CN214265160U - Polishing, fixing and protecting jig for flange of semiconductor equipment ion implantation device - Google Patents
Polishing, fixing and protecting jig for flange of semiconductor equipment ion implantation device Download PDFInfo
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- CN214265160U CN214265160U CN202022774193.XU CN202022774193U CN214265160U CN 214265160 U CN214265160 U CN 214265160U CN 202022774193 U CN202022774193 U CN 202022774193U CN 214265160 U CN214265160 U CN 214265160U
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Abstract
The utility model discloses a polishing and fixing protection jig for a flange of a semiconductor equipment ion implantation device, wherein the protection jig is in a three-step basin shape, and the three-step basin-shaped jig comprises a middle jig cylinder, a bottom jig, a top jig horizontal edge and a jig vertical edge positioned at the outer edge of the jig horizontal edge; the jig bottom forms a first-step surface, the middle part of the inner surface of the jig cylinder is recessed towards the outside to form a second-step surface, and the horizontal edge of the jig forms a third-step surface; the jig bottom is provided with a counter bore used for being installed on the rotating table; the bottom end of the jig cylinder is provided with a water leakage hole; a water leakage groove is formed in the outer edge of the horizontal edge of the jig; can reuse, can be in pneumatic grinding tool's supplementary better improvement production efficiency down, have convenient to use, the precision is high, repeatedly usable and use manpower sparingly and material cost's characteristics.
Description
Technical Field
The utility model relates to a wash special fixed protection tool of polishing, concretely relates to fixed protection tool of polishing of semiconductor equipment ion implantation device flange (flight source).
Background
The surface of the flange part needs to be polished and polished due to the requirement on the flatness and smoothness of the surface of the flange part, when the flange part which is cleaned and regenerated is polished and polished, the surface of the flange part is usually polished by adopting manual polishing and pneumatic polishing modes, the surface grains of the part which is manually polished and pneumatically polished are irregular, the polishing area is small, the polishing joint can be omitted, the quality of a product can not be effectively guaranteed, and the flatness and the smoothness can not meet the requirements of semiconductor process development more and more.
SUMMERY OF THE UTILITY MODEL
The problem that exists to prior art, the utility model provides a fixed protection tool of polishing of semiconductor equipment ion implantation device flange can reuse, can be in pneumatic grinding tool's supplementary better improvement production efficiency down, has convenient to use, and the precision is high, repeatedly usable and use manpower sparingly and material cost's characteristics.
The technical scheme of the utility model is that: the polishing and fixing protection jig for the flange of the semiconductor equipment ion implantation device comprises an upper flange and a bottom connecting shaft, wherein the top of the connecting shaft is connected with a central hole of the flange into a whole; the upper surface of the flange plate is a surface to be polished;
the protection jig is in a three-step basin shape, and the three-step basin-shaped jig comprises a jig cylinder in the middle, a jig bottom at the bottom, a jig horizontal edge at the top and a jig vertical edge positioned at the outer edge of the jig horizontal edge;
the jig bottom forms a first-step surface, the middle part of the inner surface of the jig cylinder is recessed towards the outside to form a second-step surface, and the horizontal edge of the jig forms a third-step surface;
the connecting shaft of the flange can be embedded in the jig cylinder, the bottom surface of the connecting shaft is attached to the bottom of the jig, the outer surface of the lower end of the connecting shaft is attached to the inner surface of the jig cylinder, and the bottom surface of the flange plate is attached to the upper surface of the horizontal edge of the jig;
the jig bottom is provided with a counter bore used for being installed on the rotating table;
the bottom end of the jig cylinder is provided with a water leakage hole;
and a water leakage groove is formed in the outer edge of the horizontal edge of the jig.
Furthermore, there are 4 counter bores, even setting on the tool bottom.
Furthermore, the 4 counter bores are located on a first circle concentric with the outer circumference of the jig bottom, and the radius of the first circle is two thirds of the radius of the outer circumference of the jig bottom.
Furthermore, there are 4 water leakage holes, even setting up on tool cylinder bottom periphery.
Furthermore, there are 4 water leakage grooves, and the water leakage grooves are uniformly arranged on the outer edge of the horizontal edge of the jig.
Furthermore, the protection jig is made of a polypropylene material.
The utility model has the advantages that:
1. the design of the three steps is more fit with the actual contour of the product, so that the product is not centrifuged in the polishing process, and the connecting shaft and the cylindrical surface of the jig are not completely fit from top to bottom through the design of the second step surface, so that the fitting is prevented from being too tight, and the disassembly is inconvenient; meanwhile, the outer surface of the lower end of the connecting shaft is attached to the inner surface of the jig cylinder, so that the mounting stability of the jig cylinder can be ensured;
2. the design of double water leakage of the water leakage hole and the water leakage groove can help a product to drain accumulated water in time in the rotary polishing process, so that the polishing quality is improved;
3. the four countersunk holes can be installed and fixed in a mode that the product is prevented from contacting with metal parts, and can also be selectively installed according to different rotary devices.
4. The cleaning and polishing fixed protection jig can be repeatedly used, can better improve the production efficiency under the assistance of a pneumatic polishing tool, and has the characteristics of convenience in use, high precision, reusability, labor saving and material cost saving.
Drawings
FIG. 1 is a schematic structural view of a polishing, fixing and protecting jig for a flange of an ion implantation apparatus for a semiconductor device;
FIG. 2 is a top view of a polishing fixture for securing and protecting a flange of an ion implantation apparatus for a semiconductor device;
FIG. 3 is a cross-sectional view taken along line A-A of FIG. 2;
FIG. 4 is a schematic view of a flange of an ion implanter of a semiconductor device.
In the figure: 1 is the third step face, 2 is the second step face, 3 is the first step face, 4 is the counter sink, 5 is the hole that leaks, 6 is the basin that leaks, 11 is the ring flange, 12 is the connecting axle.
Detailed Description
The present invention will be further described with reference to the accompanying drawings.
A grinding and fixing protection jig for a flange of an ion implantation device of semiconductor equipment is shown in figure 4, the flange of the ion implantation device of the semiconductor equipment comprises a flange plate 11 above and a connecting shaft 12 at the bottom, and the top of the connecting shaft 12 is connected with a central hole of the flange plate 11 into a whole. The upper surface of the flange plate 11 is a surface to be polished.
As shown in fig. 1-3, the protection jig is in a three-step basin shape and is made of polypropylene material. The three-step basin-shaped jig comprises a middle jig cylinder, a bottom jig, a horizontal jig edge at the top and a vertical jig edge at the outer edge of the horizontal jig edge. The jig is characterized in that a first step face 3 is formed at the bottom of the jig, a second step face 2 is formed at the middle part of the inner surface of the jig cylinder in a concave mode towards the outside, and a third step face 1 is formed at the horizontal edge of the jig. The connecting shaft 12 of the flange can be embedded in the jig cylinder, the bottom surface of the connecting shaft 12 is attached to the bottom of the jig, the outer surface of the lower end of the connecting shaft 12 is attached to the inner surface of the jig cylinder, and the bottom surface of the flange plate 11 is attached to the upper surface of the horizontal edge of the jig. The actual profile of product is laminated more in the design of three steps, makes the product can not appear centrifugal phenomenon at the in-process of polishing, and through the design of second step face for connecting axle and tool cylindrical surface can not top-down laminate completely, prevents to laminate excessively tightly, dismantles inconveniently. Meanwhile, the outer surface of the lower end of the connecting shaft is attached to the inner surface of the jig cylinder, so that the mounting stability of the jig cylinder can be guaranteed.
The jig bottom is provided with a counter bore 4 used for being installed on the rotating table. The number of the counter bores 4 is 4, the 4 counter bores 4 are uniformly arranged on a first circle concentric with the outer circumference of the bottom of the jig, and the radius of the first circle is two thirds of the radius of the outer circumference of the bottom of the jig. The four countersunk holes can be installed and fixed in a mode that the product is prevented from contacting with metal parts, and can also be selectively installed according to different rotary devices.
The bottom end of the jig cylinder is provided with a water leakage hole 5. The number of the water leakage holes 5 is 4, and the water leakage holes are uniformly formed in the circumferential surface of the bottom end of the jig cylinder. And a water leakage groove 6 is formed in the outer edge of the horizontal edge of the jig. The water leakage grooves 6 are 4 and are uniformly arranged at the outer edge of the horizontal edge of the jig. The design of leaking the two water of hole and the basin of leaking can help the product in time to get rid of ponding at the in-process of rotatory polishing, improves the quality of polishing.
The working principle is as follows: and completely matching and aligning the working surface of the fixing jig with the flange of the semiconductor equipment ion implantation device to be cleaned and polished, and firmly locking the flange. The fixed jig is locked with the grinding machine through screws to prevent random movement. The flange lip exposes the area to be cleaned and sanded. After polishing, the component is taken down, and the polishing device can be repeatedly used.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.
Claims (6)
1. The polishing, fixing and protecting jig for the flange of the semiconductor equipment ion implantation device comprises an upper flange (11) and a connecting shaft (12) at the bottom, wherein the top of the connecting shaft (12) is connected with a central hole of the flange (11) into a whole; the upper surface of the flange plate (11) is a surface to be polished;
the method is characterized in that: the protection jig is in a three-step basin shape, and the three-step basin-shaped jig comprises a jig cylinder in the middle, a jig bottom at the bottom, a jig horizontal edge at the top and a jig vertical edge positioned at the outer edge of the jig horizontal edge;
a first step surface (3) is formed at the bottom of the jig, a second step surface (2) is formed at the middle part of the inner surface of the jig cylinder and is recessed towards the outside, and a third step surface (1) is formed at the horizontal edge of the jig;
the connecting shaft (12) of the flange can be embedded in the jig cylinder, the bottom surface of the connecting shaft (12) is attached to the bottom of the jig, the outer surface of the lower end of the connecting shaft (12) is attached to the inner surface of the jig cylinder, and the bottom surface of the flange plate (11) is attached to the upper surface of the horizontal edge of the jig;
a countersunk hole (4) for mounting on the rotary table is formed in the jig bottom;
the bottom end of the jig cylinder is provided with a water leakage hole (5);
and a water leakage groove (6) is formed in the outer edge of the horizontal edge of the jig.
2. The polishing, fixing and protecting jig for the flange of the ion implantation device of the semiconductor device according to claim 1, wherein: the number of the counter bores (4) is 4, and the counter bores are uniformly arranged on the jig bottom.
3. The polishing, fixing and protecting jig for the flange of the ion implantation device of the semiconductor device according to claim 2, wherein: the 4 counter bores (4) are located on a first circle concentric with the outer circumference of the jig bottom, and the radius of the first circle is two thirds of the radius of the outer circumference of the jig bottom.
4. The polishing, fixing and protecting jig for the flange of the ion implantation device of the semiconductor device according to claim 1, wherein: the number of the water leakage holes (5) is 4, and the water leakage holes are uniformly formed in the circumferential surface of the bottom end of the jig cylinder.
5. The polishing, fixing and protecting jig for the flange of the ion implantation device of the semiconductor device according to claim 1, wherein: the number of the water leakage grooves (6) is 4, and the water leakage grooves are uniformly arranged at the outer edge of the horizontal edge of the jig.
6. The polishing, fixing and protecting jig for the flange of the ion implantation device of the semiconductor device according to claim 1, wherein: the protection jig is made of polypropylene materials.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022774193.XU CN214265160U (en) | 2020-11-26 | 2020-11-26 | Polishing, fixing and protecting jig for flange of semiconductor equipment ion implantation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022774193.XU CN214265160U (en) | 2020-11-26 | 2020-11-26 | Polishing, fixing and protecting jig for flange of semiconductor equipment ion implantation device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214265160U true CN214265160U (en) | 2021-09-24 |
Family
ID=77777937
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022774193.XU Active CN214265160U (en) | 2020-11-26 | 2020-11-26 | Polishing, fixing and protecting jig for flange of semiconductor equipment ion implantation device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214265160U (en) |
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2020
- 2020-11-26 CN CN202022774193.XU patent/CN214265160U/en active Active
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