d, wherein NA is the numerical aperture of the outgoing beam of the laser, and d is the collimation distance of the collimating mirror.
Further, the cooling medium coupling assembling is in including connecting the installation piece, setting first transport runner and second transport runner in connecting the installation piece, install connect on the installation piece and with the medium entry of first transport runner one end butt joint intercommunication connects, installs connect on the installation piece and with the second transport runner one end butt joint intercommunication the medium outlet joint, one end with first transport runner butt joint and the other end with the first conveyer pipe of annular cooling chamber one end butt joint intercommunication and one end with the second transport runner butt joint and the other end with the second conveyer pipe that annular cooling chamber butt joint formed circulation flow.
Furthermore, the first conveying flow channel and the second conveying flow channel are obliquely arranged and distributed at an included angle.
Furthermore, the first conveying pipe and the second conveying pipe are stainless steel pipes, and O-shaped rings are arranged at two ends of the stainless steel pipes.
Compared with the prior art, the utility model relates to a water-cooling diaphragm mechanism for high power optic fibre laser system's beneficial effect lies in: cooling water is directly contacted with the diaphragm body, so that the cooling efficiency is improved, and the cooling effect is good; through adopting the back taper diaphragm that has two taper hole portions ingeniously for the umbelliform laser of light source outgoing has the convergence trend because of the effect of back taper diaphragm, can carry out the plastic in the aspect of physics to the radiation range of laser, can ensure that laser can not radiate the cavity inner wall, and can in time take away the heat that back taper diaphragm interception miscellaneous light produced through the coolant in the annular cooling intracavity, thereby can guarantee effectively that the optical cavity temperature is balanced for a long time.
[ description of the drawings ]
Fig. 1 is a schematic diagram of an explosive structure according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of an embodiment of the present invention;
fig. 3 is an exploded schematic view of a diaphragm body and a diaphragm seat according to an embodiment of the present invention;
fig. 4 is a schematic cross-sectional structural view of a diaphragm body in an embodiment of the present invention;
the figures in the drawings represent:
100 a water-cooling diaphragm mechanism for a high-power optical fiber laser system;
1, a diaphragm body, 11 an annular cooling cavity, 12 light beam channels, a 121 first conical section, a 122 arc transition section, a 123 second conical section, a 124 light absorption material layer, a 13 first flange plate, a 14 first barrel part and a 141 groove; 2, a diaphragm seat, 21 a second flange plate, 22 a second barrel part and 23 a limiting compression ring; 3 a cooling medium connecting assembly, 31 a connector mounting block, 32 a first conveying flow channel, 33 a second conveying flow channel, 34 a medium inlet connector, 35 a medium outlet connector, 36 a first conveying pipe and 37 a second conveying pipe; 4, sealing rings; 5 mounting plate, 51 avoiding the duct.
[ detailed description ] embodiments
Example (b):
referring to fig. 1 to 4, the present embodiment is a water-cooled diaphragm mechanism 100 for a high-power fiber laser system, which includes a diaphragm body 1, a diaphragm seat 2 wrapped around the periphery of the diaphragm body 1 and having an annular cooling cavity 11 surrounded by the outer peripheral surface thereof, and a cooling medium connecting assembly 3 communicated with the annular cooling cavity 11 and externally connected to a cooling device, wherein a vertically through-going light beam channel 12 is formed in the middle of the diaphragm body 1, and the annular cooling cavity 11 is disposed around the light beam channel 12.
The diaphragm body 1 comprises a first flange plate 13 and a first cylinder part 14 positioned on the first flange plate 13, a circumferential groove 141 is formed in the peripheral surface of the first cylinder part 14, and the annular cooling cavity 11 is formed by matching the surface of an inner hole arm of the diaphragm seat 2.
The diaphragm seat 2 comprises a second flange 21 attached to the upper surface of the first flange 13, and a second barrel 22 located on the second flange 21 and wrapped outside the first barrel 14. The upper end of the second barrel part 22 is provided with a limiting compression ring 23 which is used for pressing the upper end face of the first barrel part 14.
A pair of sealing rings 4 for sealing the upper part and the lower part of the annular cooling cavity 11 are also arranged between the diaphragm body 1 and the diaphragm seat 2.
The light beam passage 12 sequentially includes, from top to bottom, a first conical section 121, an arc transition section 122, and a second conical section 123, where the first conical section 121 is a cone with a large top and a small bottom, and the second conical section 123 is a cone with a large top and a small bottom. The inner wall surface of the beam passage 12 is coated with a light absorbing material layer 124. The light absorbing material layer 124 is black chrome or black zinc.
The aperture size of the central diaphragm neck of the diaphragm body 1 is 2 NA d, wherein NA is the numerical aperture of the outgoing beam of the laser, and d is the collimation distance of the collimating mirror.
The cooling medium connection assembly 3 includes a joint mounting block 31, a first conveyance flow channel 32 and a second conveyance flow channel 33 provided in the joint mounting block 31, a medium inlet joint 34 installed on the joint mounting block 31 and in butt communication with one end of the first conveyance flow channel 32, a medium outlet joint 35 installed on the joint mounting block 31 and in butt communication with one end of the second conveyance flow channel 33, a first conveyance pipe 36 having one end in butt communication with the first conveyance flow channel 32 and the other end in butt communication with one end of the annular cooling chamber 11, and a second conveyance pipe 37 having one end in butt communication with the second conveyance flow channel 33 and the other end in butt communication with the annular cooling chamber 11 to form a circulation flow channel.
The first conveying flow channel 32 and the second conveying flow channel 33 are both arranged in an inclined direction and are distributed at an included angle. Through the oblique design, can lengthen the length of carrying the runner to make the weight that connects the installation piece 31 can be suitable to reduce, thereby be favorable to reducing the weight of whole laser head. The first conveying pipe 36 and the second conveying pipe 37 are stainless steel pipes, and the two ends of the first conveying pipe and the second conveying pipe are provided with O-shaped rings for performing water seal on the joint of the first conveying pipe and the annular cooling cavity 11 and the joint of the corresponding conveying flow channels; the design difficulty is reduced, and the assembly efficiency is improved. The use of stainless steel avoids pipeline corrosion and scale caused by long-time use.
This embodiment still includes a mounting panel 5, and diaphragm body 1 passes diaphragm seat 2 through the screw and locks diaphragm body 1 and diaphragm seat 2 whole on mounting panel 5, and is provided with the suppression torus of 2 up ends of suppression diaphragm seat on the mounting panel 5. The joint mounting block 31 in the cooling medium connection module 3 is fixedly mounted on the mounting plate 5 by screws. The mounting plate 5 is further provided with an escape duct 51 through which the first and second delivery pipes 36 and 37 pass.
In this embodiment, the water-cooled diaphragm mechanism 100 is used in a high-power fiber laser system, and a cooling medium enters from a medium inlet joint 34, flows through a first conveying flow channel 32 and a first conveying pipe 36, enters into an annular cooling cavity 11, and cools the inner wall surface of a diaphragm body 1; then flows into the second delivery pipe 37 and the second delivery flow channel 33, and comes out from the medium outlet joint 35 to form a circulating cooling system with an external cooling device.
In the water-cooled diaphragm mechanism 100 for the high-power fiber laser system, the cooling water is directly contacted with the diaphragm body, so that the cooling efficiency is improved, and the cooling effect is good; through adopting the back taper diaphragm that has two taper hole portions ingeniously for the umbelliform laser of light source outgoing has the convergence trend because of the effect of back taper diaphragm, can carry out the plastic in the aspect of physics to the radiation range of laser, can ensure that laser can not radiate the cavity inner wall, and can in time take away the heat that back taper diaphragm interception miscellaneous light produced through the coolant in the annular cooling intracavity, thereby can guarantee effectively that the optical cavity temperature is balanced for a long time.
What has been described above are only some embodiments of the invention. For those skilled in the art, without departing from the inventive concept, several modifications and improvements can be made, which are within the scope of the invention.
Claims (10)
1. The utility model provides a water-cooling diaphragm mechanism for high power fiber laser system which characterized in that: it includes the diaphragm body, wraps up diaphragm body periphery and rather than the peripheral surface around the diaphragm seat that is formed with an annular cooling chamber, with the annular cooling chamber intercommunication and external cooling device's coolant coupling assembling, diaphragm body middle part is formed with the vertical light beam passageway that link up, annular cooling chamber encircles the light beam passageway sets up.
2. The water-cooled diaphragm mechanism for high power fiber laser system of claim 1, wherein: the diaphragm body includes first ring flange, is located first barrel portion on the first ring flange, the peripheral surface of first barrel portion is provided with the recess of surrounding ring shape, the cooperation the hole arm surface of diaphragm seat forms annular cooling chamber.
3. The water-cooled diaphragm mechanism for high power fiber laser system of claim 2, wherein: the diaphragm seat comprises a second flange plate and a second cylinder part, wherein the second flange plate is attached to the upper surface of the first flange plate, and the second cylinder part is positioned on the second flange plate and wrapped outside the first cylinder part; and the upper end of the second barrel part is provided with a limiting compression ring for compressing the upper end face of the first barrel part.
4. The water-cooled diaphragm mechanism for high power fiber laser system of claim 1, wherein: and a pair of sealing rings for sealing the upper part and the lower part of the annular cooling cavity are also arranged between the diaphragm body and the diaphragm seat.
5. The water-cooled diaphragm mechanism for high power fiber laser system of claim 1, wherein: the light beam channel sequentially comprises a first conical section, an arc transition section and a second conical section from top to bottom, wherein the first conical section is conical with a large top and a small bottom, and the second conical section is conical with a small top and a large bottom.
6. The water-cooled diaphragm mechanism for high power fiber laser system of claim 5, wherein: and the surface of the inner wall of the light beam channel is plated with a light absorption material layer.
7. The water-cooled diaphragm mechanism for high power fiber laser system of claim 5, wherein: the aperture size of the central diaphragm neck of the diaphragm body is NA d, wherein NA is the numerical aperture of the outgoing beam of the laser, and d is the collimation distance of the collimating mirror.
8. The water-cooled diaphragm mechanism for high power fiber laser system of claim 1, wherein: cooling medium coupling assembling is in including connecting the installation piece, setting first transport runner in the installation piece and second transport runner, install connect on the installation piece and with the medium entry joint of first transport runner one end butt joint intercommunication, install connect on the installation piece and with the second transport runner one end butt joint intercommunication the medium outlet joint, one end with first transport runner butt joint and the other end with the first conveyer pipe of annular cooling chamber one end butt joint intercommunication and one end with the second transport runner butt joint and the other end with the second conveyer pipe of annular cooling chamber butt joint formation circulation runner.
9. The water-cooled diaphragm mechanism for high power fiber laser system of claim 8, wherein: the first conveying flow channel and the second conveying flow channel are obliquely arranged and distributed at an included angle.
10. The water-cooled diaphragm mechanism for high power fiber laser system of claim 8, wherein: the first conveying pipe and the second conveying pipe are stainless steel pipes, and O-shaped rings are arranged at two ends of the first conveying pipe and the second conveying pipe.
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CN202023053855.0U CN214280413U (en) | 2020-12-17 | 2020-12-17 | Water-cooling diaphragm mechanism for high-power optical fiber laser system |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN115857131A (en) * | 2023-02-16 | 2023-03-28 | 中国航天三江集团有限公司 | Embedded adjustable high-heat-dissipation-performance laser stop diaphragm |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN115857131A (en) * | 2023-02-16 | 2023-03-28 | 中国航天三江集团有限公司 | Embedded adjustable high-heat-dissipation-performance laser stop diaphragm |
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