CN214271107U - Czochralski centering calibration system of single crystal furnace - Google Patents

Abstract

The utility model relates to a single crystal growing furnace czochralski pulling centering calbiration system for carry and draw copper wire and quartz crucible coaxial line calibration, include: a calibration part which is arranged at the inner side of the main chamber of the single crystal furnace and is suspended; a monitoring section; and a processor for connecting with the monitoring portion; wherein the lifting steel wire is arranged straightly; the calibration part is connected with a heavy hammer at the lower end of the lifting steel wire, and the lower end face of the calibration part has a certain distance from the upper end face of the quartz crucible. The utility model discloses can be fast accurately repeat the centering calibration many times, stable and the uniformity is good in the result, guarantees crystal stick and quartz crucible's centre of rotation coincidence and establishes the basis during for follow-up crystal growth, has reduced because the solid-liquid interface that the shake of fused silicon liquid level caused is unusual, guarantees crystal normal growth furthest, and whole error rate is reduced to 5% by current 10%, and detection efficiency has improved about 5%, reappears the uniformity good, improves the crystal growth qualification rate.

Description

Czochralski centering calibration system of single crystal furnace

Technical Field

The utility model belongs to the technical field of vertical pulling single crystal manufacturing equipment, especially, relate to a vertical pulling centering calibration system of single crystal growing furnace.

Background

In the process of single crystal growth, in order to ensure a good growth environment of a crystal, a stable solid-liquid interface is needed to maintain the temperature distribution of a thermal field, namely, the situation of liquid level jitter is reduced as much as possible in the process of single crystal pulling. However, during the growth of the single crystal, the steel wire and the quartz crucible rotate coaxially and reversely, and if the rotation centers of the crystal rod and the quartz crucible do not coincide, the crystal rod is thrown up by the resistance of silicon liquid in the quartz crucible to the crystal rod during the rotation of the quartz crucible, so that the solid-liquid interface is deviated, the shape of the solid-liquid interface is changed, the distribution of the thermal field in the quartz crucible is influenced, the crystal growth environment is damaged, and the crystal growth is difficult. In order to ensure the normal growth of the single crystal, the centers of the rotating shafts of the steel wire and the quartz crucible must be coincident, and in the actual production process, the steel wire and the quartz crucible must be centered and calibrated before the crystal grows for each heat, so that all parts of the pulling system are positioned on a uniform central axis.

At present, the prior art adopts a human eye observation method to perform centering detection on a single crystal furnace, namely, a horizontal dial is placed at the center position of a crucible support through a heavy hammer, and whether the heavy hammer is at the center of the dial is observed from a window of a CCD camera by human eyes so as to judge whether the axial centers of a steel wire and a quartz crucible are coincided or not. However, this determination method has a large error range, low detection accuracy, poor reproduction consistency, and low detection efficiency.

SUMMERY OF THE UTILITY MODEL

The utility model provides a single crystal growing furnace czochralski pulling centering calibration system for carrying and drawing copper wire and quartz crucible coaxial line calibration, solved the error range that current centering calibration method appears great, detect the precision low, and reappear the uniformity poor, the technical problem that detection efficiency hangs down.

In order to solve the technical problem, the utility model discloses a technical scheme is:

a straight-pull centering calibration system of a single crystal furnace is used for lifting a steel wire to be calibrated with a quartz crucible in a coaxial line, and comprises the following components:

a calibration part which is arranged at the inner side of the main chamber of the single crystal furnace and is suspended;

a monitoring section;

and a processor for connecting with the monitoring portion;

wherein the lifting steel wire is arranged straightly; the calibration part is connected with a heavy hammer at the lower end of the lifting steel wire, and the lower end face of the calibration part is a certain distance away from the upper end face of the quartz crucible.

Further, the monitoring section is provided coaxially with the lifting steel wire and monitors whether the lifting steel wire and the calibration section are coaxial.

Further, the height from the lower end face of the calibration part to the upper end face of the quartz crucible is 50-60 mm; and the calibrating part is of an inverted cone structure, and the height of the calibrating part is not less than 700 mm.

Further, the diameter of the lower end face of the calibration part is 220-230 mm.

Further, the weight of the calibration part is 60-70 kg.

Further, the monitoring section includes:

an infrared emitter or an infrared receiver arranged on a puller head at the top of the auxiliary chamber of the single crystal furnace;

and an infrared receiver or an infrared transmitter arranged on the upper end surface of the heavy hammer;

the infrared receiver is connected to the processor disposed outside the main chamber.

Further, a stabilizing device for preventing the lifting steel wire from shaking in a large range is further arranged in the main chamber, and the stabilizing device is arranged above the quartz crucible.

Furthermore, the stabilizing device comprises telescopic rods which are oppositely arranged, one end of each telescopic rod is fixedly arranged on the inner side wall of the main chamber, the other end of each telescopic rod is arranged in a suspended manner, and a clamping jaw is arranged on one side of each telescopic rod, which is far away from the inner wall of the main chamber; the space formed by the alignment of the two clamping jaws is penetrated by the lifting steel wire and is not contacted with the lifting steel wire.

Furthermore, the telescopic rod axis is perpendicular to the lifting steel wire, and the upper end face of the clamping jaw is horizontally arranged.

Furthermore, a position sensor used for monitoring the lifting steel wire is arranged on the inner side of the clamping jaw and connected with the processor.

The utility model discloses centering calibration system structural design is simple, high operation, not only the precision is high, error range is little, and reproducibility is good, many times repeated centering calibration, the stable and uniformity of result is good, guarantee the basis that crystal stick and quartz crucible's centre of rotation coincidence established when follow-up crystal grows, the solid-liquid interface that has reduced because the shake of fused silicon liquid level causes is unusual, reduce the solid-liquid interface shape and change, reduce the influence of solid-liquid interface to the thermal field in the quartz crucible, thereby avoid the crystal stick to receive the risk that the resistance of the silicon liquid in the quartz crucible was got rid of, furthest guarantees single crystal's normal growth, improve the crystal growth qualification rate, guarantee product quality, whole error rate is reduced to 5% by current 10%, and it is good to reappear the uniformity, detection efficiency has improved about 5%.

Drawings

Fig. 1 is a schematic structural diagram of a centering calibration system according to an embodiment of the present invention;

fig. 2 is a schematic structural diagram of the calibration portion according to an embodiment of the present invention;

fig. 3 is a schematic structural diagram of a centering calibration system according to another embodiment of the present invention;

fig. 4 is a schematic structural view of a fixing device according to an embodiment of the present invention.

In the figure:

10. main chamber 20, auxiliary chamber 30, lifting steel wire

40. Quartz crucible 50, calibration unit 60, and monitoring unit

61. Infrared emitter 62, infrared receiver 70, securing device

71. Telescopic rod 72, clamping jaw 73 and position sensor

80. CCD camera 90 and draft tube

Detailed Description

The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.

The embodiment proposes a czochralski alignment system of a single crystal furnace, as shown in fig. 1, for aligning a pulling steel wire 30 and a quartz crucible 40 coaxially, comprising: the device comprises a calibration part 50, a monitoring part 60 and a processor, wherein the calibration part 50, the monitoring part 60 and the processor are arranged on the inner side of a main chamber 10 of the single crystal furnace in a hanging mode, and the processor is used for being connected with the monitoring part 60, wherein the monitoring part 50 is arranged coaxially with a lifting steel wire 30 and is used for monitoring whether the lifting steel wire 30 and the calibration part 50 are coaxial or not; the lifting steel wire 30 is arranged in a straight manner; the calibration part 50 is connected to a weight at the lower end of the lifting steel wire 30, and the height of the lower end surface of the calibration part 50 from the upper end surface of the quartz crucible 40 is 50-60 mm.

Further, as shown in FIG. 2, the calibration portion 50 is an inverted cone structure, similar to a shoulder structure during crystal growth, and the height H of the calibration portion 50 is not less than 700mm, the diameter D of the lower end surface thereof is 220 mm and 230mm, and the weight of the calibration portion 30 is 60-70 kg. The upper end surface of the calibration part 50 is provided with a threaded hole for connection, and is connected with the weight through a slender connecting piece. In the present embodiment, the calibration portion 50 is modeled by a shoulder-rotating section of the crystal rod, and has a structure that is infinitely close to the pulling state, so as to better simulate the pulling state. Meanwhile, in the process of pulling the single crystal, shoulder turning is started after shoulder putting is finished, and the aim is to ensure that the diameter of the crystal growth is not enlarged without limit any more, the pulling speed is required to be improved, the growth direction of the crystal is required to be changed, and the crystal is grown longitudinally; when the height H of the crystal rod shoulder-rotating section is larger than or equal to 700mm and the diameter D of the lower end surface is 220-230mm, the longitudinal growth of the crystal is stable, the general weight is 60-70kg, the calibration part 50 of the structure is completely similar to the actual crystal rod shoulder-rotating section, and can be completely matched with the pulling steel wire 30 to perform centering simulation calibration.

Further, the monitoring section 60 includes: an infrared emitter 61 provided on the top pulling head of the auxiliary chamber 20 of the single crystal furnace and an infrared receiver 62 provided on the upper end surface of the weight at the lower part of the pulling steel wire 30, as shown in FIG. 1; of course, the infrared receiver 62 may be disposed on the top of the pulling head of the auxiliary chamber 20 of the single crystal furnace, and the infrared emitter 61 may be disposed on the upper end surface of the weight at the lower portion of the pulling steel wire 30, that is, the positions of the infrared emitter 61 and the infrared receiver 62 are interchanged, and the drawings are omitted. Regardless of the arrangement of the monitoring unit 60, the infrared receiver 62 is always in signal connection with a processor (not shown) disposed outside the main chamber, and the processor is disposed on a control panel of the single crystal furnace at the peripheral computer side. The output of infrared emitter 62 is connected to the input of infrared receiver 62, the output of infrared receiver 62 is connected to the input of the processor, and the output of the processor is connected to the input of infrared emitter 62. The infrared receiver 62 and the infrared emitter 61 are disposed corresponding to each other, and the infrared emitter 61 and the infrared receiver 62 are common accessories, and the type and the size are not particularly required, and the mounting structure is not particularly limited.

When the steel wire 30 drives the calibration part 50 to slowly descend to a position 50-60mm away from the upper end surface of the quartz crucible 40, namely, the distance range between the lower end surface of the crystal rotary shoulder and the upper end surface of the quartz crucible 40 in the actual drawing process is equivalent, when the calibration part 50 is stably suspended, the steel wire 30 and the calibration part 50 are on the same central axis, the infrared emitter 61 emits a laser beam, the infrared receiver 62 receives a signal, once the steel wire 30 and the calibration part 50 are not coaxial, the laser beam emitted by the infrared emitter 61 cannot be received by the infrared receiver 62, and the processor receives the misalignment information; the positions of the steel wire 30 and the calibration part 50 are continuously adjusted until the laser beam emitted by the infrared emitter 61 is received by the infrared receiver 62, and the processor can see whether the corresponding range of the upper and lower amplitudes of the steel wire 30 and the calibration part 50 is within the standard range, so as to judge the centering accuracy.

As shown in fig. 3, in order to further improve the alignment time of the drawn steel wire 30 and the alignment portion 50 during alignment, a stabilizer 70 for preventing the drawn steel wire 30 from shaking to a large extent may be further provided in the main chamber 10, and the stabilizer 70 is horizontally and fixedly disposed right above the quartz crucible 40. Preferably, the fixing device 70 is disposed at a position offset from the CCD camera 80 disposed on the main chamber 10, so as to prevent the CCD camera 80 from observing the positions of the weight and the seed crystal in the quartz crucible 40.

As shown in fig. 4, the stabilizing device 70 includes symmetrically disposed telescopic rods 71, one end of each telescopic rod 71 is fixedly disposed on the inner side wall of the main chamber 10, the other end of each telescopic rod 71 is horizontally disposed in a suspended manner, and the axis of each telescopic rod 71 is horizontally perpendicular to the inner side wall of the main chamber 10 and perpendicular to the vertically disposed steel lifting wire 30. The retractable bar 71 is automatically moved in the horizontal direction toward the wire 30 or away from the wire 30 under the control of the processor. The telescopic rod 71 is provided with a jaw 72 on one side of the inner wall far away from the main chamber 10, and the upper end surface of the jaw 72 is horizontally arranged. The jaws 72 are a robot structure capable of being automatically controlled from left to right, and the structure is a common structure, so that the two jaws 72 are aligned to form a space which can be expanded or reduced, and the space surrounded by the two jaws 72 is penetrated by the steel lifting wire 30 and is not contacted with the steel lifting wire 30. When the steel wire 30 starts to approach, the enclosed space is larger, and as the telescopic rod 71 slowly extends forwards, the space enclosed by the claw 72 is gradually reduced, so that the steel wire 30 swings in a relatively small annular space, and the centering and calibrating time of the steel wire 30 and the calibrating part 50 is shortened.

The shortest radial distance between the claws 72 and the inner wall of the main chamber 10 is not more than the radial distance between the outer wall of the upper end surface of the guide cylinder 90 and the inner wall of the main chamber 10. The purpose is to prevent the stabilizer 70 from affecting the crystal pulling, especially the argon flow, when the stabilizer 70 is not needed to surround the steel pulling wire 30.

Further, in order to ensure the accuracy of the start-up of the claws 72, a position sensor 73 for monitoring the lifting wire 30 is provided inside the claws 72, and in the present embodiment, only one robot arm 62 is provided with a position sensor. The position of position sensor 73 is preferably located at the middle axis of jaw 72 parallel to wire 30, and position sensor 73 monitors wire 30 and sends a signal to the processor, which then controls telescoping rod 71 to move to the side near wire 30 until the center of the arc-shaped horizontal plane of jaw 72 matches the position of wire 30.

The utility model discloses use crystal bar to change shoulder section and design dedicated calibration portion 50 as the model to make calibration portion 50 with carry and draw the same cooperation of copper wire 30 and carry out the centering simulation calibration, rethread monitoring portion 60 and treater are quick and accurately judge the accuracy and the uniformity of the axiality calibration of carrying and drawing copper wire 30 and quartz crucible 40 together. The stabilizer 70 prevents the lifting steel wire 30 from shaking too much, and shortens the alignment time of the lifting steel wire 30 and the alignment portion 50. The centering calibration system is simple in structural design, convenient to operate, high in accuracy, small in error range and good in reproducibility, can repeatedly perform centering calibration for many times, judges the stability and consistency of centering results of the lifting steel wire 30 and the calibration part 50, and lays a foundation for ensuring the coincidence of the rotation centers of the crystal rod and the quartz crucible during subsequent crystal growth.

A Czochralski centering calibration method of a single crystal furnace adopts the calibration system, and comprises the following steps:

s1: the calibration part 50 is fixedly installed on a weight at the lower end of the lifting steel wire 30, and the lifting steel wire 30 is straightened; the steel wire 30 is controlled to drive the calibration part 50 to slowly move from the sub-chamber 20 to a set position in the main chamber 10 of the single crystal furnace even if the calibration part 50 is suspended at a position 50-60mm above the quartz crucible 40 in the main chamber 10.

S2: when the position of the calibration part 50 is below the stabilizing device 70 and the calibration part 50 reaches a position 50-60mm away from the position right above the quartz crucible 40 in the main chamber 10, the position sensor 73 in the jaws 72 can monitor the position of the steel wire 30 and transmit the signal to the processor, and the processor controls the telescopic rods 71 on both sides to synchronously move towards one side of the steel wire 30, so that the steel wire 30 is stabilized in a certain space range surrounded by the two jaws 72, and the steel wire 30 is not in contact with the inner wall of the jaws 72.

S3: after the calibration part 50 is stabilized, the monitoring part 60 automatically monitors whether the steel lifting wire 30 and the calibration part 50 are coaxially arranged; and recording the monitoring result of each time through the processor and judging whether the monitoring results are consistent or not.

Specifically, when the calibration part 50 is stably suspended, the steel wire 30 and the calibration part 50 are on the same central axis, the infrared transmitter 61 transmits a laser beam, the infrared receiver 62 receives a signal, and once the steel wire 30 and the calibration part 50 are not coaxial, the laser beam transmitted by the infrared transmitter 61 cannot be received by the infrared receiver 62, and the processor receives the misalignment information; the positions of the steel wire 30 and the calibration part 50 are continuously adjusted until the laser beam emitted by the infrared emitter 61 is received by the infrared receiver 62, and the processor can see whether the corresponding range of the upper and lower amplitudes of the steel wire 30 and the calibration part 50 is within the standard range, so as to judge the centering accuracy.

S4: after the centering alignment is completed, the telescopic rod 71 of the stabilizer 70 is controlled to retract and the jaws 72 are released and moved away from the lifting wire 30 so that the aligning part 50 is slowly lifted to the initial position in the sub-chamber 20.

S5: repeating the steps S1-S4, centering and calibrating for a plurality of times, and comparing whether the positions of the three times of calibration are within the range of the standard.

By adopting the calibration method, the abnormity of the solid-liquid interface caused by the liquid level jitter of the molten silicon is reduced, the change of the shape of the solid-liquid interface is reduced, and the influence of the solid-liquid interface on a thermal field in the quartz crucible is reduced, so that the risk that a crystal rod is thrown by the resistance of the silicon liquid in the quartz crucible is avoided, the normal growth of a single crystal is ensured to the maximum extent, the crystal growth qualified rate is improved, the product quality is ensured, the integral error rate is reduced to 5% from the existing 10%, the reappearance consistency is good, and the detection efficiency is improved by about 5%.

1. The utility model discloses use crystal bar to change shoulder section and design dedicated calibration portion as the model to make calibration portion and carry out the centering simulation calibration with carrying the same cooperation of carrying the lifting steel wire, rethread monitoring portion and treater are quick and accurately judge the accuracy and the uniformity of carrying the alignment of the axiality of lifting steel wire and quartz crucible together.

2. The utility model discloses centering calibration system structural design is simple, and convenient operation, not only the precision is high, error range is little, and the reproducibility is good moreover, and the centering calibration of repetitiveness is repeated many times, and stable and the uniformity is good as a result, guarantees the rotation center coincidence of crystal bar and quartz crucible and establishes the basis for follow-up crystal growth.

3. The utility model provides a calibration method, the solid-liquid interface that has reduced because the shake of molten silicon liquid level causes is unusual, it changes to reduce solid-liquid interface shape, reduce the influence of solid-liquid interface to the thermal field in the quartz crucible, thereby avoid the crystal bar to receive the risk that the resistance of the silicon fluid in the quartz crucible was got rid of, furthest guarantees single crystal's normal growth, improve the crystal growth qualification rate, guarantee product quality, whole error rate is reduced to 5% by current 10%, and reappear the uniformity, detection efficiency has improved about 5%.

The embodiments of the present invention have been described in detail, and the description is only for the preferred embodiments of the present invention, and should not be construed as limiting the scope of the present invention. All the equivalent changes and improvements made according to the application scope of the present invention should still fall within the patent coverage of the present invention.

Claims (6)

1. A straight-pull centering calibration system of a single crystal furnace is used for lifting a steel wire to be calibrated with a quartz crucible in a coaxial line, and is characterized by comprising the following components:

a calibration part which is arranged at the inner side of the main chamber of the single crystal furnace and is suspended;

a monitoring section;

and a processor for connecting with the monitoring portion;

wherein the lifting steel wire is arranged straightly; the calibration part is connected with a heavy hammer at the lower end of the lifting steel wire, and the lower end face of the calibration part is far away from the upper end face of the quartz crucible.

2. The system as set forth in claim 1, wherein the monitoring section is disposed coaxially with the pulling steel wire and is configured to monitor whether the pulling steel wire is coaxial with the calibrating section.

3. The single crystal furnace czochralski centering calibration system as claimed in claim 1 or 2, wherein the height of the lower end face of the calibration part from the upper end face of the quartz crucible is 50-60 mm; and the calibrating part is of an inverted cone structure, and the height of the calibrating part is not less than 700 mm.

4. The system as claimed in claim 3, wherein the diameter of the lower end face of the calibration portion is 220-230 mm.

5. The single crystal furnace czochralski centering calibration system as claimed in claim 4, wherein the calibration part has a weight of 60-70 kg.

6. The single crystal furnace czochralski centering calibration system as claimed in any one of claims 1-2 and 4-5, wherein the monitoring part comprises:

an infrared emitter or an infrared receiver arranged on a puller head at the top of the auxiliary chamber of the single crystal furnace;

and an infrared receiver or an infrared transmitter arranged on the upper end surface of the heavy hammer;

the infrared receiver is connected to the processor disposed outside the main chamber.

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